OK
Notification
Exit
Process Alarm
Continue
Abort
Select Recipe
Select
Close
Select All
Unselect
Default
Data
Color
Width
Display Data Items Panel
Auto Zoom
Event List
Detail
Type
Time
Description
Query Condition
Start Time
End Time
Query Option
Alarm
Warning
Information
Extra Condition
Key Words
Query
Export
Type
Time
System
Content
Result：
Records
Device Name:
Unit:
Max:
Default:
Feedback:
Setpoint:
Set
Cancel
Device Set Point
Valve Name：{0}
Device ID：{1}
Default：{2}
SetPoint：{3}
Status：{4}
{0}：{1}
ID：{2}
Feedback：{3} {4}
{0}：{1}
ID：{2}
Scale：{3} {4}
SetPoint：{5} {4}
Feedback：{6} {4}
Tolerance：{7}%
Status：{8}
{0}：{1}
ID：{2}
Feedback：{3} {4}
{0}：{1}
ID：{2}
Feedback：{3} {4}
Tolerance：{5}
{0}：{1}
ID：{2}
Feedback：{3} {4}
Tolerance：{5}
{0}：{1}
ID：{2}
Feedback：{3}
{0}：{1}
ID：{2}
Forward Power：{3} w
Reflect Power：{4} w
SetPoint：{5} w
{0}：{1}
ID：{2}
Forward Power：{3} w
Voltage：{4}
Current：{5}
SetPoint：{6} w
{0}：{1}
ID：{2}
Feedback：{3} {4}
Tolerance：{5}
Broken：{6}
{0}：{1}
ID：{2}
Work Mode：{3}
Position：{4}
Pressure：{5} mTorr
{0}：{1}
ID：{2}
Scale：{3} {4}
SetPoint：{5} {4}
Feedback：{6} {4}
Tolerance：{7}%
Status：{8}
Open Valve
Close Valve
Pump N2 Purge
Cooling Water