text/microsoft-resx
1.3
System.Resources.ResXResourceReader, System.Windows.Forms, Version=2.0.3500.0, Culture=neutral, PublicKeyToken=b77a5c561934e089
System.Resources.ResXResourceWriter, System.Windows.Forms, Version=2.0.3500.0, Culture=neutral, PublicKeyToken=b77a5c561934e089
Start
Start to process
Skip
Skip current step
Pause
Pause process when finishing current step
Continue
Continue to process
Abort
Abort process
Monitor
Open the real-time process data monitor
Select
Select recipe
Recipe
Recipe
Step No
Step Time(s)
Step Name
Recipe Time(s)
Mol
Flow
Source
Lock
Lock Recipe
Update In Process
Update recipe when processing
Gas Flow Statistic
Gas Flow History Search
Name
Run(m³)
Vent(m³)
Total(m³)
Duration
Power(kWh)
Atm Idle
Switch to idle state and remain at atmospheric pressure
Vac Idle
Switch to idle state and remain at vaccuum pressure
ProcessIdle
Switch to idle state and prepare to run the process
ExchangeTCS
ExchangeTCS
ExchangeTMA
ExchangeTMA
Isolation
Isolation
LeakCheck
LeakCheck
Reactor Status
Reactor Service
Sensor
Cooling Water
Resistance
ChamLidClosed
ChamCabDoorClosed
GBDoorClosed
GBWaterLeak
PRWaterLeak
ReactorWaterLeak
ChamPressAboveATM
DORPressVAC
Water1
Water2
R (Ω)
PSU1 Resistance(Ω)
PSU2 Resistance(Ω)
PSU3 Resistance(Ω)
SCR1 Resistance(Ω)
SCR2 Resistance(Ω)
SCR3 Resistance(Ω)
MFC Set
Reactor Pressure(mbar)
Flow(sccm)
RampTime(s)
StandardMFC
DifferentialPressure
Pressure1(mbar)
Pressure2(mbar)
Pressure3(mbar)
Pressure4(mbar)
MeanPressureDifference
MFCActualFlow
MFCSetFlow
ReactorVolume
ReactorTemp
PressureRecordingInterval (s)
SetFlow (sccm)
Pressure
SetStandardMFC
MFCRange
Deviation
RORTestResult
Restore
Discard changes and Restore to the baseline recipe
To Baseline Recipe
Save
Save changes to the baseline recipe
Accumulated Gas Flow Statistic (sccm)