using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; using Aitex.Core.RT.Device.Unit; namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks { public interface ILoadLock { bool CheckAtm(); bool CheckVacuum(); bool SetFastVentValve(bool isOpen, out string reason); bool SetSlowVentValve(bool isOpen, out string reason); bool SetFastPumpValve(bool isOpen, out string reason); bool SetSlowPumpValve(bool isOpen, out string reason); bool CheckLidOpen(); bool CheckLidClose(); bool SetLift(bool isUp, out string reason); bool CheckLiftUp(); bool CheckLiftDown(); bool CheckTrayClamped(); bool CheckTrayUnClamped(); bool SetTrayClamped(bool clamp, out string reason); bool CheckWaferClamped(); bool CheckWaferUnClamped(); bool SetWaferClamped(bool clamp, out string reason); bool CheckWaferPlaced(); bool CheckTrayPlaced(); } }