Sic.Framework-Nanjing-Baishi/MECF.Framework.RT.EquipmentLibrary/PmDevices/DicMode.cs

using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;

namespace Aitex.Core.RT.Device.PmDevices
{
    public class DicMode
    {
        public enum FlowMode
        {
            Purge,
            Vent,
            Run,
            Close,
        }

        public enum ArH2Switch
        {
            Ar,
            H2,
        }

        public enum HeaterControlMode
        {
            Pyro, // 2704 PID自动控温
            Power, // 2704 功率控制
            Hold, // 作废
            PyroAuto, // Recipe配置PSU1-3控制逻辑，2704_L1:功率百分比；2704_L2、2704_L3：PID
            PyroFollow // Recipe配置PSU1-3控制逻辑，2704_L2:PID；2704_L1、2704_L3：功率按Recipe设定之比例由程序改变功率
        }
    }
}