using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; namespace Aitex.Core.RT.Device.PmDevices { public class DicMode { public enum FlowMode { Purge, Vent, Run, Close, } public enum ArH2Switch { Ar, H2, } public enum HeaterControlMode { Pyro, // 2704 PID自动控温 Power, // 2704 功率控制 Hold, // 作废 PyroAuto, // Recipe配置PSU1-3控制逻辑,2704_L1:功率百分比;2704_L2、2704_L3:PID PyroFollow // Recipe配置PSU1-3控制逻辑,2704_L2:PID;2704_L1、2704_L3:功率按Recipe设定之比例由程序改变功率 } } }