namespace MECF.Framework.UI.Client.RecipeEditorLib.RecipeModel { /// /// Recipe参数控制名称定义。 /// public static class RecipeControlNames { public const string STEP_NO = "StepNo"; public const string STEP_NAME = "Name"; public const string STEP_TIME = "Time"; public const string COATING_RATE = "GrowthRate"; public const string TMA_FLOW_MODE = "TMA.SetValve"; public const string TCS_FLOW_MODE = "TCS.SetValve"; } //Recipe列名编号(名称带_的为组名) /*public enum RecipColNo { Step_Information = 0, StepUid, StepNo, Name, StepTime, GrowthRate, SHFlow_SHTotalFlow, ArH2Switch, SHTotalFlow, CarrayGasFlow, SHTotalFlowSplitRatio, FlowSetMode, Pressure_Rotation, PressureSet, RotationSet, Temperature_ControlMode, PSUControlMode, PSUSetMode, SCRControlMode, SCRSetMode, Temperature_TempSetting, PSUInnerTempSet, PSUMiddleTempSet, PSUOuterTempSet, SCRTempSet, Temperature_HeaterOutput, PSUInnerRatioSet, PSUMiddleRatioSet, PSUOuterRatioSet, SCRUpperRatioSet, SCRMiddleRatioSet, SCRLowerRatioSet, SHFlow_SiSourceSi_SourceTotalFlow, SiSourceTotalFlow, SHFlow_SiSource_SiH4Flow, SiH4FlowMode, SiH4Flow, SHFlow_SiSource_TCSFlow, TCSFlowMode, TCSBubbLowFlow, TCSBubbHighFlow, TCSPushFlow, TCSBubbPressure, SHFlow_SiSource_HCLFlow, HCLFlowMode, HCLFlow, SHFlow_SiSource_SiSourSplit, SiSourceSplitRatio, SiSourcePushPressure, SiSourceInnerFlow, SiSourceMiddleFlow, SiSourceOuterFlow, SHFlow_CSource_CSourceTotalFlow, CSourceTotalFlow, SHFlow_CSource_C2H4Flow, C2H4FlowMode, C2H4Flow, SHFlow_CSource_CSourceSplit, CSourceSplitRatio, CSourcePushPressure, CSourceInnerFlow, CSourceMiddleFlow, CSourceOuterFlow, SHFlow_Dope_DopeTotalFlow, DopeTotalFlow, SHFlow_Dope_N2Flow, N2FlowMode, N2ActualFlow, N2LowFlow, DilutFlowForN2, DilutedN2Flow, N2PostDilutPressure, N2HighFlowMode, N2HighFlow, SHFlow_Dope_TMAFlow, TMAFlowMode, TMABubbFlow, TMAPushFlow, TMABubbPressure, SHFlow_Dope_DopeSplit, DopeSplitRatio, DopePushPressure, DopeInnerFlow, DopeMiddleFlow, DopeOuterFlow, SHFlow_SHPushFlow, SHPushTotalFlow, SHInnerFlow, SHMiddleFlow, SHOuterFlow, InnerPushFlow, MiddlePushFlow, OuterPushFlow, Purge_SHPeripheryPurge, SHPurgeFlow, GRPurgeMainFlow, Purge_ChamberPeripheryPurge, OpticPurgeMainFlow, ChamberPurgeFlow, RotationUpPurgeFlow, ShutterPurgeFlow, HeaterWFPurgeFlow, Purge_VentFlow, TotalVentFlow, VentPushFlow, VentPreExhaustPressure }*/ }