30 lines
560 B
C#
30 lines
560 B
C#
|
using System;
|
||
|
|
using System.Collections.Generic;
|
||
|
|
using System.Runtime.Serialization;
|
||
|
|
|
||
|
|
namespace Aitex.Sorter.Common
|
||
|
|
{
|
||
|
|
[Serializable]
|
||
|
|
[DataContract]
|
||
|
|
public class WaferHistoryRecipe : WaferHistoryItem
|
||
|
|
{
|
||
|
|
[DataMember]
|
||
|
|
public string Chamber { get; set; }
|
||
|
|
|
||
|
|
[DataMember]
|
||
|
|
public string Recipe { get; set; }
|
||
|
|
|
||
|
|
[DataMember]
|
||
|
|
public string SettingTime { get; set; }
|
||
|
|
|
||
|
|
[DataMember]
|
||
|
|
public string ActualTime { get; set; }
|
||
|
|
|
||
|
|
[DataMember]
|
||
|
|
public List<RecipeStep> Steps { get; set; }
|
||
|
|
|
||
|
|
[DataMember]
|
||
|
|
public List<RecipeStepFdcData> Fdcs { get; set; }
|
||
|
|
}
|
||
|
|
}
|