1235 lines
43 KiB
C#
1235 lines
43 KiB
C#
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using Aitex.Core.Common;
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using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Fsm;
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using Aitex.Core.RT.OperationCenter;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.Event;
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using MECF.Framework.Common.SubstrateTrackings;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.OcrReaders;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
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using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Text;
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using System.Threading.Tasks;
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namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.AlignersBase
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{
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public abstract class AlignerBaseDevice : Entity, IDevice, IEntity
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{
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protected bool IsSimulatorMode
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{
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get
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{
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if (SC.ContainsItem("System.IsSimulatorMode"))
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return SC.GetValue<bool>("System.IsSimulatorMode");
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return false;
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}
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}
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private OCRReaderBaseDevice[] _ocrs;
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public OCRReaderBaseDevice[] OCRs
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{
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get => _ocrs;
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set
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{
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_ocrs = value;
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foreach(var ocr in _ocrs)
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{
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if(ocr!=null)
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ocr.InstalledModule = RobotModuleName;
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}
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}
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}
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public event Action<bool> ActionDone;
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public event Action<string, AlarmEventItem> OnDeviceAlarmStateChanged;
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public bool HasAlarm { get; }
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public bool IsBusy { get; set; }
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public string ErrorCode { get; set; } = "";
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public virtual bool IsReady()
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{
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return AlignerState == AlignerStateEnum.Idle && !IsBusy;
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}
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public object[] CurrentParamter { get; private set; }
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public bool IsOnline { get; set; }
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public WaferSize Size
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{
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get; set;
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} = WaferSize.WS12;
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public virtual int AlginerSpeedSetPoint
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{
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get
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{
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if (SC.ContainsItem($"Aligner.{RobotModuleName}.AlignSpeed"))
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return SC.GetValue<int>($"Aligner.{RobotModuleName}.AlignSpeed");
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return 100;
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}
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set
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{
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if (SC.ContainsItem($"Aligner.{RobotModuleName}.AlignSpeed"))
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SC.SetItemValue($"Aligner.{RobotModuleName}.AlignSpeed", value);
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}
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}
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public virtual WaferSize GetCurrentWaferSize()
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{
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return Size;
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}
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public virtual double CompensationAngleValue
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{
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get
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{
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if (SC.ContainsItem($"Aligner.{Name}.CompensationAngle"))
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return SC.GetValue<double>($"Aligner.{Name}.CompensationAngle");
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return 0;
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}
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}
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public virtual bool IsGripperHoldWafer { get; set; }
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public bool IsIdle
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{
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get
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{
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return fsm.State == (int)AlignerStateEnum.Idle && fsm.CheckExecuted() && !IsBusy;
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}
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}
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public bool IsError
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{
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get
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{
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return fsm.State == (int)AlignerStateEnum.Error;
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}
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}
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public bool IsInit
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{
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get
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{
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return fsm.State == (int)AlignerStateEnum.Init;
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}
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}
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public double CurrentNotch { get; set; }
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public int SpeedAxis1 { set; get; }
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public int SpeedAxis2 { set; get; }
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public int SpeedAxis3 { set; get; }
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public int SpeedAxis4 { set; get; }
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public int SpeedAxis5 { set; get; }
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public int SpeedAxis6 { set; get; }
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public float PositionAxis1 { get; set; }
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public float PositionAxis2 { get; set; }
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public float PositionAxis3 { get; set; }
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public float PositionAxis4 { get; set; }
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public float PositionAxis5 { get; set; }
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public float PositionAxis6 { get; set; }
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public int AlignerCommandTimeout { get; private set; }
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public virtual int TimeLimitAlignWafer
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{
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get
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{
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if (SC.ContainsItem($"Aligner.{Name}.TimeLimitForAlignWafer"))
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return SC.GetValue<int>($"Aligner.{Name}.TimeLimitForAlignWafer");
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return 90;
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}
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}
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public virtual int TimeLimitAlignerHome
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{
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get
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{
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if (SC.ContainsItem($"Aligner.{Name}.TimeLimitAlignerHome"))
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return SC.GetValue<int>($"Aligner.{Name}.TimeLimitAlignerHome");
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return 30;
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}
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}
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public virtual int TimeLimitReadOcr
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{
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get
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{
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if (SC.ContainsItem($"Aligner.{Name}.TimeLimitReadOCR"))
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return SC.GetValue<int>($"Aligner.{Name}.TimeLimitReadOCR");
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return 180;
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}
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}
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public virtual int TimeLimitVerifyOcr
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{
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get
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{
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if (SC.ContainsItem($"Aligner.{Name}.TimeLimitVerifyOCR"))
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return SC.GetValue<int>($"Aligner.{Name}.TimeLimitVerifyOCR");
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return 5;
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}
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}
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public enum AlignerMsg
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{
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Reset,
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Clear,
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ResetToReady,
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Stop,
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StartInit,
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InitComplete,
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StartHome,
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HomeComplete,
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ERROR,
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ActionDone,
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Abort,
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StartMaintenance,
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CompleteMaintenance,
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ReadData,
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SetParameters,
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SetParametersComplete,
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Grip,
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GripComplete,
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UnGrip,
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UnGripComplete,
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LiftUp,
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LiftUpComplete,
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LiftDown,
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LiftDownComplete,
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Align,
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AlignComplete,
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PrepareAccept,
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PrepareAcceptComplete,
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}
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protected AlignerBaseDevice(string module, string name)
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: base()
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{
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Module = module;
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Name = name;
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RobotModuleName = (ModuleName)Enum.Parse(typeof(ModuleName), Name);
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InitializeRobot();
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}
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public string EventAlignerStartAlign { get => RobotModuleName.ToString() + "StartAligning"; }
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public string EventAlignerCompleteAlign { get => RobotModuleName.ToString() + "CompleteAligning"; }
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public string AlarmAlignFailed { get => RobotModuleName.ToString() + "AligningFailed"; }
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public string AlarmAlignTimeout { get => RobotModuleName.ToString() + "AligningTimeout"; }
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public string AlarmVerifyLaserMarkFailed { get => RobotModuleName.ToString() + "VerifyLaserMarkFailed"; }
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public string AlarmVerifyLaserMarkSlotNoFailed { get => RobotModuleName.ToString() + "VerifyLaserMarkSlotNoFailed"; }
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public string AlarmVerifyLaserMarkLengthFailed { get => RobotModuleName.ToString() + "VerifyLaserMarkLengthFailed"; }
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public string AlarmVerifyLaserMarkWithHostFailed { get => RobotModuleName.ToString() + "VerifyLaserMarkWithHostFailed"; }
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public string AlarmSlotInLaserMarkIsOccuppied { get => RobotModuleName.ToString() + "SlotInLaserMarkIsOccuppied"; }
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public string AlarmVerifyLaserMarkTimeout { get => RobotModuleName.ToString() + "VerifyLaserMarkTimeout"; }
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public string AlarmWaferInformationError { get => RobotModuleName.ToString() + "WaferInformationError"; }
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public virtual bool IsNeedChangeWaferSize(WaferSize wz)
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{
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return false;
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}
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protected override bool Init()
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{
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return base.Init();
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}
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public void InitializeRobot()
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{
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BuildTransitionTable();
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SubscribeDataVariable();
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SubscribeOperation();
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SubscribeDeviceOperation();
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AlignerCommandTimeout = SC.ContainsItem("Aligner.TimeLimitAlignerCommand") ?
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SC.GetValue<int>("Aligner.TimeLimitAlignerCommand") : 120;
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WaferManager.Instance.SubscribeLocation(Name, 1);
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Running = true;
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}
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protected virtual void SubscribeOperation()
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{
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OP.Subscribe(String.Format("{0}.{1}", Name, "LiftUp"), (out string reason, int time, object[] param) =>
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{
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bool ret = LiftUp(out reason);
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if (ret)
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{
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reason = string.Format("{0} {1}", Name, "LiftUp");
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return true;
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}
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reason = "";
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return false;
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});
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OP.Subscribe(String.Format("{0}.{1}", Name, "LiftDown"), (out string reason, int time, object[] param) =>
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{
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bool ret = LiftDown(out reason);
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if (ret)
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{
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reason = string.Format("{0} {1}", Name, "LiftDown");
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return true;
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}
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reason = "";
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return false;
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});
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OP.Subscribe(String.Format("{0}.{1}", Name, "SetWaferSize"), (out string reason, int time, object[] param) =>
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{
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if(param.Length <2)
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{
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reason = "Invalide parameter";
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return false;
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}
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WaferSize size = (WaferSize)Enum.Parse(typeof(WaferSize), param[1].ToString());
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bool ret = SetWaferSize( size, out reason);
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if (ret)
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{
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reason = string.Format("{0} {1}", Name, "SetWaferSize");
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return true;
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}
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reason = "";
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return false;
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});
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OP.Subscribe(String.Format("{0}.{1}", Name, "Init"), (out string reason, int time, object[] param) =>
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{
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bool ret = Init(out reason);
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if (ret)
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{
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reason = string.Format("{0} {1}", Name, "Initializing");
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return true;
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}
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reason = "";
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return false;
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});
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OP.Subscribe(String.Format("{0}.{1}", Name, "Abort"), (out string reason, int time, object[] param) =>
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{
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bool ret = Abort(out reason);
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if (ret)
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{
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reason = string.Format("{0} {1}", Name, "Abort");
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return true;
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}
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reason = "";
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return false;
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});
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OP.Subscribe(String.Format("{0}.{1}", Name, "Home"), (out string reason, int time, object[] param) =>
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{
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bool ret = Home(out reason);
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if (ret)
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{
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reason = string.Format("{0} {1}", Name, "Homing");
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return true;
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}
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reason = "";
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return false;
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});
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OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerHome"), (out string reason, int time, object[] param) =>
|
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{
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bool ret = Home(out reason);
|
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if (ret)
|
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{
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reason = string.Format("{0} {1}", Name, "Homing");
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return true;
|
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}
|
|||
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reason = "";
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return false;
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});
|
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OP.Subscribe(String.Format("{0}.{1}", Name, "HomeModule"), (out string reason, int time, object[] param) =>
|
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{
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bool ret = HomeModule(out reason);
|
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if (ret)
|
|||
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{
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reason = string.Format("{0} {1}", Name, "ModuleHoming");
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return true;
|
|||
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}
|
|||
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reason = "";
|
|||
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return false;
|
|||
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});
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|||
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OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerHomeModule"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
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bool ret = HomeModule(out reason);
|
|||
|
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if (ret)
|
|||
|
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{
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|||
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reason = string.Format("{0} {1}", Name, "ModuleHoming");
|
|||
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return true;
|
|||
|
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}
|
|||
|
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reason = "";
|
|||
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return false;
|
|||
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|
});
|
|||
|
|
|
|||
|
|
OP.Subscribe(String.Format("{0}.{1}", Name, "Reset"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
|
|
bool ret = AlignerReset( out reason);
|
|||
|
|
if (ret)
|
|||
|
|
{
|
|||
|
|
reason = string.Format("{0} {1}", Name, "Resetting");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
reason = "";
|
|||
|
|
return true;
|
|||
|
|
});
|
|||
|
|
OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerReset"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
|
|
bool ret = AlignerReset( out reason);
|
|||
|
|
if (ret)
|
|||
|
|
{
|
|||
|
|
reason = string.Format("{0} {1}", Name, "Resetting");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
reason = "";
|
|||
|
|
return true;
|
|||
|
|
});
|
|||
|
|
OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerAlign"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
|
|
bool ret = AlignerAlign(param, out reason);
|
|||
|
|
if (ret)
|
|||
|
|
{
|
|||
|
|
reason = string.Format("{0} {1}", Name, "Resetting");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
reason = "";
|
|||
|
|
return true;
|
|||
|
|
});
|
|||
|
|
|
|||
|
|
OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerSetWaferSize"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
|
|
bool ret = AlignerSetWaferSize(param, out reason);
|
|||
|
|
if (ret)
|
|||
|
|
{
|
|||
|
|
reason = string.Format("{0} {1}", Name, "Resetting");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
reason = "";
|
|||
|
|
return true;
|
|||
|
|
});
|
|||
|
|
OP.Subscribe(String.Format("{0}.{1}", Name, "PrepareAccept"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
|
|
bool ret = PrepareAcceptWafer();
|
|||
|
|
if (ret)
|
|||
|
|
{
|
|||
|
|
reason = string.Format("{0} {1}", Name, "PrepareAccept");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
reason = "";
|
|||
|
|
return true;
|
|||
|
|
});
|
|||
|
|
OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerHold"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
|
|
bool ret = Grip(0, out reason);
|
|||
|
|
if (ret)
|
|||
|
|
{
|
|||
|
|
reason = string.Format("{0} {1}", Name, "Hold Wafer");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
});
|
|||
|
|
OP.Subscribe(String.Format("{0}.{1}", Name, "AlignerRelease"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
|
|
bool ret = Release(0, out reason);
|
|||
|
|
if (ret)
|
|||
|
|
{
|
|||
|
|
reason = string.Format("{0} {1}", Name, "Release Wafer");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
});
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
protected virtual void SubscribeDeviceOperation()
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerInit"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
|
|
bool ret = Init(out reason);
|
|||
|
|
if (ret)
|
|||
|
|
{
|
|||
|
|
reason = string.Format("{0} {1}", Name, "Init");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
});
|
|||
|
|
DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerHome"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
|
|
bool ret = Home(out reason);
|
|||
|
|
if (ret)
|
|||
|
|
{
|
|||
|
|
reason = string.Format("{0} {1}", Name, "Home");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
});
|
|||
|
|
DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerHomeModule"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
|
|
bool ret = HomeModule(out reason);
|
|||
|
|
if (ret)
|
|||
|
|
{
|
|||
|
|
reason = string.Format("{0} {1}", Name, "ModuleHome");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
});
|
|||
|
|
DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerReset"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
|
|
bool ret = AlignerReset(out reason);
|
|||
|
|
if (ret)
|
|||
|
|
{
|
|||
|
|
reason = string.Format("{0} {1}", Name, "Reset Error");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
});
|
|||
|
|
|
|||
|
|
DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerGrip"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
|
|
bool ret = Grip(0, out reason);
|
|||
|
|
if (ret)
|
|||
|
|
{
|
|||
|
|
reason = string.Format("{0} {1}", Name, "Hold Wafer");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
});
|
|||
|
|
DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerRelease"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
|
|
bool ret = Release(0, out reason);
|
|||
|
|
if (ret)
|
|||
|
|
{
|
|||
|
|
reason = string.Format("{0} {1}", Name, "Release Wafer");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
});
|
|||
|
|
|
|||
|
|
DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerLiftUp"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
|
|
bool ret = LiftUp(out reason);
|
|||
|
|
if (ret)
|
|||
|
|
{
|
|||
|
|
reason = string.Format("{0} {1}", Name, "Lifter Up");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
});
|
|||
|
|
DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerLiftDown"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
|
|
bool ret = LiftDown(out reason);
|
|||
|
|
if (ret)
|
|||
|
|
{
|
|||
|
|
reason = string.Format("{0} {1}", Name, "Lifter Down");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
});
|
|||
|
|
DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerStop"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
|
|
bool ret = Stop(out reason);
|
|||
|
|
if (ret)
|
|||
|
|
{
|
|||
|
|
reason = string.Format("{0} {1}", Name, "Stop Align");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
return false;
|
|||
|
|
});
|
|||
|
|
|
|||
|
|
DEVICE.Register(String.Format("{0}.{1}", Name, "AlignerAlign"), (out string reason, int time, object[] param) =>
|
|||
|
|
{
|
|||
|
|
double angle = double.Parse((string)param[0]);
|
|||
|
|
bool ret = Align(angle, out reason);
|
|||
|
|
if (ret)
|
|||
|
|
{
|
|||
|
|
reason = string.Format("{0} {1}", Name, "PreAlign");
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
return false;
|
|||
|
|
});
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
public bool SetWaferSize(WaferSize size, out string reason)
|
|||
|
|
{
|
|||
|
|
reason = "";
|
|||
|
|
if( (CheckToPostMessage((int)AlignerMsg.SetParameters, new object[] { "WaferSize", size })))
|
|||
|
|
{
|
|||
|
|
IsBusy = true;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
return false;
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool AlignerReset(out string reason)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
reason = "";
|
|||
|
|
if (CheckToPostMessage((int)AlignerMsg.Reset, null))
|
|||
|
|
return true;
|
|||
|
|
reason = $"{Name} is in {AlignerState}";
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
public bool Abort(out string reason)
|
|||
|
|
{
|
|||
|
|
reason = "";
|
|||
|
|
if (CheckToPostMessage((int)AlignerMsg.Abort, null))
|
|||
|
|
return true;
|
|||
|
|
reason = $"{Name} is in {AlignerState}";
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool Stop(out string reason)
|
|||
|
|
{
|
|||
|
|
reason = "";
|
|||
|
|
if (CheckToPostMessage((int)AlignerMsg.Stop, null))
|
|||
|
|
return true;
|
|||
|
|
reason = $"{Name} is in {AlignerState}";
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
public bool AlignerAlign(object[] param, out string reason)
|
|||
|
|
{
|
|||
|
|
reason = "";
|
|||
|
|
if (CheckToPostMessage((int)AlignerMsg.Align, param))
|
|||
|
|
{
|
|||
|
|
IsBusy = true;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
reason = $"{Name} is in {AlignerState}";
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool AlignerSetWaferSize(object[] param, out string reason)
|
|||
|
|
{
|
|||
|
|
reason = "";
|
|||
|
|
if (CheckToPostMessage((int)AlignerMsg.SetParameters, param))
|
|||
|
|
{
|
|||
|
|
IsBusy = true;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
reason = $"{Name} is in {AlignerState}";
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool AlignerSetWaferSize(WaferSize wz,out string reason)
|
|||
|
|
{
|
|||
|
|
reason = "";
|
|||
|
|
if (CheckToPostMessage((int)AlignerMsg.SetParameters, new object[] { "WaferSize",wz }))
|
|||
|
|
{
|
|||
|
|
IsBusy = true;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
reason = $"{Name} is in {AlignerState}";
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool Align(double angle, out string reason)
|
|||
|
|
{
|
|||
|
|
reason = "";
|
|||
|
|
double anglevalue = angle + CompensationAngleValue;
|
|||
|
|
if (CheckToPostMessage((int)AlignerMsg.Align, new object[] { anglevalue }))
|
|||
|
|
{
|
|||
|
|
IsBusy = true;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
reason = $"{Name} is in {AlignerState}";
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool LiftDown(out string reason)
|
|||
|
|
{
|
|||
|
|
reason = "";
|
|||
|
|
if (CheckToPostMessage((int)AlignerMsg.LiftDown, null))
|
|||
|
|
{
|
|||
|
|
IsBusy = true;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
reason = $"{Name} is in {AlignerState}";
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool LiftUp(out string reason)
|
|||
|
|
{
|
|||
|
|
reason = "";
|
|||
|
|
if (CheckToPostMessage((int)AlignerMsg.LiftUp, null))
|
|||
|
|
{
|
|||
|
|
IsBusy = true;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
reason = $"{Name} is in {AlignerState}";
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool Release(int v, out string reason)
|
|||
|
|
{
|
|||
|
|
reason = "";
|
|||
|
|
if (CheckToPostMessage((int)AlignerMsg.UnGrip, new object[] { v}))
|
|||
|
|
{
|
|||
|
|
IsBusy = true;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
reason = $"{Name} is in {AlignerState}";
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool Grip(int v, out string reason)
|
|||
|
|
{
|
|||
|
|
reason = "";
|
|||
|
|
if (CheckToPostMessage((int)AlignerMsg.Grip, new object[] { v }))
|
|||
|
|
{
|
|||
|
|
IsBusy = true;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
reason = $"{Name} is in {AlignerState}";
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool Clear(out string reason)
|
|||
|
|
{
|
|||
|
|
reason = "";
|
|||
|
|
if (CheckToPostMessage((int)AlignerMsg.Clear, null))
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
reason = $"{Name} is in {AlignerState}";
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool Init(out string reason)
|
|||
|
|
{
|
|||
|
|
reason = "";
|
|||
|
|
if (CheckToPostMessage((int)AlignerMsg.StartInit, null))
|
|||
|
|
{
|
|||
|
|
IsBusy = true;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
reason = $"{Name} is in {AlignerState}";
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
public bool Home(out string reason)
|
|||
|
|
{
|
|||
|
|
reason = "";
|
|||
|
|
if (CheckToPostMessage((int)AlignerMsg.StartInit, null))
|
|||
|
|
{
|
|||
|
|
IsBusy = true;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
reason = $"{Name} is in {AlignerState}";
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
public bool HomeModule(out string reason)
|
|||
|
|
{
|
|||
|
|
reason = "";
|
|||
|
|
if (CheckToPostMessage((int)AlignerMsg.StartHome, null))
|
|||
|
|
{
|
|||
|
|
IsBusy = true;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
reason = $"{Name} is in {AlignerState}";
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
public bool SetMaintenanceMode(bool ismaintain)
|
|||
|
|
{
|
|||
|
|
if (ismaintain)
|
|||
|
|
return CheckToPostMessage((int)AlignerMsg.StartMaintenance, null);
|
|||
|
|
else
|
|||
|
|
return CheckToPostMessage((int)AlignerMsg.CompleteMaintenance, null);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void SubscribeDataVariable()
|
|||
|
|
{
|
|||
|
|
DATA.Subscribe($"{Name}.State", () => AlignerState.ToString());
|
|||
|
|
DATA.Subscribe($"{Name}.AlignerState", () => AlignerState.ToString());
|
|||
|
|
DATA.Subscribe($"{Name}.Busy", () => AlignerState != AlignerStateEnum.Idle && AlignerState != AlignerStateEnum.Init);
|
|||
|
|
DATA.Subscribe($"{Name}.ErrorCode", () => ErrorCode);
|
|||
|
|
DATA.Subscribe($"{Name}.Error", () => AlignerState == AlignerStateEnum.Error);
|
|||
|
|
DATA.Subscribe($"{Name}.Notch", () => CurrentNotch);
|
|||
|
|
DATA.Subscribe($"{Name}.WaferOnAligner", () => IsWaferPresent(0));
|
|||
|
|
DATA.Subscribe($"{Name}.WaferSize", () => GetCurrentWaferSize().ToString());
|
|||
|
|
|
|||
|
|
|
|||
|
|
// string str = string.Empty;
|
|||
|
|
//
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
DATA.Subscribe($"{Module}.{Name}.State", () => AlignerState.ToString());
|
|||
|
|
|
|||
|
|
DATA.Subscribe($"{Module}.{Name}.Axis1Postion", () => PositionAxis1.ToString());
|
|||
|
|
DATA.Subscribe($"{Module}.{Name}.Axis2Postion", () => PositionAxis2.ToString());
|
|||
|
|
DATA.Subscribe($"{Module}.{Name}.Axis3Postion", () => PositionAxis3.ToString());
|
|||
|
|
DATA.Subscribe($"{Module}.{Name}.Axis4Postion", () => PositionAxis4.ToString());
|
|||
|
|
DATA.Subscribe($"{Module}.{Name}.Axis5Postion", () => PositionAxis5.ToString());
|
|||
|
|
DATA.Subscribe($"{Module}.{Name}.AlignerErrorCode", () => ErrorCode ?? ErrorCode.ToString());
|
|||
|
|
|
|||
|
|
EV.Subscribe(new EventItem("Event", EventAlignerStartAlign, $"{RobotModuleName} start aligning wafer.", EventLevel.Information, Aitex.Core.RT.Event.EventType.EventUI_Notify));
|
|||
|
|
EV.Subscribe(new EventItem("Event", EventAlignerCompleteAlign, $"{RobotModuleName} complete aligning wafer.", EventLevel.Information, Aitex.Core.RT.Event.EventType.EventUI_Notify));
|
|||
|
|
|
|||
|
|
EV.Subscribe(new EventItem("Alarm", AlarmAlignTimeout, "Aligner align wafer time out.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
|
|||
|
|
EV.Subscribe(new EventItem("Alarm", AlarmAlignFailed, "Aligner aligner wafer failed.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
|
|||
|
|
EV.Subscribe(new EventItem("Alarm", AlarmVerifyLaserMarkFailed, "Aligner verify laser mark failed.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
|
|||
|
|
EV.Subscribe(new EventItem("Alarm", AlarmVerifyLaserMarkSlotNoFailed, "Aligner verify laser mark slot no failed.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
|
|||
|
|
EV.Subscribe(new EventItem("Alarm", AlarmVerifyLaserMarkLengthFailed, "Aligner verify laser mark length failed.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
|
|||
|
|
EV.Subscribe(new EventItem("Alarm", AlarmVerifyLaserMarkWithHostFailed, "Aligner verify laser mark with host failed.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
|
|||
|
|
EV.Subscribe(new EventItem("Alarm", AlarmVerifyLaserMarkTimeout, "Aligner wait ocr manual verification timeout.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
|
|||
|
|
EV.Subscribe(new EventItem("Alarm", AlarmSlotInLaserMarkIsOccuppied, "The slot in Laser Mark is occuppied.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
|
|||
|
|
EV.Subscribe(new EventItem("Alarm", AlarmWaferInformationError, "The wafer sensor status doesn't match wafer information.", EventLevel.Alarm, Aitex.Core.RT.Event.EventType.EventUI_Notify));
|
|||
|
|
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void BuildTransitionTable()
|
|||
|
|
{
|
|||
|
|
fsm = new StateMachine<AlignerBaseDevice>(Name + ".StateMachine", (int)AlignerStateEnum.Init, 50);
|
|||
|
|
|
|||
|
|
//Init sequence
|
|||
|
|
AnyStateTransition(AlignerMsg.ERROR, fError, AlignerStateEnum.Error);
|
|||
|
|
AnyStateTransition(AlignerMsg.Reset, fReset, AlignerStateEnum.Resetting);
|
|||
|
|
AnyStateTransition(AlignerMsg.Stop, fStop, AlignerStateEnum.Stopped);
|
|||
|
|
AnyStateTransition(AlignerMsg.Abort, FsmAbort, AlignerStateEnum.Init);
|
|||
|
|
AnyStateTransition(AlignerMsg.StartMaintenance, fStartMaintenance, AlignerStateEnum.Maintenance);
|
|||
|
|
|
|||
|
|
Transition(AlignerStateEnum.Maintenance, FSM_MSG.TIMER, fMonitorMaintenance, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.Maintenance, AlignerMsg.CompleteMaintenance, fCompleteMaintenance, AlignerStateEnum.Idle);
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
Transition(AlignerStateEnum.Resetting, AlignerMsg.ActionDone, fResetComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.Resetting, FSM_MSG.TIMER, fMonitorReset, AlignerStateEnum.Idle);
|
|||
|
|
|
|||
|
|
|
|||
|
|
Transition(AlignerStateEnum.Init, AlignerMsg.StartInit, fStartInit, AlignerStateEnum.Initializing);
|
|||
|
|
Transition(AlignerStateEnum.Idle, AlignerMsg.StartInit, fStartInit, AlignerStateEnum.Initializing);
|
|||
|
|
Transition(AlignerStateEnum.Error, AlignerMsg.StartInit, fStartInit, AlignerStateEnum.Initializing);
|
|||
|
|
|
|||
|
|
Transition(AlignerStateEnum.Init, AlignerMsg.InitComplete, fInitComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.Error, AlignerMsg.InitComplete, fInitComplete, AlignerStateEnum.Idle);
|
|||
|
|
|
|||
|
|
Transition(AlignerStateEnum.Initializing, AlignerMsg.InitComplete, fInitComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.Initializing, AlignerMsg.ActionDone, fInitComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.Initializing, FSM_MSG.TIMER, fMonitorInit, AlignerStateEnum.Idle);
|
|||
|
|
|
|||
|
|
Transition(AlignerStateEnum.Init, AlignerMsg.StartHome, fStartHome, AlignerStateEnum.Homing);
|
|||
|
|
Transition(AlignerStateEnum.Idle, AlignerMsg.StartHome, fStartHome, AlignerStateEnum.Homing);
|
|||
|
|
Transition(AlignerStateEnum.Error, AlignerMsg.StartHome, fStartHome, AlignerStateEnum.Homing);
|
|||
|
|
|
|||
|
|
Transition(AlignerStateEnum.Init, AlignerMsg.HomeComplete, fHomeComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.Error, AlignerMsg.HomeComplete, fHomeComplete, AlignerStateEnum.Idle);
|
|||
|
|
|
|||
|
|
Transition(AlignerStateEnum.Homing, AlignerMsg.HomeComplete, fHomeComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.Homing, AlignerMsg.ActionDone, fHomeComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.Homing, FSM_MSG.TIMER, fMonitorHome, AlignerStateEnum.Idle);
|
|||
|
|
|
|||
|
|
Transition(AlignerStateEnum.Error, AlignerMsg.Clear, fClear, AlignerStateEnum.Init);
|
|||
|
|
Transition(AlignerStateEnum.Error, AlignerMsg.ResetToReady, fResetToReady, AlignerStateEnum.Idle);
|
|||
|
|
|
|||
|
|
Transition(AlignerStateEnum.Idle, AlignerMsg.SetParameters, fStartSetParameters, AlignerStateEnum.SettingServos);
|
|||
|
|
Transition(AlignerStateEnum.SettingServos, AlignerMsg.SetParametersComplete, fSetComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.SettingServos, AlignerMsg.ActionDone, fSetComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.SettingServos, FSM_MSG.TIMER, fMonitorSetParamter, AlignerStateEnum.Idle);
|
|||
|
|
|
|||
|
|
|
|||
|
|
Transition(AlignerStateEnum.Idle, AlignerMsg.ReadData, fStartReadData, AlignerStateEnum.ReadingData);
|
|||
|
|
Transition(AlignerStateEnum.ReadingData, AlignerMsg.ActionDone, null, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.ReadingData, FSM_MSG.TIMER, fMonitorReadData, AlignerStateEnum.Idle);
|
|||
|
|
|
|||
|
|
|
|||
|
|
Transition(AlignerStateEnum.Idle, AlignerMsg.Grip, fStartGrip, AlignerStateEnum.Gripping);
|
|||
|
|
Transition(AlignerStateEnum.Gripping, AlignerMsg.GripComplete, fGripComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.Gripping, AlignerMsg.ActionDone, fGripComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.Gripping, FSM_MSG.TIMER, fMonitorGrip, AlignerStateEnum.Idle);
|
|||
|
|
|
|||
|
|
|
|||
|
|
Transition(AlignerStateEnum.Idle, AlignerMsg.UnGrip, fStartUnGrip, AlignerStateEnum.UnGripping);
|
|||
|
|
Transition(AlignerStateEnum.UnGripping, AlignerMsg.UnGripComplete, fUnGripComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.UnGripping, AlignerMsg.ActionDone, fUnGripComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.UnGripping, FSM_MSG.TIMER, fMonitorUnGrip, AlignerStateEnum.Idle);
|
|||
|
|
|
|||
|
|
Transition(AlignerStateEnum.Idle, AlignerMsg.LiftUp, fStartLiftup, AlignerStateEnum.LiftingUp);
|
|||
|
|
Transition(AlignerStateEnum.LiftingUp, AlignerMsg.LiftUpComplete, fLiftupComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.LiftingUp, AlignerMsg.ActionDone, fLiftupComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.LiftingUp, FSM_MSG.TIMER, fMonitorLiftup, AlignerStateEnum.Idle);
|
|||
|
|
|
|||
|
|
Transition(AlignerStateEnum.Idle, AlignerMsg.LiftDown, fStartLiftdown, AlignerStateEnum.LiftingDown);
|
|||
|
|
Transition(AlignerStateEnum.LiftingDown, AlignerMsg.LiftDownComplete, fLiftdownComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.LiftingDown, AlignerMsg.ActionDone, fLiftdownComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.LiftingDown, FSM_MSG.TIMER, fMonitorLiftdown, AlignerStateEnum.Idle);
|
|||
|
|
|
|||
|
|
|
|||
|
|
Transition(AlignerStateEnum.Idle, AlignerMsg.Align, fStartAlign, AlignerStateEnum.Aligning);
|
|||
|
|
Transition(AlignerStateEnum.Aligning, AlignerMsg.AlignComplete, fAlignComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.Aligning, AlignerMsg.ActionDone, fAlignComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.Aligning, FSM_MSG.TIMER, fMonitorAligning, AlignerStateEnum.Idle);
|
|||
|
|
|
|||
|
|
Transition(AlignerStateEnum.Idle, AlignerMsg.PrepareAccept, fStartPrepareAccept, AlignerStateEnum.PrepareAccept);
|
|||
|
|
Transition(AlignerStateEnum.PrepareAccept, AlignerMsg.PrepareAcceptComplete, fPrepareAcceptComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.PrepareAccept, AlignerMsg.ActionDone, fPrepareAcceptComplete, AlignerStateEnum.Idle);
|
|||
|
|
Transition(AlignerStateEnum.PrepareAccept, FSM_MSG.TIMER, fMonitorPrepareAccept, AlignerStateEnum.Idle);
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fMonitorPrepareAccept(object[] param)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fPrepareAcceptComplete(object[] param)
|
|||
|
|
{
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fStartPrepareAccept(object[] param)
|
|||
|
|
{
|
|||
|
|
return true ;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fMonitorHome(object[] param)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fHomeComplete(object[] param)
|
|||
|
|
{
|
|||
|
|
return true; ;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fStartHome(object[] param)
|
|||
|
|
{
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public virtual bool IsWaferPresent(int slotindex)
|
|||
|
|
{
|
|||
|
|
return WaferManager.Instance.CheckHasWafer(RobotModuleName, slotindex);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public virtual RobotArmWaferStateEnum GetWaferState(int slotindex=0)
|
|||
|
|
{
|
|||
|
|
if (WaferManager.Instance.CheckHasWafer(RobotModuleName, slotindex) != IsWaferPresent(slotindex))
|
|||
|
|
{
|
|||
|
|
return RobotArmWaferStateEnum.Error;
|
|||
|
|
}
|
|||
|
|
return IsWaferPresent(slotindex)? RobotArmWaferStateEnum.Present: RobotArmWaferStateEnum.Absent;
|
|||
|
|
}
|
|||
|
|
protected virtual bool fStartMaintenance(object[] param)
|
|||
|
|
{
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fMonitorMaintenance(object[] param)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fCompleteMaintenance(object[] param)
|
|||
|
|
{
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected abstract bool fStartLiftup(object[] param);
|
|||
|
|
|
|||
|
|
protected virtual bool fLiftupComplete(object[] param)
|
|||
|
|
{
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fMonitorLiftup(object[] param)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected abstract bool fStartLiftdown(object[] param);
|
|||
|
|
|
|||
|
|
protected virtual bool fLiftdownComplete(object[] param)
|
|||
|
|
{
|
|||
|
|
return true ;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fMonitorLiftdown(object[] param)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected abstract bool fStartAlign(object[] param);
|
|||
|
|
|
|||
|
|
private bool fAlignComplete(object[] param)
|
|||
|
|
{
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fMonitorAligning(object[] param)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fMonitorUnGrip(object[] param)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fMonitorGrip(object[] param)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fMoveComplete(object[] param)
|
|||
|
|
{
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fStartMove(object[] param)
|
|||
|
|
{
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fMonitorSetParamter(object[] param)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fMonitorReadData(object[] param)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fMonitorReset(object[] param)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fMonitorGoTo(object[] param)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fMonitorMap(object[] param)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
protected virtual bool fMonitorPlace(object[] param)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
protected virtual bool fMonitorSwap(object[] param)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fMonitorPick(object[] param)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fMonitorInit(object[] param)
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected abstract bool fStop(object[] param);
|
|||
|
|
|
|||
|
|
|
|||
|
|
protected abstract bool FsmAbort(object[] param);
|
|||
|
|
|
|||
|
|
|
|||
|
|
protected bool fResetComplete(object[] param)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected abstract bool fClear(object[] param);
|
|||
|
|
|
|||
|
|
protected virtual bool fSetComplete(object[] param)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
protected abstract bool fStartReadData(object[] param);
|
|||
|
|
protected abstract bool fStartSetParameters(object[] param);
|
|||
|
|
|
|||
|
|
protected abstract bool fStartUnGrip(object[] param);
|
|||
|
|
protected abstract bool fStartGrip(object[] param);
|
|||
|
|
protected abstract bool fResetToReady(object[] param);
|
|||
|
|
protected abstract bool fReset(object[] param);
|
|||
|
|
protected abstract bool fStartInit(object[] param);
|
|||
|
|
protected abstract bool fError(object[] param);
|
|||
|
|
|
|||
|
|
|
|||
|
|
protected virtual bool fUnGripComplete(object[] param)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected virtual bool fGripComplete(object[] param)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
protected virtual bool fInitComplete(object[] param)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
public AlignerStateEnum AlignerState { get => (AlignerStateEnum)fsm.State; }
|
|||
|
|
public string Module { get; set; }
|
|||
|
|
public string Name { get; set; }
|
|||
|
|
|
|||
|
|
public ModuleName RobotModuleName { get; private set; }
|
|||
|
|
public ModuleName CurrentInteractModule { get; private set; }
|
|||
|
|
|
|||
|
|
|
|||
|
|
public virtual bool IsNeedRelease
|
|||
|
|
{
|
|||
|
|
get
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public virtual bool IsNeedPrepareBeforePlaceWafer()
|
|||
|
|
{
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
public virtual void Monitor()
|
|||
|
|
{
|
|||
|
|
return;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public virtual void Reset()
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
public virtual void OnError(string errortext)
|
|||
|
|
{
|
|||
|
|
EV.PostAlarmLog(Module, $"{Name} occurred error: {errortext}");
|
|||
|
|
IsBusy = false;
|
|||
|
|
CheckToPostMessage((int)AlignerMsg.ERROR, new object[] { errortext });
|
|||
|
|
}
|
|||
|
|
public virtual bool SetParameters(object[] param)
|
|||
|
|
{
|
|||
|
|
return CheckToPostMessage((int)AlignerMsg.SetParameters, param);
|
|||
|
|
}
|
|||
|
|
public virtual bool PrepareAcceptWafer()
|
|||
|
|
{
|
|||
|
|
if(CheckToPostMessage((int)AlignerMsg.PrepareAccept,null))
|
|||
|
|
{
|
|||
|
|
IsBusy = true;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public virtual bool HomeAllAxes(out string reason)
|
|||
|
|
{
|
|||
|
|
reason = string.Empty;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public virtual bool QueryWaferMap(ModuleName module, out string reason)
|
|||
|
|
{
|
|||
|
|
reason = "";
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
public virtual bool OnActionDone(object[] param)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
return CheckToPostMessage((int)AlignerMsg.ActionDone, new object[] { "ActionDone" });
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool CheckToPostMessage(int msg, params object[] args)
|
|||
|
|
{
|
|||
|
|
if (!fsm.FindTransition(fsm.State, msg))
|
|||
|
|
{
|
|||
|
|
if (msg != 7)
|
|||
|
|
EV.PostWarningLog(Name, $"{Name} is in { (AlignerStateEnum)fsm.State} state，can not do {(AlignerMsg)msg}");
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
CurrentParamter = args;
|
|||
|
|
fsm.PostMsg(msg, args);
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
public bool CheckToPostMessage(AlignerMsg msg, params object[] args)
|
|||
|
|
{
|
|||
|
|
if (!fsm.FindTransition(fsm.State, (int)msg))
|
|||
|
|
{
|
|||
|
|
if ((int)msg != 7)
|
|||
|
|
EV.PostWarningLog(Name, $"{Name} is in { (AlignerStateEnum)fsm.State} state，can not do {(AlignerMsg)msg}");
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
CurrentParamter = args;
|
|||
|
|
fsm.PostMsg((int)msg, args);
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool Check(int msg, out string reason, params object[] args)
|
|||
|
|
{
|
|||
|
|
if (!fsm.FindTransition(fsm.State, msg))
|
|||
|
|
{
|
|||
|
|
reason = String.Format("{0} is in {1} state，can not do {2}", Name, (AlignerStateEnum)fsm.State, (AlignerMsg)msg);
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
CurrentParamter = args;
|
|||
|
|
reason = "";
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
}
|