30 lines
560 B
C#
30 lines
560 B
C#
using System;
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using System.Collections.Generic;
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using System.Runtime.Serialization;
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namespace Aitex.Sorter.Common
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{
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[Serializable]
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[DataContract]
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public class WaferHistoryRecipe : WaferHistoryItem
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{
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[DataMember]
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public string Chamber { get; set; }
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[DataMember]
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public string Recipe { get; set; }
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[DataMember]
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public string SettingTime { get; set; }
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[DataMember]
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public string ActualTime { get; set; }
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[DataMember]
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public List<RecipeStep> Steps { get; set; }
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[DataMember]
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public List<RecipeStepFdcData> Fdcs { get; set; }
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}
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}
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