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Sic.Framework-Nanjing-Baishi/MECF.Framework.Common/Aitex/Core/Common
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SL 6db597171b [RT.Equipment] 
IoPSU中增加属性OutputLimitHigh、OutputLimitLow。
IoPSU中新增数据注册，用于后期Trace和查询。
IoPSU中增加修改1600℃功能，可修改OutputLimitHigh生效温度。
 		2023-08-02 17:33:02 +08:00
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DeviceData [RT.Equipment] 2023-08-02 17:33:02 +08:00
EnumE90Status.cs Add project files. 2023-04-13 11:51:03 +08:00
EnumWaferProcessStatus.cs Add project files. 2023-04-13 11:51:03 +08:00
ProcessStatus.cs Add project files. 2023-04-13 11:51:03 +08:00
SubstAccessType.cs Add project files. 2023-04-13 11:51:03 +08:00
SubstHistory.cs Add project files. 2023-04-13 11:51:03 +08:00
SubstrateTransportStatus.cs Add project files. 2023-04-13 11:51:03 +08:00
WaferInfoRt.cs [Common] 2023-06-12 13:48:19 +08:00
WaferSize.cs [Common] 2023-04-21 10:14:39 +08:00
WaferStatus.cs Add project files. 2023-04-13 11:51:03 +08:00
WaferTrayStatus.cs Add project files. 2023-04-13 11:51:03 +08:00