153 lines
4.5 KiB
C#
153 lines
4.5 KiB
C#
using System;
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using Sicentury.Core;
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namespace MECF.Framework.RT.Core.Managers.PDS
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{
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public class ProcessDataStatPerRun : BindableBase
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{
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#region Variables
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private DateTime _statStart;
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private DateTime? _statEnd;
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#endregion
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#region Constructors
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public ProcessDataStatPerRun(int index, Guid uid, string module, string recipeName, string waferUid, DateTime beginTime, DateTime endTime, double h2,
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double ar,
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double pn2, double hcl, double sih4, double cxhx, double tcs, double tma, double heaterPowerConsumption) : this(module)
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{
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Index = index;
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Module = module;
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StatisticsUid = uid;
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RecipeName = recipeName;
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WaferId = waferUid;
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StatisticsStart = beginTime;
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StatisticsEnd = endTime;
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H2.Total = h2;
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Ar.Total = ar;
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PN2.Total = pn2;
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HCL.Total = hcl;
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SiH4.Total = sih4;
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C2H4.Total = cxhx;
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TCS.Total = tcs;
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TMA.Total = tma;
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HeaterPowerConsumption.Total = heaterPowerConsumption;
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}
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public ProcessDataStatPerRun(string module)
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{
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StatisticsUid = Guid.NewGuid();
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Module = module;
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WaferId = string.Empty;
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RecipeName = string.Empty;
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StatisticsStart = DateTime.Now;
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H2 = new ProcessDataStatCounter(nameof(H2), module, FilterSccmToSccs);
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Ar = new ProcessDataStatCounter(nameof(Ar), module, FilterSccmToSccs);
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PN2 = new ProcessDataStatCounter(nameof(PN2), module, FilterSccmToSccs);
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HCL = new ProcessDataStatCounter(nameof(HCL), module, FilterSccmToSccs);
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SiH4 = new ProcessDataStatCounter(nameof(SiH4), module, FilterSccmToSccs);
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C2H4 = new ProcessDataStatCounter(nameof(C2H4), module, FilterSccmToSccs);
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TCS = new ProcessDataStatCounter(nameof(TCS), module, FilterSccmToSccs);
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TMA = new ProcessDataStatCounter(nameof(TMA), module, FilterSccmToSccs);
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// 加热器瞬时功率单位为KW，需转换为KWs再进行积分
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HeaterPowerConsumption = new ProcessDataStatCounter(nameof(HeaterPowerConsumption), module,
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FilterKwhToKws, new[]
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{
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$"{module}.PSU1.OutputPowerFeedBack",
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$"{module}.PSU2.OutputPowerFeedBack",
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$"{module}.PSU3.OutputPowerFeedBack",
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$"{module}.SCR1.PowerFeedBack",
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$"{module}.SCR2.PowerFeedBack",
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$"{module}.SCR3.PowerFeedBack"
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});
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}
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public ProcessDataStatPerRun(string module, string waferId) : this(module)
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{
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WaferId = waferId;
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}
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#endregion
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#region Properties
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public int Index { get; set; }
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public string Module { get; set; }
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public string WaferId { get; }
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public string RecipeName { get; internal set; }
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public Guid StatisticsUid { get; }
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public DateTime StatisticsStart
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{
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get => _statStart;
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set => Set(ref _statStart, value);
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}
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public DateTime? StatisticsEnd
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{
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get => _statEnd;
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set => Set(ref _statEnd, value);
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}
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public ProcessDataStatCounter H2 { get; }
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public ProcessDataStatCounter Ar { get; }
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public ProcessDataStatCounter PN2 { get; }
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public ProcessDataStatCounter HCL { get; }
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public ProcessDataStatCounter SiH4 { get; }
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public ProcessDataStatCounter C2H4 { get; }
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public ProcessDataStatCounter TCS { get; }
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public ProcessDataStatCounter TMA { get; }
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public ProcessDataStatCounter HeaterPowerConsumption { get; }
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#endregion
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#region Methods
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private double FilterSccmToSccs(double sccm)
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{
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return sccm / 60.0d;
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}
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private double FilterKwhToKws(double kwh)
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{
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return kwh / 3600.0d;
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}
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/// <summary>
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/// 累加工艺数据。
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/// </summary>
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public void Accumulate()
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{
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H2.Accumulate();
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Ar.Accumulate();
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PN2.Accumulate();
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HCL.Accumulate();
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SiH4.Accumulate();
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C2H4.Accumulate();
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TCS.Accumulate();
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TMA.Accumulate();
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HeaterPowerConsumption.Accumulate();
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}
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#endregion
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}
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}
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