2023-04-13 11:51:03 +08:00
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.SCCore;
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using Aitex.Sorter.Common;
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using MECF.Framework.Common.Communications;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
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using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Text;
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using System.Text.RegularExpressions;
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using System.Threading;
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using System.Threading.Tasks;
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namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot.HineAutomation
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{
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public abstract class HAtmHandler : HandlerBase
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{
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protected ModuleName _target;
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protected int _slot;
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protected const string EOT = "\r\n";
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protected bool _isBackground;
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protected bool _isSimulator;
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public bool IsBackground { get { return _isBackground; } }
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protected bool _hasResponse;
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public bool HasResponse { get { return _hasResponse; } }
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public HAtmRobot RobotDevice { get; }
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public ModuleName Target => _target;
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public int Slot => _slot;
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protected HAtmHandler(Robot robot)
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: base("")
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{
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RobotDevice = (HAtmRobot)robot;
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_isSimulator = SC.GetValue<bool>("System.IsSimulatorMode");
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}
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public virtual string Package(params object[] args)
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{
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return "";
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}
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public virtual void Update()
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{
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}
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public override bool HandleMessage(MessageBase msg, out bool handled)
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{
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ResponseMessage = msg;
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handled = true;
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return true;
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}
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public string GetBladeTarget(ModuleName target, int slot)
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{
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string bladeTarget = "";
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var from = "";
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var level = "";
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{
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int cassette = 180;
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int cooling = 110;
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int pm = 55;
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if (Math.Abs(RobotDevice.RotateReqPos - cassette) < 10)
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{
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from = $"{ModuleName.LoadLock}";
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}
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if (Math.Abs(RobotDevice.RotateReqPos - cooling) < 10)
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{
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from = $"{ModuleName.Cooling}";
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}
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if (Math.Abs(RobotDevice.RotateReqPos - pm) < 10)
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{
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from = $"{ModuleName.PM}";
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}
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if (Math.Abs(RobotDevice.RotateReqPos) < 10)
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{
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from = $"{ModuleHelper.Converter(RobotDevice.Name)}";
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}
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}
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{
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//int pm = 1600;
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//int cool = 2628;
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if (RobotDevice.ZActPos < 15000)
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{
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if(slot < 8)
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{
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level = "low,low";
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}
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else if(slot > 15)
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{
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level = "low,high";
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}
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else
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{
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level = "low,medium";
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}
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}
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else if(RobotDevice.ZActPos > 30000)
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{
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if (slot < 8)
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{
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level = "high,low";
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}
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else if (slot > 15)
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{
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level = "high,high";
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}
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else
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{
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level = "high,medium";
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}
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}
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else
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{
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if (slot < 8)
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{
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level = "medium,low";
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}
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else if (slot > 15)
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{
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level = "medium,high";
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}
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else
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{
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level = "medium,medium";
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}
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}
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}
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bladeTarget = $"{from}.{level}";
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return bladeTarget;
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}
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}
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public class HomeHandler : HAtmHandler
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{
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private const string Category = "HM";
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public HomeHandler(Robot robot)
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: base(robot)
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{
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Name = "Home";
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_isBackground = false;
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_hasResponse = SC.GetValue<bool>("TMRobot.AllCommandsHaveResponse");
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//if(_isSimulator)
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UpdateBefore();
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}
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public override string Package(params object[] args)
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{
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//A,HM<CR><LF>
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return string.Format($"A,HM{EOT}");
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}
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private void UpdateBefore()
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{
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RobotDevice.Blade1Target = ModuleHelper.Converter(RobotDevice.Name);
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//RobotDevice.CmdBladeTarget = $"{ModuleHelper.Converter(RobotDevice.Name)}.Retract";
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RobotDevice.CmdBlade1Extend = "0";
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}
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public override bool HandleMessage(MessageBase msg, out bool handled)
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{
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// X,HM<CR><LF>
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handled = false;
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var result = msg as HAtmMessage;
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if (!result.IsResponse) return true;
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if (result.IsFormatError || result.Category != Category)
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{
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RobotDevice.SetError(result.Data);
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return true;
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}
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ResponseMessage = msg;
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handled = true;
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return true;
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}
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}
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public class AbortHandler : HAtmHandler
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{
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public AbortHandler(Robot robot)
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: base(robot)
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{
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Name = "Abort";
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_isBackground = false;
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_hasResponse = false;
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}
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public override string Package(params object[] args)
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{
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return string.Format($"D{EOT}");
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}
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}
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public class ResetHandler : HAtmHandler
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{
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private const string Category = "ER";
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public ResetHandler(Robot robot)
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: base(robot)
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{
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Name = "Reset";
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_isBackground = false;
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_hasResponse = SC.GetValue<bool>("TMRobot.AllCommandsHaveResponse");
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}
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public override string Package(params object[] args)
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{
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return string.Format($"S,ER{EOT}");
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}
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public override bool HandleMessage(MessageBase msg, out bool handled)
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{
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// X,ER<CR><LF>
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handled = false;
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var result = msg as HAtmMessage;
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if (!result.IsResponse) return true;
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if (result.IsFormatError || result.Category != Category)
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{
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RobotDevice.SetError(result.Data);
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return true;
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}
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ResponseMessage = msg;
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handled = true;
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return true;
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}
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}
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public class PickHandler : HAtmHandler
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{
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private int _thetaAxis;
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private int _zAxis;
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private Hand blade;
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private const string Category = "PK";
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public PickHandler(Robot robot, ModuleName target, int slot = 0)
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: base(robot)
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{
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Name = "Pick";
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_thetaAxis = RobotConvertor.Chamber2ThetaAxisPosition(target);
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_zAxis = RobotConvertor.ChamberSlot2ZAxisPosition(target, slot);
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_slot = slot;
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_target = target;
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blade = Hand.Blade1;
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_isBackground = false;
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_hasResponse = SC.GetValue<bool>("TMRobot.AllCommandsHaveResponse");
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//if (_isSimulator)
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UpdateBefore();
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}
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public override string Package(params object[] args)
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{
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//A,PK[,tt,zz,at]<CR><LF>
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return string.Format("A,PK,{0:D2},{1:D2}{2}",
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_thetaAxis,
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_zAxis,
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EOT);
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}
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private void UpdateBefore()
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{
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RobotDevice.Blade1Target = _target;
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//RobotDevice.CmdBladeTarget = $"{GetBladeTarget(_target, _slot)}.Picking";
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RobotDevice.CmdBladeTarget = $"{_target}.Picking";
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RobotDevice.CmdBlade1Extend = "1";
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//if (!_isSimulator)
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// WaferManager.Instance.WaferMoved(_target, _slot, ModuleHelper.Converter(RobotDevice.Name), (int)blade);
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}
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public override void Update()
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{
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//if (_isSimulator)
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//{
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// WaferManager.Instance.WaferMoved(_target, _slot, ModuleHelper.Converter(RobotDevice.Name), (int)blade);
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// RobotDevice.CmdBladeTarget = $"{_target}.Retract";
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//}
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//else
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{
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if(WaferManager.Instance.CheckNoWafer(ModuleHelper.Converter(RobotDevice.Name), (int)blade) && WaferManager.Instance.CheckHasWafer(_target, _slot))
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{
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WaferManager.Instance.WaferMoved(_target, _slot, ModuleHelper.Converter(RobotDevice.Name), (int)blade);
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LOG.Info("Wafer move in handler");
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}
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}
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RobotDevice.Blade1Target = ModuleHelper.Converter(RobotDevice.Name);
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}
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public override bool HandleMessage(MessageBase msg, out bool handled)
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{
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// X,PK<CR><LF>
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handled = false;
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var result = msg as HAtmMessage;
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if (!result.IsResponse) return true;
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if (result.IsFormatError || result.Category != Category)
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{
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RobotDevice.SetError(result.Data);
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return true;
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}
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|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class GotoHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private int _thetaAxis;
|
|
|
|
|
|
private int _zAxis;
|
|
|
|
|
|
private Hand blade;
|
|
|
|
|
|
private bool _isPick;
|
|
|
|
|
|
private const string Category = "GO";
|
|
|
|
|
|
private string _up;
|
|
|
|
|
|
|
|
|
|
|
|
public GotoHandler(Robot robot, ModuleName target, int slot = 0, bool isPick = true, bool isUp = true)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "goto";
|
|
|
|
|
|
_thetaAxis = RobotConvertor.Chamber2ThetaAxisPosition(target);
|
|
|
|
|
|
_zAxis = RobotConvertor.ChamberSlot2ZAxisPosition(target, slot);
|
|
|
|
|
|
_slot = slot;
|
|
|
|
|
|
_target = target;
|
|
|
|
|
|
blade = Hand.Blade1;
|
|
|
|
|
|
_isPick = isPick;
|
|
|
|
|
|
_up = isUp ? "U" : "D";
|
|
|
|
|
|
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = SC.GetValue<bool>("TMRobot.AllCommandsHaveResponse");
|
|
|
|
|
|
|
|
|
|
|
|
//if (_isSimulator)
|
|
|
|
|
|
UpdateBefore();
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//A,GO[,rr,tt,zzb]<CR><LF>
|
|
|
|
|
|
return string.Format("A,GO,EX,{0:D2},{1:D2}{2}{3}",
|
|
|
|
|
|
_thetaAxis,
|
|
|
|
|
|
_zAxis,
|
|
|
|
|
|
_up,
|
|
|
|
|
|
EOT);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
private void UpdateBefore()
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.Blade1Target = _target;
|
|
|
|
|
|
|
|
|
|
|
|
//RobotDevice.CmdBladeTarget = $"{_target}.{(_isPick ? "Picking" : "Placing")}";
|
|
|
|
|
|
//RobotDevice.CmdBladeTarget = $"{GetBladeTarget(_target, _slot)}.Extend";
|
|
|
|
|
|
RobotDevice.CmdBladeTarget = $"{_target}.Extend";
|
|
|
|
|
|
RobotDevice.CmdBlade1Extend = "1";
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override void Update()
|
|
|
|
|
|
{
|
|
|
|
|
|
if (!_isPick)
|
|
|
|
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(RobotDevice.Name), (int)blade, _target, _slot);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
// X,GO<CR><LF>
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class ZAxisMoveHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private int _zAxis;
|
|
|
|
|
|
private Hand blade;
|
|
|
|
|
|
private const string Category = "GZ";
|
|
|
|
|
|
private string _up;
|
|
|
|
|
|
private bool _isUp;
|
|
|
|
|
|
|
|
|
|
|
|
public ZAxisMoveHandler(Robot robot, ModuleName target, int slot, bool isUp)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "goto";
|
|
|
|
|
|
_zAxis = RobotConvertor.ChamberSlot2ZAxisPosition(target, slot);
|
|
|
|
|
|
_slot = slot;
|
|
|
|
|
|
_target = target;
|
|
|
|
|
|
blade = Hand.Blade1;
|
|
|
|
|
|
_up = isUp ? "U" : "D";
|
|
|
|
|
|
_isUp = isUp;
|
|
|
|
|
|
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = SC.GetValue<bool>("TMRobot.AllCommandsHaveResponse");
|
|
|
|
|
|
|
|
|
|
|
|
//if (_isSimulator)
|
|
|
|
|
|
UpdateBefore();
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//A,GZ[,zzb]<CR><LF>
|
|
|
|
|
|
return string.Format("A,GZ,{0:D2}{1}{2}",
|
|
|
|
|
|
_zAxis,
|
|
|
|
|
|
_up,
|
|
|
|
|
|
EOT);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
private void UpdateBefore()
|
|
|
|
|
|
{
|
|
|
|
|
|
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override void Update()
|
|
|
|
|
|
{
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
// X,GZ<CR><LF>
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class PlaceRetractHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private int _thetaAxis;
|
|
|
|
|
|
private int _zAxis;
|
|
|
|
|
|
//private Hand blade;
|
|
|
|
|
|
private const string Category = "GO";
|
|
|
|
|
|
|
|
|
|
|
|
public PlaceRetractHandler(Robot robot, ModuleName target, int slot = 0)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "PlaceRetract";
|
|
|
|
|
|
_thetaAxis = RobotConvertor.Chamber2ThetaAxisPosition(target);
|
|
|
|
|
|
_zAxis = RobotConvertor.ChamberSlot2ZAxisPosition(target, slot);
|
|
|
|
|
|
_slot = slot;
|
|
|
|
|
|
_target = target;
|
|
|
|
|
|
//blade = Hand.Blade1;
|
|
|
|
|
|
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = SC.GetValue<bool>("TMRobot.AllCommandsHaveResponse");
|
|
|
|
|
|
|
|
|
|
|
|
//if (_isSimulator)
|
|
|
|
|
|
UpdateBefore();
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//A,GO[,rr,tt,zzb]<CR><LF>
|
|
|
|
|
|
return string.Format("A,GO,RE,{0:D2},{1:D2}U{2}",
|
|
|
|
|
|
_thetaAxis,
|
|
|
|
|
|
_zAxis,
|
|
|
|
|
|
EOT);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
private void UpdateBefore()
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.Blade1Target = ModuleHelper.Converter(RobotDevice.Name);
|
|
|
|
|
|
|
|
|
|
|
|
RobotDevice.CmdBladeTarget = $"{_target}.PlaceRetract";
|
|
|
|
|
|
RobotDevice.CmdBlade1Extend = "0";
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override void Update()
|
|
|
|
|
|
{
|
|
|
|
|
|
//WaferManager.Instance.WaferMoved(ModuleHelper.Converter(RobotDevice.Name), (int)blade, _target, _slot);
|
|
|
|
|
|
|
|
|
|
|
|
//if (_isSimulator)
|
|
|
|
|
|
{
|
|
|
|
|
|
//RobotDevice.Blade1Target = ModuleHelper.Converter(RobotDevice.Name);
|
|
|
|
|
|
|
|
|
|
|
|
//RobotDevice.CmdBladeTarget = $"{_target}.Retract";
|
|
|
|
|
|
//RobotDevice.CmdBlade1Extend = "0";
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
// X,GO<CR><LF>
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class PickRetractHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private int _thetaAxis;
|
|
|
|
|
|
private int _zAxis;
|
|
|
|
|
|
private Hand blade;
|
|
|
|
|
|
private const string Category = "GO";
|
|
|
|
|
|
private bool _isNeedWaferMove;
|
|
|
|
|
|
|
|
|
|
|
|
public PickRetractHandler(Robot robot, ModuleName target, int slot = 0, bool isNeedWaferMove = true)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "PickRetract";
|
|
|
|
|
|
_thetaAxis = RobotConvertor.Chamber2ThetaAxisPosition(target);
|
|
|
|
|
|
_zAxis = RobotConvertor.ChamberSlot2ZAxisPosition(target, slot);
|
|
|
|
|
|
_slot = slot;
|
|
|
|
|
|
_target = target;
|
|
|
|
|
|
blade = Hand.Blade1;
|
|
|
|
|
|
|
|
|
|
|
|
_isNeedWaferMove = isNeedWaferMove;
|
|
|
|
|
|
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = SC.GetValue<bool>("TMRobot.AllCommandsHaveResponse");
|
|
|
|
|
|
|
|
|
|
|
|
//if (_isSimulator)
|
|
|
|
|
|
UpdateBefore();
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//A,GO[,rr,tt,zzb]<CR><LF>
|
|
|
|
|
|
return string.Format("A,GO,RE,{0:D2},{1:D2}U{2}",
|
|
|
|
|
|
_thetaAxis,
|
|
|
|
|
|
_zAxis,
|
|
|
|
|
|
EOT);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
private void UpdateBefore()
|
|
|
|
|
|
{
|
|
|
|
|
|
if(_isNeedWaferMove)
|
|
|
|
|
|
WaferManager.Instance.WaferMoved(_target, _slot, ModuleHelper.Converter(RobotDevice.Name), (int)blade);
|
|
|
|
|
|
RobotDevice.Blade1Target = ModuleHelper.Converter(RobotDevice.Name);
|
|
|
|
|
|
|
|
|
|
|
|
RobotDevice.CmdBladeTarget = $"{_target}.PickRetract";
|
|
|
|
|
|
RobotDevice.CmdBlade1Extend = "0";
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override void Update()
|
|
|
|
|
|
{
|
|
|
|
|
|
//WaferManager.Instance.WaferMoved(_target, _slot, ModuleHelper.Converter(RobotDevice.Name), (int)blade);
|
|
|
|
|
|
|
|
|
|
|
|
//if (_isSimulator)
|
|
|
|
|
|
{
|
|
|
|
|
|
//RobotDevice.Blade1Target = ModuleHelper.Converter(RobotDevice.Name);
|
|
|
|
|
|
|
|
|
|
|
|
//RobotDevice.CmdBladeTarget = $"{_target}.Retract";
|
|
|
|
|
|
//RobotDevice.CmdBlade1Extend = "0";
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
// X,GO<CR><LF>
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class PlaceHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private int _thetaAxis;
|
|
|
|
|
|
private int _zAxis;
|
|
|
|
|
|
private Hand blade;
|
|
|
|
|
|
private const string Category = "PL";
|
|
|
|
|
|
|
|
|
|
|
|
public PlaceHandler(Robot robot, ModuleName target, int slot = 0)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "Place";
|
|
|
|
|
|
_thetaAxis = RobotConvertor.Chamber2ThetaAxisPosition(target);
|
|
|
|
|
|
_zAxis = RobotConvertor.ChamberSlot2ZAxisPosition(target, slot);
|
|
|
|
|
|
_slot = slot;
|
|
|
|
|
|
_target = target;
|
|
|
|
|
|
blade = Hand.Blade1;
|
|
|
|
|
|
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = SC.GetValue<bool>("TMRobot.AllCommandsHaveResponse");
|
|
|
|
|
|
|
|
|
|
|
|
//if (_isSimulator)
|
|
|
|
|
|
UpdateBefore();
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//A,PL[,tt,zz,at]<CR><LF>
|
|
|
|
|
|
return string.Format("A,PL,{0:D2},{1:D2}{2}",
|
|
|
|
|
|
_thetaAxis,
|
|
|
|
|
|
_zAxis,
|
|
|
|
|
|
EOT);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
private void UpdateBefore()
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.Blade1Target = _target;
|
|
|
|
|
|
|
|
|
|
|
|
//RobotDevice.CmdBladeTarget = $"{GetBladeTarget(_target, _slot)}.Placing";
|
|
|
|
|
|
RobotDevice.CmdBladeTarget = $"{_target}.Placing";
|
|
|
|
|
|
RobotDevice.CmdBlade1Extend = "1";
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override void Update()
|
|
|
|
|
|
{
|
|
|
|
|
|
if(WaferManager.Instance.CheckHasWafer(ModuleHelper.Converter(RobotDevice.Name), (int)blade) && WaferManager.Instance.CheckNoWafer(_target, _slot))
|
|
|
|
|
|
{
|
|
|
|
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(RobotDevice.Name), (int)blade, _target, _slot);
|
|
|
|
|
|
LOG.Info("Wafer move in handler");
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
//if (_isSimulator)
|
|
|
|
|
|
//{
|
|
|
|
|
|
// RobotDevice.CmdBladeTarget = $"{_target}.Retract";
|
|
|
|
|
|
//}
|
|
|
|
|
|
|
|
|
|
|
|
RobotDevice.Blade1Target = ModuleHelper.Converter(RobotDevice.Name);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
// X,PL<CR><LF>
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class VacuumOnHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private const string Category = "VY";
|
|
|
|
|
|
public VacuumOnHandler(Robot robot)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "vacuum on";
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = SC.GetValue<bool>("TMRobot.AllCommandsHaveResponse");
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//A,VY<CR><LF>
|
|
|
|
|
|
return string.Format("A,VY{0}",
|
|
|
|
|
|
EOT);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
private void UpdateBefore()
|
|
|
|
|
|
{
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override void Update()
|
|
|
|
|
|
{
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
// X,VY<CR><LF>
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class VacuumOffHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private const string Category = "VN";
|
|
|
|
|
|
public VacuumOffHandler(Robot robot)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "vacuum off";
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = SC.GetValue<bool>("TMRobot.AllCommandsHaveResponse");
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//A,VN<CR><LF>
|
|
|
|
|
|
return string.Format("A,VN{0}",
|
|
|
|
|
|
EOT);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
private void UpdateBefore()
|
|
|
|
|
|
{
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override void Update()
|
|
|
|
|
|
{
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
// X,VN<CR><LF>
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class SetThetaSpeedHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private int _speed;
|
|
|
|
|
|
private int _acceleration;
|
|
|
|
|
|
private const string Category = "MH";
|
|
|
|
|
|
public SetThetaSpeedHandler(Robot robot, int speed, int acceleration)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "set speed";
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = SC.GetValue<bool>("TMRobot.AllCommandsHaveResponse");
|
|
|
|
|
|
_speed = speed;
|
|
|
|
|
|
_acceleration = acceleration;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//S,MH,a,xx,yy<CR><LF>
|
|
|
|
|
|
//xx = Percentage of maximum allowed acceleration.
|
|
|
|
|
|
//yy = Percentage of maximum allowed speed
|
|
|
|
|
|
//a T(Theta) or Z(Up/ Down), or R(Reach)
|
|
|
|
|
|
var command = "S,MH,T," + _speed.ToString("D2") + "," + _acceleration.ToString("D2");
|
|
|
|
|
|
return string.Format("{0}{1}", command,
|
|
|
|
|
|
EOT);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
private void UpdateBefore()
|
|
|
|
|
|
{
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override void Update()
|
|
|
|
|
|
{
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
// X,MH<CR><LF>
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class SetReachSpeedHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private int _speed;
|
|
|
|
|
|
private int _acceleration;
|
|
|
|
|
|
private const string Category = "MH";
|
|
|
|
|
|
public SetReachSpeedHandler(Robot robot, int speed, int acceleration)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "set speed";
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = SC.GetValue<bool>("TMRobot.AllCommandsHaveResponse");
|
|
|
|
|
|
_speed = speed;
|
|
|
|
|
|
_acceleration = acceleration;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//S,MH,a,xx,yy<CR><LF>
|
|
|
|
|
|
//xx = Percentage of maximum allowed acceleration.
|
|
|
|
|
|
//yy = Percentage of maximum allowed speed
|
|
|
|
|
|
//a T(Theta) or Z(Up/ Down), or R(Reach)
|
|
|
|
|
|
var command = "S,MH,R," + _speed.ToString("D2") + "," + _acceleration.ToString("D2");
|
|
|
|
|
|
return string.Format("{0}{1}", command,
|
|
|
|
|
|
EOT);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
private void UpdateBefore()
|
|
|
|
|
|
{
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override void Update()
|
|
|
|
|
|
{
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
// X,MH<CR><LF>
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class QueryAllAxisStatusHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private const string Retract = "RE";
|
|
|
|
|
|
private const string Up = "U";
|
|
|
|
|
|
private const string Category = "AA";
|
|
|
|
|
|
//private bool _isUp;
|
|
|
|
|
|
public QueryAllAxisStatusHandler(Robot robot)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "QueryAllAxisStatus";
|
|
|
|
|
|
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//R,AA <CR> <LF>
|
|
|
|
|
|
return string.Format($"R,AA{EOT}");
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
//aabbccd X,AA,RE0000d
|
|
|
|
|
|
//aa = RE(Radial Axis Retract0 or EX(Extended)
|
|
|
|
|
|
//bb = Theta Axis Address Position (01-15)
|
|
|
|
|
|
//cc = Z Axis Address Position (01-99)
|
|
|
|
|
|
//d = U(Up) or D(Dn)
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category || result.MessagePart.Length < 1 || result.MessagePart[0].Length != 7)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
string aa = result.MessagePart[0].Substring(0, 2);
|
|
|
|
|
|
string bb = result.MessagePart[0].Substring(2, 2);
|
|
|
|
|
|
string cc = result.MessagePart[0].Substring(4, 2);
|
|
|
|
|
|
string d = result.MessagePart[0].Substring(6, 1);
|
|
|
|
|
|
if (aa == Retract)
|
|
|
|
|
|
RobotDevice.IsRetract = true;
|
|
|
|
|
|
else
|
|
|
|
|
|
RobotDevice.IsRetract = false;
|
|
|
|
|
|
|
|
|
|
|
|
int.TryParse(bb, out int thetaAxisAddressPosition);
|
|
|
|
|
|
RobotDevice.ThetaAxisAddressPosition = thetaAxisAddressPosition;
|
|
|
|
|
|
int.TryParse(cc, out int zAxisAddressPosition);
|
|
|
|
|
|
RobotDevice.ZAxisAddressPosition = zAxisAddressPosition;
|
|
|
|
|
|
|
|
|
|
|
|
if (d.ToUpper() == Up)
|
|
|
|
|
|
RobotDevice.IsUp = true;
|
|
|
|
|
|
else
|
|
|
|
|
|
RobotDevice.IsUp = false;
|
|
|
|
|
|
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class QueryThetaAxisStatusHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private const string Retract = "RE";
|
|
|
|
|
|
private const string Up = "U";
|
|
|
|
|
|
private const string Category = "TA";
|
|
|
|
|
|
private const string Busy = "B";
|
|
|
|
|
|
private const string Referenced = "R";
|
|
|
|
|
|
//private bool _isUp;
|
|
|
|
|
|
public QueryThetaAxisStatusHandler(Robot robot)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "QueryThetaAxisStatus";
|
|
|
|
|
|
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//R,TA <CR> <LF>
|
|
|
|
|
|
return string.Format($"R,TA{EOT}");
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
//X,TA,abccdde<CR><LF>
|
|
|
|
|
|
//a = B (Busy) or R (Ready)
|
|
|
|
|
|
//b = R (Referenced) or U (Unreferenced)
|
|
|
|
|
|
//cc = Current Position
|
|
|
|
|
|
//dd = Command Address Position
|
|
|
|
|
|
//e = X (Overcurrent Latch Set) or (Not Set)
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category || result.MessagePart.Length < 1 || result.MessagePart[0].Length < 7)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
string a = result.MessagePart[0].Substring(0, 1);
|
|
|
|
|
|
string b = result.MessagePart[0].Substring(1, 1);
|
|
|
|
|
|
string cc = result.MessagePart[0].Substring(2, 2);
|
|
|
|
|
|
string dd = result.MessagePart[0].Substring(4, 2);
|
|
|
|
|
|
string e = result.MessagePart[0].Substring(6, 1);
|
|
|
|
|
|
if (a == Busy)
|
|
|
|
|
|
RobotDevice.IsThetaBusy = true;
|
|
|
|
|
|
else
|
|
|
|
|
|
RobotDevice.IsThetaBusy = false;
|
|
|
|
|
|
|
|
|
|
|
|
if (RobotDevice.IsHomed)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.IsRotationAxisUnreferencedTrig.CLK = b.ToUpper() == "U";
|
|
|
|
|
|
if (RobotDevice.IsRotationAxisUnreferencedTrig.Q)
|
|
|
|
|
|
{
|
|
|
|
|
|
EV.PostAlarmLog(RobotDevice.Module, "Rotation axis is unreferenced, please repair it");
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class QueryZAxisStatusHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private const string Retract = "RE";
|
|
|
|
|
|
private const string Up = "U";
|
|
|
|
|
|
private const string Category = "ZA";
|
|
|
|
|
|
private const string Busy = "B";
|
|
|
|
|
|
private const string Referenced = "R";
|
|
|
|
|
|
//private bool _isUp;
|
|
|
|
|
|
public QueryZAxisStatusHandler(Robot robot)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "QueryZAxisStatus";
|
|
|
|
|
|
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//R,ZA <CR> <LF>
|
|
|
|
|
|
return string.Format($"R,ZA{EOT}");
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
//X,TA,abccdde<CR><LF>
|
|
|
|
|
|
//X,ZA,abccdeefg<CR><LF>
|
|
|
|
|
|
//a = B (Busy) or R (Ready)
|
|
|
|
|
|
//b = R (Referenced) or U (Unreferenced)
|
|
|
|
|
|
//cc = Current Position
|
|
|
|
|
|
//dd = Command Address Position
|
|
|
|
|
|
//e = X (Overcurrent Latch Set) or (Not Set)
|
|
|
|
|
|
//f U(Up) or D(Down) Command
|
|
|
|
|
|
//g = X (Overcurrent Latch Set) or (Space) (Not Set)
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category || result.MessagePart.Length < 1 || result.MessagePart[0].Length < 9)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
string a = result.MessagePart[0].Substring(0, 1);
|
|
|
|
|
|
string b = result.MessagePart[0].Substring(1, 1);
|
|
|
|
|
|
string cc = result.MessagePart[0].Substring(2, 2);
|
|
|
|
|
|
string dd = result.MessagePart[0].Substring(4, 2);
|
|
|
|
|
|
string e = result.MessagePart[0].Substring(6, 1);
|
|
|
|
|
|
string f = result.MessagePart[0].Substring(7, 1);
|
|
|
|
|
|
string g = result.MessagePart[0].Substring(8, 1);
|
|
|
|
|
|
if (a == Busy)
|
|
|
|
|
|
RobotDevice.IsZBusy = true;
|
|
|
|
|
|
else
|
|
|
|
|
|
RobotDevice.IsZBusy = false;
|
|
|
|
|
|
|
|
|
|
|
|
if (RobotDevice.IsHomed)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.IsZAxisUnreferencedTrig.CLK = b.ToUpper() == "U";
|
|
|
|
|
|
if (RobotDevice.IsZAxisUnreferencedTrig.Q)
|
|
|
|
|
|
{
|
|
|
|
|
|
EV.PostAlarmLog(RobotDevice.Module, "Z axis is unreferenced, please repair it");
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class QueryRadialAxisStatusHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private const string Retract = "RE";
|
|
|
|
|
|
private const string Up = "U";
|
|
|
|
|
|
private const string Category = "RA";
|
|
|
|
|
|
private const string Busy = "B";
|
|
|
|
|
|
private const string Referenced = "R";
|
|
|
|
|
|
//private bool _isUp;
|
|
|
|
|
|
public QueryRadialAxisStatusHandler(Robot robot)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "QueryRadialAxisStatus";
|
|
|
|
|
|
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//R,RA <CR> <LF>
|
|
|
|
|
|
return string.Format($"R,RA{EOT}");
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
//X,RA,abccdde<CR><LF>
|
|
|
|
|
|
//a = B (Busy) or R (Ready)
|
|
|
|
|
|
//b = R (Referenced) or U (Unreferenced)
|
|
|
|
|
|
//cc = Current Position(RE = retract, EX = extend)
|
|
|
|
|
|
//dd = Command Address Position(RE = retract, EX = extend)
|
|
|
|
|
|
//e = X (Overcurrent Latch Set) or (Not Set)
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category || result.MessagePart.Length < 1 || result.MessagePart[0].Length < 7)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
string a = result.MessagePart[0].Substring(0, 1);
|
|
|
|
|
|
string b = result.MessagePart[0].Substring(1, 1);
|
|
|
|
|
|
string cc = result.MessagePart[0].Substring(2, 2);
|
|
|
|
|
|
string dd = result.MessagePart[0].Substring(4, 2);
|
|
|
|
|
|
string e = result.MessagePart[0].Substring(6, 1);
|
|
|
|
|
|
if (a == Busy)
|
|
|
|
|
|
RobotDevice.IsRadialBusy = true;
|
|
|
|
|
|
else
|
|
|
|
|
|
RobotDevice.IsRadialBusy = false;
|
|
|
|
|
|
|
|
|
|
|
|
if (cc == Retract)
|
|
|
|
|
|
RobotDevice.IsRetract = true;
|
|
|
|
|
|
else
|
|
|
|
|
|
RobotDevice.IsRetract = false;
|
|
|
|
|
|
|
|
|
|
|
|
if(RobotDevice.IsHomed)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.IsExtensionAxisUnreferencedTrig.CLK = b.ToUpper() == "U";
|
|
|
|
|
|
if (RobotDevice.IsExtensionAxisUnreferencedTrig.Q)
|
|
|
|
|
|
{
|
|
|
|
|
|
EV.PostAlarmLog(RobotDevice.Module, "Extension axis is unreferenced, please repair it");
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class QueryErrorHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private const string Category = "ER";
|
|
|
|
|
|
public QueryErrorHandler(Robot robot)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "QueryError";
|
|
|
|
|
|
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//R,ER <CR> <LF>
|
|
|
|
|
|
return string.Format("R,ER{0}", EOT);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
//aa,bb,…..zz X,ER,OK
|
|
|
|
|
|
//aa = first error code
|
|
|
|
|
|
//bb = second error code
|
|
|
|
|
|
//etc… All current error codes will be returned.
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category || result.MessagePart.Length < 1)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
if(result.MessagePart[0] == "OK")
|
|
|
|
|
|
{
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
string error = string.Join(",", result.MessagePart);
|
|
|
|
|
|
|
|
|
|
|
|
EV.PostAlarmLog(RobotDevice.Name, $"{RobotDevice.Name} error, error code({error}):{(RobotDevice.ErrorCodeReference.ContainsKey(error) ? RobotDevice.ErrorCodeReference[error] : "")}");
|
|
|
|
|
|
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class QueryOperationalStatusHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private const string Error = "E";
|
|
|
|
|
|
private const string Busy = "B";
|
|
|
|
|
|
private const string Referenced = "R";
|
|
|
|
|
|
private const string DataValid = "V";
|
|
|
|
|
|
private const string LastCommandSuccessful = "S";
|
|
|
|
|
|
private const string WaferPresent = "Y";
|
|
|
|
|
|
private const string OvercurrentShutdownPresent = "X";
|
|
|
|
|
|
private const string CassettePortChange = "C";
|
|
|
|
|
|
private const string Category = "OS";
|
|
|
|
|
|
public QueryOperationalStatusHandler(Robot robot)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "QueryOperationalStatus";
|
|
|
|
|
|
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//R,OS <CR> <LF>
|
|
|
|
|
|
return string.Format($"R,OS{EOT}");
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
//abcdeeffgghijkl "X,OS, RRVHM UN C"
|
|
|
|
|
|
//a = E (Error Present) or space (No Error Present)
|
|
|
|
|
|
//b = B (Busy) or R (Ready)
|
|
|
|
|
|
//c = R (All Axes Referenced) or space (Not All Referenced)
|
|
|
|
|
|
//d = V (Data Valid) or space (Data Not Valid)
|
|
|
|
|
|
//ee = Last/Current Action Category
|
2023-05-19 11:32:08 +08:00
|
|
|
|
//FeedBack = Theta Address of High Level Command
|
2023-04-13 11:51:03 +08:00
|
|
|
|
//gg = Z-Address of High Level Command
|
|
|
|
|
|
//h = S (Last Command Successful) or U (Unsuccessful)
|
|
|
|
|
|
//I = Y (Wafer Present on End Effector) or N (Not Present)
|
|
|
|
|
|
//J = X (Overcurrent Shutdown Present) or space (Not Present)
|
|
|
|
|
|
//K = C (Cassette Port Change) or space (no change)
|
|
|
|
|
|
//L = Mapping sensor status
|
|
|
|
|
|
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category || result.MessagePart.Length < 1 ||
|
|
|
|
|
|
(result.MessagePart[0].Length != 14 && result.MessagePart[0].Length != 15))
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.RawMessage );
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
string a = result.MessagePart[0].Substring(0, 1);
|
|
|
|
|
|
string b = result.MessagePart[0].Substring(1, 1);
|
|
|
|
|
|
string c = result.MessagePart[0].Substring(2, 1);
|
|
|
|
|
|
string d = result.MessagePart[0].Substring(3, 1);
|
|
|
|
|
|
string ee = result.MessagePart[0].Substring(4, 2);
|
|
|
|
|
|
string ff = result.MessagePart[0].Substring(6, 2);
|
|
|
|
|
|
string gg = result.MessagePart[0].Substring(8, 2);
|
|
|
|
|
|
string h = result.MessagePart[0].Substring(10, 1);
|
|
|
|
|
|
string i = result.MessagePart[0].Substring(11, 1);
|
|
|
|
|
|
string j = result.MessagePart[0].Substring(12, 1);
|
|
|
|
|
|
string k = result.MessagePart[0].Substring(13, 1);
|
|
|
|
|
|
string l = string.Empty;
|
|
|
|
|
|
if (result.MessagePart[0].Length > 14)
|
|
|
|
|
|
l = result.MessagePart[0].Substring(14, 1);
|
|
|
|
|
|
|
|
|
|
|
|
if (a == Error)
|
|
|
|
|
|
RobotDevice.SetError($"{result.RawMessage}");
|
|
|
|
|
|
|
|
|
|
|
|
if (b == Busy)
|
|
|
|
|
|
RobotDevice.IsBusy = true;
|
|
|
|
|
|
else
|
|
|
|
|
|
RobotDevice.IsBusy = false; ;
|
|
|
|
|
|
|
|
|
|
|
|
if (i == WaferPresent)
|
|
|
|
|
|
RobotDevice.WaferPresentOnBlade1 = true;
|
|
|
|
|
|
else
|
|
|
|
|
|
RobotDevice.WaferPresentOnBlade1 = false;
|
|
|
|
|
|
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class QueryPositionHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private const string Category = "GP";
|
|
|
|
|
|
public QueryPositionHandler(Robot robot)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "QueryPosition";
|
|
|
|
|
|
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//R,GP <CR> <LF>
|
|
|
|
|
|
return string.Format($"R,GP{EOT}");
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
//X,GP,0,11118,1149,0,11118,1149<CR><LF>
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category || result.MessagePart.Length != 6)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
string rReqPos = result.MessagePart[0];//retract
|
|
|
|
|
|
string tReqPos = result.MessagePart[1];//rotate
|
|
|
|
|
|
string zReqPos = result.MessagePart[2];//z
|
|
|
|
|
|
string rActPos = result.MessagePart[3];
|
|
|
|
|
|
string tActPos = result.MessagePart[4];
|
|
|
|
|
|
string zActPos = result.MessagePart[5];
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
int.TryParse(rReqPos, out int pos);
|
|
|
|
|
|
RobotDevice.RetractReqPos = pos;
|
|
|
|
|
|
|
|
|
|
|
|
int.TryParse(tReqPos, out pos);
|
|
|
|
|
|
RobotDevice.RotateReqPos = pos/100;//deg
|
|
|
|
|
|
|
|
|
|
|
|
int.TryParse(zReqPos, out pos);
|
|
|
|
|
|
RobotDevice.ZReqPos = pos;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class QuerySpeedHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private const string Category = "SS";
|
|
|
|
|
|
public QuerySpeedHandler(Robot robot)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "QuerySpeed";
|
|
|
|
|
|
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//R,SS <CR> <LF>
|
|
|
|
|
|
return string.Format($"R,SS{EOT}");
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
// X,SS,rAccel,rVel, tAccel, tVel, zAccel, zVel<CR><LF>
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category || result.MessagePart.Length != 6)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
string rAccel = result.MessagePart[0];
|
|
|
|
|
|
string rVel = result.MessagePart[1];
|
|
|
|
|
|
string tAccel = result.MessagePart[2];
|
|
|
|
|
|
string tVel = result.MessagePart[3];
|
|
|
|
|
|
string zAccel = result.MessagePart[4];
|
|
|
|
|
|
string zVel = result.MessagePart[5];
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class SetCommandResponseHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private const string Category = "RR";
|
|
|
|
|
|
public SetCommandResponseHandler(Robot robot)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "SetCommandResponse";
|
|
|
|
|
|
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = SC.GetValue<bool>("TMRobot.AllCommandsHaveResponse");
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//S,RR <CR> <LF>
|
|
|
|
|
|
return string.Format($"S,{Category},Y{EOT}");
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
// X,RR<CR><LF>
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class QueryWaferMapHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private const string Category = "MP";
|
|
|
|
|
|
private int _thetaAxis;
|
|
|
|
|
|
public QueryWaferMapHandler(Robot robot, ModuleName target)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "QueryWaferMap";
|
|
|
|
|
|
_thetaAxis = RobotConvertor.Chamber2ThetaAxisPosition(target);
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//R,MP,tt<CR><LF>
|
|
|
|
|
|
return string.Format("R,MP,{0:D2}{1}",
|
|
|
|
|
|
_thetaAxis,
|
|
|
|
|
|
EOT);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
//X,MP,tt,xxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxxx<CR><LF>
|
|
|
|
|
|
//0= No wafer
|
|
|
|
|
|
//1= wafer present
|
|
|
|
|
|
//2=double wafer
|
|
|
|
|
|
//X=cross slotted wafer
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category || result.MessagePart == null && result.MessagePart.Length < 2)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
RobotDevice.SlotMap = string.Empty;
|
|
|
|
|
|
foreach(var item in result.MessagePart[1])
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SlotMap += item;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public class WaferMapHandler : HAtmHandler
|
|
|
|
|
|
{
|
|
|
|
|
|
private const string Category = "MP";
|
|
|
|
|
|
private int _thetaAxis;
|
|
|
|
|
|
public WaferMapHandler(Robot robot, ModuleName target)
|
|
|
|
|
|
: base(robot)
|
|
|
|
|
|
{
|
|
|
|
|
|
Name = "WaferMap";
|
|
|
|
|
|
_thetaAxis = RobotConvertor.Chamber2ThetaAxisPosition(target);
|
|
|
|
|
|
_isBackground = false;
|
|
|
|
|
|
_hasResponse = SC.GetValue<bool>("TMRobot.AllCommandsHaveResponse");
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override string Package(params object[] args)
|
|
|
|
|
|
{
|
|
|
|
|
|
//A,MP,tt<CR><LF>
|
|
|
|
|
|
return string.Format("A,MP,{0:D2}{1}",
|
|
|
|
|
|
_thetaAxis,
|
|
|
|
|
|
EOT);
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
public override bool HandleMessage(MessageBase msg, out bool handled)
|
|
|
|
|
|
{
|
|
|
|
|
|
//X,MP,tt<CR><LF>
|
|
|
|
|
|
handled = false;
|
|
|
|
|
|
var result = msg as HAtmMessage;
|
|
|
|
|
|
if (!result.IsResponse) return true;
|
|
|
|
|
|
|
|
|
|
|
|
if (result.IsFormatError || result.Category != Category)
|
|
|
|
|
|
{
|
|
|
|
|
|
RobotDevice.SetError(result.Data);
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
|
|
|
|
|
|
ResponseMessage = msg;
|
|
|
|
|
|
handled = true;
|
|
|
|
|
|
|
|
|
|
|
|
return true;
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
|
|
|
|
|
}
|
