35 lines
830 B
C#
35 lines
830 B
C#
using System;
|
||
using System.Collections.Generic;
|
||
using System.Linq;
|
||
using System.Text;
|
||
using System.Threading.Tasks;
|
||
|
||
namespace Aitex.Core.RT.Device.PmDevices
|
||
{
|
||
public class DicMode
|
||
{
|
||
public enum FlowMode
|
||
{
|
||
Purge,
|
||
Vent,
|
||
Run,
|
||
Close,
|
||
}
|
||
|
||
public enum ArH2Switch
|
||
{
|
||
Ar,
|
||
H2,
|
||
}
|
||
|
||
public enum HeaterControlMode
|
||
{
|
||
Pyro, // 2704 PID自动控温
|
||
Power, // 2704 功率控制
|
||
Hold, // 作废
|
||
PyroAuto, // Recipe配置PSU1-3控制逻辑，2704_L1:功率百分比；2704_L2、2704_L3：PID
|
||
PyroFollow // Recipe配置PSU1-3控制逻辑，2704_L2:PID；2704_L1、2704_L3：功率按Recipe设定之比例由程序改变功率
|
||
}
|
||
}
|
||
}
|