diff --git a/MECF.Framework.RT.EquipmentLibrary/Devices/IoPressureBalanceChecker.cs b/MECF.Framework.RT.EquipmentLibrary/Devices/IoPressureBalanceChecker.cs
new file mode 100644
index 0000000..be69fd5
--- /dev/null
+++ b/MECF.Framework.RT.EquipmentLibrary/Devices/IoPressureBalanceChecker.cs
@@ -0,0 +1,87 @@
+using Aitex.Core.RT.Device;
+using Aitex.Core.RT.Device.Unit;
+using Aitex.Core.RT.Event;
+using Aitex.Core.RT.IOCore;
+using Aitex.Core.RT.SCCore;
+using Aitex.Core.RT.Tolerance;
+using MECF.Framework.Common.Event;
+using System;
+using System.Collections.Generic;
+using System.Drawing;
+using System.Linq;
+using System.Security.Cryptography;
+using System.Text;
+using System.Threading.Tasks;
+using System.Xml;
+
+namespace Aitex.Core.RT.Device.Devices
+{
+    public class IoPressureBalanceChecker : BaseDevice, IDevice
+    {
+        private readonly AIAccessor _aiValue1 = null;
+        private readonly AIAccessor _aiValue2 = null;
+        private readonly string _formatString = "0.0";
+
+        private double _threshold = 8;
+        private double _value = 0;
+
+        /// <summary>
+        /// 误差超限警告检查器
+        /// </summary>
+        private readonly ToleranceChecker _balanceChecker;
+
+        public string Value => _value.ToString(_formatString);
+        public IoPressureBalanceChecker(string module, XmlElement node, string ioModule = "") : base(module, node, ioModule)
+        {
+            _aiValue1 = ParseAiNode("aiValue1", node, ioModule);
+            _aiValue2 = ParseAiNode("aiValue2", node, ioModule);
+
+            _balanceChecker = new ToleranceChecker(5);
+
+            if (node.HasAttribute("formatString"))
+                _formatString = string.IsNullOrEmpty(node.GetAttribute("formatString")) ? "F5" : node.GetAttribute("formatString");
+        }
+
+        public bool Initialize()
+        {
+            _threshold = SC.GetValue<double>($"PM.{Module}.Heater.PressureBalanceDifference");
+            return true;
+        }
+
+        private bool ResetChecker()
+        {
+            _balanceChecker.Reset(5);
+            return true;
+        }
+
+        public void Reset()
+        {
+            _balanceChecker.Reset(5);
+        }
+
+        public void Terminate()
+        {
+            _balanceChecker.Reset(5);
+        }
+
+        protected override void HandleMonitor()
+        {
+            _value = _aiValue1.Value - _aiValue2.Value;
+            _balanceChecker.Monitor(_value, -_threshold, _threshold, 5);
+            if (_balanceChecker.Trig)
+            {
+                var alarmLevel = SC.SafeGetStringValue($"PM.{Module}.Heater.PressureImbalanceAlarmLevel", "Warning");
+                if (alarmLevel == "Warning")
+                {
+                    EV.PostWarningLog(Module, $"PT1:{_aiValue1}({_aiValue1.Value})/PT2:{_aiValue2}({_aiValue2.Value}) Pressure out of balance(threshold:{_threshold})");
+                } 
+                else
+                {
+                    EV.PostAlarmLog(Module, $"PT1:{_aiValue1}({_aiValue1.Value})/PT2:{_aiValue2}({_aiValue2.Value}) Pressure out of balance(threshold:{_threshold})");
+                }
+                    
+            }
+            
+        }
+    }
+}
diff --git a/MECF.Framework.RT.EquipmentLibrary/MECF.Framework.RT.EquipmentLibrary.csproj b/MECF.Framework.RT.EquipmentLibrary/MECF.Framework.RT.EquipmentLibrary.csproj
index 6d820bb..83e6a7a 100644
--- a/MECF.Framework.RT.EquipmentLibrary/MECF.Framework.RT.EquipmentLibrary.csproj
+++ b/MECF.Framework.RT.EquipmentLibrary/MECF.Framework.RT.EquipmentLibrary.csproj
@@ -78,6 +78,7 @@
     <Compile Include="Devices\AdsIoProvider.cs" />
     <Compile Include="Devices\DoSensor.cs" />
     <Compile Include="Devices\IoLineHeater.cs" />
+    <Compile Include="Devices\IoPressureBalanceChecker.cs" />
     <Compile Include="Devices\IoSensorAnalog.cs" />
     <Compile Include="Devices\IoBottomSection.cs" />
     <Compile Include="Devices\IoChamberMoveBody.cs" />