896 lines
40 KiB
C#
896 lines
40 KiB
C#
using System;
|
||
using System.Collections.Generic;
|
||
using System.Collections.ObjectModel;
|
||
using System.ComponentModel;
|
||
using System.Linq;
|
||
using MECF.Framework.Common.DataCenter;
|
||
using MECF.Framework.UI.Client.RecipeEditorLib.RecipeModel.Params;
|
||
|
||
namespace MECF.Framework.UI.Client.RecipeEditorLib.RecipeModel
|
||
{
|
||
public class RecipeStep : ObservableCollection<Param>
|
||
{
|
||
/// <summary>
|
||
/// 步骤起始编号。
|
||
/// </summary>
|
||
public const int START_INDEX = 1;
|
||
|
||
#region Variables
|
||
|
||
private bool _isHideValue;
|
||
private bool _isProcessed;
|
||
|
||
|
||
/// <summary>
|
||
/// 当配方步骤的IsSaved属性发生变化时，触发此事件。
|
||
/// </summary>
|
||
public event EventHandler<bool> SavedStateChanged;
|
||
|
||
|
||
#endregion
|
||
|
||
#region Constructors
|
||
|
||
public RecipeStep(RecipeStep previous)
|
||
{
|
||
Previous = previous;
|
||
IsSaved = true;
|
||
}
|
||
|
||
#endregion
|
||
|
||
#region Properties
|
||
|
||
/// <summary>
|
||
/// 父级配方集合。
|
||
/// </summary>
|
||
public RecipeData Parent { get; internal set; }
|
||
|
||
/// <summary>
|
||
/// 返回配方步骤序号参数。
|
||
/// </summary>
|
||
public StepParam StepNoParam => this.FirstOrDefault(x => x is StepParam) as StepParam;
|
||
|
||
public StringParam UidParam => this.FirstOrDefault(param => param.DisplayName == "Uid") as StringParam;
|
||
|
||
/// <summary>
|
||
/// 当前配方步骤的唯一识别码。
|
||
/// </summary>
|
||
public string StepUid
|
||
{
|
||
get => UidParam?.Value ?? null;
|
||
set
|
||
{
|
||
var paramUid = UidParam;
|
||
if (paramUid != null)
|
||
{
|
||
paramUid.Value = value;
|
||
}
|
||
}
|
||
}
|
||
|
||
/// <summary>
|
||
/// 返回步骤序号。
|
||
/// </summary>
|
||
public int? StepNo
|
||
{
|
||
get
|
||
{
|
||
var param = StepNoParam;
|
||
return param?.Value ?? null;
|
||
}
|
||
}
|
||
|
||
/// <summary>
|
||
/// 返回步骤执行时长。
|
||
/// </summary>
|
||
public double? StepTime
|
||
{
|
||
get
|
||
{
|
||
var param = this.FirstOrDefault(x => x is DoubleParam && string.Equals(x.Name,
|
||
RecipColNo.StepTime.ToString(), StringComparison.CurrentCultureIgnoreCase)) as DoubleParam;
|
||
return param?.Value;
|
||
}
|
||
}
|
||
|
||
/// <summary>
|
||
/// 返回当前配方步骤是否已保存。
|
||
/// </summary>
|
||
public bool IsSaved { get; private set; }
|
||
|
||
/// <summary>
|
||
/// 返回当前步骤是否已经跑完工艺。
|
||
/// </summary>
|
||
public bool IsProcessed
|
||
{
|
||
get => _isProcessed;
|
||
set
|
||
{
|
||
if (_isProcessed != value)
|
||
{
|
||
_isProcessed = value;
|
||
OnPropertyChanged(new PropertyChangedEventArgs(nameof(IsProcessed)));
|
||
}
|
||
}
|
||
}
|
||
|
||
/// <summary>
|
||
/// 返回前序配方。
|
||
/// </summary>
|
||
public RecipeStep Previous { get; private set; }
|
||
|
||
/// <summary>
|
||
/// 返回后序配方。
|
||
/// </summary>
|
||
public RecipeStep Next { get; private set; }
|
||
|
||
/// <summary>
|
||
/// 返回是否隐藏当前步骤的参数值。
|
||
/// </summary>
|
||
public bool IsHideValue
|
||
{
|
||
get => _isHideValue;
|
||
set
|
||
{
|
||
_isHideValue = value;
|
||
this.ToList().ForEach(x => x.IsHideValue = value);
|
||
}
|
||
}
|
||
|
||
#endregion
|
||
|
||
#region Methods
|
||
|
||
/// <summary>
|
||
/// 当配方中的参数的属性发生变化时，触发此事件。
|
||
/// </summary>
|
||
/// <param name="sender"></param>
|
||
/// <param name="e"></param>
|
||
private void ParamOnPropertyChanged(object sender, PropertyChangedEventArgs e)
|
||
{
|
||
if (!(sender is IParam param))
|
||
return;
|
||
|
||
if (e.PropertyName == nameof(Param.IsSaved))
|
||
{
|
||
if (param.IsSaved == false)
|
||
{
|
||
IsSaved = false;
|
||
}
|
||
else
|
||
{
|
||
IsSaved = this.ToList().FirstOrDefault(x => x.IsSaved == false) == null;
|
||
}
|
||
|
||
SavedStateChanged?.Invoke(this, IsSaved);
|
||
}
|
||
}
|
||
|
||
|
||
/// <summary>
|
||
/// 将指定的Param链接到前序Param。
|
||
/// </summary>
|
||
/// <param name="param">当前Step中的参数。</param>
|
||
private void LinkWithPreviousParam(IParam param)
|
||
{
|
||
var preParam = Previous?.FirstOrDefault(x => x.Name == param.Name);
|
||
param.Previous = preParam;
|
||
if (preParam != null)
|
||
preParam.Next = param;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 将指定的Param链接到后序Param。
|
||
/// </summary>
|
||
/// <param name="param">当前Step中的参数。</param>
|
||
private void LinkWithNextParam(IParam param)
|
||
{
|
||
var nextParam = Next?.FirstOrDefault(x => x.Name == param.Name);
|
||
param.Next = nextParam;
|
||
if (nextParam != null)
|
||
nextParam.Previous = param;
|
||
}
|
||
|
||
/// <summary>
|
||
/// 在当前步骤中查找指定控制名的参数。
|
||
/// </summary>
|
||
/// <param name="controlName">
|
||
/// 参数控制的名称。
|
||
/// </param>
|
||
/// <param name="isIgnoreCase">
|
||
/// 是否区分大小写。
|
||
/// </param>
|
||
/// <returns></returns>
|
||
public IParam FindParamByControlName(string controlName, bool isIgnoreCase = true)
|
||
{
|
||
return this.FirstOrDefault(x =>
|
||
string.Equals(x.Name, controlName,
|
||
isIgnoreCase ? StringComparison.CurrentCultureIgnoreCase : StringComparison.CurrentCulture));
|
||
}
|
||
|
||
/// <summary>
|
||
/// 校验步骤中的所有参数。
|
||
/// </summary>
|
||
public void Validate()
|
||
{
|
||
this.ToList().ForEach(x => x.Validate());
|
||
}
|
||
|
||
/// <summary>
|
||
/// 取消所有参数的Highlight状态。
|
||
/// </summary>
|
||
public void ResetHighlight()
|
||
{
|
||
this.ToList().ForEach(x => x.ResetHighlight());
|
||
}
|
||
|
||
/// <summary>
|
||
/// 获取高亮显示的参数。
|
||
/// </summary>
|
||
/// <returns></returns>
|
||
public List<Param> GetHighlightedParams()
|
||
{
|
||
return this.ToList().Where(p => p.IsHighlighted).ToList();
|
||
}
|
||
|
||
/// <summary>
|
||
/// 保存当前配方步骤。
|
||
/// </summary>
|
||
public void Save()
|
||
{
|
||
this.ToList().ForEach(x => x.Save());
|
||
}
|
||
|
||
/// <summary>
|
||
/// 設置前序步驟。
|
||
/// </summary>
|
||
/// <param name="step"></param>
|
||
public void SetPreviousStep(RecipeStep step)
|
||
{
|
||
Previous = step;
|
||
|
||
// 调整Step中Param的链接关系
|
||
this.ToList().ForEach(LinkWithPreviousParam);
|
||
|
||
if (Previous == null)
|
||
return;
|
||
|
||
// 将前序步骤的后序步骤链接到我自己。
|
||
Previous.Next = this;
|
||
}
|
||
|
||
public void SetNextStep(RecipeStep step)
|
||
{
|
||
Next = step;
|
||
this.ToList().ForEach(LinkWithNextParam);
|
||
}
|
||
|
||
/// <summary>
|
||
/// 检查StepNo是否为有效值。
|
||
/// </summary>
|
||
/// <param name="stepNo"></param>
|
||
/// <param name="validatedStepNo"></param>
|
||
/// <returns></returns>
|
||
public static bool ValidateStepNo(int? stepNo, out int validatedStepNo)
|
||
{
|
||
validatedStepNo = int.MinValue;
|
||
var isValid = stepNo >= START_INDEX;
|
||
if (isValid)
|
||
validatedStepNo = stepNo.Value;
|
||
|
||
return isValid;
|
||
}
|
||
|
||
|
||
#endregion
|
||
|
||
#region Gas Flow Calculation
|
||
|
||
private static double GetTcsFlow(RecipeStep currentStep, string selectedChamber)
|
||
{
|
||
var currentTcsBubbleLowFlow = ((DoubleParam)currentStep[(int)RecipColNo.TCSBubbLowFlow]).Value;
|
||
var currentTcsBubbleHighFlow = ((DoubleParam)currentStep[(int)RecipColNo.TCSBubbHighFlow]).Value;
|
||
var currentTcsPushFlow = ((DoubleParam)currentStep[(int)RecipColNo.TCSPushFlow]).Value;
|
||
var currentTcsFlowMode = (currentStep[(int)RecipColNo.TCSFlowMode] as ComboxParam)?.Value;
|
||
|
||
var tcsFlow = 0d;
|
||
|
||
var tcsEff =
|
||
(double)QueryDataClient.Instance.Service.GetConfig($"PM.{selectedChamber}.Efficiency.TCS-Eff");
|
||
if (string.Equals(currentTcsFlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase)
|
||
|| string.Equals(currentTcsFlowMode, FlowModeParam.FlowModeEnum.Vent.ToString(),
|
||
StringComparison.OrdinalIgnoreCase))
|
||
{
|
||
tcsFlow = (currentTcsBubbleHighFlow + currentTcsBubbleLowFlow) * tcsEff + currentTcsPushFlow;
|
||
}
|
||
else if (string.Equals(currentTcsFlowMode, FlowModeParam.FlowModeEnum.Purge.ToString(),
|
||
StringComparison.OrdinalIgnoreCase))
|
||
{
|
||
tcsFlow = currentTcsBubbleHighFlow + currentTcsBubbleLowFlow + currentTcsPushFlow;
|
||
}
|
||
|
||
return tcsFlow;
|
||
}
|
||
|
||
private static double GetTmaFlow(RecipeStep currentStep, string selectedChamber)
|
||
{
|
||
var currentTmaBubbleFlow = ((DoubleParam)currentStep[(int)RecipColNo.TMABubbFlow]).Value;
|
||
var currentTmaPushFlow = ((DoubleParam)currentStep[(int)RecipColNo.TMAPushFlow]).Value;
|
||
var currentTmaFlowMode = ((ComboxParam)currentStep[(int)RecipColNo.TMAFlowMode]).Value;
|
||
|
||
var tmaFlow = 0d;
|
||
var tmaEff =
|
||
(double)QueryDataClient.Instance.Service.GetConfig($"PM.{selectedChamber}.Efficiency.TMA-Eff");
|
||
|
||
if (string.Equals(currentTmaFlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase)
|
||
|| string.Equals(currentTmaFlowMode, FlowModeParam.FlowModeEnum.Vent.ToString(),
|
||
StringComparison.OrdinalIgnoreCase))
|
||
tmaFlow = currentTmaBubbleFlow * tmaEff + currentTmaPushFlow;
|
||
else if (string.Equals(currentTmaFlowMode, FlowModeParam.FlowModeEnum.Purge.ToString(),
|
||
StringComparison.OrdinalIgnoreCase))
|
||
tmaFlow = currentTmaBubbleFlow + currentTmaPushFlow;
|
||
|
||
return tmaFlow;
|
||
}
|
||
|
||
private static void CalSiSourceFlow(RecipeStep currentStep)
|
||
{
|
||
var currentSiSourSplitRatio = new double[3];
|
||
if (currentStep[(int)RecipColNo.SiSourceSplitRatio] is Sets3RatioParam siSourceRatio)
|
||
currentSiSourSplitRatio = siSourceRatio.Ratio;
|
||
|
||
var currentSiSourTotalFlow = ((DoubleParam)currentStep[(int)RecipColNo.SiSourceTotalFlow]).Value;
|
||
|
||
//double currentSiSourPushFlow = currentSiSourTotalFlow - (currentSiH4FlowMode == FlowMode.Run.ToString() ? currentSiH4Flow : 0)
|
||
// - (currentTCSFlowMode == FlowMode.Run.ToString() ? TCSFlow : 0) - (currentHClFlowMode == FlowMode.Run.ToString() ? currentHClFlow : 0);
|
||
|
||
//(currentStep[(int)RecipColNo.SiSourceOuterFlow] as DoubleParam).Value = currentSiSourPushFlow.ToString("F1");
|
||
|
||
double currentSiSourInnerFlow = 0;
|
||
double currentSiSourMidFlow = 0;
|
||
double currentSiSourOutFlow = 0;
|
||
|
||
if (currentSiSourSplitRatio.Length == 3)
|
||
{
|
||
var rationSum = currentSiSourSplitRatio[0] + currentSiSourSplitRatio[1] + currentSiSourSplitRatio[2];
|
||
|
||
currentSiSourInnerFlow = currentSiSourTotalFlow / rationSum * currentSiSourSplitRatio[0];
|
||
currentSiSourMidFlow = currentSiSourTotalFlow / rationSum * currentSiSourSplitRatio[1];
|
||
currentSiSourOutFlow = currentSiSourTotalFlow / rationSum * currentSiSourSplitRatio[2];
|
||
}
|
||
|
||
((DoubleParam)currentStep[(int)RecipColNo.SiSourceInnerFlow]).Value = Math.Round(currentSiSourInnerFlow, 1);
|
||
((DoubleParam)currentStep[(int)RecipColNo.SiSourceMiddleFlow]).Value = Math.Round(currentSiSourMidFlow, 1);
|
||
((DoubleParam)currentStep[(int)RecipColNo.SiSourceOuterFlow]).Value = Math.Round(currentSiSourOutFlow, 1);
|
||
}
|
||
|
||
private static void CalCSourceFlow(RecipeStep currentStep)
|
||
{
|
||
var currentC2H4Flow = ((DoubleParam)currentStep[(int)RecipColNo.C2H4Flow]).Value;
|
||
var currentCSourSplitRatio = new double[3];
|
||
if (currentStep[(int)RecipColNo.CSourceSplitRatio] is Sets3RatioParam cSourceRatio)
|
||
currentCSourSplitRatio = cSourceRatio.Ratio;
|
||
|
||
var currentCSourTotalFlow = ((DoubleParam)currentStep[(int)RecipColNo.CSourceTotalFlow]).Value;
|
||
|
||
var currentC2H4FlowMode = (currentStep[(int)RecipColNo.C2H4FlowMode] as ComboxParam)?.Value;
|
||
var currentCSourPushFlow = currentCSourTotalFlow -
|
||
(string.Equals(currentC2H4FlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase)
|
||
? currentC2H4Flow
|
||
: 0d);
|
||
|
||
|
||
((DoubleParam)currentStep[(int)RecipColNo.CSourceOuterFlow]).Value = Math.Round(currentCSourPushFlow, 1);
|
||
|
||
double currentCSourInnerFlow = 0;
|
||
double currentCSourMidFlow = 0;
|
||
double currentCSourOuterFlow = 0;
|
||
|
||
if (currentCSourSplitRatio.Length == 3)
|
||
{
|
||
var ratioSum = currentCSourSplitRatio[0] + currentCSourSplitRatio[1] + currentCSourSplitRatio[2];
|
||
|
||
currentCSourInnerFlow = currentCSourTotalFlow / ratioSum * currentCSourSplitRatio[0];
|
||
currentCSourMidFlow = currentCSourTotalFlow / ratioSum * currentCSourSplitRatio[1];
|
||
currentCSourOuterFlow = currentCSourTotalFlow / ratioSum * currentCSourSplitRatio[2];
|
||
}
|
||
|
||
((DoubleParam)currentStep[(int)RecipColNo.CSourceInnerFlow]).Value = Math.Round(currentCSourInnerFlow, 1);
|
||
((DoubleParam)currentStep[(int)RecipColNo.CSourceMiddleFlow]).Value = Math.Round(currentCSourMidFlow, 1);
|
||
((DoubleParam)currentStep[(int)RecipColNo.CSourceOuterFlow]).Value = Math.Round(currentCSourOuterFlow, 1);
|
||
}
|
||
|
||
private static void CalDopeFlow(RecipeStep currentStep)
|
||
{
|
||
var currentDopeTotalFlow = ((DoubleParam)currentStep[(int)RecipColNo.DopeTotalFlow]).Value;
|
||
var currentN2ActualFlow = ((DoubleParam)currentStep[(int)RecipColNo.N2ActualFlow]).Value;
|
||
var currentN2LowFlow = ((DoubleParam)currentStep[(int)RecipColNo.N2LowFlow]).Value;
|
||
var currentDiluFlowForN2 = ((DoubleParam)currentStep[(int)RecipColNo.DilutFlowForN2]).Value;
|
||
|
||
|
||
var currentDilutedN2Flow =
|
||
(currentN2LowFlow + currentDiluFlowForN2) * currentN2ActualFlow / currentN2LowFlow;
|
||
((DoubleParam)currentStep[(int)RecipColNo.DilutedN2Flow]).Value = Math.Round(currentDilutedN2Flow, 1);
|
||
|
||
|
||
var currentDopeSplitRatio = new double[3];
|
||
if (currentStep[(int)RecipColNo.DopeSplitRatio] is Sets3RatioParam dopRatio)
|
||
currentDopeSplitRatio = dopRatio.Ratio;
|
||
|
||
|
||
|
||
//double currentDopePushFlow = currentDopeTotalFlow
|
||
// - (currentN2FlowMode == FlowMode.Run.ToString() ? currentDilutedN2Flow : 0)
|
||
// - (currentN2HighFlowMode == FlowMode.Run.ToString() ? currentN2HighFlow : 0)
|
||
// - (currentTMAFlowMode == FlowMode.Run.ToString() ? TMAFlow : 0);
|
||
|
||
//(currentStep[(int)RecipColNo.DopeOuterFlow] as DoubleParam).Value = currentDopePushFlow.ToString("F1");
|
||
|
||
double currentDopeInnerFlow = 0;
|
||
double currentDopeMidFlow = 0;
|
||
double currentDopeOuterFlow = 0;
|
||
|
||
if (currentDopeSplitRatio.Length == 3)
|
||
{
|
||
var ratioSum = currentDopeSplitRatio[0] + currentDopeSplitRatio[1] + currentDopeSplitRatio[2];
|
||
|
||
currentDopeInnerFlow = currentDopeTotalFlow / ratioSum * currentDopeSplitRatio[0];
|
||
currentDopeMidFlow = currentDopeTotalFlow / ratioSum * currentDopeSplitRatio[1];
|
||
currentDopeOuterFlow = currentDopeTotalFlow / ratioSum * currentDopeSplitRatio[2];
|
||
}
|
||
|
||
((DoubleParam)currentStep[(int)RecipColNo.DopeInnerFlow]).Value = Math.Round(currentDopeInnerFlow, 1);
|
||
((DoubleParam)currentStep[(int)RecipColNo.DopeMiddleFlow]).Value = Math.Round(currentDopeMidFlow, 1);
|
||
((DoubleParam)currentStep[(int)RecipColNo.DopeOuterFlow]).Value = Math.Round(currentDopeOuterFlow, 1);
|
||
}
|
||
|
||
private static void CalShSupplementFlow(RecipeStep currentStep)
|
||
{
|
||
var currentSiSourTotalFlow = ((DoubleParam)currentStep[(int)RecipColNo.SiSourceTotalFlow]).Value;
|
||
var currentCSourTotalFlow = ((DoubleParam)currentStep[(int)RecipColNo.CSourceTotalFlow]).Value;
|
||
var currentDopeTotalFlow = ((DoubleParam)currentStep[(int)RecipColNo.DopeTotalFlow]).Value;
|
||
|
||
var currentShTotalFlow = ((DoubleParam)currentStep[(int)RecipColNo.SHTotalFlow]).Value;
|
||
var currentSurroundingFlow = ((DoubleParam)currentStep[(int)RecipColNo.CarrayGasFlow]).Value;
|
||
|
||
|
||
var currentSiSourInnerFlow = ((DoubleParam)currentStep[(int)RecipColNo.SiSourceInnerFlow]).Value;
|
||
var currentSiSourMidFlow = ((DoubleParam)currentStep[(int)RecipColNo.SiSourceMiddleFlow]).Value;
|
||
|
||
var currentCSourInnerFlow = ((DoubleParam)currentStep[(int)RecipColNo.CSourceInnerFlow]).Value;
|
||
var currentCSourMidFlow = ((DoubleParam)currentStep[(int)RecipColNo.CSourceMiddleFlow]).Value;
|
||
|
||
var currentDopeInnerFlow = ((DoubleParam)currentStep[(int)RecipColNo.DopeInnerFlow]).Value;
|
||
var currentDopeMidFlow = ((DoubleParam)currentStep[(int)RecipColNo.DopeMiddleFlow]).Value;
|
||
|
||
|
||
var currentShTotalFlowSplitRatio = new double[3];
|
||
if (currentStep[(int)RecipColNo.SHTotalFlowSplitRatio] is Sets3RatioParam shTotalRatio)
|
||
currentShTotalFlowSplitRatio = shTotalRatio.Ratio;
|
||
|
||
|
||
var currentShSuppTotalFlow = currentShTotalFlow - currentSurroundingFlow - currentSiSourTotalFlow -
|
||
currentCSourTotalFlow - currentDopeTotalFlow;
|
||
var sumShTotalFlowSplitRatio = currentShTotalFlowSplitRatio[0] + currentShTotalFlowSplitRatio[1] +
|
||
currentShTotalFlowSplitRatio[2];
|
||
var currentShInnerFlow = (currentShTotalFlow - currentSurroundingFlow) / sumShTotalFlowSplitRatio *
|
||
currentShTotalFlowSplitRatio[0];
|
||
var currentShMidFlow = (currentShTotalFlow - currentSurroundingFlow) / sumShTotalFlowSplitRatio *
|
||
currentShTotalFlowSplitRatio[1];
|
||
var currentShOutterFlow = (currentShTotalFlow - currentSurroundingFlow) / sumShTotalFlowSplitRatio *
|
||
currentShTotalFlowSplitRatio[2];
|
||
var currentInnerSuppFlow = currentShInnerFlow - currentSiSourInnerFlow - currentCSourInnerFlow -
|
||
currentDopeInnerFlow;
|
||
var currentMidSuppFlow = currentShMidFlow - currentSiSourMidFlow - currentCSourMidFlow - currentDopeMidFlow;
|
||
var currentOutterSuppFlow = currentShSuppTotalFlow - currentInnerSuppFlow - currentMidSuppFlow;
|
||
|
||
((DoubleParam)currentStep[(int)RecipColNo.SHPushTotalFlow]).Value = Math.Round(currentShSuppTotalFlow, 1);
|
||
((DoubleParam)currentStep[(int)RecipColNo.SHInnerFlow]).Value = Math.Round(currentShInnerFlow, 1);
|
||
((DoubleParam)currentStep[(int)RecipColNo.SHMiddleFlow]).Value = Math.Round(currentShMidFlow, 1);
|
||
((DoubleParam)currentStep[(int)RecipColNo.SHOuterFlow]).Value = Math.Round(currentShOutterFlow, 1);
|
||
((DoubleParam)currentStep[(int)RecipColNo.InnerPushFlow]).Value = Math.Round(currentInnerSuppFlow, 1);
|
||
((DoubleParam)currentStep[(int)RecipColNo.MiddlePushFlow]).Value = Math.Round(currentMidSuppFlow, 1);
|
||
((DoubleParam)currentStep[(int)RecipColNo.OuterPushFlow]).Value = Math.Round(currentOutterSuppFlow, 1);
|
||
}
|
||
|
||
private static void CalVentFlow(RecipeStep currentStep, string selectedChamber)
|
||
{
|
||
var currentSiH4Flow = ((DoubleParam)currentStep[(int)RecipColNo.SiH4Flow]).Value;
|
||
var currentTotalVentFlow = ((DoubleParam)currentStep[(int)RecipColNo.TotalVentFlow]).Value;
|
||
var currentHClFlow = ((DoubleParam)currentStep[(int)RecipColNo.HCLFlow]).Value;
|
||
var currentN2HighFlow = ((DoubleParam)currentStep[(int)RecipColNo.N2HighFlow]).Value;
|
||
var currentC2H4Flow = ((DoubleParam)currentStep[(int)RecipColNo.C2H4Flow]).Value;
|
||
var currentDilutedN2Flow = ((DoubleParam)currentStep[(int)RecipColNo.DilutedN2Flow]).Value;
|
||
|
||
var currentN2FlowMode = ((ComboxParam)currentStep[(int)RecipColNo.N2FlowMode]).Value;
|
||
var currentN2HighFlowMode = ((ComboxParam)currentStep[(int)RecipColNo.N2HighFlowMode]).Value;
|
||
var currentSiH4FlowMode = (currentStep[(int)RecipColNo.SiH4FlowMode] as ComboxParam)?.Value;
|
||
var currentTcsFlowMode = (currentStep[(int)RecipColNo.TCSFlowMode] as ComboxParam)?.Value;
|
||
var currentHClFlowMode = (currentStep[(int)RecipColNo.HCLFlowMode] as ComboxParam)?.Value;
|
||
var currentC2H4FlowMode = (currentStep[(int)RecipColNo.C2H4FlowMode] as ComboxParam)?.Value;
|
||
var currentTmaFlowMode = ((ComboxParam)currentStep[(int)RecipColNo.TMAFlowMode]).Value;
|
||
|
||
var tcsFlow = GetTcsFlow(currentStep, selectedChamber);
|
||
var tmaFlow = GetTmaFlow(currentStep, selectedChamber);
|
||
|
||
var currentSiSourTotalFlowForPurge =
|
||
(string.Equals(currentSiH4FlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase) == false
|
||
? currentSiH4Flow
|
||
: 0d)
|
||
+ (string.Equals(currentTcsFlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase) == false
|
||
? tcsFlow
|
||
: 0d) +
|
||
(string.Equals(currentHClFlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase) == false
|
||
? currentHClFlow
|
||
: 0d);
|
||
|
||
var currentCSourTotalFlowForPurge =
|
||
string.Equals(currentC2H4FlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase) == false
|
||
? currentC2H4Flow
|
||
: 0d;
|
||
|
||
|
||
var n2Flow = (string.Equals(currentN2FlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase) == false
|
||
? currentDilutedN2Flow
|
||
: 0d) +
|
||
(string.Equals(currentN2HighFlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase) == false
|
||
? currentN2HighFlow
|
||
: 0d);
|
||
|
||
var currentDopeTotalFlowForPurge = n2Flow + (string.Equals(currentTmaFlowMode,
|
||
FlowModeParam.FlowModeEnum.Run.ToString(), StringComparison.OrdinalIgnoreCase) == false
|
||
? tmaFlow
|
||
: 0d);
|
||
|
||
var currentVentPushFlow = currentTotalVentFlow - currentSiSourTotalFlowForPurge -
|
||
currentCSourTotalFlowForPurge - currentDopeTotalFlowForPurge;
|
||
|
||
((DoubleParam)currentStep[(int)RecipColNo.VentPushFlow]).Value = Math.Round(currentVentPushFlow, 1);
|
||
}
|
||
|
||
public void CalRecipeParameterForRunVent()
|
||
{
|
||
/*if (!(currentStep.StepTime > 0))
|
||
return;*/
|
||
|
||
CalSiSourceFlow(this);
|
||
CalCSourceFlow(this);
|
||
CalDopeFlow(this);
|
||
CalShSupplementFlow(this);
|
||
CalVentFlow(this, Parent.Module);
|
||
}
|
||
|
||
[Obsolete("该函数已废除，请使用分步计算函数。")]
|
||
private void CalRecipeParameterForRunVent(RecipeStep previousStep,
|
||
IReadOnlyList<Param> currentStep, double stepTime)
|
||
{
|
||
/*#region SH Total flow
|
||
|
||
var currentShTotalFlow = ((DoubleParam)currentStep[(int)RecipColNo.SHTotalFlow]).Value;
|
||
var currentSurroundingFlow = ((DoubleParam)currentStep[(int)RecipColNo.CarrayGasFlow]).Value;
|
||
|
||
var currentShTotalFlowSplitRatio = new double[3];
|
||
if (currentStep[(int)RecipColNo.SHTotalFlowSplitRatio] is Sets3RatioParam shTotalRatio)
|
||
currentShTotalFlowSplitRatio = shTotalRatio.Ratio;
|
||
|
||
#endregion
|
||
|
||
#region Si Source
|
||
|
||
var currentSiH4Flow = ((DoubleParam)currentStep[(int)RecipColNo.SiH4Flow]).Value;
|
||
var currentTcsBubbleLowFlow = ((DoubleParam)currentStep[(int)RecipColNo.TCSBubbLowFlow]).Value;
|
||
var currentTcsBubbleHighFlow = ((DoubleParam)currentStep[(int)RecipColNo.TCSBubbHighFlow]).Value;
|
||
var currentTcsPushFlow = ((DoubleParam)currentStep[(int)RecipColNo.TCSPushFlow]).Value;
|
||
var currentHClFlow = ((DoubleParam)currentStep[(int)RecipColNo.HCLFlow]).Value;
|
||
|
||
var currentSiSourSplitRatio = new double[3];
|
||
if (currentStep[(int)RecipColNo.SiSourceSplitRatio] is Sets3RatioParam siSourceRatio)
|
||
currentSiSourSplitRatio = siSourceRatio.Ratio;
|
||
|
||
var currentSiSourTotalFlow = ((DoubleParam)currentStep[(int)RecipColNo.SiSourceTotalFlow]).Value;
|
||
|
||
var currentSiH4FlowMode = (currentStep[(int)RecipColNo.SiH4FlowMode] as ComboxParam)?.Value;
|
||
var currentTcsFlowMode = (currentStep[(int)RecipColNo.TCSFlowMode] as ComboxParam)?.Value;
|
||
var currentHClFlowMode = (currentStep[(int)RecipColNo.HCLFlowMode] as ComboxParam)?.Value;
|
||
|
||
double tcsFlow = 0d;
|
||
var tcsEff =
|
||
(double)QueryDataClient.Instance.Service.GetConfig($"PM.{Parent.ChamberBelongTo}.Efficiency.TCS-Eff");
|
||
if (string.Equals(currentTcsFlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase)
|
||
|| string.Equals(currentTcsFlowMode, FlowModeParam.FlowModeEnum.Vent.ToString(),
|
||
StringComparison.OrdinalIgnoreCase))
|
||
{
|
||
tcsFlow = (currentTcsBubbleHighFlow + currentTcsBubbleLowFlow) * tcsEff + currentTcsPushFlow;
|
||
}
|
||
else if (string.Equals(currentTcsFlowMode, FlowModeParam.FlowModeEnum.Purge.ToString(),
|
||
StringComparison.OrdinalIgnoreCase))
|
||
{
|
||
tcsFlow = currentTcsBubbleHighFlow + currentTcsBubbleLowFlow + currentTcsPushFlow;
|
||
}
|
||
|
||
//double currentSiSourPushFlow = currentSiSourTotalFlow - (currentSiH4FlowMode == FlowMode.Run.ToString() ? currentSiH4Flow : 0)
|
||
// - (currentTCSFlowMode == FlowMode.Run.ToString() ? TCSFlow : 0) - (currentHClFlowMode == FlowMode.Run.ToString() ? currentHClFlow : 0);
|
||
|
||
//(currentStep[(int)RecipColNo.SiSourceOuterFlow] as DoubleParam).Value = currentSiSourPushFlow.ToString("F1");
|
||
|
||
double currentSiSourInnerFlow = 0;
|
||
double currentSiSourMidFlow = 0;
|
||
double currentSiSourOutFlow = 0;
|
||
|
||
if (currentSiSourSplitRatio.Length == 3)
|
||
{
|
||
var rationSum = currentSiSourSplitRatio[0] + currentSiSourSplitRatio[1] + currentSiSourSplitRatio[2];
|
||
|
||
currentSiSourInnerFlow = currentSiSourTotalFlow / rationSum * currentSiSourSplitRatio[0];
|
||
currentSiSourMidFlow = currentSiSourTotalFlow / rationSum * currentSiSourSplitRatio[1];
|
||
currentSiSourOutFlow = currentSiSourTotalFlow / rationSum * currentSiSourSplitRatio[2];
|
||
}
|
||
|
||
((DoubleParam)currentStep[(int)RecipColNo.SiSourceInnerFlow]).Value = Math.Round(currentSiSourInnerFlow, 1);
|
||
((DoubleParam)currentStep[(int)RecipColNo.SiSourceMiddleFlow]).Value = Math.Round(currentSiSourMidFlow, 1);
|
||
((DoubleParam)currentStep[(int)RecipColNo.SiSourceOuterFlow]).Value = Math.Round(currentSiSourOutFlow, 1);
|
||
|
||
#endregion
|
||
|
||
#region C Source
|
||
|
||
var currentC2H4Flow = ((DoubleParam)currentStep[(int)RecipColNo.C2H4Flow]).Value;
|
||
var currentCSourSplitRatio = new double[3];
|
||
if (currentStep[(int)RecipColNo.CSourceSplitRatio] is Sets3RatioParam cSourceRatio)
|
||
currentCSourSplitRatio = cSourceRatio.Ratio;
|
||
|
||
var currentCSourTotalFlow = ((DoubleParam)currentStep[(int)RecipColNo.CSourceTotalFlow]).Value;
|
||
|
||
var currentC2H4FlowMode = (currentStep[(int)RecipColNo.C2H4FlowMode] as ComboxParam)?.Value;
|
||
var currentCSourPushFlow = currentCSourTotalFlow -
|
||
(string.Equals(currentC2H4FlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase)
|
||
? currentC2H4Flow
|
||
: 0d);
|
||
|
||
|
||
((DoubleParam)currentStep[(int)RecipColNo.CSourceOuterFlow]).Value = Math.Round(currentCSourPushFlow, 1);
|
||
|
||
double currentCSourInnerFlow = 0;
|
||
double currentCSourMidFlow = 0;
|
||
double currentCSourOuterFlow = 0;
|
||
|
||
if (currentCSourSplitRatio.Length == 3)
|
||
{
|
||
var ratioSum = currentCSourSplitRatio[0] + currentCSourSplitRatio[1] + currentCSourSplitRatio[2];
|
||
|
||
currentCSourInnerFlow = currentCSourTotalFlow / ratioSum * currentCSourSplitRatio[0];
|
||
currentCSourMidFlow = currentCSourTotalFlow / ratioSum * currentCSourSplitRatio[1];
|
||
currentCSourOuterFlow = currentCSourTotalFlow / ratioSum * currentCSourSplitRatio[2];
|
||
}
|
||
|
||
((DoubleParam)currentStep[(int)RecipColNo.CSourceInnerFlow]).Value = Math.Round(currentCSourInnerFlow, 1);
|
||
((DoubleParam)currentStep[(int)RecipColNo.CSourceMiddleFlow]).Value = Math.Round(currentCSourMidFlow, 1);
|
||
((DoubleParam)currentStep[(int)RecipColNo.CSourceOuterFlow]).Value = Math.Round(currentCSourOuterFlow, 1);
|
||
|
||
#endregion
|
||
|
||
#region Dope
|
||
|
||
var currentDopeTotalFlow = ((DoubleParam)currentStep[(int)RecipColNo.DopeTotalFlow]).Value;
|
||
var currentN2ActualFlow = ((DoubleParam)currentStep[(int)RecipColNo.N2ActualFlow]).Value;
|
||
var currentN2LowFlow = ((DoubleParam)currentStep[(int)RecipColNo.N2LowFlow]).Value;
|
||
var currentDiluFlowForN2 = ((DoubleParam)currentStep[(int)RecipColNo.DilutFlowForN2]).Value;
|
||
|
||
var currentN2HighFlow = ((DoubleParam)currentStep[(int)RecipColNo.N2HighFlow]).Value;
|
||
var currentTmaBubbFlow = ((DoubleParam)currentStep[(int)RecipColNo.TMABubbFlow]).Value;
|
||
var currentTmaPushFlow = ((DoubleParam)currentStep[(int)RecipColNo.TMAPushFlow]).Value;
|
||
|
||
var currentDilutedN2Flow =
|
||
(currentN2LowFlow + currentDiluFlowForN2) * currentN2ActualFlow / currentN2LowFlow;
|
||
((DoubleParam)currentStep[(int)RecipColNo.DilutedN2Flow]).Value = Math.Round(currentDilutedN2Flow, 1);
|
||
|
||
|
||
var currentDopeSplitRatio = new double[3];
|
||
if (currentStep[(int)RecipColNo.DopeSplitRatio] is Sets3RatioParam dopRatio)
|
||
currentDopeSplitRatio = dopRatio.Ratio;
|
||
|
||
var currentN2FlowMode = ((ComboxParam)currentStep[(int)RecipColNo.N2FlowMode]).Value;
|
||
var currentN2HighFlowMode = ((ComboxParam)currentStep[(int)RecipColNo.N2HighFlowMode]).Value;
|
||
var currentTmaFlowMode = ((ComboxParam)currentStep[(int)RecipColNo.TMAFlowMode]).Value;
|
||
|
||
double tmaFlow = 0;
|
||
var tmaEff =
|
||
(double)QueryDataClient.Instance.Service.GetConfig($"PM.{Parent.ChamberBelongTo}.Efficiency.TMA-Eff");
|
||
|
||
if (string.Equals(currentTmaFlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase)
|
||
|| string.Equals(currentTmaFlowMode, FlowModeParam.FlowModeEnum.Vent.ToString(),
|
||
StringComparison.OrdinalIgnoreCase))
|
||
tmaFlow = currentTmaBubbFlow * tmaEff + currentTmaPushFlow;
|
||
else if (string.Equals(currentTmaFlowMode, FlowModeParam.FlowModeEnum.Purge.ToString(),
|
||
StringComparison.OrdinalIgnoreCase))
|
||
tmaFlow = currentTmaBubbFlow + currentTmaPushFlow;
|
||
|
||
//double currentDopePushFlow = currentDopeTotalFlow
|
||
// - (currentN2FlowMode == FlowMode.Run.ToString() ? currentDilutedN2Flow : 0)
|
||
// - (currentN2HighFlowMode == FlowMode.Run.ToString() ? currentN2HighFlow : 0)
|
||
// - (currentTMAFlowMode == FlowMode.Run.ToString() ? TMAFlow : 0);
|
||
|
||
//(currentStep[(int)RecipColNo.DopeOuterFlow] as DoubleParam).Value = currentDopePushFlow.ToString("F1");
|
||
|
||
double currentDopeInnerFlow = 0;
|
||
double currentDopeMidFlow = 0;
|
||
double currentDopeOuterFlow = 0;
|
||
|
||
if (currentDopeSplitRatio.Length == 3)
|
||
{
|
||
var ratioSum = currentDopeSplitRatio[0] + currentDopeSplitRatio[1] + currentDopeSplitRatio[2];
|
||
|
||
currentDopeInnerFlow = currentDopeTotalFlow / ratioSum * currentDopeSplitRatio[0];
|
||
currentDopeMidFlow = currentDopeTotalFlow / ratioSum * currentDopeSplitRatio[1];
|
||
currentDopeOuterFlow = currentDopeTotalFlow / ratioSum * currentDopeSplitRatio[2];
|
||
}
|
||
|
||
(currentStep[(int)RecipColNo.DopeInnerFlow] as DoubleParam).Value = Math.Round(currentDopeInnerFlow, 1);
|
||
(currentStep[(int)RecipColNo.DopeMiddleFlow] as DoubleParam).Value = Math.Round(currentDopeMidFlow, 1);
|
||
(currentStep[(int)RecipColNo.DopeOuterFlow] as DoubleParam).Value = Math.Round(currentDopeOuterFlow, 1);
|
||
|
||
#endregion
|
||
|
||
#region SH Supp. Flow
|
||
|
||
var currentShSuppTotalFlow = currentShTotalFlow - currentSurroundingFlow - currentSiSourTotalFlow -
|
||
currentCSourTotalFlow - currentDopeTotalFlow;
|
||
var sumShTotalFlowSplitRatio = currentShTotalFlowSplitRatio[0] + currentShTotalFlowSplitRatio[1] +
|
||
currentShTotalFlowSplitRatio[2];
|
||
var currentShInnerFlow = (currentShTotalFlow - currentSurroundingFlow) / sumShTotalFlowSplitRatio *
|
||
currentShTotalFlowSplitRatio[0];
|
||
var currentShMidFlow = (currentShTotalFlow - currentSurroundingFlow) / sumShTotalFlowSplitRatio *
|
||
currentShTotalFlowSplitRatio[1];
|
||
var currentShOutterFlow = (currentShTotalFlow - currentSurroundingFlow) / sumShTotalFlowSplitRatio *
|
||
currentShTotalFlowSplitRatio[2];
|
||
var currentInnerSuppFlow = currentShInnerFlow - currentSiSourInnerFlow - currentCSourInnerFlow -
|
||
currentDopeInnerFlow;
|
||
var currentMidSuppFlow = currentShMidFlow - currentSiSourMidFlow - currentCSourMidFlow - currentDopeMidFlow;
|
||
var currentOutterSuppFlow = currentShSuppTotalFlow - currentInnerSuppFlow - currentMidSuppFlow;
|
||
|
||
(currentStep[(int)RecipColNo.SHPushTotalFlow] as DoubleParam).Value = Math.Round(currentShSuppTotalFlow, 1);
|
||
(currentStep[(int)RecipColNo.SHInnerFlow] as DoubleParam).Value = Math.Round(currentShInnerFlow, 1);
|
||
(currentStep[(int)RecipColNo.SHMiddleFlow] as DoubleParam).Value = Math.Round(currentShMidFlow, 1);
|
||
(currentStep[(int)RecipColNo.SHOuterFlow] as DoubleParam).Value = Math.Round(currentShOutterFlow, 1);
|
||
(currentStep[(int)RecipColNo.InnerPushFlow] as DoubleParam).Value = Math.Round(currentInnerSuppFlow, 1);
|
||
(currentStep[(int)RecipColNo.MiddlePushFlow] as DoubleParam).Value = Math.Round(currentMidSuppFlow, 1);
|
||
(currentStep[(int)RecipColNo.OuterPushFlow] as DoubleParam).Value = Math.Round(currentOutterSuppFlow, 1);
|
||
|
||
#endregion
|
||
|
||
#region Vent Flow
|
||
|
||
var currentTotalVentFlow = (currentStep[(int)RecipColNo.TotalVentFlow] as DoubleParam).Value;
|
||
|
||
var currentSiSourTotalFlowForPurge =
|
||
(string.Equals(currentSiH4FlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase) == false
|
||
? currentSiH4Flow
|
||
: 0d)
|
||
+ (string.Equals(currentTcsFlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase) == false
|
||
? tcsFlow
|
||
: 0d) +
|
||
(string.Equals(currentHClFlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase) == false
|
||
? currentHClFlow
|
||
: 0d);
|
||
|
||
var currentCSourTotalFlowForPurge =
|
||
string.Equals(currentC2H4FlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase) == false
|
||
? currentC2H4Flow
|
||
: 0d;
|
||
|
||
|
||
var n2Flow = (string.Equals(currentN2FlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase) == false
|
||
? currentDilutedN2Flow
|
||
: 0d) +
|
||
(string.Equals(currentN2HighFlowMode, FlowModeParam.FlowModeEnum.Run.ToString(),
|
||
StringComparison.OrdinalIgnoreCase) == false
|
||
? currentN2HighFlow
|
||
: 0d);
|
||
|
||
var currentDopeTotalFlowForPurge = n2Flow + (string.Equals(currentTmaFlowMode,
|
||
FlowModeParam.FlowModeEnum.Run.ToString(), StringComparison.OrdinalIgnoreCase) == false
|
||
? tmaFlow
|
||
: 0d);
|
||
|
||
var currentVentPushFlow = currentTotalVentFlow - currentSiSourTotalFlowForPurge -
|
||
currentCSourTotalFlowForPurge - currentDopeTotalFlowForPurge;
|
||
|
||
(currentStep[(int)RecipColNo.VentPushFlow] as DoubleParam).Value = Math.Round(currentVentPushFlow, 1);
|
||
|
||
#endregion*/
|
||
}
|
||
|
||
#endregion
|
||
|
||
#region Override Methods
|
||
|
||
protected override void InsertItem(int index, Param item)
|
||
{
|
||
if (item != null)
|
||
{
|
||
item.Parent = this;
|
||
LinkWithPreviousParam(item);
|
||
LinkWithNextParam(item);
|
||
|
||
item.PropertyChanged += ParamOnPropertyChanged;
|
||
}
|
||
|
||
base.InsertItem(index, item);
|
||
}
|
||
|
||
protected override void SetItem(int index, Param item)
|
||
{
|
||
throw new NotSupportedException();
|
||
}
|
||
|
||
protected override void RemoveItem(int index)
|
||
{
|
||
if (Count > 0)
|
||
{
|
||
if (index >= 0 && index < Count)
|
||
{
|
||
this[index].PropertyChanged -= ParamOnPropertyChanged;
|
||
}
|
||
}
|
||
|
||
// 将前后两个Param链接起来
|
||
var preParam = this[index].Previous;
|
||
var nextParam = this[index].Next;
|
||
if (preParam != null && nextParam != null)
|
||
{
|
||
preParam.Next = nextParam;
|
||
nextParam.Previous = preParam;
|
||
}
|
||
else if (preParam == null && nextParam != null)
|
||
{
|
||
nextParam.Previous = null;
|
||
}
|
||
else if (preParam != null)
|
||
{
|
||
preParam.Next = null;
|
||
}
|
||
|
||
|
||
IsSaved = false;
|
||
SavedStateChanged?.Invoke(this, true);
|
||
|
||
base.RemoveItem(index);
|
||
}
|
||
|
||
protected override void ClearItems()
|
||
{
|
||
this.ToList().ForEach(x => x.PropertyChanged -= ParamOnPropertyChanged);
|
||
|
||
IsSaved = Count <= 0;
|
||
SavedStateChanged?.Invoke(this, true);
|
||
|
||
base.ClearItems();
|
||
}
|
||
|
||
public override string ToString()
|
||
{
|
||
return Count > 0 ? (StepNoParam == null ? "Recipe Step, Item={Count}" : StepNoParam.ToString()) : "Empty Recipe Step";
|
||
}
|
||
|
||
#endregion
|
||
}
|
||
}
|