1149 lines
48 KiB
C#
1149 lines
48 KiB
C#
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using System;
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using System.Collections.Generic;
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using System.IO.Ports;
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using System.Linq;
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using System.Text;
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using Aitex.Core.Common.DeviceData;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.OperationCenter;
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using Aitex.Core.RT.SCCore;
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using Aitex.Core.Util;
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using MECF.Framework.Common.Communications;
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using MECF.Framework.Common.Device.Bases;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Common;
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using Newtonsoft.Json;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.SubstrateTrackings;
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using System.Threading;
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using Aitex.Core.Common;
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using Aitex.Core.RT.DataCenter;
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using System.Text.RegularExpressions;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.AlignersBase;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.JEL;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
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using Aitex.Core.RT.Device.Devices;
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namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.JelAligner
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{
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public class JelAligner:AlignerBaseDevice,IConnection
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{
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/* SAL3262HV model: for 2-inch to 6-inch wafer
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SAL3362HV model: for 3-inch to 6-inch wafer
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SAL3482HV model: for 4-inch to 8-inch wafer
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SAL38C3HV model: for 8-inch to 12-inch wafer*/
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public JelAligner(string module, string name,string scRoot,IoSensor[] dis, IoTrigger[] dos,int alignerType =0,string robotModel = ""):base(module,name)
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{
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isSimulatorMode = SC.ContainsItem("System.IsSimulatorMode") ? SC.GetValue<bool>("System.IsSimulatorMode") : false;
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_robotModel = robotModel;
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_scRoot = scRoot;
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if (dis != null)
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{
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_diWaferPresent = dis[0];
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_diOcrOn300 = dis[1];
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_diOcrOn200 = dis[2];
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}
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if (dos != null)
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{
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_doOcrTo300 = dos[0];
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_doOcrTo200 = dos[1];
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}
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ResetPropertiesAndResponses();
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RegisterSpecialData();
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_enableLog = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableLogMessage");
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_bodyNumber = SC.GetValue<int>($"{_scRoot}.{Name}.BodyNumber");
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PortName = SC.GetStringValue($"{_scRoot}.{Name}.PortName");
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TimelimitAlginerHome = SC.GetValue<int>($"{_scRoot}.{Name}.TimeLimitAlignerHome");
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TimelimitForAlignWafer = SC.GetValue<int>($"{_scRoot}.{Name}.TimeLimitForAlignWafer");
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_connection = new JelAlignerConnection(PortName);
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_connection.EnableLog(_enableLog);
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if (_connection.Connect())
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{
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EV.PostInfoLog(Module, $"{Module}.{Name} connected");
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}
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_thread = new PeriodicJob(100, OnTimer, $"{Module}.{Name} MonitorHandler", true);
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}
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private IoSensor _diWaferPresent;
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private IoSensor _diOcrOn300;
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private IoSensor _diOcrOn200;
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private Aitex.Core.RT.Device.Unit.IoTrigger _doOcrTo300;
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private Aitex.Core.RT.Device.Unit.IoTrigger _doOcrTo200;
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public virtual bool OnTimer()
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{
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try
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{
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if (!_connection.IsConnected || _connection.IsCommunicationError)
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{
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lock (_locker)
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{
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_lstMoveHandler.Clear();
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}
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_trigRetryConnect.CLK = !_connection.IsConnected;
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if (_trigRetryConnect.Q)
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{
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_connection.SetPortAddress(SC.GetStringValue($"{_scRoot}.{Name}.PortName"));
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if (!_connection.Connect())
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{
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EV.PostAlarmLog(Module, $"Can not connect with {_connection.Address}, {Module}.{Name}");
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}
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else
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{
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}
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}
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return true;
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}
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HandlerBase handler = null;
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DateTime dtstart = DateTime.Now;
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lock (_locker)
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{
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while (_lstMoveHandler.Count > 0 && _lstMonitorHandler.Count == 0)
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{
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if (!_connection.IsBusy)
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{
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if (YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd &&
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XAxisStatus == JelAxisStatus.NormalEnd)
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{
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handler = _lstMoveHandler.First.Value;
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_connection.Execute(handler);
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_lstMoveHandler.RemoveFirst();
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}
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else
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{
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_connection.Execute(new JelAlignerReadHandler(this, ""));
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}
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}
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else
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{
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_connection.MonitorTimeout();
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_trigCommunicationError.CLK = _connection.IsCommunicationError;
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if (_trigCommunicationError.Q)
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{
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_lstMoveHandler.Clear();
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OnError($"{Module}.{Name} communication error, {_connection.LastCommunicationError}");
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}
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}
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if (DateTime.Now - dtstart > TimeSpan.FromSeconds(150))
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{
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_lstMonitorHandler.Clear();
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_lstMoveHandler.Clear();
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OnError("Robot action timeout");
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}
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}
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while (_lstMonitorHandler.Count > 0)
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{
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if (!_connection.IsBusy)
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{
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handler = _lstMonitorHandler.First.Value;
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_connection.Execute(handler);
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_lstMonitorHandler.RemoveFirst();
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}
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if (DateTime.Now - dtstart > TimeSpan.FromSeconds(150))
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{
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_lstMonitorHandler.Clear();
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_lstMoveHandler.Clear();
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OnError("Robot action timeout");
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}
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}
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}
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}
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catch (Exception ex)
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{
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LOG.Write(ex);
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}
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return true;
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}
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private void ResetPropertiesAndResponses()
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{
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}
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private void RegisterSpecialData()
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{
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DATA.Subscribe($"{Module}.{Name}.CurrentReadRoutine", () => CurrentReadRoutine);
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DATA.Subscribe($"{Module}.{Name}.CurrentReadSpeedData", () => CurrentReadSpeedData);
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DATA.Subscribe($"{Module}.{Name}.CurrentReadAData", () => CurrentReadAData);
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DATA.Subscribe($"{Module}.{Name}.IsLeftArmPressureSensorON", () => IsLeftArmPressureSensorON);
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DATA.Subscribe($"{Module}.{Name}.IsRightArmPressureSensorON", () => IsRightArmPressureSensorON);
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DATA.Subscribe($"{Module}.{Name}.YAxisAndThetaAxisStatus", () => YAxisAndThetaAxisStatus.ToString());
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DATA.Subscribe($"{Module}.{Name}.XAxisStatus", () => XAxisStatus.ToString());
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DATA.Subscribe($"{Module}.{Name}.CurrentCompoundCommandStatus", () => CurrentCompoundCommandStatus.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadCassetNumber", () => ReadCassetNumber.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadSlotNumber", () => ReadSlotNumber.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadBankNumber", () => ReadBankNumber.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadPosLeftArmPostion", () => ReadPosLeftArmPostion);
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DATA.Subscribe($"{Module}.{Name}.ReadPosRightArmPostion", () => ReadPosRightArmPostion.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadPosZAxisPostion", () => ReadPosZAxisPostion.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadPosThetaAxisPostion", () => ReadPosThetaAxisPostion.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadParameterMax", () => ReadParameterMax.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadParameterMin", () => ReadParameterMin.ToString());
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DATA.Subscribe($"{Module}.{Name}.ReadParameterValue", () => ReadParameterValue.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingFirstSlotPosition", () => MappingFirstSlotPosition.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingGateWidth", () => MappingGateWidth.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingMaxDetectWidth", () => MappingMaxDetectWidth.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingMinDetectWidth", () => MappingMinDetectWidth.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingSlotsNumber", () => MappingSlotsNumber.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingSpeed", () => MappingSpeed.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingStopPostion", () => MappingStopPostion.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingTopSlotPostion", () => MappingTopSlotPostion.ToString());
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DATA.Subscribe($"{Module}.{Name}.IsMappingSensorON", () => IsMappingSensorON.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingWaferResult", () => MappingWaferResult.ToString());
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DATA.Subscribe($"{Module}.{Name}.MappingWidthResult", () => MappingWidthResult.ToString());
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}
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private int _bodyNumber;
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private string _robotModel; //T-00902H
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public int BodyNumber { get => _bodyNumber; }
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private string _address = "";
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public string Address { get => _address; }
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private bool isSimulatorMode;
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private string _scRoot;
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private PeriodicJob _thread;
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protected JelAlignerConnection _connection;
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private R_TRIG _trigError = new R_TRIG();
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private R_TRIG _trigCommunicationError = new R_TRIG();
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private R_TRIG _trigRetryConnect = new R_TRIG();
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private R_TRIG _trigActionDone = new R_TRIG();
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private LinkedList<HandlerBase> _lstMoveHandler = new LinkedList<HandlerBase>();
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private LinkedList<HandlerBase> _lstMonitorHandler = new LinkedList<HandlerBase>();
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private bool _isAligned;
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private bool _isOnHomedPostion;
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public int TimelimitAlginerHome { get; set; }
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public int TimelimitForAlignWafer { get; set; }
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private object _locker = new object();
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private bool _enableLog;
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public string PortName;
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public bool IsConnected { get; }
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#region Properties
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public JelAxisStatus XAxisStatus { get; set; }
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public JelAxisStatus YAxisAndThetaAxisStatus { get; set; }
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public float RightArmPostion { get; set; }
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public float ThetaAxisPostion { get; set; }
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public float LeftArmPostion { get; set; }
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public float ZAxisPostion { get; set; }
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public Int32[] AData { get; set; } = new Int32[1000];
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public JelParameterData[] RobotParameters { get; set; } = new JelParameterData[2000];
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public string ReadBankNumber { get; set; } = "";
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public int ReadCassetNumber { get; set; }
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public int ReadSlotNumber { get; set; }
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public bool IsRightArmPressureSensorON { get; set; }
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public bool IsLeftArmPressureSensorON { get; set; }
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public bool IsEchoBack { get; set; }
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public JelCommandStatus CurrentCompoundCommandStatus { get; set; }
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public string StopPostionOfCompoundCommand { get; set; }
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public string[] MainRoutines { get; set; } = new string[320];
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public string[] SubRoutines { get; set; } = new string[16];
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public string CurrentReadRoutine { get; set; }
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public int HighSpeed { get; set; }
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public int LowSpeed { get; set; }
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public int DomainOfAccDec { get; set; }
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public int AccDecSpeed { get; set; }
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public int MagnificationOfFrequency { get; set; }
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public int PulsePostionOfManualSlowDown { get; set; }
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public int CurrentReadSpeedData { get; set; }
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public Int32 CurrentReadAData { get; set; }
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public Int32 ReadPosRightArmPostion { get; set; }
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public Int32 ReadPosThetaAxisPostion { get; set; }
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public Int32 ReadPosLeftArmPostion { get; set; }
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public Int32 ReadPosZAxisPostion { get; set; }
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public float ReadParameterMin { get; set; }
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public float ReadParameterMax { get; set; }
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public float ReadParameterValue { get; set; }
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//Mapping Data
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public float MappingFirstSlotPosition { get; set; }
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public float MappingTopSlotPostion { get; set; }
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public int MappingSlotsNumber { get; set; }
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public float MappingMinDetectWidth { get; set; }
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public float MappingMaxDetectWidth { get; set; }
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public float MappingGateWidth { get; set; }
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public float MappingStopPostion { get; set; }
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public float MappingSpeed { get; set; }
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public bool IsMappingSensorON { get; set; }
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public string MappingWaferResult { get; set; } = string.Empty;
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public string MappingWidthResult { get; set; } = string.Empty;
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#endregion
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#region ParseHandler
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public void ParseData(string command, string parameter, string data)
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{
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try
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{
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string datavalue = data.Replace($"${BodyNumber}", "").Replace("\r", "");
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if (command == "") ParseRobotStatus(datavalue); // Read Robot Status
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if (command == "6" || command == "6M") ParseRobotPostion(parameter, datavalue); //Read Postion Data
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if (command == "A") // Read A data
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{
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int _index;
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if (!int.TryParse(parameter.Replace("D", ""), out _index)) return;
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AData[_index] = Convert.ToInt32(datavalue);
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CurrentReadAData = Convert.ToInt32(datavalue);
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}
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if (command == "BC")
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{
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ReadBankNumber = datavalue;
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}
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if (command == "WCP")
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{
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string[] strvalues = datavalue.Split(',');
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ReadCassetNumber = Convert.ToInt32(strvalues[0]);
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ReadSlotNumber = Convert.ToInt32(strvalues[1]);
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}
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if (command == "CS")
|
|||
|
|
{
|
|||
|
|
if (parameter == "1")
|
|||
|
|
IsRightArmPressureSensorON = datavalue == "1";
|
|||
|
|
if (parameter == "2")
|
|||
|
|
IsLeftArmPressureSensorON = datavalue == "1";
|
|||
|
|
}
|
|||
|
|
if (command == "DTD")
|
|||
|
|
{
|
|||
|
|
int _index;
|
|||
|
|
if (!int.TryParse(parameter, out _index)) return;
|
|||
|
|
string[] paradata = datavalue.Split(',');
|
|||
|
|
//if (paradata.Length < 3) return;
|
|||
|
|
RobotParameters[_index].Value = paradata[0];
|
|||
|
|
RobotParameters[_index].MinValue = paradata[1];
|
|||
|
|
RobotParameters[_index].MaxValue = paradata[2];
|
|||
|
|
}
|
|||
|
|
if (command == "EE")
|
|||
|
|
{
|
|||
|
|
IsEchoBack = datavalue == "E";
|
|||
|
|
}
|
|||
|
|
if (command == "G")
|
|||
|
|
{
|
|||
|
|
if (datavalue == "0")
|
|||
|
|
CurrentCompoundCommandStatus = JelCommandStatus.InPause;
|
|||
|
|
if (datavalue == "1") CurrentCompoundCommandStatus = JelCommandStatus.InExecution;
|
|||
|
|
if (datavalue == "E") CurrentCompoundCommandStatus = JelCommandStatus.InError;
|
|||
|
|
}
|
|||
|
|
if (command == "GER")
|
|||
|
|
{
|
|||
|
|
LOG.Write("Compaund command stop postion:" + datavalue);
|
|||
|
|
}
|
|||
|
|
if (command == "IR")
|
|||
|
|
{
|
|||
|
|
int _index;
|
|||
|
|
if (!int.TryParse(parameter, out _index)) return;
|
|||
|
|
if (_index < 0 || _index > 319) return;
|
|||
|
|
MainRoutines[_index] = datavalue;
|
|||
|
|
CurrentReadRoutine = datavalue;
|
|||
|
|
}
|
|||
|
|
if (command == "IRS")
|
|||
|
|
{
|
|||
|
|
int _index = Convert.ToInt32(parameter, 16);
|
|||
|
|
if (_index < 0 || _index > 15) return;
|
|||
|
|
SubRoutines[_index] = datavalue;
|
|||
|
|
CurrentReadRoutine = datavalue;
|
|||
|
|
}
|
|||
|
|
if (command == "O")
|
|||
|
|
{
|
|||
|
|
CurrentReadSpeedData = Convert.ToInt32(datavalue);
|
|||
|
|
if (parameter == "H")
|
|||
|
|
HighSpeed = Convert.ToInt32(datavalue);
|
|||
|
|
if (parameter == "L")
|
|||
|
|
LowSpeed = Convert.ToInt32(datavalue);
|
|||
|
|
if (parameter == "S")
|
|||
|
|
DomainOfAccDec = Convert.ToInt32(datavalue);
|
|||
|
|
if (parameter == "G")
|
|||
|
|
AccDecSpeed = Convert.ToInt32(datavalue);
|
|||
|
|
if (parameter == "X")
|
|||
|
|
MagnificationOfFrequency = Convert.ToInt32(datavalue);
|
|||
|
|
if (parameter == "D")
|
|||
|
|
PulsePostionOfManualSlowDown = Convert.ToInt32(datavalue);
|
|||
|
|
}
|
|||
|
|
if (command == "PSD")
|
|||
|
|
{
|
|||
|
|
string[] stradata = datavalue.Split(',');
|
|||
|
|
ReadPosRightArmPostion = Convert.ToInt32(stradata[0].ToString());
|
|||
|
|
ReadPosThetaAxisPostion = Convert.ToInt32(stradata[1].ToString());
|
|||
|
|
ReadPosLeftArmPostion = Convert.ToInt32(stradata[2].ToString());
|
|||
|
|
ReadPosZAxisPostion = Convert.ToInt32(stradata[3].ToString());
|
|||
|
|
}
|
|||
|
|
if (command == "DTD")
|
|||
|
|
{
|
|||
|
|
string[] stradata = datavalue.Split(',');
|
|||
|
|
ReadParameterValue = Convert.ToSingle(stradata[0].ToString());
|
|||
|
|
ReadParameterMin = Convert.ToSingle(stradata[1].ToString());
|
|||
|
|
ReadParameterMax = Convert.ToSingle(stradata[2].ToString());
|
|||
|
|
}
|
|||
|
|
if (command == "WLO") // Obtaining the postion data of mapping 1st slot detected
|
|||
|
|
MappingFirstSlotPosition = Convert.ToSingle(datavalue);
|
|||
|
|
if (command == "WHI")
|
|||
|
|
MappingTopSlotPostion = Convert.ToSingle(datavalue);
|
|||
|
|
if (command == "WFC")
|
|||
|
|
MappingSlotsNumber = Convert.ToInt32(datavalue);
|
|||
|
|
if (command == "WWN")
|
|||
|
|
MappingMinDetectWidth = Convert.ToSingle(datavalue);
|
|||
|
|
if (command == "WWM")
|
|||
|
|
MappingMaxDetectWidth = Convert.ToSingle(datavalue);
|
|||
|
|
if (command == "WWG")
|
|||
|
|
MappingGateWidth = Convert.ToSingle(datavalue);
|
|||
|
|
if (command == "WEND")
|
|||
|
|
MappingStopPostion = Convert.ToSingle(datavalue);
|
|||
|
|
if (command == "WSP")
|
|||
|
|
MappingSpeed = Convert.ToSingle(datavalue);
|
|||
|
|
//if (command == "WFK")
|
|||
|
|
//{
|
|||
|
|
// MappingWaferResult = datavalue;
|
|||
|
|
// NotifySlotMapResult(CurrentInteractModule, datavalue.Replace(",", "").Replace("E", "?"));
|
|||
|
|
//}
|
|||
|
|
if (command == "WFW")
|
|||
|
|
MappingWidthResult = datavalue;
|
|||
|
|
|
|||
|
|
if(command == "WAS")
|
|||
|
|
{
|
|||
|
|
switch(datavalue)
|
|||
|
|
{
|
|||
|
|
case "2":
|
|||
|
|
Size = WaferSize.WS2;
|
|||
|
|
break;
|
|||
|
|
case "3":
|
|||
|
|
Size = WaferSize.WS3;
|
|||
|
|
break;
|
|||
|
|
case "4":
|
|||
|
|
Size = WaferSize.WS4;
|
|||
|
|
break;
|
|||
|
|
case "5":
|
|||
|
|
Size = WaferSize.WS5;
|
|||
|
|
break;
|
|||
|
|
case "6":
|
|||
|
|
Size = WaferSize.WS6;
|
|||
|
|
break;
|
|||
|
|
case "8":
|
|||
|
|
Size = WaferSize.WS8;
|
|||
|
|
break;
|
|||
|
|
case "9":
|
|||
|
|
Size = WaferSize.WS12;
|
|||
|
|
break;
|
|||
|
|
default:
|
|||
|
|
Size = WaferSize.WS0;
|
|||
|
|
break;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
if(command == "WIS1")
|
|||
|
|
{
|
|||
|
|
if (datavalue == "0")
|
|||
|
|
IsGripperHoldWafer = false;
|
|||
|
|
if (datavalue == "1")
|
|||
|
|
IsGripperHoldWafer = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
catch (Exception ex)
|
|||
|
|
{
|
|||
|
|
LOG.Write($"Parse {command}.{parameter ?? parameter} data {data} error:" + ex.ToString());
|
|||
|
|
OnError($"Parse data error:{command}.{parameter ?? parameter} data {data}");
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
private void ParseRobotStatus(string data)
|
|||
|
|
{
|
|||
|
|
if (data.Length < 2) return;
|
|||
|
|
YAxisAndThetaAxisStatus = (JelAxisStatus)Convert.ToInt16(data.ToArray()[0].ToString());
|
|||
|
|
XAxisStatus = (JelAxisStatus)Convert.ToInt16(data.ToArray()[1].ToString());
|
|||
|
|
if (YAxisAndThetaAxisStatus == JelAxisStatus.SensorError || YAxisAndThetaAxisStatus == JelAxisStatus.CommandError)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
OnError($"YAxisAndThetaAxisStatus is {YAxisAndThetaAxisStatus}");
|
|||
|
|
}
|
|||
|
|
if (XAxisStatus == JelAxisStatus.SensorError || XAxisStatus == JelAxisStatus.CommandError)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
OnError($"XAxisStatus is {XAxisStatus}");
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
private void ParseRobotPostion(string axis, string data)
|
|||
|
|
{
|
|||
|
|
float _floatvalue;
|
|||
|
|
if (!float.TryParse(data, out _floatvalue)) return;
|
|||
|
|
if (axis == "1")
|
|||
|
|
{
|
|||
|
|
RightArmPostion = _floatvalue;
|
|||
|
|
PositionAxis1 = _floatvalue;
|
|||
|
|
}
|
|||
|
|
if (axis == "2")
|
|||
|
|
{
|
|||
|
|
ThetaAxisPostion = _floatvalue;
|
|||
|
|
PositionAxis2 = _floatvalue;
|
|||
|
|
}
|
|||
|
|
if (axis == "3")
|
|||
|
|
{
|
|||
|
|
LeftArmPostion = _floatvalue;
|
|||
|
|
PositionAxis3 = _floatvalue;
|
|||
|
|
}
|
|||
|
|
if (axis == "4")
|
|||
|
|
{
|
|||
|
|
ZAxisPostion = _floatvalue;
|
|||
|
|
PositionAxis4 = _floatvalue;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
#endregion
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
public override bool IsNeedChangeWaferSize(WaferSize wz)
|
|||
|
|
{
|
|||
|
|
if(_diOcrOn200 == null || _diOcrOn200.SensorDI == null || _diOcrOn300 == null || _diOcrOn300.SensorDI == null)
|
|||
|
|
{
|
|||
|
|
return Size != wz;
|
|||
|
|
}
|
|||
|
|
if(wz == WaferSize.WS12)
|
|||
|
|
{
|
|||
|
|
if (_diOcrOn300.Value && !_diOcrOn200.Value && GetCurrentWaferSize() == wz)
|
|||
|
|
return false;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
if (wz == WaferSize.WS8)
|
|||
|
|
{
|
|||
|
|
if (!_diOcrOn300.Value && _diOcrOn200.Value && GetCurrentWaferSize() == wz)
|
|||
|
|
return false;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
public bool Connect()
|
|||
|
|
{
|
|||
|
|
return _connection.Connect();
|
|||
|
|
}
|
|||
|
|
public bool Disconnect()
|
|||
|
|
{
|
|||
|
|
return _connection.Disconnect();
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override bool fReset(object[] param)
|
|||
|
|
{
|
|||
|
|
if (!_connection.IsConnected)
|
|||
|
|
{
|
|||
|
|
_enableLog = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableLogMessage");
|
|||
|
|
_bodyNumber = SC.GetValue<int>($"{_scRoot}.{Name}.BodyNumber");
|
|||
|
|
PortName = SC.GetStringValue($"{_scRoot}.{Name}.PortName");
|
|||
|
|
|
|||
|
|
TimelimitAlginerHome = SC.GetValue<int>($"{_scRoot}.{Name}.TimeLimitAlignerHome");
|
|||
|
|
TimelimitForAlignWafer = SC.GetValue<int>($"{_scRoot}.{Name}.TimeLimitForAlignWafer");
|
|||
|
|
|
|||
|
|
_connection = new JelAlignerConnection(PortName);
|
|||
|
|
_connection.EnableLog(_enableLog);
|
|||
|
|
if (_connection.Connect())
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
EV.PostInfoLog(Module, $"{Module}.{Name} connected");
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
_trigError.RST = true;
|
|||
|
|
|
|||
|
|
_connection.SetCommunicationError(false, "");
|
|||
|
|
_trigCommunicationError.RST = true;
|
|||
|
|
|
|||
|
|
_enableLog = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableLogMessage");
|
|||
|
|
_connection.EnableLog(_enableLog);
|
|||
|
|
|
|||
|
|
_trigRetryConnect.RST = true;
|
|||
|
|
|
|||
|
|
_lstMoveHandler.Clear();
|
|||
|
|
_lstMonitorHandler.Clear();
|
|||
|
|
_connection.ForceClear();
|
|||
|
|
lock (_locker)
|
|||
|
|
{
|
|||
|
|
_lstMonitorHandler.AddLast(new JelAlignerRawCommandHandler(this, $"${BodyNumber}RD\r"));
|
|||
|
|
_lstMonitorHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|||
|
|
_lstMonitorHandler.AddLast(new JelAlignerReadHandler(this, "WIS1"));
|
|||
|
|
}
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override bool fMonitorReset(object[] param)
|
|||
|
|
{
|
|||
|
|
_isAligned = false;
|
|||
|
|
return true;
|
|||
|
|
//if (XAxisStatus == JelAxisStatus.NormalEnd
|
|||
|
|
// && (YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
|
|||
|
|
// && _lstMoveHandler.Count == 0
|
|||
|
|
// && _lstMonitorHandler.Count == 0
|
|||
|
|
// && !_connection.IsBusy)
|
|||
|
|
//{
|
|||
|
|
// IsBusy = false;
|
|||
|
|
// return true;
|
|||
|
|
//}
|
|||
|
|
//if (_lstMonitorHandler.Count == 0 && _lstMoveHandler.Count == 0 && !_connection.IsBusy)
|
|||
|
|
// _connection.Execute(new JelAlignerReadHandler(this, ""));
|
|||
|
|
//return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override bool fStartInit(object[] param)
|
|||
|
|
{
|
|||
|
|
lock (_locker)
|
|||
|
|
{
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "W0"));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, "WIS1"));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, "WAS"));
|
|||
|
|
|
|||
|
|
if (SC.ContainsItem($"{_scRoot}.{Name}.JelWaferType"))
|
|||
|
|
{
|
|||
|
|
int wafertype = SC.GetValue<int>($"{_scRoot}.{Name}.JelWaferType");
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerSetHandler(this, "WAT", wafertype.ToString()));
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
if(WaferManager.Instance.CheckHasWafer(RobotModuleName,0))
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
string strpara;
|
|||
|
|
switch (WaferManager.Instance.GetWaferSize(RobotModuleName, 0))
|
|||
|
|
{
|
|||
|
|
case WaferSize.WS2:
|
|||
|
|
case WaferSize.WS3:
|
|||
|
|
case WaferSize.WS4:
|
|||
|
|
case WaferSize.WS5:
|
|||
|
|
case WaferSize.WS6:
|
|||
|
|
case WaferSize.WS8:
|
|||
|
|
strpara = _currentSetWaferSize.ToString().Replace("WS", "");
|
|||
|
|
if (_doOcrTo200 != null && _doOcrTo200.DoTrigger != null)
|
|||
|
|
_doOcrTo200.SetTrigger(true, out _);
|
|||
|
|
if (_doOcrTo300 != null && _doOcrTo300.DoTrigger != null)
|
|||
|
|
_doOcrTo300.SetTrigger(false, out _);
|
|||
|
|
break;
|
|||
|
|
case WaferSize.WS12:
|
|||
|
|
strpara = "9";
|
|||
|
|
if (_doOcrTo200 != null && _doOcrTo200.DoTrigger != null)
|
|||
|
|
_doOcrTo200.SetTrigger(false, out _);
|
|||
|
|
if (_doOcrTo300 != null && _doOcrTo300.DoTrigger != null)
|
|||
|
|
_doOcrTo300.SetTrigger(true, out _);
|
|||
|
|
break;
|
|||
|
|
default:
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
_lstMonitorHandler.AddLast(new JelAlignerMoveHandler(this, "WAS", strpara));
|
|||
|
|
_lstMonitorHandler.AddLast(new JelAlignerReadHandler(this, "WAS"));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WMC"));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
_isAligned = false;
|
|||
|
|
_isOnHomedPostion = false;
|
|||
|
|
_dtActionStart = DateTime.Now;
|
|||
|
|
return true;
|
|||
|
|
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
private DateTime _dtActionStart;
|
|||
|
|
protected override bool fMonitorInit(object[] param)
|
|||
|
|
{
|
|||
|
|
_isAligned = false;
|
|||
|
|
if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds((double)TimelimitAlginerHome))
|
|||
|
|
OnError("Init timeout");
|
|||
|
|
if(_lstMoveHandler.Count == 0
|
|||
|
|
&& !_connection.IsBusy && XAxisStatus == JelAxisStatus.NormalEnd
|
|||
|
|
&& YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
if(IsWaferPresent(0) && WaferManager.Instance.CheckNoWafer(RobotModuleName,0))
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.CreateWafer(RobotModuleName, 0,
|
|||
|
|
WaferStatus.Normal, GetCurrentWaferSize());
|
|||
|
|
}
|
|||
|
|
if (!IsWaferPresent(0) && WaferManager.Instance.CheckHasWafer(RobotModuleName, 0))
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.DeleteWafer(RobotModuleName, 0);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
if (_lstMoveHandler.Count == 0 && !_connection.IsBusy)
|
|||
|
|
_connection.Execute(new JelAlignerReadHandler(this, ""));
|
|||
|
|
return base.fMonitorInit(param);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override bool fStartHome(object[] param)
|
|||
|
|
{
|
|||
|
|
lock (_locker)
|
|||
|
|
{
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "W0"));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, "WIS1"));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, "WAS"));
|
|||
|
|
|
|||
|
|
if (SC.ContainsItem($"{_scRoot}.{Name}.JelWaferType"))
|
|||
|
|
{
|
|||
|
|
int wafertype = SC.GetValue<int>($"{_scRoot}.{Name}.JelWaferType");
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerSetHandler(this, "WAT", wafertype.ToString()));
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
if (WaferManager.Instance.CheckHasWafer(RobotModuleName, 0))
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
string strpara;
|
|||
|
|
switch (WaferManager.Instance.GetWaferSize(RobotModuleName, 0))
|
|||
|
|
{
|
|||
|
|
case WaferSize.WS2:
|
|||
|
|
case WaferSize.WS3:
|
|||
|
|
case WaferSize.WS4:
|
|||
|
|
case WaferSize.WS5:
|
|||
|
|
case WaferSize.WS6:
|
|||
|
|
case WaferSize.WS8:
|
|||
|
|
strpara = _currentSetWaferSize.ToString().Replace("WS", "");
|
|||
|
|
if (_doOcrTo200 != null && _doOcrTo200.DoTrigger != null)
|
|||
|
|
_doOcrTo200.SetTrigger(true, out _);
|
|||
|
|
if (_doOcrTo300 != null && _doOcrTo300.DoTrigger != null)
|
|||
|
|
_doOcrTo300.SetTrigger(false, out _);
|
|||
|
|
break;
|
|||
|
|
case WaferSize.WS12:
|
|||
|
|
strpara = "9";
|
|||
|
|
if (_doOcrTo200 != null && _doOcrTo200.DoTrigger != null)
|
|||
|
|
_doOcrTo200.SetTrigger(false, out _);
|
|||
|
|
if (_doOcrTo300 != null && _doOcrTo300.DoTrigger != null)
|
|||
|
|
_doOcrTo300.SetTrigger(true, out _);
|
|||
|
|
break;
|
|||
|
|
default:
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
_lstMonitorHandler.AddLast(new JelAlignerMoveHandler(this, "WAS", strpara));
|
|||
|
|
_lstMonitorHandler.AddLast(new JelAlignerReadHandler(this, "WAS"));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WMC"));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_isAligned = false;
|
|||
|
|
|
|||
|
|
_dtActionStart = DateTime.Now;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override bool fMonitorHome(object[] param)
|
|||
|
|
{
|
|||
|
|
if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds((double)TimelimitAlginerHome))
|
|||
|
|
OnError("Home timeout");
|
|||
|
|
if (_lstMoveHandler.Count == 0
|
|||
|
|
&& !_connection.IsBusy && XAxisStatus == JelAxisStatus.NormalEnd
|
|||
|
|
&& YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
_isOnHomedPostion = true;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
if (_lstMoveHandler.Count == 0 && !_connection.IsBusy)
|
|||
|
|
_connection.Execute(new JelAlignerReadHandler(this, ""));
|
|||
|
|
return base.fMonitorHome(param);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
public override bool IsReady()
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
return AlignerState == AlignerStateEnum.Idle && !IsBusy;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override bool IsWaferPresent(int slotindex)
|
|||
|
|
{
|
|||
|
|
if (_diWaferPresent != null)
|
|||
|
|
return _diWaferPresent.Value;
|
|||
|
|
return WaferManager.Instance.CheckHasWafer(RobotModuleName, slotindex);
|
|||
|
|
}
|
|||
|
|
public override bool IsNeedPrepareBeforePlaceWafer()
|
|||
|
|
{
|
|||
|
|
return !_isOnHomedPostion;
|
|||
|
|
}
|
|||
|
|
protected override bool fStartLiftup(object[] param) //Ungrip
|
|||
|
|
{
|
|||
|
|
_dtActionStart = DateTime.Now;
|
|||
|
|
lock (_locker)
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WU"));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|||
|
|
}
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override bool fMonitorLiftup(object[] param)
|
|||
|
|
{
|
|||
|
|
if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(TimelimitForAlignWafer))
|
|||
|
|
OnError("Alignment timeout");
|
|||
|
|
|
|||
|
|
if (_lstMoveHandler.Count == 0
|
|||
|
|
&& !_connection.IsBusy && XAxisStatus == JelAxisStatus.NormalEnd
|
|||
|
|
&& YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
_isAligned = false;
|
|||
|
|
_isOnHomedPostion = false;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
if (_lstMoveHandler.Count == 0 && !_connection.IsBusy)
|
|||
|
|
_connection.Execute(new JelAlignerReadHandler(this, ""));
|
|||
|
|
|
|||
|
|
return base.fMonitorLiftup(param);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override bool fStartLiftdown(object[] param)
|
|||
|
|
{
|
|||
|
|
lock (_locker)
|
|||
|
|
{
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WD"));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|||
|
|
}
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
protected override bool fMonitorLiftdown(object[] param)
|
|||
|
|
{
|
|||
|
|
if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(TimelimitForAlignWafer))
|
|||
|
|
OnError("Alignment timeout");
|
|||
|
|
|
|||
|
|
if (_lstMoveHandler.Count == 0
|
|||
|
|
&& !_connection.IsBusy && XAxisStatus == JelAxisStatus.NormalEnd
|
|||
|
|
&& YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
_isAligned = true;
|
|||
|
|
_isOnHomedPostion = false;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
if (_lstMoveHandler.Count == 0 && !_connection.IsBusy)
|
|||
|
|
_connection.Execute(new JelAlignerReadHandler(this, ""));
|
|||
|
|
return base.fMonitorLiftdown(param);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override bool fStartAlign(object[] param)
|
|||
|
|
{
|
|||
|
|
WaferSize wz = WaferManager.Instance.GetWaferSize(RobotModuleName, 0);
|
|||
|
|
if(wz != GetCurrentWaferSize())
|
|||
|
|
{
|
|||
|
|
EV.PostAlarmLog("System", "Wafer size is not match, can't do alignment");
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
double aligneangle = (double)param[0];
|
|||
|
|
|
|||
|
|
while(aligneangle<0 || aligneangle>360)
|
|||
|
|
{
|
|||
|
|
if (aligneangle < 0)
|
|||
|
|
aligneangle += 360;
|
|||
|
|
if (aligneangle > 360)
|
|||
|
|
aligneangle -= 360;
|
|||
|
|
}
|
|||
|
|
//int speed = SC.GetValue<int>($"{_scRoot}.{Name}.AlignSpeed");
|
|||
|
|
|
|||
|
|
int intangle = (int)(aligneangle * 20000/360);
|
|||
|
|
CurrentNotch = aligneangle;
|
|||
|
|
lock (_locker)
|
|||
|
|
{
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerRawCommandHandler(this, $"${BodyNumber}RD\r"));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WUC")); //Close grip
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|||
|
|
//_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WA")); //Move down
|
|||
|
|
//_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerSetHandler(this, "WOP",intangle.ToString()));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerRawCommandHandler(this, $"${BodyNumber}RD\r"));
|
|||
|
|
if (_isAligned)
|
|||
|
|
{
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "G15")); //Align to angle compaund command
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WA")); //Align
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WDF")); //Ungrip
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, "WIS1"));
|
|||
|
|
}
|
|||
|
|
_dtActionStart = DateTime.Now;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
protected override bool fMonitorAligning(object[] param)
|
|||
|
|
{
|
|||
|
|
if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(TimelimitForAlignWafer))
|
|||
|
|
OnError("Alignment timeout");
|
|||
|
|
if (_lstMoveHandler.Count == 0
|
|||
|
|
&& !_connection.IsBusy && XAxisStatus == JelAxisStatus.NormalEnd
|
|||
|
|
&& YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
_isAligned = true;
|
|||
|
|
_isOnHomedPostion = false;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
if (_lstMoveHandler.Count == 0 && !_connection.IsBusy)
|
|||
|
|
_connection.Execute(new JelAlignerReadHandler(this, ""));
|
|||
|
|
return base.fMonitorAligning(param);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override bool fStop(object[] param)
|
|||
|
|
{
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override bool FsmAbort(object[] param)
|
|||
|
|
{
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
protected override bool fClear(object[] param)
|
|||
|
|
{
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
protected override bool fStartReadData(object[] param)
|
|||
|
|
{
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
protected override bool fStartSetParameters(object[] param)
|
|||
|
|
{
|
|||
|
|
_dtActionStart = DateTime.Now;
|
|||
|
|
_currentSetParameter = param[0].ToString();
|
|||
|
|
switch(_currentSetParameter)
|
|||
|
|
{
|
|||
|
|
case "WaferSize":
|
|||
|
|
if(GetWaferState() != RobotArmWaferStateEnum.Absent)
|
|||
|
|
{
|
|||
|
|
EV.PostAlarmLog("System","Can't set wafersize when wafer is not absent");
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
_currentSetWaferSize = (WaferSize)param[1];
|
|||
|
|
|
|||
|
|
if(WaferManager.Instance.CheckHasWafer(RobotModuleName,0))
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.UpdateWaferSize(RobotModuleName, 0, _currentSetWaferSize);
|
|||
|
|
}
|
|||
|
|
string strpara;
|
|||
|
|
switch(_currentSetWaferSize)
|
|||
|
|
{
|
|||
|
|
case WaferSize.WS2:
|
|||
|
|
case WaferSize.WS3:
|
|||
|
|
case WaferSize.WS4:
|
|||
|
|
case WaferSize.WS5:
|
|||
|
|
case WaferSize.WS6:
|
|||
|
|
case WaferSize.WS8:
|
|||
|
|
strpara = _currentSetWaferSize.ToString().Replace("WS", "");
|
|||
|
|
if (_doOcrTo200 != null && _doOcrTo200.DoTrigger!=null)
|
|||
|
|
_doOcrTo200.SetTrigger(true, out _);
|
|||
|
|
if (_doOcrTo300 != null && _doOcrTo300.DoTrigger != null)
|
|||
|
|
_doOcrTo300.SetTrigger(false, out _);
|
|||
|
|
break;
|
|||
|
|
case WaferSize.WS12:
|
|||
|
|
strpara = "9";
|
|||
|
|
if (_doOcrTo200 != null && _doOcrTo200.DoTrigger != null)
|
|||
|
|
_doOcrTo200.SetTrigger(false, out _);
|
|||
|
|
if (_doOcrTo300 != null && _doOcrTo300.DoTrigger != null)
|
|||
|
|
_doOcrTo300.SetTrigger(true, out _);
|
|||
|
|
break;
|
|||
|
|
default:
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
lock (_locker)
|
|||
|
|
{
|
|||
|
|
_lstMonitorHandler.AddLast(new JelAlignerMoveHandler(this, "WAS", strpara));
|
|||
|
|
_lstMonitorHandler.AddLast(new JelAlignerReadHandler(this, "WAS"));
|
|||
|
|
}
|
|||
|
|
break;
|
|||
|
|
}
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
private string _currentSetParameter;
|
|||
|
|
private WaferSize _currentSetWaferSize = WaferSize.WS0;
|
|||
|
|
protected override bool fMonitorSetParamter(object[] param)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds(TimelimitForAlignWafer))
|
|||
|
|
OnError("Set parameter timeout");
|
|||
|
|
switch(_currentSetParameter)
|
|||
|
|
{
|
|||
|
|
case "WaferSize":
|
|||
|
|
if(_lstMonitorHandler.Count == 0 && _lstMoveHandler.Count == 0 && !_connection.IsBusy)
|
|||
|
|
{
|
|||
|
|
if (_currentSetWaferSize != Size)
|
|||
|
|
{
|
|||
|
|
OnError($"Fail to set wafer size,set:{_currentSetWaferSize},return:{Size}");
|
|||
|
|
}
|
|||
|
|
if (_currentSetWaferSize == WaferSize.WS12)
|
|||
|
|
{
|
|||
|
|
if (_diOcrOn200 != null && _diOcrOn200.SensorDI !=null && _diOcrOn200.Value)
|
|||
|
|
return false;
|
|||
|
|
if (_diOcrOn300 != null && _diOcrOn300.SensorDI != null && !_diOcrOn300.Value)
|
|||
|
|
return false;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
if (_currentSetWaferSize == WaferSize.WS8)
|
|||
|
|
{
|
|||
|
|
if (_diOcrOn200 != null && _diOcrOn200.SensorDI != null && !_diOcrOn200.Value)
|
|||
|
|
return false;
|
|||
|
|
if (_diOcrOn300 != null && _diOcrOn300.SensorDI != null && _diOcrOn300.Value)
|
|||
|
|
return false;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
break;
|
|||
|
|
}
|
|||
|
|
return base.fMonitorSetParamter(param);
|
|||
|
|
}
|
|||
|
|
protected override bool fStartUnGrip(object[] param)
|
|||
|
|
{
|
|||
|
|
lock (_locker)
|
|||
|
|
{
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WDF"));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|||
|
|
}
|
|||
|
|
_diStartUngrip = DateTime.Now;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
private DateTime _diStartUngrip;
|
|||
|
|
protected override bool fMonitorUnGrip(object[] param)
|
|||
|
|
{
|
|||
|
|
if (DateTime.Now - _diStartUngrip > TimeSpan.FromSeconds(10))
|
|||
|
|
OnError("UnGrip timeout");
|
|||
|
|
if (_lstMoveHandler.Count == 0
|
|||
|
|
&& !_connection.IsBusy && XAxisStatus == JelAxisStatus.NormalEnd
|
|||
|
|
&& YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
if (_lstMoveHandler.Count == 0 && !_connection.IsBusy)
|
|||
|
|
_connection.Execute(new JelAlignerReadHandler(this, ""));
|
|||
|
|
return base.fMonitorUnGrip(param);
|
|||
|
|
}
|
|||
|
|
protected override bool fStartGrip(object[] param)
|
|||
|
|
{
|
|||
|
|
lock (_locker)
|
|||
|
|
{
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WUC"));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|||
|
|
}
|
|||
|
|
_diStartUngrip = DateTime.Now;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
protected override bool fMonitorGrip(object[] param)
|
|||
|
|
{
|
|||
|
|
if (DateTime.Now - _diStartUngrip > TimeSpan.FromSeconds(10))
|
|||
|
|
OnError("Grip timeout");
|
|||
|
|
if (_lstMoveHandler.Count == 0
|
|||
|
|
&& !_connection.IsBusy )
|
|||
|
|
{
|
|||
|
|
if (XAxisStatus == JelAxisStatus.NormalEnd && YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
_connection.Execute(new JelAlignerReadHandler(this, ""));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
return base.fMonitorGrip(param);
|
|||
|
|
}
|
|||
|
|
protected override bool fResetToReady(object[] param)
|
|||
|
|
{
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override bool fError(object[] param)
|
|||
|
|
{
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override void OnError(string errortext)
|
|||
|
|
{
|
|||
|
|
_isAligned = false;
|
|||
|
|
_isOnHomedPostion = false;
|
|||
|
|
_lstMonitorHandler.Clear();
|
|||
|
|
_lstMoveHandler.Clear();
|
|||
|
|
base.OnError(errortext);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override bool IsNeedRelease
|
|||
|
|
{
|
|||
|
|
get
|
|||
|
|
{
|
|||
|
|
return IsGripperHoldWafer;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override bool fStartPrepareAccept(object[] param)
|
|||
|
|
{
|
|||
|
|
_dtActionStart = DateTime.Now;
|
|||
|
|
lock (_locker)
|
|||
|
|
{
|
|||
|
|
_lstMonitorHandler.AddLast(new JelAlignerRawCommandHandler(this, $"${BodyNumber}RD\r"));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerMoveHandler(this, "WMC"));
|
|||
|
|
_lstMoveHandler.AddLast(new JelAlignerReadHandler(this, ""));
|
|||
|
|
}
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
protected override bool fMonitorPrepareAccept(object[] param)
|
|||
|
|
{
|
|||
|
|
if (DateTime.Now - _dtActionStart > TimeSpan.FromSeconds((double)TimelimitAlginerHome))
|
|||
|
|
OnError("Home timeout");
|
|||
|
|
if (_lstMoveHandler.Count == 0
|
|||
|
|
&& !_connection.IsBusy && XAxisStatus == JelAxisStatus.NormalEnd
|
|||
|
|
&& YAxisAndThetaAxisStatus == JelAxisStatus.NormalEnd)
|
|||
|
|
{
|
|||
|
|
IsBusy = false;
|
|||
|
|
_isAligned = false;
|
|||
|
|
_isOnHomedPostion = true;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
if (_lstMoveHandler.Count == 0 && !_connection.IsBusy)
|
|||
|
|
_connection.Execute(new JelAlignerReadHandler(this, ""));
|
|||
|
|
|
|||
|
|
return base.fMonitorPrepareAccept(param);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
}
|