62 lines
1.2 KiB
C#
62 lines
1.2 KiB
C#
using System;
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using System.Runtime.Serialization;
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using Aitex.Core.Common.DeviceData.IoDevice.Base;
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namespace Aitex.Core.Common.DeviceData.IoDevice
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{
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public class AITProcessRunData : XDataBase
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{
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[DataMember]
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public Guid Uid { get; set; }
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[DataMember]
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public int Index { get; set; }
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[DataMember]
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public string Module { get; set; }
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[DataMember]
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public string WaferId { get; set; }
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[DataMember]
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public string RecipeName { get; set; }
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[DataMember]
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public DateTime? ProcessBegin { get; set; }
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[DataMember]
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public DateTime? ProcessEnd { get; set; }
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[DataMember]
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public double H2 { get; set; }
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[DataMember]
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public double Ar { get; set; }
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[DataMember]
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public double PN2 { get; set; }
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[DataMember]
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public double HCL { get; set; }
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[DataMember]
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public double SiH4 { get; set; }
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[DataMember]
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public double C2H4 { get; set; }
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[DataMember]
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public double TCS { get; set; }
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[DataMember]
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public double TMA { get; set; }
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[DataMember]
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public double HeaterPowerConsumption { get; set; }
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}
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}
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