using System;
using System.Runtime.Serialization;

namespace MECF.Framework.Common.Equipment
{
	[Serializable]
	[DataContract]
	public enum ModuleName
	{
		[EnumMember]
		System,
		[EnumMember]
		LP1,
		[EnumMember]
		LP2,
		[EnumMember]
		LP3,
		[EnumMember]
		LP4,
		[EnumMember]
		LP5,
		[EnumMember]
		LP6,
		[EnumMember]
		LP7,
		[EnumMember]
		LP8,
		[EnumMember]
		LP9,
		[EnumMember]
		LP10,
		[EnumMember]
		VaccumRobot,
		[EnumMember]
		LoadRobot,
		[EnumMember]
		EfemRobot,
		[EnumMember]
		TMRobot,
		[EnumMember]
		Upender,
		[EnumMember]
		EFEM,
		[EnumMember]
		Aligner,
		[EnumMember]
		Aligner1,
		[EnumMember]
		Aligner2,
		[EnumMember]
		AlignerA,
		[EnumMember]
		AlignerB,
		[EnumMember]
		LL1,
		[EnumMember]
		LL2,
		[EnumMember]
		LL3,
		[EnumMember]
		LL4,
		[EnumMember]
		LL5,
		[EnumMember]
		LL6,
		[EnumMember]
		LL7,
		[EnumMember]
		LL8,
		[EnumMember]
		LLA,
		[EnumMember]
		LLB,
		[EnumMember]
		LLC,
		[EnumMember]
		LLD,
		[EnumMember]
		LLE,
		[EnumMember]
		LLF,
		[EnumMember]
		LLG,
		[EnumMember]
		LLH,
		[EnumMember]
		VCE1,
		[EnumMember]
		VCE2,
		[EnumMember]
		VCEA,
		[EnumMember]
		VCEB,
		[EnumMember]
		TM,
		[EnumMember]
		Cooling1,
		[EnumMember]
		Cooling2,
		[EnumMember]
		Buffer,
		[EnumMember]
		Buffer1,
		[EnumMember]
		Buffer2,
		[EnumMember]
		Buffer3,
		[EnumMember]
		Buffer4,
		[EnumMember]
		Buffer5,
		[EnumMember]
		Buffer6,
		[EnumMember]
		PM,
		[EnumMember]
		PM1,
		[EnumMember]
		PM2,
		[EnumMember]
		PM3,
		[EnumMember]
		PM4,
		[EnumMember]
		PM5,
		[EnumMember]
		PM6,
		[EnumMember]
		PM7,
		[EnumMember]
		PM8,
		[EnumMember]
		PMA,
		[EnumMember]
		PMB,
		[EnumMember]
		PMC,
		[EnumMember]
		PMD,
		[EnumMember]
		Spin1L,
		[EnumMember]
		Spin1H,
		[EnumMember]
		Spin2L,
		[EnumMember]
		Spin2H,
		[EnumMember]
		Spin3L,
		[EnumMember]
		Spin3H,
		[EnumMember]
		Spin4L,
		[EnumMember]
		Spin4H,
		[EnumMember]
		Spin5L,
		[EnumMember]
		Spin5H,
		[EnumMember]
		Spin6L,
		[EnumMember]
		Spin6H,
		[EnumMember]
		LDULD,
		[EnumMember]
		BufferOut,
		[EnumMember]
		BufferIn,
		[EnumMember]
		Dryer,
		[EnumMember]
		QDR,
		[EnumMember]
		Robot,
		[EnumMember]
		Handler,
		[EnumMember]
		WIDReader1,
		[EnumMember]
		WIDReader2,
		[EnumMember]
		LL1IN,
		[EnumMember]
		LL1OUT,
		[EnumMember]
		LL2IN,
		[EnumMember]
		LL2OUT,
		[EnumMember]
		TurnOverStation,
		[EnumMember]
		Host,
		[EnumMember]
		PTR,
		[EnumMember]
		Cooling,
		[EnumMember]
		Cassette,
		[EnumMember]
		CassInnerL,
		[EnumMember]
		CassInnerR,
		[EnumMember]
		CassOuterL,
		[EnumMember]
		CassOuterR,
		[EnumMember]
		CassAL,
		[EnumMember]
		CassAR,
		[EnumMember]
		CassBL,
		[EnumMember]
		CassBR,
		[EnumMember]
		Shuttle,
		[EnumMember]
		CoolingBuffer1,
		[EnumMember]
		CoolingBuffer2,
		[EnumMember]
		LoadLock,
		[EnumMember]
		SMIFLeft,
		[EnumMember]
		SMIFRight,
		[EnumMember]
		SMIFA,
		[EnumMember]
		SMIFB,
		[EnumMember]
		SPM1,
		[EnumMember]
		SPM2,
		[EnumMember]
		BRM1,
		[EnumMember]
		BRM2,
		[EnumMember]
		CCU,
		[EnumMember]
		Buffer7,
		[EnumMember]
		Buffer8,

		[EnumMember]
		TurnStation,
	
		[EnumMember]
		UnLoad,
		[EnumMember]
		WaferRobot,
		[EnumMember]
		TrayRobot,
		[EnumMember]
		Load,

		/// <summary>
		/// 未定义的模组名称。
		/// </summary>
        [EnumMember]
        UnDefined = int.MaxValue
    }
}