namespace RecipeEditorLib.RecipeModel.Params
{
    //Recipe列名编号(名称带_的为组名)
    public enum RecipColNo
    {
        Step_Information = 0,
        StepNo,
        Name,
        Time,
        SHFlow_SHTotalFlow,
        ArH2Switch,
        SHTotalFlow,
        CarrayGasFlow,
        SHTotalFlowSplitRatio,
        FlowSetMode,
        Pressure_Rotation,
        PressureSet,
        RotationSet,
        Temperature_ControlMode,
        PSUControlMode,
        PSUSetMode,
        SCRControlMode,
        SCRSetMode,
        Temperature_TempSetting,
        PSUInnerTempSet,
        PSUMiddleTempSet,
        PSUOuterTempSet,
        SCRTempSet,
        Temperature_HeaterOutput,
        PSUInnerRatioSet,
        PSUMiddleRatioSet,
        PSUOuterRatioSet,
        SCRUpperRatioSet,
        SCRMiddleRatioSet,
        SCRLowerRatioSet,
        SHFlow_SiSourceSi_SourceTotalFlow,
        SiSourceTotalFlow,
        SHFlow_SiSource_SiH4Flow,
        SiH4FlowMode,
        SiH4Flow,
        SHFlow_SiSource_TCSFlow,
        TCSFlowMode,
        TCSBubbLowFlow,
        TCSBubbHighFlow,
        TCSPushFlow,
        TCSBubbPressure,
        SHFlow_SiSource_HCLFlow,
        HCLFlowMode,
        HCLFlow,
        SHFlow_SiSource_SiSourSplit,
        SiSourceSplitRatio,
        SiSourcePushPressure,
        SiSourceInnerFlow,
        SiSourceMiddleFlow,
        SiSourceOuterFlow,
        SHFlow_CSource_CSourceTotalFlow,
        CSourceTotalFlow,
        SHFlow_CSource_C2H4Flow,
        C2H4FlowMode,
        C2H4Flow,
        SHFlow_CSource_CSourceSplit,
        CSourceSplitRatio,
        CSourcePushPressure,
        CSourceInnerFlow,
        CSourceMiddleFlow,
        CSourceOuterFlow,
        SHFlow_Dope_DopeTotalFlow,
        DopeTotalFlow,
        SHFlow_Dope_N2Flow,
        N2FlowMode,
        N2ActualFlow,
        N2LowFlow,
        DilutFlowForN2,
        DilutedN2Flow,
        N2PostDilutPressure,
        N2HighFlowMode,
        N2HighFlow,
        SHFlow_Dope_TMAFlow,
        TMAFlowMode,
        TMABubbFlow,
        TMAPushFlow,
        TMABubbPressure,
        SHFlow_Dope_DopeSplit,
        DopeSplitRatio,
        DopePushPressure,
        DopeInnerFlow,
        DopeMiddleFlow,
        DopeOuterFlow,
        SHFlow_SHPushFlow,
        SHPushTotalFlow,
        SHInnerFlow,
        SHMiddleFlow,
        SHOuterFlow,
        InnerPushFlow,
        MiddlePushFlow,
        OuterPushFlow,
        Purge_SHPeripheryPurge,
        SHPurgeFlow,
        GRPurgeMainFlow,
        Purge_ChamberPeripheryPurge,
        OpticPurgeMainFlow,
        ChamberPurgeFlow,
        RotationUpPurgeFlow,
        ShutterPurgeFlow,
        HeaterWFPurgeFlow,
        Purge_VentFlow,
        TotalVentFlow,
        VentPushFlow,
        VentPreExhaustPressure
    }
}