817 lines
28 KiB
C#
817 lines
28 KiB
C#
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using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.OperationCenter;
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using Aitex.Core.RT.SCCore;
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using Aitex.Core.Util;
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using Aitex.Sorter.Common;
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using MECF.Framework.Common.Communications;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
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using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Text;
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using System.Text.RegularExpressions;
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using System.Threading;
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using System.Threading.Tasks;
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namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot.HineAutomation
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{
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public class HAtmRobot : Robot
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{
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#region properties
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public override bool Error
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{
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get
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{
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return _exceuteErr;
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}
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}
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public bool IsThetaBusy { get; set; }
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public bool IsZBusy { get; set; }
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public bool IsRadialBusy { get; set; }
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public override bool Busy
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{
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get
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{
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return IsBusy || IsThetaBusy || IsZBusy || IsRadialBusy || (!_motionTimer.IsIdle() && _motionTimer.GetElapseTime() < _motionTime) /*|| ThetaAxisAddressPosition != _targetThetaAxisAddressPosition || ZAxisAddressPosition != _targetZAxisAddressPosition*/;
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}
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}
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public override bool Moving
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{
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get
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{
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return IsBusy || IsThetaBusy || IsZBusy || IsRadialBusy || (!_motionTimer.IsIdle() && _motionTimer.GetElapseTime() < _motionTime) /*|| ThetaAxisAddressPosition != _targetThetaAxisAddressPosition || ZAxisAddressPosition != _targetZAxisAddressPosition*/;
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}
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}
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public override bool WaferOnBlade1 => WaferPresentOnBlade1;
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public bool IsBusy { private get; set; }
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public bool IsRetract { get; set; }
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public bool IsUp { get; set; }
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public int ThetaAxisAddressPosition { get; set; }
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public int ZAxisAddressPosition { get; set; }
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public int RetractReqPos { get; set; }
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public int RotateReqPos { get; set; }
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public int ZReqPos { get; set; }
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public int ZActPos { get; set; }
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public string SlotMap { get; set; }
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public Dictionary<string, string> ErrorCodeReference;
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public R_TRIG IsRotationAxisUnreferencedTrig { get; set; }
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public R_TRIG IsExtensionAxisUnreferencedTrig { get; set; }
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public R_TRIG IsZAxisUnreferencedTrig { get; set; }
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public bool IsHomed => _isHomed;
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#endregion
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#region fields
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private HAtmConnection _connection;
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private string _address;
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private PeriodicJob _thread;
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private LinkedList<HandlerBase> _lstHandler = new LinkedList<HandlerBase>();
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private object _lockerHandlerList = new object();
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private R_TRIG _trigError = new R_TRIG();
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private R_TRIG _trigWarningMessage = new R_TRIG();
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private string _lastError = string.Empty;
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private int _errorCode;
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private int _targetThetaAxisAddressPosition;
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private int _targetZAxisAddressPosition;
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private HandlerBase _waferMoveHandler;
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private HandlerBase _homeHandler;
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private bool _isHomed;
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private bool _isSimulator;
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//private bool _isFirstHome = true;
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private bool _enableLog;
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private bool _isPowerUp = true;
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private DeviceTimer _motionTimer = new DeviceTimer();
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private int _motionTime = 1000;
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private Dictionary<string, int> _motionTimeDic;
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private ModuleName _lastTarget;
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private R_TRIG _zAxisHomeTrig = new R_TRIG();
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#endregion
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public HAtmRobot(string module)
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: base(module, module, module, module, "", RobotType.HAtm)
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{
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IsRetract = true;
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}
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static bool CheckAddressPort(string s)
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{
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bool isLegal;
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Regex regex = new Regex(@"^((2[0-4]\d|25[0-5]|[1]?\d\d?)\.){3}(2[0-4]\d|25[0-5]|[1]?\d\d?)\:([1-9]|[1-9][0-9]|[1-9][0-9][0-9]|[1-9][0-9][0-9][0-9]|[1-6][0-5][0-5][0-3][0-5])$");//CheckAddressPort
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Match match = regex.Match(s);
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if (match.Success)
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{
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isLegal = true;
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}
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else
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{
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isLegal = false;
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}
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return isLegal;
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}
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public override bool Initialize()
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{
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_address = SC.GetStringValue($"{Module}.Address");
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_isSimulator = SC.GetValue<bool>("System.IsSimulatorMode");
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_enableLog = SC.GetValue<bool>($"{Module}.EnableLogMessage");
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_connection = new HAtmConnection(_address);
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if (CheckAddressPort(_address))
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{
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if (_connection.Connect())
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{
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EV.PostInfoLog(Module, $"{Module} connected");
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}
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}
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else EV.PostWarningLog(Module, $"{Module} Adress is illegal");
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_thread = new PeriodicJob(50, OnTimer, $"{Module} MonitorHandler", true);
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DATA.Subscribe($"{Name}.IsHomed", () => _isHomed);
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DATA.Subscribe($"{Name}.IsConnected", () => _connection.IsConnected);
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OP.Subscribe("Robot.QueryOperationalStatus", (string cmd, object[] args) =>
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{
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QueryOperationalStatus();
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return true;
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});
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_motionTimeDic = new Dictionary<string, int>()
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{
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{ $"{ModuleName.Cassette}.{ModuleName.PM}.Picking",4000},
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{ $"{ModuleName.PM}.{ModuleName.PM}.Picking",1500},
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{ $"{ModuleName.PM}.{ModuleName.Cooling}.Picking",2400},
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{ $"{ModuleName.Cooling}.{ModuleName.Cooling}.Picking",1500},
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{ $"{ModuleName.Cooling}.{ModuleName.PM}.Picking",2400},
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{ $"{ModuleName.Cassette}.{ModuleName.Cooling}.Picking",2200},
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{ $"{ModuleName.Cooling}.{ModuleName.Cassette}.Picking",2200},
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{ $"{ModuleName.Cassette}.{ModuleName.Cassette}.Picking",1500},
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{ $"{ModuleName.PM}.{ModuleName.Cassette}.Picking",4000},
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{ $"{ModuleName.TMRobot}.{ModuleName.Cassette}.Picking",5000},
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{ $"{ModuleName.TMRobot}.{ModuleName.Cooling}.Picking",3700},
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{ $"{ModuleName.TMRobot}.{ModuleName.PM}.Picking",2200},
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{ $"System.{ModuleName.Cassette}.Picking",5000},
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{ $"System.{ModuleName.Cooling}.Picking",3700},
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{ $"System.{ModuleName.PM}.Picking",2200},
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};
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ErrorCodeReference = new Dictionary<string, string>()
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{
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{ "S0","Serial response timeout"},
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{ "S1","Illegal sc interrupt"},
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{ "S2","Parity Error"},
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{ "S3","Input Buffer overflow"},
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{ "C0","Command not recognized"},
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{ "C1","Illegal Z-Axis Command Address"},
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{ "C2","Illegal Radial Axis Command Address"},
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{ "C3","Illegal Theta Axis Command Address"},
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{ "C4","Illegal Pick – wafer on pan"},
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{ "C5","Illegal Place – wafer not on pan"},
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{ "C6","Illegal action command – error present"},
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{ "C7","Command overrun – Hatm5.0 Busy"},
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{ "C8","Illegal command – not in learn mode"},
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{ "C9","Illegal Search – hardware not present"},
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{ "CA","Illegal Fetch – hardware not present"},
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{ "CB","Illegal Action – data not valid"},
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{ "CC","Illegal Action – Request Queue overrun"},
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{ "CD","Illegal Action – Overcurrent Latch Set"},
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{ "CE","Illegal Action – Interlock Open"},
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{ "CF","Loss of Vacuum Detect"},
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{ "D0","Illegal Pitch"},
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{ "D1","Illegal Offset"},
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{ "D2","Illegal number of slots"},
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{ "D3","Illegal rotate position"},
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{ "D4","Illegal difference value"},
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{ "D5","Parameter missing"},
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{ "D6","Illegal Set Command"},
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{ "D7","Illegal Option"},
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{ "D8","Illegal Category"},
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{ "D9","Illegal Bias"},
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{ "DA","Illegal Bias Set, Z not valid"},
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{ "DB","Invalid rotational speed data(exceeded the legal percent range)"},
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{ "DC","Invalid z-axis speed data (exceeded the legal percent range)"},
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{ "I0","Z requested position is out of range"},
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{ "I1","Theta requested position is out of range"},
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{ "I2","Radial requested position is out of range"},
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{ "I3","Illegal Z Position"},
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{ "I4","Illegal Theta Position"},
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{ "I5","Illegal Data"},
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{ "A0","Theta Axis action timeout"},
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{ "A1","Z-Axis action timeout"},
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{ "A2","Radial Axis action timeout"},
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{ "A3","Theta overtravel"},
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{ "A4","Theta Axis reference detect"},
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{ "A5","Z-Axis reference detect"},
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{ "A6","Function timeout"},
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{ "A7","Loss of Retrace on Rotate"},
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{ "A8","Cassette Interlock error"},
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{ "A9","Overcurrent shutdown"},
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{ "P0","Bad Checksum – Theta Parameters"},
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{ "P1","Bad Checksum – Z Parameters"},
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{ "P2","Bad Checksum – Radial Parameters"},
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{ "F0","Flipper current limit activated"},
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{ "F1","Flipper device error"},
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{ "F2","Flipper over voltage"},
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{ "F3","Flipper over temperature"},
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{ "F4","Flipper continuous current limit"},
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{ "F5","No Flipper is installed"},
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};
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IsRotationAxisUnreferencedTrig = new R_TRIG();
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IsExtensionAxisUnreferencedTrig = new R_TRIG();
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IsZAxisUnreferencedTrig = new R_TRIG();
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return base.Initialize();
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}
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private bool OnTimer()
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{
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try
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{
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_connection.MonitorTimeout();
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_connection.MonitorConnection(SC.GetValue<int>("TMRobot.ReconnectCount"), out bool retried);
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if (retried)
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{
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lock (_lockerHandlerList)
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{
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_lstHandler.Clear();
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}
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}
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if (!_connection.IsConnected || _connection.IsCommunicationError)
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{
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return true;
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}
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if (_connection.IsBusy)
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return true;
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HandlerBase handler = null;
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lock (_lockerHandlerList)
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{
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if (_isPowerUp)
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{
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if(SC.GetValue<bool>("TMRobot.AllCommandsHaveResponse"))
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_lstHandler.AddFirst(new SetCommandResponseHandler(this));
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_isPowerUp = false;
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}
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if (_lstHandler.Count == 0)
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{
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_lstHandler.AddLast(new QueryOperationalStatusHandler(this));
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_lstHandler.AddLast(new QueryAllAxisStatusHandler(this));
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_lstHandler.AddLast(new QueryThetaAxisStatusHandler(this));
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_lstHandler.AddLast(new QueryZAxisStatusHandler(this));
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_lstHandler.AddLast(new QueryRadialAxisStatusHandler(this));
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_lstHandler.AddLast(new QueryPositionHandler(this));
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}
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if (_lstHandler.Count > 0)
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{
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handler = _lstHandler.First.Value;
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_lstHandler.RemoveFirst();
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}
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}
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if (handler != null)
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{
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handler.SendText = ((HAtmHandler)handler).Package();
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_connection.Execute(handler);
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}
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if (_waferMoveHandler != null)
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{
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var pick = _waferMoveHandler as PickHandler;
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if (pick != null && WaferOnBlade1 && WaferManager.Instance.CheckHasWafer(pick.Target, pick.Slot))
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{
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WaferManager.Instance.WaferMoved(pick.Target, pick.Slot, ModuleHelper.Converter(Name), (int)Hand.Blade1);
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CmdBladeTarget = $"{pick.Target}.Retract";
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}
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var place = _waferMoveHandler as PlaceHandler;
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if (place != null && !WaferOnBlade1 && WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(Name), (int)Hand.Blade1))
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{
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WaferManager.Instance.WaferMoved(ModuleHelper.Converter(Name), (int)Hand.Blade1, place.Target, place.Slot);
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CmdBladeTarget = $"{place.Target}.Retract";
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}
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}
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if (_waferMoveHandler != null && !Moving)
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{
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_lastTarget = ((HAtmHandler)_waferMoveHandler).Target;
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((HAtmHandler)_waferMoveHandler).Update();
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_waferMoveHandler = null;
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_motionTimer.Stop();
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}
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if (_homeHandler != null)
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{
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_zAxisHomeTrig.CLK = ZReqPos == 0;
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if(_zAxisHomeTrig.Q)//means ZAXis is homed
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{
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ChangeRobotBladeTarget();
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}
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if (!Moving)
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{
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_lastTarget = ((HAtmHandler)_homeHandler).Target;
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_isHomed = true;
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_homeHandler = null;
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_motionTimer.Stop();
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}
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}
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}
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catch (Exception ex)
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{
|
|||
|
|
LOG.Write(ex);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void ChangeRobotBladeTarget()
|
|||
|
|
{
|
|||
|
|
//CmdBladeTarget = $"{ModuleHelper.Converter(RobotDevice.Name)}.Retract";
|
|||
|
|
int cassette = 180;
|
|||
|
|
int cooling = 110;
|
|||
|
|
int pm = 55;
|
|||
|
|
if(Math.Abs(RotateReqPos - cassette) < 10)
|
|||
|
|
{
|
|||
|
|
CmdBladeTarget = $"{ModuleName.Cassette}.{ModuleHelper.Converter(Name)}.Retract";
|
|||
|
|
return;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
if (Math.Abs(RotateReqPos - cooling) < 10)
|
|||
|
|
{
|
|||
|
|
CmdBladeTarget = $"{ModuleName.Cooling}.{ModuleHelper.Converter(Name)}.Retract";
|
|||
|
|
return;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
if (Math.Abs(RotateReqPos - pm) < 10)
|
|||
|
|
{
|
|||
|
|
CmdBladeTarget = $"{ModuleName.PM}.{ModuleHelper.Converter(Name)}.Retract";
|
|||
|
|
return;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
if (Math.Abs(RotateReqPos) < 10)
|
|||
|
|
{
|
|||
|
|
CmdBladeTarget = $"{ModuleHelper.Converter(Name)}.{ModuleHelper.Converter(Name)}.Retract";
|
|||
|
|
return;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
CmdBladeTarget = $"{ModuleHelper.Converter(Name)}.Retract";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override void Monitor()
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override void Reset()
|
|||
|
|
{
|
|||
|
|
_trigError.RST = true;
|
|||
|
|
_trigWarningMessage.RST = true;
|
|||
|
|
IsRotationAxisUnreferencedTrig.RST = true;
|
|||
|
|
IsExtensionAxisUnreferencedTrig.RST = true;
|
|||
|
|
IsZAxisUnreferencedTrig.RST = true;
|
|||
|
|
|
|||
|
|
_connection.Reset();
|
|||
|
|
|
|||
|
|
_exceuteErr = false;
|
|||
|
|
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(new ResetHandler(this));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_motionTimer.Stop();
|
|||
|
|
|
|||
|
|
_zAxisHomeTrig.RST = true;
|
|||
|
|
|
|||
|
|
_isHomed = false;
|
|||
|
|
|
|||
|
|
base.Reset();
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void SetErrorCode(int errorCode)
|
|||
|
|
{
|
|||
|
|
_errorCode = errorCode;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void SetError(string reason)
|
|||
|
|
{
|
|||
|
|
_trigWarningMessage.CLK = true;
|
|||
|
|
if (_trigWarningMessage.Q)
|
|||
|
|
{
|
|||
|
|
EV.PostWarningLog(Module, $"{Module} error, {reason}");
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(new QueryErrorHandler(this));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_exceuteErr = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override void OnDataChanged(string package)
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
public override bool Home(out string reason)
|
|||
|
|
{
|
|||
|
|
reason = string.Empty;
|
|||
|
|
var handler = new HomeHandler(this);
|
|||
|
|
//if (_lstHandler.Count > 0 && Moving && !_isFirstHome)
|
|||
|
|
//{
|
|||
|
|
// reason = "Robot busy, please wait or abort.";
|
|||
|
|
// EV.PostMessage(Name, EventEnum.DefaultWarning, string.Format("{0} {1} {2}", this.Name, handler.Name.ToString(), reason));
|
|||
|
|
|
|||
|
|
// return false;
|
|||
|
|
//}
|
|||
|
|
|
|||
|
|
SetBusy();
|
|||
|
|
|
|||
|
|
_exceuteErr = false;
|
|||
|
|
_targetThetaAxisAddressPosition = 0;
|
|||
|
|
_targetZAxisAddressPosition = 0;
|
|||
|
|
ThetaAxisAddressPosition = -1;
|
|||
|
|
ZAxisAddressPosition = -1;
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(handler);
|
|||
|
|
if(SC.GetValue<bool>("TMRobot.AllCommandsHaveResponse"))
|
|||
|
|
_lstHandler.AddFirst(new SetCommandResponseHandler(this));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_homeHandler = handler;
|
|||
|
|
_isHomed = false;
|
|||
|
|
//_isFirstHome = false;
|
|||
|
|
|
|||
|
|
_enableLog = SC.GetValue<bool>($"{Module}.EnableLogMessage");
|
|||
|
|
|
|||
|
|
IsThetaBusy = true;
|
|||
|
|
IsZBusy = true;
|
|||
|
|
IsRadialBusy = true;
|
|||
|
|
_motionTimer.Start(0);
|
|||
|
|
_zAxisHomeTrig.RST = true;
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool Pick(ModuleName target, int slot, out string reason)
|
|||
|
|
{
|
|||
|
|
reason = string.Empty;
|
|||
|
|
var handler = new PickHandler(this, target, slot);
|
|||
|
|
if (_lstHandler.Count > 0 && Moving)
|
|||
|
|
{
|
|||
|
|
reason = "Robot busy, please wait or abort.";
|
|||
|
|
EV.PostMessage(Name, EventEnum.DefaultWarning, string.Format("{0} {1} {2}", this.Name, handler.Name.ToString(), reason));
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
SetBusy();
|
|||
|
|
|
|||
|
|
_targetThetaAxisAddressPosition = RobotConvertor.Chamber2ThetaAxisPosition(target);
|
|||
|
|
_targetZAxisAddressPosition = RobotConvertor.ChamberSlot2ZAxisPosition(target, slot);
|
|||
|
|
ThetaAxisAddressPosition = -1;
|
|||
|
|
ZAxisAddressPosition = -1;
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(handler);
|
|||
|
|
}
|
|||
|
|
_waferMoveHandler = handler;
|
|||
|
|
|
|||
|
|
IsThetaBusy = true;
|
|||
|
|
IsZBusy = true;
|
|||
|
|
IsRadialBusy = true;
|
|||
|
|
_motionTimer.Start(0);
|
|||
|
|
|
|||
|
|
if(_isSimulator)
|
|||
|
|
WaferPresentOnBlade1 = false;
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool Place(ModuleName target, int slot, out string reason)
|
|||
|
|
{
|
|||
|
|
reason = string.Empty;
|
|||
|
|
var handler = new PlaceHandler(this, target, slot);
|
|||
|
|
if (_lstHandler.Count > 0 && Moving)
|
|||
|
|
{
|
|||
|
|
reason = "Robot busy, please wait or abort.";
|
|||
|
|
EV.PostMessage(Name, EventEnum.DefaultWarning, string.Format("{0} {1} {2}", this.Name, handler.Name.ToString(), reason));
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
SetBusy();
|
|||
|
|
|
|||
|
|
_targetThetaAxisAddressPosition = RobotConvertor.Chamber2ThetaAxisPosition(target);
|
|||
|
|
_targetZAxisAddressPosition = RobotConvertor.ChamberSlot2ZAxisPosition(target, slot);
|
|||
|
|
ThetaAxisAddressPosition = -1;
|
|||
|
|
ZAxisAddressPosition = -1;
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(handler);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_waferMoveHandler = handler;
|
|||
|
|
|
|||
|
|
IsThetaBusy = true;
|
|||
|
|
IsZBusy = true;
|
|||
|
|
IsRadialBusy = true;
|
|||
|
|
_motionTimer.Start(0);
|
|||
|
|
|
|||
|
|
if (_isSimulator)
|
|||
|
|
WaferPresentOnBlade1 = true;
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool GotoExtend(ModuleName target, int slot, bool isPick, bool isUp, out string reason)
|
|||
|
|
{
|
|||
|
|
reason = string.Empty;
|
|||
|
|
var handler = new GotoHandler(this, target, slot, isPick, isUp);
|
|||
|
|
if (_lstHandler.Count > 0 && Moving)
|
|||
|
|
{
|
|||
|
|
reason = "Robot busy, please wait or abort.";
|
|||
|
|
EV.PostMessage(Name, EventEnum.DefaultWarning, string.Format("{0} {1} {2}", this.Name, handler.Name.ToString(), reason));
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
SetBusy();
|
|||
|
|
|
|||
|
|
_targetThetaAxisAddressPosition = RobotConvertor.Chamber2ThetaAxisPosition(target);
|
|||
|
|
_targetZAxisAddressPosition = RobotConvertor.ChamberSlot2ZAxisPosition(target, slot);
|
|||
|
|
ThetaAxisAddressPosition = -1;
|
|||
|
|
ZAxisAddressPosition = -1;
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(handler);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_waferMoveHandler = handler;
|
|||
|
|
|
|||
|
|
IsThetaBusy = true;
|
|||
|
|
IsZBusy = true;
|
|||
|
|
IsRadialBusy = true;
|
|||
|
|
_motionTimer.Start(0);
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool ZAxisMove(ModuleName target, int slot, bool isUp, out string reason)
|
|||
|
|
{
|
|||
|
|
reason = string.Empty;
|
|||
|
|
var handler = new ZAxisMoveHandler(this, target, slot, isUp);
|
|||
|
|
if (_lstHandler.Count > 0 && Moving)
|
|||
|
|
{
|
|||
|
|
reason = "Robot busy, please wait or abort.";
|
|||
|
|
EV.PostMessage(Name, EventEnum.DefaultWarning, string.Format("{0} {1} {2}", this.Name, handler.Name.ToString(), reason));
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_targetZAxisAddressPosition = RobotConvertor.ChamberSlot2ZAxisPosition(target, slot);
|
|||
|
|
ZAxisAddressPosition = -1;
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(handler);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
IsZBusy = true;
|
|||
|
|
_motionTimer.Start(0);
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool PlaceRetract(ModuleName target, int slot, out string reason)
|
|||
|
|
{
|
|||
|
|
reason = string.Empty;
|
|||
|
|
var handler = new PlaceRetractHandler(this, target, slot);
|
|||
|
|
if (_lstHandler.Count > 0 && Moving)
|
|||
|
|
{
|
|||
|
|
reason = "Robot busy, please wait or abort.";
|
|||
|
|
EV.PostMessage(Name, EventEnum.DefaultWarning, string.Format("{0} {1} {2}", this.Name, handler.Name.ToString(), reason));
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
SetBusy();
|
|||
|
|
|
|||
|
|
_targetThetaAxisAddressPosition = RobotConvertor.Chamber2ThetaAxisPosition(target);
|
|||
|
|
_targetZAxisAddressPosition = RobotConvertor.ChamberSlot2ZAxisPosition(target, slot);
|
|||
|
|
ThetaAxisAddressPosition = -1;
|
|||
|
|
ZAxisAddressPosition = -1;
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(handler);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_waferMoveHandler = handler;
|
|||
|
|
|
|||
|
|
IsThetaBusy = true;
|
|||
|
|
IsZBusy = true;
|
|||
|
|
IsRadialBusy = true;
|
|||
|
|
_motionTimer.Start(0);
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool PickRetract(ModuleName target, int slot, bool isNeedWaferMove, out string reason)
|
|||
|
|
{
|
|||
|
|
reason = string.Empty;
|
|||
|
|
var handler = new PickRetractHandler(this, target, slot, isNeedWaferMove);
|
|||
|
|
if (_lstHandler.Count > 0 && Moving)
|
|||
|
|
{
|
|||
|
|
reason = "Robot busy, please wait or abort.";
|
|||
|
|
EV.PostMessage(Name, EventEnum.DefaultWarning, string.Format("{0} {1} {2}", this.Name, handler.Name.ToString(), reason));
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
SetBusy();
|
|||
|
|
|
|||
|
|
_targetThetaAxisAddressPosition = RobotConvertor.Chamber2ThetaAxisPosition(target);
|
|||
|
|
_targetZAxisAddressPosition = RobotConvertor.ChamberSlot2ZAxisPosition(target, slot);
|
|||
|
|
ThetaAxisAddressPosition = -1;
|
|||
|
|
ZAxisAddressPosition = -1;
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(handler);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_waferMoveHandler = handler;
|
|||
|
|
|
|||
|
|
IsThetaBusy = true;
|
|||
|
|
IsZBusy = true;
|
|||
|
|
IsRadialBusy = true;
|
|||
|
|
_motionTimer.Start(0);
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void Abort()
|
|||
|
|
{
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(new AbortHandler(this));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_waferMoveHandler = null;
|
|||
|
|
_homeHandler = null;
|
|||
|
|
_motionTimer.Stop();
|
|||
|
|
_zAxisHomeTrig.RST = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void QueryAllAxisStatus()
|
|||
|
|
{
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(new QueryAllAxisStatusHandler(this));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void QueryError()
|
|||
|
|
{
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(new QueryErrorHandler(this));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void SetSpeed()
|
|||
|
|
{
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(new SetThetaSpeedHandler(this, SC.GetValue<int>("TMRobot.Speed"), SC.GetValue<int>("TMRobot.Speed")));
|
|||
|
|
_lstHandler.AddFirst(new SetReachSpeedHandler(this, SC.GetValue<int>("TMRobot.Speed"), SC.GetValue<int>("TMRobot.Speed")));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void QueryOperationalStatus()
|
|||
|
|
{
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(new QueryOperationalStatusHandler(this));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool VacuumOn(out string reason)
|
|||
|
|
{
|
|||
|
|
reason = string.Empty;
|
|||
|
|
var handler = new VacuumOnHandler(this);
|
|||
|
|
//if (_lstHandler.Count > 0)
|
|||
|
|
//{
|
|||
|
|
// reason = "Robot busy, please wait or abort.";
|
|||
|
|
// EV.PostMessage(Name, EventEnum.DefaultWarning, string.Format("{0} {1} {2}", this.Name, handler.Name.ToString(), reason));
|
|||
|
|
|
|||
|
|
// return false;
|
|||
|
|
//}
|
|||
|
|
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(handler);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool VacuumOff(out string reason)
|
|||
|
|
{
|
|||
|
|
reason = string.Empty;
|
|||
|
|
var handler = new VacuumOffHandler(this);
|
|||
|
|
//if (_lstHandler.Count > 0)
|
|||
|
|
//{
|
|||
|
|
// reason = "Robot busy, please wait or abort.";
|
|||
|
|
// EV.PostMessage(Name, EventEnum.DefaultWarning, string.Format("{0} {1} {2}", this.Name, handler.Name.ToString(), reason));
|
|||
|
|
|
|||
|
|
// return false;
|
|||
|
|
//}
|
|||
|
|
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(handler);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool WaferMap(ModuleName target, out string reason)
|
|||
|
|
{
|
|||
|
|
reason = string.Empty;
|
|||
|
|
var handler = new WaferMapHandler(this, target);
|
|||
|
|
if (_lstHandler.Count > 0 && Moving)
|
|||
|
|
{
|
|||
|
|
reason = "Robot busy, please wait or abort.";
|
|||
|
|
EV.PostMessage(Name, EventEnum.DefaultWarning, string.Format("{0} {1} {2}", this.Name, handler.Name.ToString(), reason));
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
SetBusy();
|
|||
|
|
|
|||
|
|
_targetThetaAxisAddressPosition = RobotConvertor.Chamber2ThetaAxisPosition(target);
|
|||
|
|
ThetaAxisAddressPosition = -1;
|
|||
|
|
ZAxisAddressPosition = -1;
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(handler);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
IsThetaBusy = true;
|
|||
|
|
IsZBusy = true;
|
|||
|
|
IsRadialBusy = true;
|
|||
|
|
_motionTimer.Start(0);
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool GetWaferMap(ModuleName target, out string reason)
|
|||
|
|
{
|
|||
|
|
reason = string.Empty;
|
|||
|
|
var handler = new QueryWaferMapHandler(this, target);
|
|||
|
|
SlotMap = string.Empty;
|
|||
|
|
|
|||
|
|
lock (_lockerHandlerList)
|
|||
|
|
{
|
|||
|
|
_lstHandler.AddFirst(handler);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void SetBusy()
|
|||
|
|
{
|
|||
|
|
//IsBusy || IsThetaBusy || IsZBusy || IsRadialBusy
|
|||
|
|
IsBusy = true;
|
|||
|
|
IsThetaBusy = true;
|
|||
|
|
IsZBusy = true;
|
|||
|
|
IsRadialBusy = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
}
|