namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot { public enum RobotUnit { Robot = 1, Aligner = 2, } public enum EventType { Error = 100, Aligner = 140, } public enum SpeedType { H, //No-wafer transfer speed, M, //With-wafer transfer speed L, //Low speed O, //Home speed B, //Speed in low-speed-area } public enum StateBit { LowBattery = 0x10, //1: Low battery voltage, 0: Normal state Ready = 0x20, //1: Ready, 0: Busy ServorOff = 0x40, //1: Servo OFF, 0: Servo ON Error = 0x80, //Error occurrence, 0: No error occurrence CtrlLowBattery =0x01, //1: Low battery voltage, 0: Normal state WaferOnBlade1 = 0x02, //(1: Has wafer, 0: No wafer) WaferOnBlade2 = 0x04, //(1: Has wafer, 0: No wafer) WaferOnBlade3 = 0x08, //(1: Has wafer, 0: No wafer) WaferOnBlade4 = 0x10, //(1: Has wafer, 0: No wafer) WaferOnGrip = 0x02, // WaferOnCCD = 0x04, // } public class ProtocolTag { public const string tag_end = "\r"; public const string tag_cmd_start = "$"; public const string cmd_token = ","; public const string resp_tag_normal = "$"; public const string resp_tag_error = "?"; public const string resp_tag_excute = "!"; public const string resp_tag_event = ">"; public const string resp_evt_error = "100"; } }