377 lines
21 KiB
C#
377 lines
21 KiB
C#
using MECF.Framework.Common.DataCenter;
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using MECF.Framework.UI.Client.RecipeEditorLib.RecipeModel.Params;
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using System;
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using MECF.Framework.Common.Equipment;
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namespace MECF.Framework.UI.Client.RecipeEditorLib.RecipeModel
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{
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/// <summary>
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/// 配方步骤气体流量计算器基类。
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/// <br/>
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/// 同时，该类也作为默认计算器使用；如果构造<see cref="RecipeData"/>时没有指定
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/// 计算器对象实例，则默认使用此计算器。
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/// </summary>
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public class RecipeGasFlowCalculatorBase : IRecipeGasFlowCalculator
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{
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#region Properties
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public virtual string NameTcsBubbleLowFlow => "Mfc11.Ramp";
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public virtual string NameTcsBubbleHighFlow => "Mfc10.Ramp";
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public virtual string NameTcsPushFlow => "Mfc12.Ramp";
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public virtual string NameTcsFlowMode => "TCS.SetValve";
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public virtual string NameTmaBubbleFlow => "Mfc7.Ramp";
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public virtual string NameTmaPushFlow => "Mfc8.Ramp";
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public virtual string NameTmaFlowMode => "TMA.SetValve";
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public virtual string NameSiSourceSplitRatio => "SiSourSplitRatio";
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public virtual string NameSiSourceTotalFlow => "SiSourTotalFlow";
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public virtual string NameSiSourceInnerFlow => "Mfc23.Ramp";
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public virtual string NameSiSourceMiddleFlow => "Mfc22.Ramp";
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public virtual string NameSiSourceOuterFlow => "Mfc9.Ramp";
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public virtual string NameCxHxFlow => "Mfc16.Ramp";
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public virtual string NameCxHxFlowMode => "C2H4.SetValve";
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public virtual string NameCSourceSplitRatio => "CSourSplitRatio";
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public virtual string NameCSourceTotalFlow => "CSourTotalFlow";
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public virtual string NameCSourcePushFlow => "Mfc15.Ramp";
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public virtual string NameCSourceInnerFlow => "Mfc26.Ramp";
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public virtual string NameCSourceMiddleFlow => "Mfc25.Ramp";
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public virtual string NameCSourceOuterFlow => "Mfc15.Ramp";
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public virtual string NameDopeTotalFlow => "DopeTotalFlow";
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public virtual string NameDopeSplitRatio => "DopeSplitRatio";
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public virtual string NameDopeInnerFlow => "Mfc20.Ramp";
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public virtual string NameDopeMiddleFlow => "Mfc19.Ramp";
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public virtual string NameDopeOuterFlow => "Mfc2.Ramp";
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public virtual string NameN2ActualFlow => "N2ActualFlow";
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public virtual string NameN2LowFlow => "Mfc4.Ramp";
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public virtual string NameDilutionFlowForN2 => "Mfc3.Ramp";
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public virtual string NameDilutedN2Flow => "Mfc6.Ramp";
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public virtual string NameShTotalFlow => "SHTotalFlow";
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public virtual string NameShTotalFlowSplitRatio => "SHTotalFlowSplitRatio";
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public virtual string NameShPushTotalFlow => "SHSuppTotalFlow";
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public virtual string NameShInnerFlow => "SHInnerFlow";
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public virtual string NameShMiddleFlow => "SHMidFlow";
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public virtual string NameShOuterFlow => "SHOutterFlow";
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public virtual string NameInnerPushFlow => "Mfc29.Ramp";
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public virtual string NameMiddlePushFlow => "Mfc31.Ramp";
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public virtual string NameOuterPushFlow => "Mfc28.Ramp";
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public virtual string NameCarryGasFlow => "Mfc40.Ramp";
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public virtual string NameSiH4Flow => "Mfc14.Ramp";
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public virtual string NameSiH4FlowMode => "SiH4.SetValve";
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public virtual string NameVentPushFlow => "Mfc1.Ramp";
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public virtual string NameTotalVentFlow => "TotalVentFlow";
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public virtual string NameHclFlow => "Mfc13.Ramp";
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public virtual string NameHclFlowMode => "HCl.SetValve";
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public virtual string NameN2HighFlow => "Mfc5.Ramp";
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public virtual string NameN2FlowMode => "N2Dilution.SetValve";
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public virtual string NameN2HighFlowMode => "N2HighDoping.SetValve";
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#endregion
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/// <summary>
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/// 计算指定工艺步骤的气体流量。
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/// </summary>
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/// <param name="step">工艺步骤对象。</param>
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/// <param name="chamberName">
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/// 当前配方步骤所属反应腔的名称，可用的名称请参考<see cref="ModuleName"/>。
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/// <remarks>
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/// 为什么需要传入反应腔名称？
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/// <br/>
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/// 计算Vent Flow时，需要使用TCS、TMA的气体流量参数；而上述两个流量的计算需要使用
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/// 系统配置中PM.{chamberName}.Efficiency.TCS-Eff或TMA-Eff的配置值。因此计算
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/// 配方气体流量时需要传入反应腔名称以获取这两个配置参数的数值。
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/// </remarks>
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/// </param>
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public void Calculate(RecipeStep step, string chamberName)
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{
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CalSiSourceFlow(step);
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CalCSourceFlow(step);
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CalDopeFlow(step);
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CalShSupplementFlow(step);
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CalVentFlow(step, chamberName);
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}
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#region Gas Flow Calculation
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protected virtual double GetTcsFlow(RecipeStep step, string chamberName)
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{
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var currentTcsBubbleLowFlow = ((DoubleParam)step.FindParamByControlName(NameTcsBubbleLowFlow)).Value;
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var currentTcsBubbleHighFlow = ((DoubleParam)step.FindParamByControlName(NameTcsBubbleHighFlow)).Value;
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var currentTcsPushFlow = ((DoubleParam)step.FindParamByControlName(NameTcsPushFlow)).Value;
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var currentTcsFlowMode = ((ComboxParam)step.FindParamByControlName(NameTcsFlowMode)).Value;
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var tcsFlow = 0d;
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var tcsEff =
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(double)QueryDataClient.Instance.Service.GetConfig($"PM.{chamberName}.Efficiency.TCS-Eff");
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if (string.Equals(currentTcsFlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
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StringComparison.OrdinalIgnoreCase)
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|| string.Equals(currentTcsFlowMode, FlowModeParam.FlowModeEnum.Vent.ToString(),
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StringComparison.OrdinalIgnoreCase))
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{
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tcsFlow = (currentTcsBubbleHighFlow + currentTcsBubbleLowFlow) * tcsEff + currentTcsPushFlow;
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}
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else if (string.Equals(currentTcsFlowMode, FlowModeParam.FlowModeEnum.Purge.ToString(),
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StringComparison.OrdinalIgnoreCase))
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{
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tcsFlow = currentTcsBubbleHighFlow + currentTcsBubbleLowFlow + currentTcsPushFlow;
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}
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return tcsFlow;
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}
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protected virtual double GetTmaFlow(RecipeStep step, string chamberName)
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{
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var currentTmaBubbleFlow = ((DoubleParam)step.FindParamByControlName(NameTmaBubbleFlow)).Value;
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var currentTmaPushFlow = ((DoubleParam)step.FindParamByControlName(NameTmaPushFlow)).Value;
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var currentTmaFlowMode = ((ComboxParam)step.FindParamByControlName(NameTmaFlowMode)).Value;
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var tmaFlow = 0d;
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var tmaEff =
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(double)QueryDataClient.Instance.Service.GetConfig($"PM.{chamberName}.Efficiency.TMA-Eff");
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if (string.Equals(currentTmaFlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
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StringComparison.OrdinalIgnoreCase)
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|| string.Equals(currentTmaFlowMode, FlowModeParam.FlowModeEnum.Vent.ToString(),
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StringComparison.OrdinalIgnoreCase))
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tmaFlow = currentTmaBubbleFlow * tmaEff + currentTmaPushFlow;
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else if (string.Equals(currentTmaFlowMode, FlowModeParam.FlowModeEnum.Purge.ToString(),
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StringComparison.OrdinalIgnoreCase))
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tmaFlow = currentTmaBubbleFlow + currentTmaPushFlow;
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return tmaFlow;
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}
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protected virtual void CalSiSourceFlow(RecipeStep step)
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{
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var currentSiSourSplitRatio = new double[3];
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if (step.FindParamByControlName(NameSiSourceSplitRatio) is Sets3RatioParam siSourceRatio)
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currentSiSourSplitRatio = siSourceRatio.Ratio;
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var currentSiSourTotalFlow = ((DoubleParam)step.FindParamByControlName(NameSiSourceTotalFlow)).Value;
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//double currentSiSourPushFlow = currentSiSourTotalFlow - (currentSiH4FlowMode == FlowMode.Run.ToString() ? currentSiH4Flow : 0)
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// - (currentTCSFlowMode == FlowMode.Run.ToString() ? TCSFlow : 0) - (currentHClFlowMode == FlowMode.Run.ToString() ? currentHClFlow : 0);
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//(currentStep[(int)RecipColNo.SiSourceOuterFlow] as DoubleParam).Value = currentSiSourPushFlow.ToString("F1");
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double currentSiSourInnerFlow = 0;
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double currentSiSourMidFlow = 0;
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double currentSiSourOutFlow = 0;
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if (currentSiSourSplitRatio.Length == 3)
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{
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var rationSum = currentSiSourSplitRatio[0] + currentSiSourSplitRatio[1] + currentSiSourSplitRatio[2];
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currentSiSourInnerFlow = currentSiSourTotalFlow / rationSum * currentSiSourSplitRatio[0];
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currentSiSourMidFlow = currentSiSourTotalFlow / rationSum * currentSiSourSplitRatio[1];
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currentSiSourOutFlow = currentSiSourTotalFlow / rationSum * currentSiSourSplitRatio[2];
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}
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((DoubleParam)step.FindParamByControlName(NameSiSourceInnerFlow)).Value = Math.Round(currentSiSourInnerFlow, 1);
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((DoubleParam)step.FindParamByControlName(NameSiSourceMiddleFlow)).Value = Math.Round(currentSiSourMidFlow, 1);
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((DoubleParam)step.FindParamByControlName(NameSiSourceOuterFlow)).Value = Math.Round(currentSiSourOutFlow, 1);
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}
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protected virtual void CalCSourceFlow(RecipeStep currentStep)
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{
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var currentC2H4Flow = ((DoubleParam)currentStep.FindParamByControlName(NameCxHxFlow)).Value;
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var currentCSourSplitRatio = new double[3];
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if (currentStep.FindParamByControlName(NameCSourceSplitRatio) is Sets3RatioParam cSourceRatio)
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currentCSourSplitRatio = cSourceRatio.Ratio;
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var currentCSourTotalFlow = ((DoubleParam)currentStep.FindParamByControlName(NameCSourceTotalFlow)).Value;
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var currentC2H4FlowMode = (currentStep.FindParamByControlName(NameCxHxFlowMode) as ComboxParam)?.Value;
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var currentCSourPushFlow = currentCSourTotalFlow -
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(string.Equals(currentC2H4FlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
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StringComparison.OrdinalIgnoreCase)
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? currentC2H4Flow
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: 0d);
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((DoubleParam)currentStep.FindParamByControlName(NameCSourcePushFlow)).Value = Math.Round(currentCSourPushFlow, 1);
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double currentCSourInnerFlow = 0;
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double currentCSourMidFlow = 0;
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double currentCSourOuterFlow = 0;
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if (currentCSourSplitRatio.Length == 3)
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{
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var ratioSum = currentCSourSplitRatio[0] + currentCSourSplitRatio[1] + currentCSourSplitRatio[2];
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currentCSourInnerFlow = currentCSourTotalFlow / ratioSum * currentCSourSplitRatio[0];
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currentCSourMidFlow = currentCSourTotalFlow / ratioSum * currentCSourSplitRatio[1];
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currentCSourOuterFlow = currentCSourTotalFlow / ratioSum * currentCSourSplitRatio[2];
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}
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((DoubleParam)currentStep.FindParamByControlName(NameCSourceInnerFlow)).Value = Math.Round(currentCSourInnerFlow, 1);
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((DoubleParam)currentStep.FindParamByControlName(NameCSourceMiddleFlow)).Value = Math.Round(currentCSourMidFlow, 1);
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((DoubleParam)currentStep.FindParamByControlName(NameCSourceOuterFlow)).Value = Math.Round(currentCSourOuterFlow, 1);
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}
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protected virtual void CalDopeFlow(RecipeStep currentStep)
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{
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var currentDopeTotalFlow = ((DoubleParam)currentStep.FindParamByControlName(NameDopeTotalFlow)).Value;
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var currentN2ActualFlow = ((DoubleParam)currentStep.FindParamByControlName(NameN2ActualFlow)).Value;
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var currentN2LowFlow = ((DoubleParam)currentStep.FindParamByControlName(NameN2LowFlow)).Value;
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var currentDiluFlowForN2 = ((DoubleParam)currentStep.FindParamByControlName(NameDilutionFlowForN2)).Value;
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var currentDilutedN2Flow =
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(currentN2LowFlow + currentDiluFlowForN2) * currentN2ActualFlow / currentN2LowFlow;
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((DoubleParam)currentStep.FindParamByControlName(NameDilutedN2Flow)).Value = Math.Round(currentDilutedN2Flow, 1);
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var currentDopeSplitRatio = new double[3];
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if (currentStep.FindParamByControlName(NameDopeSplitRatio) is Sets3RatioParam dopRatio)
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currentDopeSplitRatio = dopRatio.Ratio;
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//double currentDopePushFlow = currentDopeTotalFlow
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// - (currentN2FlowMode == FlowMode.Run.ToString() ? currentDilutedN2Flow : 0)
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// - (currentN2HighFlowMode == FlowMode.Run.ToString() ? currentN2HighFlow : 0)
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// - (currentTMAFlowMode == FlowMode.Run.ToString() ? TMAFlow : 0);
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//(currentStep[(int)RecipColNo.DopeOuterFlow] as DoubleParam).Value = currentDopePushFlow.ToString("F1");
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double currentDopeInnerFlow = 0;
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double currentDopeMidFlow = 0;
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double currentDopeOuterFlow = 0;
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if (currentDopeSplitRatio.Length == 3)
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{
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var ratioSum = currentDopeSplitRatio[0] + currentDopeSplitRatio[1] + currentDopeSplitRatio[2];
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currentDopeInnerFlow = currentDopeTotalFlow / ratioSum * currentDopeSplitRatio[0];
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currentDopeMidFlow = currentDopeTotalFlow / ratioSum * currentDopeSplitRatio[1];
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currentDopeOuterFlow = currentDopeTotalFlow / ratioSum * currentDopeSplitRatio[2];
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}
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((DoubleParam)currentStep.FindParamByControlName(NameDopeInnerFlow)).Value = Math.Round(currentDopeInnerFlow, 1);
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((DoubleParam)currentStep.FindParamByControlName(NameDopeMiddleFlow)).Value = Math.Round(currentDopeMidFlow, 1);
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((DoubleParam)currentStep.FindParamByControlName(NameDopeOuterFlow)).Value = Math.Round(currentDopeOuterFlow, 1);
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}
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protected virtual void CalShSupplementFlow(RecipeStep currentStep)
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{
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var currentSiSourTotalFlow = ((DoubleParam)currentStep.FindParamByControlName(NameSiSourceTotalFlow)).Value;
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var currentCSourTotalFlow = ((DoubleParam)currentStep.FindParamByControlName(NameCSourceTotalFlow)).Value;
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var currentDopeTotalFlow = ((DoubleParam)currentStep.FindParamByControlName(NameDopeTotalFlow)).Value;
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var currentShTotalFlow = ((DoubleParam)currentStep.FindParamByControlName(NameShTotalFlow)).Value;
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var currentSurroundingFlow = ((DoubleParam)currentStep.FindParamByControlName(NameCarryGasFlow)).Value;
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var currentSiSourInnerFlow = ((DoubleParam)currentStep.FindParamByControlName(NameSiSourceInnerFlow)).Value;
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var currentSiSourMidFlow = ((DoubleParam)currentStep.FindParamByControlName(NameSiSourceMiddleFlow)).Value;
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var currentCSourInnerFlow = ((DoubleParam)currentStep.FindParamByControlName(NameCSourceInnerFlow)).Value;
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var currentCSourMidFlow = ((DoubleParam)currentStep.FindParamByControlName(NameCSourceMiddleFlow)).Value;
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var currentDopeInnerFlow = ((DoubleParam)currentStep.FindParamByControlName(NameDopeInnerFlow)).Value;
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var currentDopeMidFlow = ((DoubleParam)currentStep.FindParamByControlName(NameDopeMiddleFlow)).Value;
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var currentShTotalFlowSplitRatio = new double[3];
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if (currentStep.FindParamByControlName(NameShTotalFlowSplitRatio) is Sets3RatioParam shTotalRatio)
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currentShTotalFlowSplitRatio = shTotalRatio.Ratio;
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var currentShSuppTotalFlow = currentShTotalFlow - currentSurroundingFlow - currentSiSourTotalFlow -
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currentCSourTotalFlow - currentDopeTotalFlow;
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var sumShTotalFlowSplitRatio = currentShTotalFlowSplitRatio[0] + currentShTotalFlowSplitRatio[1] +
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currentShTotalFlowSplitRatio[2];
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var currentShInnerFlow = (currentShTotalFlow - currentSurroundingFlow) / sumShTotalFlowSplitRatio *
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currentShTotalFlowSplitRatio[0];
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var currentShMidFlow = (currentShTotalFlow - currentSurroundingFlow) / sumShTotalFlowSplitRatio *
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currentShTotalFlowSplitRatio[1];
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var currentShOutterFlow = (currentShTotalFlow - currentSurroundingFlow) / sumShTotalFlowSplitRatio *
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currentShTotalFlowSplitRatio[2];
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var currentInnerSuppFlow = currentShInnerFlow - currentSiSourInnerFlow - currentCSourInnerFlow -
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currentDopeInnerFlow;
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var currentMidSuppFlow = currentShMidFlow - currentSiSourMidFlow - currentCSourMidFlow - currentDopeMidFlow;
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var currentOutterSuppFlow = currentShSuppTotalFlow - currentInnerSuppFlow - currentMidSuppFlow;
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((DoubleParam)currentStep.FindParamByControlName(NameShPushTotalFlow)).Value = Math.Round(currentShSuppTotalFlow, 1);
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((DoubleParam)currentStep.FindParamByControlName(NameShInnerFlow)).Value = Math.Round(currentShInnerFlow, 1);
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((DoubleParam)currentStep.FindParamByControlName(NameShMiddleFlow)).Value = Math.Round(currentShMidFlow, 1);
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((DoubleParam)currentStep.FindParamByControlName(NameShOuterFlow)).Value = Math.Round(currentShOutterFlow, 1);
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((DoubleParam)currentStep.FindParamByControlName(NameInnerPushFlow)).Value = Math.Round(currentInnerSuppFlow, 1);
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((DoubleParam)currentStep.FindParamByControlName(NameMiddlePushFlow)).Value = Math.Round(currentMidSuppFlow, 1);
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((DoubleParam)currentStep.FindParamByControlName(NameOuterPushFlow)).Value = Math.Round(currentOutterSuppFlow, 1);
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}
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protected virtual void CalVentFlow(RecipeStep currentStep, string chamberName)
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{
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var currentSiH4Flow = ((DoubleParam)currentStep.FindParamByControlName(NameSiH4Flow)).Value;
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var currentTotalVentFlow = ((DoubleParam)currentStep.FindParamByControlName(NameTotalVentFlow)).Value;
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var currentHClFlow = ((DoubleParam)currentStep.FindParamByControlName(NameHclFlow)).Value;
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var currentN2HighFlow = ((DoubleParam)currentStep.FindParamByControlName(NameN2HighFlow)).Value;
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var currentC2H4Flow = ((DoubleParam)currentStep.FindParamByControlName(NameCxHxFlow)).Value;
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var currentDilutedN2Flow = ((DoubleParam)currentStep.FindParamByControlName(NameDilutedN2Flow)).Value;
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var currentN2FlowMode = ((ComboxParam)currentStep.FindParamByControlName(NameN2FlowMode)).Value;
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var currentN2HighFlowMode = ((ComboxParam)currentStep.FindParamByControlName(NameN2HighFlowMode)).Value;
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var currentSiH4FlowMode = (currentStep.FindParamByControlName(NameSiH4FlowMode) as ComboxParam)?.Value;
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var currentTcsFlowMode = (currentStep.FindParamByControlName(NameTcsFlowMode) as ComboxParam)?.Value;
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var currentHClFlowMode = (currentStep.FindParamByControlName(NameHclFlowMode) as ComboxParam)?.Value;
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var currentC2H4FlowMode = (currentStep.FindParamByControlName(NameCxHxFlowMode) as ComboxParam)?.Value;
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var currentTmaFlowMode = ((ComboxParam)currentStep.FindParamByControlName(NameTmaFlowMode)).Value;
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var tcsFlow = GetTcsFlow(currentStep, chamberName);
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var tmaFlow = GetTmaFlow(currentStep, chamberName);
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var currentSiSourTotalFlowForPurge =
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(string.Equals(currentSiH4FlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
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StringComparison.OrdinalIgnoreCase) == false
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? currentSiH4Flow
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: 0d)
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+ (string.Equals(currentTcsFlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
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StringComparison.OrdinalIgnoreCase) == false
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? tcsFlow
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: 0d) +
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(string.Equals(currentHClFlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
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StringComparison.OrdinalIgnoreCase) == false
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? currentHClFlow
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: 0d);
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var currentCSourTotalFlowForPurge =
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string.Equals(currentC2H4FlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
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StringComparison.OrdinalIgnoreCase) == false
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? currentC2H4Flow
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: 0d;
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var n2Flow = (string.Equals(currentN2FlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
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StringComparison.OrdinalIgnoreCase) == false
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? currentDilutedN2Flow
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: 0d) +
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(string.Equals(currentN2HighFlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
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StringComparison.OrdinalIgnoreCase) == false
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? currentN2HighFlow
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: 0d);
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var currentDopeTotalFlowForPurge = n2Flow + (string.Equals(currentTmaFlowMode,
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FlowModeParam.FlowModeEnum.Run.ToString(), StringComparison.OrdinalIgnoreCase) == false
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? tmaFlow
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: 0d);
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var currentVentPushFlow = currentTotalVentFlow - currentSiSourTotalFlowForPurge -
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currentCSourTotalFlowForPurge - currentDopeTotalFlowForPurge;
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((DoubleParam)currentStep.FindParamByControlName(NameVentPushFlow)).Value = Math.Round(currentVentPushFlow, 1);
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}
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#endregion
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}
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}
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