text/microsoft-resx 1.3 System.Resources.ResXResourceReader, System.Windows.Forms, Version=2.0.3500.0, Culture=neutral, PublicKeyToken=b77a5c561934e089 System.Resources.ResXResourceWriter, System.Windows.Forms, Version=2.0.3500.0, Culture=neutral, PublicKeyToken=b77a5c561934e089 Start Start to process Skip Skip current step Pause Pause process when finishing current step Continue Continue to process Abort Abort process Monitor Open the real-time process data monitor Select Select recipe Recipe Recipe Step No Step Time(s) Step Name Recipe Time(s) Mol Flow Source Lock Lock Recipe Update In Process Update recipe when processing Gas Flow Statistic Gas Flow History Search Name Run(m³) Vent(m³) Total(m³) Duration Power(kWh) Atm Idle Switch to idle state and remain at atmospheric pressure Vac Idle Switch to idle state and remain at vaccuum pressure ProcessIdle Switch to idle state and prepare to run the process ExchangeTCS ExchangeTCS ExchangeTMA ExchangeTMA Isolation Isolation LeakCheck LeakCheck Reactor Status Reactor Service Sensor Cooling Water Resistance ChamLidClosed ChamCabDoorClosed GBDoorClosed GBWaterLeak PRWaterLeak ReactorWaterLeak ChamPressAboveATM DORPressVAC Water1 Water2 R (Ω) PSU1 Resistance(Ω) PSU2 Resistance(Ω) PSU3 Resistance(Ω) SCR1 Resistance(Ω) SCR2 Resistance(Ω) SCR3 Resistance(Ω) MFC Set Reactor Pressure(mbar) Flow(sccm) RampTime(s) StandardMFC DifferentialPressure Pressure1(mbar) Pressure2(mbar) Pressure3(mbar) Pressure4(mbar) MeanPressureDifference MFCActualFlow MFCSetFlow ReactorVolume ReactorTemp PressureRecordingInterval (s) SetFlow (sccm) Pressure SetStandardMFC MFCRange Deviation RORTestResult Restore Discard changes and Restore to the baseline recipe To Baseline Recipe Save Save changes to the baseline recipe Accumulated Gas Flow Statistic (sccm)