1726 lines
57 KiB
C#
1726 lines
57 KiB
C#
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using System.Collections.Generic;
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using System.Collections.ObjectModel;
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using Aitex.Core.Common.DeviceData;
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using Aitex.Core.Util;
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using Caliburn.Micro;
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using MECF.Framework.Common.OperationCenter;
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using System;
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using System.Linq;
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using MECF.Framework.Common.DataCenter;
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using MECF.Framework.UI.Client.CenterViews.Editors.Sequence;
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using MECF.Framework.UI.Client.CenterViews.Editors.Recipe;
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using MECF.Framework.UI.Client.ClientBase;
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using System.Windows;
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using RecipeEditorLib.DGExtension.CustomColumn;
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using RecipeEditorLib.RecipeModel.Params;
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using System.Windows.Controls;
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using Caliburn.Micro.Core;
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using System.Windows.Media;
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using SicUI.Client;
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using System.Windows.Threading;
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using MECF.Framework.UI.Client.CenterViews.Core;
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using SicUI.Controls;
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namespace SicUI.Models.PMs
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{
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public class PMProcessViewModel : SicModuleUIViewModelBase, ISupportMultipleSystem
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{
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private double _tmaFlowRatio = 1;
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private double _tcsFlowRatio = 1;
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private double _hclFlowRatio = 1;
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private double _C2H4FlowRatio = 1;
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private double _sih4FlowRatio = 1;
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private double _pn2FlowRatio = 1;
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#region properties
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public bool IsPermission { get => this.Permission == 3; }
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[Subscription("IsBusy")]
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public bool IsBusy { get; set; }
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[Subscription("Status")]
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public string Status { get; set; }
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public bool IsPMProcess => Status == "Process" || Status == "PostProcess" || Status == "Paused" || Status == "PMMacroPause" || Status == "PMMacro" || Status == "PostPMMacro";
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public bool IsPreProcess => Status == "PreProcess" || Status == "PrePMMacro";
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[Subscription("IsOnline")]
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public bool IsOnline { get; set; }
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[Subscription("Recipe.DeviceData")]
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public AITDeviceData Recipe { get; set; }
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public float[] RecipeData1 => RecipeData;
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public float[] RecipeData = new float[] { 1, 2, 3, 4, 5, 6, 7, 8, 9, 9, 10, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 11, 1, 1, 1, 1, 11, 1, 1, 1, 1, 1, 1, 1, 1, 1, 11, 1, 11, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1 };
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private string selectedRecipe;
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public string SelectedRecipe
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{
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set
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{
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selectedRecipe = value;
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}
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get
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{
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return selectedRecipe;
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}
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}
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public string SelectedRecipeDispaly
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{
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get
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{
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if (SelectedRecipe != null)
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{
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int index = SelectedRecipe.LastIndexOf(@"\");
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if (index > 0)
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{
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return SelectedRecipe.Substring(index + 1);
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}
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}
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return SelectedRecipe;
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}
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}
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private string SelectedRecipePath { get; set; }
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[Subscription("RecipeStepName")]
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public string RecipeStepName { get; set; }
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[Subscription("RecipeStepNumber")]
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public int RecipeStepNumber { get; set; }
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[Subscription("ArH2Switch")]
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public string ArH2Switch { get; set; }
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[Subscription("N2FlowMode")]
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public string N2FlowMode { get; set; }
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[Subscription("RecipeStepElapseTime")]
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public int RecipeStepElapseTime { get; set; }
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[Subscription("RecipeStepTime")]
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public int RecipeStepTime { get; set; }
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[Subscription("RecipeStepElapseTime2")]
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public int RecipeStepElapseTime2 { get; set; }
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[Subscription("RecipeTotalElapseTime")]
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public int RecipeTotalElapseTime { get; set; }
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[Subscription("RecipeTotalTime")]
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public int RecipeTotalTime { get; set; }
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[Subscription("RecipeTotalElapseTime2")]
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public int RecipeTotalElapseTime2 { get; set; }
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public string StepNumber
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{
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get
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{
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if (IsPMProcess)
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{
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return $"{RecipeStepNumber}";
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}
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else if (IsPreProcess)
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{
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return "0";
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}
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return "--";
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}
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set
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{
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}
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}
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public string StepName
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{
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get
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{
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if (IsPMProcess)
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{
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return $"{RecipeStepName}";
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}
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else if (IsPreProcess)
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{
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return "0";
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}
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return "--";
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}
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}
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public string StepTime
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{
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get
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{
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if (IsPMProcess)
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{
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return $"{RecipeStepElapseTime}/{RecipeStepTime}";
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}
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else if (IsPreProcess)
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{
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return "0";
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}
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return "--";
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}
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}
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public string RecipeTime
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{
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get
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{
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if (IsPMProcess)
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{
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return $"{RecipeTotalElapseTime}/{RecipeTotalTime}";
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}
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else if (IsPreProcess)
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{
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return "0";
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}
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return "--";
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}
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}
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//qbh 20220523
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private int x = 0;
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private DispatcherTimer timer;
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SicUI.WinDataView dv = null;
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public event EventHandler TimerEvent;
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//
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public RecipeData CurrentRecipe { get; set; } = new RecipeData();
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public ObservableCollection<EditorDataGridTemplateColumnBase> Columns { get; set; } = new ObservableCollection<EditorDataGridTemplateColumnBase>();
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private RecipeFormatBuilder _columnBuilder = new RecipeFormatBuilder();
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public bool IsSelectButtonEnable => !string.IsNullOrEmpty(Status) && !Status.Equals("Process")
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&& !Status.Equals("PreProcess") && !Status.Equals("PostProcess") && !Status.Equals("Paused") && !IsOnline;
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public bool IsStartButtonEnable => !string.IsNullOrEmpty(SelectedRecipe) && !string.IsNullOrEmpty(Status)
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&& !Status.Equals("Process") && !Status.Equals("PreProcess") && !Status.Equals("PostProcess") &&
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!Status.Equals("PrePMMacro") && !Status.Equals("PMMacro") && !Status.Equals("PostPMMacro") &&
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!Status.Equals("Paused") && !IsOnline;// !IsProcessRunning;
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public bool IsStopButtonEnable => !string.IsNullOrEmpty(Status) && (Status.Equals("Process") || Status.Equals("PMMacro")) && !IsOnline;
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public bool IsAbortButtonEnable => !string.IsNullOrEmpty(Status) && (Status.Equals("Process") || Status.Equals("PMMacro")) && !IsOnline; //|| Status.Equals("PreProcess") || Status.Equals("PostProcess") || Status.Equals("Paused"));//IsProcessRunning;
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public bool IsPauseButtonEnable => !string.IsNullOrEmpty(Status) && (Status.Equals("Process") || Status.Equals("PMMacro")) && !IsOnline;
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public bool IsSkipButtonEnable => !string.IsNullOrEmpty(Status) && Status.Equals("Process") && !IsOnline;
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public bool IsContinueButtonEnable => !string.IsNullOrEmpty(Status) && (Status.Equals("Paused") || Status.Equals("PMMacroPause")) && !IsOnline;
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public WaferInfo MLLWafer
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{
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get
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{
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if (ModuleManager.ModuleInfos["LLH"].WaferManager.Wafers.Count > 0)
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return ModuleManager.ModuleInfos["LLH"].WaferManager.Wafers[0];
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return null;
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}
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}
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public bool MLLHasWafer
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{
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get
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{
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return MLLWafer.WaferStatus > 0;
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}
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}
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public WaferInfo PMWafer
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{
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get
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{
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if (ModuleManager.ModuleInfos[SystemName].WaferManager.Wafers.Count > 0)
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return ModuleManager.ModuleInfos[SystemName].WaferManager.Wafers[0];
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return null;
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}
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}
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public bool PMHasWafer => PMWafer.WaferStatus > 0;
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public Dictionary<int, string> DicGas { get; set; }
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public int MLLCurrentWafer { get; set; }
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public int MLLTotalWafer { get; set; }
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// public bool IsEnableGasMap => !IsBusy && IsMaintainMode;
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//public string SystemName { get => throw new NotImplementedException(); set => throw new NotImplementedException(); }
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public object View { get; set; }
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public string CurrentProcessType { get; set; }
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private bool needLoadRecipe = false;
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#endregion
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protected override void OnActivate()
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{
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try
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{
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if (String.IsNullOrEmpty(SelectedRecipePath))
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{
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needLoadRecipe = false;
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SelectedRecipePath = (string)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.LastRecipeName");
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if (!string.IsNullOrEmpty(SelectedRecipePath))
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{
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if (SelectedRecipePath.StartsWith("Sic\\Process"))
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{
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CurrentProcessType = "Process";
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}
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else if (SelectedRecipePath.StartsWith("Sic\\Routine"))
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{
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CurrentProcessType = "Routine";
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}
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UpdateRecipeFormat();
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LoadData(SelectedRecipePath);
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}
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}
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//流量需要乘以此系数
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_tmaFlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.TMAFlowRatio");
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_tcsFlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.TCSFlowRatio");
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_hclFlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.HCLFlowRatio");
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_C2H4FlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.C2H4FlowRatio");
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_sih4FlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.SiH4FlowRatio");
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_pn2FlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.PN2FlowRatio");
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base.OnActivate();
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}
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catch (Exception ex)
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{ }
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}
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protected override void OnDeactivate(bool close)
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{
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ActiveUpdateData = true;
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base.OnDeactivate(close);
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}
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protected override void OnInitialize()
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{
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base.OnInitialize();
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//权限
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string roleID = BaseApp.Instance.UserContext.RoleID;
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stepsVisibility = RoleAccountProvider.Instance.GetMenuPermission(roleID, "PM1.Process.Steps") == 3;
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//qbh 20220523
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TimerEvent = new EventHandler(myTimerEvent);
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}
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private bool stepsVisibility;
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public bool StepsVisibility
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{
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get { return stepsVisibility; }
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}
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public void UpdateRecipeFormat()
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{
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this.Columns = this._columnBuilder.Build($"Sic\\{CurrentProcessType}", SystemName, false, ClientApp.Instance.UserContext.RoleName);
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this.CurrentRecipe = new RecipeData();
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CurrentRecipe.RecipeChamberType = _columnBuilder.RecipeChamberType;
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CurrentRecipe.RecipeVersion = _columnBuilder.RecipeVersion;
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CurrentRecipe.PopEnable.Add("Oes", _columnBuilder.OesConfig.Count > 0);
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CurrentRecipe.PopEnable.Add("Vat", _columnBuilder.VatConfig.Count > 0);
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CurrentRecipe.PopEnable.Add("FineTuning", _columnBuilder.FineTuningConfig.Count > 0);
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}
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|||
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protected override void Poll()
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{
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try
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{
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base.Poll();
|
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string lastPath = (string)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.LastRecipeName");
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if (SelectedRecipePath != lastPath)
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{
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|||
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needLoadRecipe = true;
|
|||
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}
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|||
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SelectedRecipePath = lastPath;
|
|||
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if (SelectedRecipePath.StartsWith("Sic\\Process"))
|
|||
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{
|
|||
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CurrentProcessType = "Process";
|
|||
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}
|
|||
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else if (SelectedRecipePath.StartsWith("Sic\\Routine"))
|
|||
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{
|
|||
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CurrentProcessType = "Routine";
|
|||
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}
|
|||
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|||
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if (!string.IsNullOrEmpty(SelectedRecipePath))
|
|||
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{
|
|||
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var array = SelectedRecipePath.Split(new char[] { '\\' });
|
|||
|
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|
|||
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if (SelectedRecipe != array[array.Length - 1])
|
|||
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{
|
|||
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SelectedRecipe = array[array.Length - 1];
|
|||
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|
|||
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//if (SelectedRecipePath.StartsWith("Sic\\Process"))
|
|||
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//{
|
|||
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// InvokeClient.Instance.Service.DoOperation($"{SystemName}.Recipe.SetRecipeData", SelectedRecipePath);
|
|||
|
|
//}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
catch (Exception ex)
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void InvokeAfterUpdateProperty(Dictionary<string, object> data)
|
|||
|
|
{
|
|||
|
|
try
|
|||
|
|
{
|
|||
|
|
if (needLoadRecipe)
|
|||
|
|
{
|
|||
|
|
needLoadRecipe = false;
|
|||
|
|
UpdateRecipeFormat();
|
|||
|
|
OnViewLoaded(View);
|
|||
|
|
LoadData(SelectedRecipePath);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
base.InvokeAfterUpdateProperty(data);
|
|||
|
|
}
|
|||
|
|
catch (Exception ex)
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
public void ParamsExpanded(ExpanderColumn col)
|
|||
|
|
{
|
|||
|
|
int index = this.Columns.IndexOf(col);
|
|||
|
|
for (var i = index + 1; i < this.Columns.Count; i++)
|
|||
|
|
{
|
|||
|
|
if (this.Columns[i] is ExpanderColumn)
|
|||
|
|
break;
|
|||
|
|
this.Columns[i].Visibility = Visibility.Visible;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void ParamsCollapsed(ExpanderColumn col)
|
|||
|
|
{
|
|||
|
|
int index = this.Columns.IndexOf(col);
|
|||
|
|
for (var i = index + 1; i < this.Columns.Count; i++)
|
|||
|
|
{
|
|||
|
|
if (this.Columns[i] is ExpanderColumn)
|
|||
|
|
break;
|
|||
|
|
this.Columns[i].Visibility = Visibility.Collapsed;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void OnViewLoaded(object view)
|
|||
|
|
{
|
|||
|
|
View = view;
|
|||
|
|
base.OnViewLoaded(view);
|
|||
|
|
RecipeFormatBuilder.ApplyTemplate((UserControl)view, this.Columns);
|
|||
|
|
PMProcessView u = (PMProcessView)view;
|
|||
|
|
u.dgCustom.Columns.Clear();
|
|||
|
|
|
|||
|
|
this.Columns.Apply((c) =>
|
|||
|
|
{
|
|||
|
|
c.Header = c;
|
|||
|
|
u.dgCustom.Columns.Add(c);
|
|||
|
|
|
|||
|
|
});
|
|||
|
|
u.dgCustom.ItemsSource = this.CurrentRecipe.Steps;
|
|||
|
|
u.dgCustom.FrozenColumnCount = 4;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
public void Select()
|
|||
|
|
{
|
|||
|
|
RecipeSelectDialogViewModel dialog = new RecipeSelectDialogViewModel();
|
|||
|
|
dialog.DisplayName = "Select Recipe";
|
|||
|
|
|
|||
|
|
var recipeProvider = new RecipeProvider();
|
|||
|
|
var processType = QueryDataClient.Instance.Service.GetConfig("System.Recipe.SupportedProcessType");
|
|||
|
|
if (processType == null)
|
|||
|
|
{
|
|||
|
|
processType = "Process,Routine";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
var ProcessTypeFileList = new ObservableCollection<ProcessTypeFileItem>();
|
|||
|
|
string[] recipeProcessType = ((string)processType).Split(',');
|
|||
|
|
|
|||
|
|
for (int i = 0; i < recipeProcessType.Length; i++)
|
|||
|
|
{
|
|||
|
|
var type = new ProcessTypeFileItem();
|
|||
|
|
type.ProcessType = recipeProcessType[i];
|
|||
|
|
var prefix = $"Sic\\{recipeProcessType[i]}";
|
|||
|
|
var recipes = recipeProvider.GetXmlRecipeList(prefix);
|
|||
|
|
type.FileListByProcessType = RecipeSequenceTreeBuilder.BuildFileNode(prefix, "", false, recipes)[0].Files;
|
|||
|
|
ProcessTypeFileList.Add(type);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
dialog.ProcessTypeFileList = ProcessTypeFileList;
|
|||
|
|
|
|||
|
|
WindowManager wm = new WindowManager();
|
|||
|
|
bool? bret = wm.ShowDialog(dialog);
|
|||
|
|
|
|||
|
|
if (!this.CheckColumnDataAvalible())
|
|||
|
|
{
|
|||
|
|
//return;
|
|||
|
|
}
|
|||
|
|
if ((bool)bret)
|
|||
|
|
{
|
|||
|
|
SelectedRecipePath = dialog.DialogResult;
|
|||
|
|
|
|||
|
|
if (SelectedRecipePath.StartsWith("Sic\\Process"))
|
|||
|
|
{
|
|||
|
|
CurrentProcessType = "Process";
|
|||
|
|
}
|
|||
|
|
else if (SelectedRecipePath.StartsWith("Sic\\Routine"))
|
|||
|
|
{
|
|||
|
|
CurrentProcessType = "Routine";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
InvokeClient.Instance.Service.DoOperation($"{SystemName}.SelectRecipe", SelectedRecipePath);
|
|||
|
|
InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"PM.{SystemName}.LastRecipeName", SelectedRecipePath); // 记录最后一次工艺文件名称
|
|||
|
|
|
|||
|
|
UpdateRecipeFormat();
|
|||
|
|
OnViewLoaded(View);
|
|||
|
|
LoadData(SelectedRecipePath);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool CheckColumnDataAvalible()
|
|||
|
|
{
|
|||
|
|
//return true;
|
|||
|
|
|
|||
|
|
//if (CurrentProcessType == ProcessTypeFileList[1].ProcessType)
|
|||
|
|
//{
|
|||
|
|
// return true;
|
|||
|
|
//}
|
|||
|
|
|
|||
|
|
List<string> lstNotCorrectInfo = new List<string>();
|
|||
|
|
List<string> lstOutOfRange = new List<string>();
|
|||
|
|
|
|||
|
|
List<int> lstSplitColums = new List<int>()
|
|||
|
|
{
|
|||
|
|
(int)RecipColNo.SHTotalFlowSplitRatio,
|
|||
|
|
(int)RecipColNo.SiSourceSplitRatio,
|
|||
|
|
(int)RecipColNo.CSourceSplitRatio,
|
|||
|
|
(int)RecipColNo.DopeSplitRatio
|
|||
|
|
};
|
|||
|
|
|
|||
|
|
|
|||
|
|
for (var a = 0; a < this.CurrentRecipe.Steps.Count; a++)
|
|||
|
|
{
|
|||
|
|
var invalidParam =
|
|||
|
|
CurrentRecipe.Steps[a]
|
|||
|
|
.Where(param => param is IParam p && p.IsValidated == false).ToList();
|
|||
|
|
|
|||
|
|
lstNotCorrectInfo.AddRange(invalidParam.Cast<IParam>()
|
|||
|
|
.Select(iparam => $"(Step {a + 1}) {iparam.DisplayName}: {iparam.ValidationError}"));
|
|||
|
|
|
|||
|
|
/*for (int i = 0; i < this.Columns.Count; i++)
|
|||
|
|
{
|
|||
|
|
if (this.Columns[i] is DoubleColumn)
|
|||
|
|
{
|
|||
|
|
DoubleColumn column = (DoubleColumn)this.Columns[i];
|
|||
|
|
double maxValue = column.Maximun;
|
|||
|
|
double minValue = column.Minimun;
|
|||
|
|
|
|||
|
|
if (maxValue != minValue)
|
|||
|
|
{
|
|||
|
|
double cValue = 0;
|
|||
|
|
if (!double.TryParse((this.CurrentRecipe.Steps[a][i] as DoubleParam).Value, out cValue))
|
|||
|
|
{
|
|||
|
|
if ((this.CurrentRecipe.Steps[a][i] as DoubleParam).Value != "Hold")
|
|||
|
|
{
|
|||
|
|
lstNotCorrectInfo.Add($"Step {a + 1} {column.DisplayName}: value {(this.CurrentRecipe.Steps[a][i] as DoubleParam).Value} is incorrect numerical format ");
|
|||
|
|
(this.CurrentRecipe.Steps[a][i] as DoubleParam).Foreground = "Red";
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
else if (cValue > maxValue || cValue < minValue)
|
|||
|
|
{
|
|||
|
|
lstOutOfRange.Add($"Step {a + 1} {column.DisplayName}: value {cValue} is out of range {minValue}-{maxValue}");
|
|||
|
|
(this.CurrentRecipe.Steps[a][i] as DoubleParam).Foreground = "Red";
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
else if (lstSplitColums.Contains(i))
|
|||
|
|
{
|
|||
|
|
double a1 = 0;
|
|||
|
|
double a2 = 0;
|
|||
|
|
double a3 = 0;
|
|||
|
|
string[] arrSplitRatio = (this.CurrentRecipe.Steps[a][i] as StringParam).Value.Split(':');
|
|||
|
|
if (arrSplitRatio.Length != 3
|
|||
|
|
|| !double.TryParse(arrSplitRatio[0], out a1) || !double.TryParse(arrSplitRatio[1], out a2) || !double.TryParse(arrSplitRatio[2], out a3)
|
|||
|
|
|| a1 <= 0 || a2 <= 0 || a3 <= 0)
|
|||
|
|
{
|
|||
|
|
lstNotCorrectInfo.Add($"(Step {i + 1}) {this.Columns[i].DisplayName}: value is not avalible!");
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}*/
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
if (lstNotCorrectInfo.Count > 0 || lstOutOfRange.Count > 0)
|
|||
|
|
{
|
|||
|
|
string strInfo = "";
|
|||
|
|
for (int i = 0; i < lstNotCorrectInfo.Count; i++)
|
|||
|
|
{
|
|||
|
|
strInfo += lstNotCorrectInfo[i] + "\r\n";
|
|||
|
|
}
|
|||
|
|
for (int i = 0; i < lstOutOfRange.Count; i++)
|
|||
|
|
{
|
|||
|
|
strInfo += lstOutOfRange[i] + "\r\n";
|
|||
|
|
}
|
|||
|
|
MessageBox.Show(strInfo, "Warning", MessageBoxButton.OK, MessageBoxImage.Warning);
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void DeleteProcessData()
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void LoadData(string selectedRecipePath)
|
|||
|
|
{
|
|||
|
|
CurrentRecipe.Clear();
|
|||
|
|
|
|||
|
|
var array = selectedRecipePath.Split(new char[] { '\\' });
|
|||
|
|
|
|||
|
|
string recipeName = array[array.Length - 1];
|
|||
|
|
string prefixPath = SelectedRecipePath.Replace(recipeName, "");
|
|||
|
|
|
|||
|
|
var _recipeProvider = new RecipeProvider();
|
|||
|
|
var recipeContent = _recipeProvider.ReadRecipeFile(prefixPath, recipeName);
|
|||
|
|
|
|||
|
|
if (string.IsNullOrEmpty(recipeContent))
|
|||
|
|
{
|
|||
|
|
MessageBox.Show($"{prefixPath}\\{recipeName} is empty, please confirm the file is valid.");
|
|||
|
|
return;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
CurrentRecipe.RecipeChamberType = _columnBuilder.RecipeChamberType;
|
|||
|
|
CurrentRecipe.RecipeVersion = _columnBuilder.RecipeVersion;
|
|||
|
|
|
|||
|
|
CurrentRecipe.InitData(prefixPath, recipeName, recipeContent, Columns,
|
|||
|
|
_columnBuilder.Configs, SystemName, null);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void Start()
|
|||
|
|
{
|
|||
|
|
ChooseDialogBoxViewModel dialog = new ChooseDialogBoxViewModel();
|
|||
|
|
dialog.DisplayName = "Tips";
|
|||
|
|
dialog.InfoStr = "Please Check All Gas Ready Before Start Process!";
|
|||
|
|
|
|||
|
|
WindowManager wm = new WindowManager();
|
|||
|
|
bool? bret = wm.ShowDialog(dialog);
|
|||
|
|
if (!bret.HasValue || !bret.Value)
|
|||
|
|
{
|
|||
|
|
return;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
var array = SelectedRecipePath.Split(new char[] { '\\' });
|
|||
|
|
if (array[1] == "Process")
|
|||
|
|
{
|
|||
|
|
InvokeClient.Instance.Service.DoOperation($"{SystemName}.RunRecipe", SelectedRecipePath, false, true);
|
|||
|
|
}
|
|||
|
|
else if (array[1] == "Routine")
|
|||
|
|
{
|
|||
|
|
InvokeClient.Instance.Service.DoOperation($"{SystemName}.RunPMMacro", SelectedRecipePath);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void Skip()
|
|||
|
|
{
|
|||
|
|
InvokeClient.Instance.Service.DoOperation($"{SystemName}.RecipeSkipStep");
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void Stop()
|
|||
|
|
{
|
|||
|
|
InvokeClient.Instance.Service.DoOperation($"{SystemName}.Abort");
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void Pause()
|
|||
|
|
{
|
|||
|
|
InvokeClient.Instance.Service.DoOperation($"{SystemName}.Pause");
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void Continue()
|
|||
|
|
{
|
|||
|
|
InvokeClient.Instance.Service.DoOperation($"{SystemName}.Continue", "Step continue");
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void Abort()
|
|||
|
|
{
|
|||
|
|
InvokeClient.Instance.Service.DoOperation($"{SystemName}.Abort");
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
#region 腔体绑定数据
|
|||
|
|
[Subscription("TC1.L1InputTempSetPoint")]
|
|||
|
|
public float L1InputTemp { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("TC1.L2InputTempSetPoint")]
|
|||
|
|
public float L2InputTemp { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("TC1.L3InputTempSetPoint")]
|
|||
|
|
public float L3InputTemp { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("TC2.L3InputTempSetPoint")]
|
|||
|
|
public float SCRL3InputTemp { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("TC1.L1TargetSPSetPoint")]
|
|||
|
|
public float L1TargetSP { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("TC1.L2TargetSPSetPoint")]
|
|||
|
|
public float L2TargetSP { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("TC1.L3TargetSPSetPoint")]
|
|||
|
|
public float L3TargetSP { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("TC2.L3TargetSPSetPoint")]
|
|||
|
|
public float SCRL3TargetSP { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("TC1.TempCtrlTCIN")]
|
|||
|
|
public float PM1Temprature { get; set; }
|
|||
|
|
|
|||
|
|
//底部温度
|
|||
|
|
[Subscription("TC1.TempCtrlTCIN")]
|
|||
|
|
public float TC1Temp2 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("TC1.HeaterModeSetPoint")]
|
|||
|
|
public float TC1HeaterMode { get; set; }
|
|||
|
|
public string TC1Mode
|
|||
|
|
{
|
|||
|
|
get
|
|||
|
|
{
|
|||
|
|
switch (TC1HeaterMode)
|
|||
|
|
{
|
|||
|
|
case 0: return "Power";
|
|||
|
|
case 1: return "Pyro";
|
|||
|
|
}
|
|||
|
|
return "Power";
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
[Subscription("TC2.HeaterModeSetPoint")]
|
|||
|
|
public float TC2HeaterMode { get; set; }
|
|||
|
|
public string TC2Mode
|
|||
|
|
{
|
|||
|
|
get
|
|||
|
|
{
|
|||
|
|
switch (TC2HeaterMode)
|
|||
|
|
{
|
|||
|
|
case 0: return "Power";
|
|||
|
|
case 1: return "TC";
|
|||
|
|
case 2: return "Pyro";
|
|||
|
|
}
|
|||
|
|
return "Power";
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("SCR1.PowerFeedBack")]
|
|||
|
|
public float SCR1Power { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("SCR2.PowerFeedBack")]
|
|||
|
|
public float SCR2Power { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("SCR3.PowerFeedBack")]
|
|||
|
|
public float SCR3Power { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("PSU1.OutputPowerFeedBack")]
|
|||
|
|
public float PSU1Power { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("PSU2.OutputPowerFeedBack")]
|
|||
|
|
public float PSU2Power { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("PSU3.OutputPowerFeedBack")]
|
|||
|
|
public float PSU3Power { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("PMServo.ActualSpeedFeedback")]
|
|||
|
|
public float ActualSpeedFeedback { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("PT1.FeedBack")]
|
|||
|
|
public float PT1Pressure { get; set; }
|
|||
|
|
#endregion 腔体绑定数据
|
|||
|
|
|
|||
|
|
#region MFC
|
|||
|
|
[Subscription("Mfc1.DeviceData")]
|
|||
|
|
public AITMfcData Mfc1Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc2.DeviceData")]
|
|||
|
|
public AITMfcData Mfc2Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc3.DeviceData")]
|
|||
|
|
public AITMfcData Mfc3Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc4.DeviceData")]
|
|||
|
|
public AITMfcData Mfc4Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc5.DeviceData")]
|
|||
|
|
public AITMfcData Mfc5Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc6.DeviceData")]
|
|||
|
|
public AITMfcData Mfc6Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc7.DeviceData")]
|
|||
|
|
public AITMfcData Mfc7Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc8.DeviceData")]
|
|||
|
|
public AITMfcData Mfc8Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc9.DeviceData")]
|
|||
|
|
public AITMfcData Mfc9Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc10.DeviceData")]
|
|||
|
|
public AITMfcData Mfc10Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc11.DeviceData")]
|
|||
|
|
public AITMfcData Mfc11Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc12.DeviceData")]
|
|||
|
|
public AITMfcData Mfc12Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc13.DeviceData")]
|
|||
|
|
public AITMfcData Mfc13Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc14.DeviceData")]
|
|||
|
|
public AITMfcData Mfc14Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc15.DeviceData")]
|
|||
|
|
public AITMfcData Mfc15Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc16.DeviceData")]
|
|||
|
|
public AITMfcData Mfc16Data { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("Mfc19.DeviceData")]
|
|||
|
|
public AITMfcData Mfc19Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc20.DeviceData")]
|
|||
|
|
public AITMfcData Mfc20Data { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("Mfc22.DeviceData")]
|
|||
|
|
public AITMfcData Mfc22Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc23.DeviceData")]
|
|||
|
|
public AITMfcData Mfc23Data { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("Mfc25.DeviceData")]
|
|||
|
|
public AITMfcData Mfc25Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc26.DeviceData")]
|
|||
|
|
public AITMfcData Mfc26Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc27.DeviceData")]
|
|||
|
|
public AITMfcData Mfc27Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc28.DeviceData")]
|
|||
|
|
public AITMfcData Mfc28Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc29.DeviceData")]
|
|||
|
|
public AITMfcData Mfc29Data { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("Mfc30.DeviceData")]
|
|||
|
|
public AITMfcData Mfc30Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc31.DeviceData")]
|
|||
|
|
public AITMfcData Mfc31Data { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("Mfc32.DeviceData")]
|
|||
|
|
public AITMfcData Mfc32Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc33.DeviceData")]
|
|||
|
|
public AITMfcData Mfc33Data { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("Mfc35.DeviceData")]
|
|||
|
|
public AITMfcData Mfc35Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc36.DeviceData")]
|
|||
|
|
public AITMfcData Mfc36Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc37.DeviceData")]
|
|||
|
|
public AITMfcData Mfc37Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc38.DeviceData")]
|
|||
|
|
public AITMfcData Mfc38Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Mfc40.DeviceData")]
|
|||
|
|
public AITMfcData Mfc40Data { get; set; }
|
|||
|
|
#endregion
|
|||
|
|
|
|||
|
|
#region Valve
|
|||
|
|
|
|||
|
|
[Subscription("V27.DeviceData")]
|
|||
|
|
public AITValveData V27 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V25.DeviceData")]
|
|||
|
|
public AITValveData V25 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V31.DeviceData")]
|
|||
|
|
public AITValveData V31 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V32.DeviceData")]
|
|||
|
|
public AITValveData V32 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V33.DeviceData")]
|
|||
|
|
public AITValveData V33 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V33s.DeviceData")]
|
|||
|
|
public AITValveData V33s { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V35.DeviceData")]
|
|||
|
|
public AITValveData V35 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V36.DeviceData")]
|
|||
|
|
public AITValveData V36 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V37.DeviceData")]
|
|||
|
|
public AITValveData V37 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V37s.DeviceData")]
|
|||
|
|
public AITValveData V37s { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("V39.DeviceData")]
|
|||
|
|
public AITValveData V39 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V39s.DeviceData")]
|
|||
|
|
public AITValveData V39s { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V40.DeviceData")]
|
|||
|
|
public AITValveData V40 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V40s.DeviceData")]
|
|||
|
|
public AITValveData V40s { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("V41.DeviceData")]
|
|||
|
|
public AITValveData V41 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V41s.DeviceData")]
|
|||
|
|
public AITValveData V41s { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("V42.DeviceData")]
|
|||
|
|
public AITValveData V42 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V43.DeviceData")]
|
|||
|
|
public AITValveData V43 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V43s.DeviceData")]
|
|||
|
|
public AITValveData V43s { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("V45.DeviceData")]
|
|||
|
|
public AITValveData V45 { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("V46.DeviceData")]
|
|||
|
|
public AITValveData V46 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V46s.DeviceData")]
|
|||
|
|
public AITValveData V46s { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V48.DeviceData")]
|
|||
|
|
public AITValveData V48 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V48s.DeviceData")]
|
|||
|
|
public AITValveData V48s { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("V49.DeviceData")]
|
|||
|
|
public AITValveData V49 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V50.DeviceData")]
|
|||
|
|
public AITValveData V50 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V50s.DeviceData")]
|
|||
|
|
public AITValveData V50s { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V51.DeviceData")]
|
|||
|
|
public AITValveData V51 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V51s.DeviceData")]
|
|||
|
|
public AITValveData V51s { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("V52.DeviceData")]
|
|||
|
|
public AITValveData V52 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V52s.DeviceData")]
|
|||
|
|
public AITValveData V52s { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V53.DeviceData")]
|
|||
|
|
public AITValveData V53 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V53s.DeviceData")]
|
|||
|
|
public AITValveData V53s { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V54.DeviceData")]
|
|||
|
|
public AITValveData V54 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V54s.DeviceData")]
|
|||
|
|
public AITValveData V54s { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V55.DeviceData")]
|
|||
|
|
public AITValveData V55 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V56.DeviceData")]
|
|||
|
|
public AITValveData V56 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V58.DeviceData")]
|
|||
|
|
public AITValveData V58 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V58s.DeviceData")]
|
|||
|
|
public AITValveData V58s { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("V59.DeviceData")]
|
|||
|
|
public AITValveData V59 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V60.DeviceData")]
|
|||
|
|
public AITValveData V60 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V61.DeviceData")]
|
|||
|
|
public AITValveData V61 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V62.DeviceData")]
|
|||
|
|
public AITValveData V62 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V63.DeviceData")]
|
|||
|
|
public AITValveData V63 { get; set; }
|
|||
|
|
|
|||
|
|
//[Subscription("V64.DeviceData")]
|
|||
|
|
//public AITValveData V64 { get; set; }
|
|||
|
|
|
|||
|
|
//[Subscription("V65.DeviceData")]
|
|||
|
|
//public AITValveData V65 { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("V68.DeviceData")]
|
|||
|
|
public AITValveData V68 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V69.DeviceData")]
|
|||
|
|
public AITValveData V69 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V70.DeviceData")]
|
|||
|
|
public AITValveData V70 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V72.DeviceData")]
|
|||
|
|
public AITValveData V72 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V73.DeviceData")]
|
|||
|
|
public AITValveData V73 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V74.DeviceData")]
|
|||
|
|
public AITValveData V74 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V75.DeviceData")]
|
|||
|
|
public AITValveData V75 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V76.DeviceData")]
|
|||
|
|
public AITValveData V76 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V87.DeviceData")]
|
|||
|
|
public AITValveData V87 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V88.DeviceData")]
|
|||
|
|
public AITValveData V88 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V89.DeviceData")]
|
|||
|
|
public AITValveData V89 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V90.DeviceData")]
|
|||
|
|
public AITValveData V90 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V91.DeviceData")]
|
|||
|
|
public AITValveData V91 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V92.DeviceData")]
|
|||
|
|
public AITValveData V92 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V93.DeviceData")]
|
|||
|
|
public AITValveData V93 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V94.DeviceData")]
|
|||
|
|
public AITValveData V94 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V95.DeviceData")]
|
|||
|
|
public AITValveData V95 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V96.DeviceData")]
|
|||
|
|
public AITValveData V96 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V97.DeviceData")]
|
|||
|
|
public AITValveData V97 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("EPV1.DeviceData")]
|
|||
|
|
public AITValveData EPV1 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("EPV2.DeviceData")]
|
|||
|
|
public AITValveData EPV2 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V99.DeviceData")]
|
|||
|
|
public AITValveData V99 { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("V99s.DeviceData")]
|
|||
|
|
public AITValveData V99s { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
#endregion
|
|||
|
|
|
|||
|
|
#region Pressure
|
|||
|
|
[Subscription("Pressure1.DeviceData")]
|
|||
|
|
public AITPressureMeterData PT1Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Pressure2.DeviceData")]
|
|||
|
|
public AITPressureMeterData PT2Data { get; set; }
|
|||
|
|
[Subscription("Pressure3.DeviceData")]
|
|||
|
|
public AITPressureMeterData PT3Data { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
[Subscription("Pressure4.DeviceData")]
|
|||
|
|
public AITPressureMeterData PT4Data { get; set; }
|
|||
|
|
[Subscription("Pressure5.DeviceData")]
|
|||
|
|
public AITPressureMeterData PT5Data { get; set; }
|
|||
|
|
[Subscription("Pressure6.DeviceData")]
|
|||
|
|
public AITPressureMeterData PT6Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("Pressure7.DeviceData")]
|
|||
|
|
public AITPressureMeterData PT7Data { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("PT1.DeviceData")]
|
|||
|
|
public AITPressureMeterData ChamPress { get; set; }
|
|||
|
|
|
|||
|
|
[Subscription("PT2.DeviceData")]
|
|||
|
|
public AITPressureMeterData ForelinePress { get; set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
#endregion
|
|||
|
|
|
|||
|
|
#region 特气显示颜色
|
|||
|
|
|
|||
|
|
public SolidColorBrush PN2Color
|
|||
|
|
{
|
|||
|
|
get
|
|||
|
|
{
|
|||
|
|
if (IsPN2RunMode)
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(0, 0, 0));
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(255, 0, 0));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
public SolidColorBrush C2H4Color
|
|||
|
|
{
|
|||
|
|
get
|
|||
|
|
{
|
|||
|
|
if (IsC2H4RunMode)
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(0, 0, 0));
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(255, 0, 0));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
public SolidColorBrush SIH4Color
|
|||
|
|
{
|
|||
|
|
get
|
|||
|
|
{
|
|||
|
|
if (IsSiH4RunMode)
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(0, 0, 0));
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(255, 0, 0));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
public SolidColorBrush HCLColor
|
|||
|
|
{
|
|||
|
|
get
|
|||
|
|
{
|
|||
|
|
if (IsHCLRunMode)
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(0, 0, 0));
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(255, 0, 0));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public SolidColorBrush TMAColor
|
|||
|
|
{
|
|||
|
|
get
|
|||
|
|
{
|
|||
|
|
if (IsTMARunMode)
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(0, 0, 0));
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(255, 0, 0));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public SolidColorBrush TCSColor
|
|||
|
|
{
|
|||
|
|
get
|
|||
|
|
{
|
|||
|
|
if (IsTCSRunMode)
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(0, 0, 0));
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromRgb(255, 0, 0));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public SolidColorBrush PN2FlowColor
|
|||
|
|
{
|
|||
|
|
get
|
|||
|
|
{
|
|||
|
|
if (IsPN2RunMode)
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 0, 255, 255));
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 190, 190, 190));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
public SolidColorBrush C2H4FlowColor
|
|||
|
|
{
|
|||
|
|
get
|
|||
|
|
{
|
|||
|
|
if (IsC2H4RunMode)
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 0, 255, 255));
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 190, 190, 190));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
public SolidColorBrush SIH4FlowColor
|
|||
|
|
{
|
|||
|
|
get
|
|||
|
|
{
|
|||
|
|
if (IsSiH4RunMode)
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 0, 255, 255));
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 190, 190, 190));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
public SolidColorBrush HCLFlowColor
|
|||
|
|
{
|
|||
|
|
get
|
|||
|
|
{
|
|||
|
|
if (IsHCLRunMode)
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 0, 255, 255));
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 190, 190, 190));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public SolidColorBrush TMAFlowColor
|
|||
|
|
{
|
|||
|
|
get
|
|||
|
|
{
|
|||
|
|
if (IsTMARunMode)
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 0, 255, 255));
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 190, 190, 190));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public SolidColorBrush TCSFlowColor
|
|||
|
|
{
|
|||
|
|
get
|
|||
|
|
{
|
|||
|
|
if (IsTCSRunMode)
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 0, 255, 255));
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
return new SolidColorBrush(System.Windows.Media.Color.FromArgb(255, 190, 190, 190));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
#endregion
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
public bool IsPN2RunMode => N2FlowMode == "Run";
|
|||
|
|
public bool IsHCLRunMode => V54.IsOpen;
|
|||
|
|
public bool IsSiH4RunMode => V55.IsOpen && !V56.IsOpen;
|
|||
|
|
public bool IsC2H4RunMode => V59.IsOpen && !V60.IsOpen;
|
|||
|
|
public bool IsTCSRunMode => V53.IsOpen;
|
|||
|
|
public bool IsTMARunMode => V41.IsOpen && !V42.IsOpen;
|
|||
|
|
|
|||
|
|
|
|||
|
|
public double ArFlow => CalArFlowSum();
|
|||
|
|
public double H2Flow => CalH2FlowSum();
|
|||
|
|
public double PN2Flow => GetPN2MFCFlow(IsPN2RunMode) * _pn2FlowRatio;
|
|||
|
|
public double HCLFlow => GetHclMFCFlow(IsHCLRunMode) * _hclFlowRatio;
|
|||
|
|
public double SiH4Flow => GetSiH4MFCFlow(IsSiH4RunMode) * _sih4FlowRatio;
|
|||
|
|
public double C2H4Flow => GetC2H4MFCFlow(IsC2H4RunMode) * _C2H4FlowRatio;
|
|||
|
|
public double TCSFlow => GetTCSMFCFlow(IsTCSRunMode) * _tcsFlowRatio;
|
|||
|
|
public double TMAFlow => GetTMAMFCFlow(IsTMARunMode) * _tmaFlowRatio;
|
|||
|
|
|
|||
|
|
public bool ISPN2Flow => PN2Flow > 0 && IsPN2RunMode;
|
|||
|
|
public bool ISHCLFlow => HCLFlow > 0 && IsHCLRunMode;
|
|||
|
|
public bool ISSiH4Flow => SiH4Flow > 0 && IsSiH4RunMode;
|
|||
|
|
public bool ISC2H4Flow => C2H4Flow > 0 && IsC2H4RunMode;
|
|||
|
|
public bool ISArFlow => ArFlow > 0;
|
|||
|
|
public bool ISH2Flow => H2Flow > 0;
|
|||
|
|
public bool ISTCSFlow => TCSFlow > 0 && IsTCSRunMode;
|
|||
|
|
public bool ISTMAFlow => TMAFlow > 0 && IsTMARunMode;
|
|||
|
|
|
|||
|
|
|
|||
|
|
#region 计算Ar 和 H2 总流量
|
|||
|
|
|
|||
|
|
private double CalArFlowSum()
|
|||
|
|
{
|
|||
|
|
// 参与计算Ar流量的MFC
|
|||
|
|
double flowCount = 0;
|
|||
|
|
double otherflowCount = 0;
|
|||
|
|
var mfcs = new List<AITMfcData>();
|
|||
|
|
|
|||
|
|
if (!V32.IsOpen)
|
|||
|
|
{
|
|||
|
|
return 0;
|
|||
|
|
}
|
|||
|
|
if (V33s.IsOpen)
|
|||
|
|
{
|
|||
|
|
//68打开后直通部分
|
|||
|
|
if (V68.IsOpen)
|
|||
|
|
{
|
|||
|
|
if (V96.IsOpen) mfcs.Add(Mfc38Data);
|
|||
|
|
if (V95.IsOpen) mfcs.Add(Mfc37Data);
|
|||
|
|
if (V94.IsOpen) mfcs.Add(Mfc36Data);
|
|||
|
|
if (V93.IsOpen) mfcs.Add(Mfc35Data);
|
|||
|
|
if (V92.IsOpen) mfcs.Add(Mfc32Data);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
if (V35.IsOpen || V36.IsOpen)
|
|||
|
|
{
|
|||
|
|
if (V35.IsOpen || V36.IsOpen)
|
|||
|
|
{
|
|||
|
|
#region 反应仓进Ar气所有情况，在进气是判断是否有混合气体
|
|||
|
|
//35打开后，直通部分
|
|||
|
|
if (V35.IsOpen)
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
if (V97.IsOpen) mfcs.Add(Mfc40Data);
|
|||
|
|
if (V91.IsOpen) mfcs.Add(Mfc33Data);
|
|||
|
|
if (V87.IsOpen) mfcs.Add(Mfc27Data);
|
|||
|
|
if (V90.IsOpen) mfcs.Add(Mfc31Data);
|
|||
|
|
if (V89.IsOpen) mfcs.Add(Mfc29Data);
|
|||
|
|
if (V88.IsOpen) mfcs.Add(Mfc28Data);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
//35和36可能会混合，对所有混路气阀分析，总阀门进气开启情况汇总
|
|||
|
|
//63阀所有情况
|
|||
|
|
if ((V58s.IsOpen && V59.IsOpen) || V36.IsOpen)
|
|||
|
|
{
|
|||
|
|
if (V63.IsOpen)
|
|||
|
|
{
|
|||
|
|
if (V90.IsOpen) mfcs.Add(Mfc25Data);
|
|||
|
|
if (V89.IsOpen) mfcs.Add(Mfc26Data);
|
|||
|
|
if (V88.IsOpen) mfcs.Add(Mfc15Data);
|
|||
|
|
if (V36.IsOpen)
|
|||
|
|
otherflowCount += IsC2H4RunMode ? GetC2H4MFCFlow(true) : 0;//V36打开后可能会混合气体，63阀门混合的C2H4
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
//62阀所有情况
|
|||
|
|
if (V53.IsOpen || (V51s.IsOpen && V54.IsOpen) || (V52s.IsOpen && V55.IsOpen) || V36.IsOpen)
|
|||
|
|
{
|
|||
|
|
if (V62.IsOpen)
|
|||
|
|
{
|
|||
|
|
if (V90.IsOpen) mfcs.Add(Mfc22Data);
|
|||
|
|
if (V89.IsOpen) mfcs.Add(Mfc23Data);
|
|||
|
|
if (V88.IsOpen) mfcs.Add(Mfc9Data);
|
|||
|
|
if (V36.IsOpen)
|
|||
|
|
{
|
|||
|
|
otherflowCount += IsSiH4RunMode ? GetSiH4MFCFlow(true) : 0;//V36打开后可能会混合气体，62阀门混合的SIH4
|
|||
|
|
otherflowCount += IsHCLRunMode ? GetHclMFCFlow(true) : 0;//V36打开后可能会混合气体，62阀门混合的HCL
|
|||
|
|
}
|
|||
|
|
otherflowCount += IsTCSRunMode ? GetTCSMFCFlow(true) : 0;//主路通气后可能会混合气体，62阀门混合的TCS
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
//61阀所有情况
|
|||
|
|
if (V39.IsOpen || (V40.IsOpen && V37.IsOpen) || V41.IsOpen || V36.IsOpen)
|
|||
|
|
{
|
|||
|
|
if (V61.IsOpen)
|
|||
|
|
{
|
|||
|
|
if (V90.IsOpen) mfcs.Add(Mfc19Data);
|
|||
|
|
if (V89.IsOpen) mfcs.Add(Mfc20Data);
|
|||
|
|
if (V88.IsOpen) mfcs.Add(Mfc2Data);
|
|||
|
|
if (V36.IsOpen)
|
|||
|
|
otherflowCount += IsPN2RunMode ? GetPN2MFCFlow(true) : 0;//V36打开后可能会混合气体，62阀门混合的PN2
|
|||
|
|
otherflowCount += IsTMARunMode ? GetTMAMFCFlow(true) : 0;//主路通气后可能会混合气体，62阀门混合的TMA
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
#endregion
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
while (mfcs.Count > 0)
|
|||
|
|
{
|
|||
|
|
string deviceName = mfcs[0].DeviceName;
|
|||
|
|
flowCount += mfcs[0].FeedBack;
|
|||
|
|
mfcs.RemoveAll(m => m.DeviceName == deviceName);
|
|||
|
|
}
|
|||
|
|
return (flowCount - otherflowCount) > 0 ? flowCount - otherflowCount : 0;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private double CalH2FlowSum()
|
|||
|
|
{
|
|||
|
|
// 参与计算H2流量的MFC
|
|||
|
|
double flowCount = 0;
|
|||
|
|
double otherflowCount = 0;
|
|||
|
|
var mfcs = new List<AITMfcData>();
|
|||
|
|
|
|||
|
|
if (!V31.IsOpen)
|
|||
|
|
{
|
|||
|
|
return 0;
|
|||
|
|
}
|
|||
|
|
if (V33.IsOpen)
|
|||
|
|
{
|
|||
|
|
if (V35.IsOpen || V36.IsOpen)
|
|||
|
|
{
|
|||
|
|
#region 反应仓进H2气所有情况，在进气是判断是否有混合气体
|
|||
|
|
//35打开后，直通部分
|
|||
|
|
if (V35.IsOpen)
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
if (V97.IsOpen) mfcs.Add(Mfc40Data);
|
|||
|
|
if (V91.IsOpen) mfcs.Add(Mfc33Data);
|
|||
|
|
if (V87.IsOpen) mfcs.Add(Mfc27Data);
|
|||
|
|
if (V90.IsOpen) mfcs.Add(Mfc31Data);
|
|||
|
|
if (V89.IsOpen) mfcs.Add(Mfc29Data);
|
|||
|
|
if (V88.IsOpen) mfcs.Add(Mfc28Data);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
//35和36可能会混合，对所有混路气阀分析，总阀门进气开启情况汇总
|
|||
|
|
//63阀所有情况
|
|||
|
|
if ((V58s.IsOpen && V59.IsOpen) || V36.IsOpen)
|
|||
|
|
{
|
|||
|
|
if (V63.IsOpen)
|
|||
|
|
{
|
|||
|
|
if (V90.IsOpen) mfcs.Add(Mfc25Data);
|
|||
|
|
if (V89.IsOpen) mfcs.Add(Mfc26Data);
|
|||
|
|
if (V88.IsOpen) mfcs.Add(Mfc15Data);
|
|||
|
|
if (V36.IsOpen)
|
|||
|
|
otherflowCount += IsC2H4RunMode ? GetC2H4MFCFlow(true) : 0;//V36打开后可能会混合气体，63阀门混合的C2H4
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
//62阀所有情况
|
|||
|
|
if (V53.IsOpen || (V51s.IsOpen && V54.IsOpen) || (V52s.IsOpen && V55.IsOpen) || V36.IsOpen)
|
|||
|
|
{
|
|||
|
|
if (V62.IsOpen)
|
|||
|
|
{
|
|||
|
|
if (V90.IsOpen) mfcs.Add(Mfc22Data);
|
|||
|
|
if (V89.IsOpen) mfcs.Add(Mfc23Data);
|
|||
|
|
if (V88.IsOpen) mfcs.Add(Mfc9Data);
|
|||
|
|
if (V36.IsOpen)
|
|||
|
|
{
|
|||
|
|
otherflowCount += IsSiH4RunMode ? GetSiH4MFCFlow(true) : 0;//V36打开后可能会混合气体，62阀门混合的SIH4
|
|||
|
|
otherflowCount += IsHCLRunMode ? GetHclMFCFlow(true) : 0;//V36打开后可能会混合气体，62阀门混合的HCL
|
|||
|
|
}
|
|||
|
|
otherflowCount += IsTCSRunMode ? GetTCSMFCFlow(true) : 0;//主路通气后可能会混合气体，62阀门混合的TCS
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
//61阀所有情况
|
|||
|
|
if (V39.IsOpen || (V40.IsOpen && V37.IsOpen) || V41.IsOpen || V36.IsOpen)
|
|||
|
|
{
|
|||
|
|
if (V61.IsOpen)
|
|||
|
|
{
|
|||
|
|
if (V90.IsOpen) mfcs.Add(Mfc19Data);
|
|||
|
|
if (V89.IsOpen) mfcs.Add(Mfc20Data);
|
|||
|
|
if (V88.IsOpen) mfcs.Add(Mfc2Data);
|
|||
|
|
if (V36.IsOpen)
|
|||
|
|
otherflowCount += IsPN2RunMode ? GetPN2MFCFlow(true) : 0;//V36打开后可能会混合气体，62阀门混合的PN2
|
|||
|
|
otherflowCount += IsTMARunMode ? GetTMAMFCFlow(true) : 0;//主路通气后可能会混合气体，62阀门混合的TMA
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
#endregion
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
while (mfcs.Count > 0)
|
|||
|
|
{
|
|||
|
|
string deviceName = mfcs[0].DeviceName;
|
|||
|
|
flowCount += mfcs[0].FeedBack;
|
|||
|
|
mfcs.RemoveAll(m => m.DeviceName == deviceName);
|
|||
|
|
}
|
|||
|
|
return (flowCount - otherflowCount) > 0 ? flowCount - otherflowCount : 0;
|
|||
|
|
}
|
|||
|
|
#endregion
|
|||
|
|
|
|||
|
|
private double GetC2H4MFCFlow(bool isRun)
|
|||
|
|
{
|
|||
|
|
// 参与计算C2H4流量的MFC
|
|||
|
|
double flow = 0;
|
|||
|
|
|
|||
|
|
if (V58.IsOpen == false) // V58关闭时通载气，不计算C2H4流量
|
|||
|
|
return 0;
|
|||
|
|
|
|||
|
|
if (isRun)
|
|||
|
|
{
|
|||
|
|
// 气体进入反应腔
|
|||
|
|
if (V59.IsOpen && V63.IsOpen && (V90.IsOpen || V89.IsOpen || V88.IsOpen))
|
|||
|
|
{
|
|||
|
|
flow = Mfc16Data.FeedBack;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
// 气体直接排走
|
|||
|
|
if (!V59.IsOpen && V60.IsOpen)
|
|||
|
|
{
|
|||
|
|
flow = Mfc16Data.FeedBack;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
return flow;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private double GetSiH4MFCFlow(bool isRun)
|
|||
|
|
{
|
|||
|
|
double flow = 0;
|
|||
|
|
|
|||
|
|
if (V52.IsOpen == false) // V52关闭时通载气，不计算SiH4流量
|
|||
|
|
return 0;
|
|||
|
|
|
|||
|
|
if (isRun)
|
|||
|
|
{
|
|||
|
|
// 气体进入反应腔
|
|||
|
|
if (V55.IsOpen && V62.IsOpen && (V90.IsOpen || V89.IsOpen || V88.IsOpen))
|
|||
|
|
{
|
|||
|
|
flow += Mfc14Data.FeedBack;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
// 气体直接排走
|
|||
|
|
if (!V55.IsOpen && V56.IsOpen)
|
|||
|
|
{
|
|||
|
|
flow += Mfc14Data.FeedBack;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
return flow;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
private double GetHclMFCFlow(bool isRun)
|
|||
|
|
{
|
|||
|
|
double flow = 0;
|
|||
|
|
|
|||
|
|
if (V51.IsOpen == false) // V51关闭时通载气，不计算HCL流量
|
|||
|
|
return 0;
|
|||
|
|
|
|||
|
|
if (isRun)
|
|||
|
|
{
|
|||
|
|
// 气体进入反应腔
|
|||
|
|
if (V54.IsOpen && V62.IsOpen && (V90.IsOpen || V89.IsOpen || V88.IsOpen))
|
|||
|
|
{
|
|||
|
|
flow += Mfc13Data.FeedBack;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
// 气体直接排走
|
|||
|
|
if (V54s.IsOpen)
|
|||
|
|
{
|
|||
|
|
flow += Mfc13Data.FeedBack;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
return flow;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private double GetPN2MFCFlow(bool isRun)
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
//新计算方式
|
|||
|
|
double flow = 0;
|
|||
|
|
if (IsPMProcess)
|
|||
|
|
{
|
|||
|
|
if (N2FlowMode == "Purge")
|
|||
|
|
{
|
|||
|
|
flow = 0;
|
|||
|
|
}
|
|||
|
|
else if (N2FlowMode == "Vent")
|
|||
|
|
{
|
|||
|
|
flow = Mfc4Data.FeedBack + Mfc5Data.FeedBack;
|
|||
|
|
}
|
|||
|
|
else if (N2FlowMode == "Run")
|
|||
|
|
{
|
|||
|
|
flow = Mfc6Data.FeedBack * Mfc4Data.FeedBack / (Mfc3Data.FeedBack + Mfc4Data.FeedBack);
|
|||
|
|
|
|||
|
|
if (V40.IsOpen)
|
|||
|
|
{
|
|||
|
|
flow += Mfc5Data.FeedBack;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return flow;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private double GetTCSMFCFlow(bool isRun)
|
|||
|
|
{
|
|||
|
|
double flow = 0;
|
|||
|
|
if (!(bool)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.TmaEnable"))//TMA未选装
|
|||
|
|
return 0;
|
|||
|
|
|
|||
|
|
|
|||
|
|
if (isRun)
|
|||
|
|
{
|
|||
|
|
if (!V49.IsOpen && V48.IsOpen && V53.IsOpen && V62.IsOpen && (V90.IsOpen || V89.IsOpen || V88.IsOpen)) { flow += Mfc10Data.FeedBack + Mfc11Data.FeedBack; }
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
if (!V49.IsOpen && V48.IsOpen && !V53.IsOpen) { flow += Mfc10Data.FeedBack + Mfc11Data.FeedBack; }
|
|||
|
|
}
|
|||
|
|
return flow;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private double GetTMAMFCFlow(bool isRun)
|
|||
|
|
{
|
|||
|
|
double flow = 0;
|
|||
|
|
if (isRun)
|
|||
|
|
{
|
|||
|
|
if (!V45.IsOpen && V43.IsOpen && V41.IsOpen && !V42.IsOpen && V61.IsOpen && (V90.IsOpen || V89.IsOpen || V88.IsOpen)) { flow += Mfc7Data.FeedBack; }
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
if (!V45.IsOpen && V43.IsOpen && !V41.IsOpen && V42.IsOpen) { flow += Mfc7Data.FeedBack; }
|
|||
|
|
}
|
|||
|
|
return flow;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
//
|
|||
|
|
public void NewWindow()
|
|||
|
|
{
|
|||
|
|
if (dv==null)
|
|||
|
|
{
|
|||
|
|
dv = new WinDataView(this,SystemName);
|
|||
|
|
//dv.ShowDialog();
|
|||
|
|
dv.dsFresh = new WinDataView.DataShow();
|
|||
|
|
dv.Show();
|
|||
|
|
InitTimer();
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
dv.Visibility = Visibility.Visible;
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
private void InitTimer()
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
//设置定时器
|
|||
|
|
timer = new DispatcherTimer();
|
|||
|
|
timer.Interval = new TimeSpan(10000000); //100分之一毫秒为单位
|
|||
|
|
timer.Tick += new EventHandler(timer_Tick);
|
|||
|
|
|
|||
|
|
//开启定时器
|
|||
|
|
timer.Start();
|
|||
|
|
}
|
|||
|
|
private void timer_Tick(object sender, EventArgs e)
|
|||
|
|
{
|
|||
|
|
try
|
|||
|
|
{
|
|||
|
|
TimerEvent(sender, e);
|
|||
|
|
}
|
|||
|
|
catch (Exception ex)
|
|||
|
|
{
|
|||
|
|
//MessageBox.Show(ex.Message, "异常");
|
|||
|
|
//EV.PostWarningLog()
|
|||
|
|
}
|
|||
|
|
//throw new NotImplementedException();
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
private void myTimerEvent(object obj, System.EventArgs e)
|
|||
|
|
{
|
|||
|
|
dv.dsFresh.RecipeName = SelectedRecipeDispaly;
|
|||
|
|
dv.dsFresh.StepNumber = StepNumber;
|
|||
|
|
dv.dsFresh.StepName = StepName;
|
|||
|
|
dv.dsFresh.StepTime = StepTime;
|
|||
|
|
dv.dsFresh.RecipeTime = RecipeTime;
|
|||
|
|
//
|
|||
|
|
dv.dsFresh.PSUMOde = TC1Mode;
|
|||
|
|
dv.dsFresh.SCRMOde = TC2Mode;
|
|||
|
|
//
|
|||
|
|
dv.dsFresh.Inner = PSU1Power.ToString();
|
|||
|
|
dv.dsFresh.Middle = PSU2Power.ToString();
|
|||
|
|
dv.dsFresh.Outer = PSU3Power.ToString();
|
|||
|
|
|
|||
|
|
dv.dsFresh.U = SCR1Power.ToString();
|
|||
|
|
dv.dsFresh.M = SCR2Power.ToString();
|
|||
|
|
dv.dsFresh.L = SCR3Power.ToString();
|
|||
|
|
//
|
|||
|
|
dv.dsFresh.TC1 = SCRL3InputTemp.ToString();
|
|||
|
|
dv.dsFresh.TC2 = L2InputTemp.ToString();
|
|||
|
|
dv.dsFresh.TC3 = L3InputTemp.ToString();
|
|||
|
|
|
|||
|
|
dv.dsFresh.ChamPressFeedBack = ChamPress.FeedBack.ToString(ChamPress.FormatString);//ChamPress.ToString();
|
|||
|
|
dv.dsFresh.ActualSpeedFeedback = ActualSpeedFeedback.ToString();
|
|||
|
|
dv.dsFresh.PM1Temprature = PM1Temprature.ToString();
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|