1393 lines
48 KiB
C#
1393 lines
48 KiB
C#
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using System;
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using System.Text;
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using Aitex.Core.RT.Device;
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using Aitex.Sorter.Common;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.Common.SubstrateTrackings;
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using System.Text.RegularExpressions;
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using Aitex.Core.RT.Log;
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namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot.SR100
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{
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public class handler<T> : IHandler where T : ITransferMsg, new()
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{
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public int ID { get; set; }
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public int Unit { get; set; }
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public bool IsBackground { get { return _imp.background; } }
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private static int retry_time = 3;
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private int retry_count = retry_time;
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private object[] _objs = null;
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private TokenGenerator _generator;
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private T _imp = new T();
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public handler(IDevice device)
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{
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_imp.Robot = device;
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}
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public handler(IDevice device, ref TokenGenerator gen, params object[] objs)
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{
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_imp.Robot = device;
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this._generator = gen;
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this._objs = objs;
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}
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public bool Execute<TPort>(ref TPort port) where TPort : ICommunication
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{
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retry_count = retry_time;
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ID = _generator.create();
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return port.Write(string.Format("{0}{1}{2}", ProtocolTag.tag_cmd_start, package(), ProtocolTag.tag_end));
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}
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/// <summary>
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/// return value: bhandle
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/// </summary>
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/// <typeparam name="TPort"></typeparam>
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/// <param name="port"></param>
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/// <param name="msg"></param>
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/// <param name="completed"></param>
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/// <returns></returns>
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///
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public bool OnMessage<TPort>(ref TPort port, string message, out bool completed) where TPort : ICommunication
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{
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//message = ">,1,EVNT,100,2018/11/16 17:01:06,2BA0,A1";
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// >,1,EVNT,100,2019/10/11 17:27:32,1930,8B
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//message = " !,1,36,40,2BA0,MTRS,002200,-0011931,-0610171,00179995,00049818,00186336,57";
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//message = "!,1,16,40,0000,MTCH,000483,-0011862,00000000,00179516,00090369,00172882,0A";
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try
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{
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completed = false;
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string package = message;
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string[] words = Regex.Split(package, ProtocolTag.cmd_token);
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string type = words[0];
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int unit = int.Parse(words[1]);
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string sum = words[words.Length - 1];
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string check = Checksum(package);
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if (sum != check)
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{
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throw (new InvalidPackageException(string.Format("check sum error{0}", package)));
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}
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if (type != ProtocolTag.resp_tag_event && type != ProtocolTag.resp_tag_error)
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{
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int seq = int.Parse(words[2]);
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if (seq != ID)
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return false;
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if (unit != Unit)
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{
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throw (new InvalidPackageException(string.Format("invalid unit {0}", package)));
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}
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}
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if (type == ProtocolTag.resp_tag_error)
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{
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string error = words[1];
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//‘1’: Warning 1 (W1), ‘2’: Warning 2 (W2), ‘3’: Important alarm 1 (A1), ‘4’: Important alarm 2 (A2),
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//‘5’: Serious alarm (F)
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if (error[0] != '1' && error[0] != '2')
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{
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string warning = string.Format("can't execute retry, {0}", error);
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LOG.Warning(warning);
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throw (new ExcuteFailedException(warning));
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}
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if (retry_count-- <= 0)
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{
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string warning = string.Format("retry over {0} times", retry_time);
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LOG.Warning(warning);
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throw (new ExcuteFailedException(warning));
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}
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port.Write(string.Format("{0}{1}{2}", ProtocolTag.tag_cmd_start, this.package(), ProtocolTag.tag_end));
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return true;
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}
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else if (type == ProtocolTag.resp_tag_event)
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{
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string evtType = words[3];
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string evtInfo = words[5];
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if (_imp.evt)
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completed = _imp.unpackage(type, words);
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return _imp.evt;
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}
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else
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{
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completed = _imp.unpackage(type, words);
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if (completed)
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{
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_generator.release(ID);
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if (_imp.background)
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{
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ID = this._generator.create();
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port.Write(string.Format("{0}{1}{2}", ProtocolTag.tag_cmd_start, ackn(), ProtocolTag.tag_end));
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_generator.release(ID);
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}
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//wait 2ms
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return true;
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}
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return true;
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}
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}
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catch (ExcuteFailedException e)
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{
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throw (e);
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}
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catch (InvalidPackageException e)
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{
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throw e;
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}
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catch (Exception ex)
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{
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LOG.Write(ex);
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throw (new InvalidPackageException(message));
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}
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}
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private string Checksum(string package)
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{
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int start = package.IndexOf(ProtocolTag.cmd_token);
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int end = package.LastIndexOf(ProtocolTag.cmd_token);
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int len = end - start + 1;
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if (len > 1)
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{
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string data = package.Substring(start, len);
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return Checksum(Encoding.Default.GetBytes(data));
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}
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return "";
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}
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private string Checksum(byte[] bytes)
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{
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int sum = 0;
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foreach (byte code in bytes)
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{
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sum += code;
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}
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string hex = String.Format("{0:X2}", sum % 256);
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return hex;
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}
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private string package()
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{
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//$,<UNo>(,<SeqNo>),<Command>,<Parameter>(,<Sum>)<CR>
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string data = string.Empty;
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data = string.Format(",{0:D1},{1:D2}{2}", Unit, ID, _imp.package(this._objs));
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string sum = Checksum(Encoding.ASCII.GetBytes(data));
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return data + sum;
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}
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private string ackn()
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{
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//$,<UNo>(,<SeqNo>),ACKN(,<Sum>)<CR>
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string data = string.Empty;
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data = string.Format(",{0:D1},{1:D2},ACKN,", Unit, ID);
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string sum = Checksum(Encoding.ASCII.GetBytes(data));
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return data + sum;
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}
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}
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public class RobotMotionHandler : ITransferMsg
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{
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public bool background { get; protected set; }
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public bool evt { get { return false; } }
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public string deviceID { private get; set; }
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public string _cmd = string.Empty;
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public IDevice Robot { set { _device = (Robot)value; } }
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protected Robot _device;
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public RobotMotionHandler()
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{
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background = false;
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}
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public virtual string package(params object[] args)
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{
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return "";
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}
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public bool unpackage(string type, string[] items)
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{
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int value = Convert.ToInt32(items[3],16);
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_device.Status = value;
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int error = Convert.ToInt32(items[4], 16);
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_device.ErrorCode = error;
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if (error > 0)
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_device.LastErrorCode = error;
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if (type.Equals(ProtocolTag.resp_tag_excute))
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{
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if (items.Length > 7)
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_device.ElapseTime = int.Parse(items[6]);
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if (items.Length > 8)
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_device.Rotation = int.Parse(items[7]);
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if (items.Length > 9)
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_device.Extension = int.Parse(items[8]);
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if (items.Length > 10)
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_device.Wrist1= int.Parse(items[9]);
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if (items.Length > 11)
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_device.Wrist2= int.Parse(items[10]);
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if (items.Length > 12)
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_device.Evevation = int.Parse(items[11]);
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if (error == 0)
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{
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update(items);
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}
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return true;
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}
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return !background;
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}
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protected virtual void update(string[] data)
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{
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}
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}
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public class RbInitHandler : RobotMotionHandler
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{
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public RbInitHandler()
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{
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background = true;
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}
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//$,<UNo>(,<SeqNo>),CCLR,<CMode>(,<Sum>)<CR>
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public override string package(params object[] args)
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{
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return ",CCLR,E,";
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}
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}
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public class RbHomeHandler : RobotMotionHandler
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{
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public RbHomeHandler()
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{
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background = true;
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}
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public override string package(params object[] args)
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{
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updateBefore();
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return ",INIT,1,1,G,";
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}
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protected void updateBefore()
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{
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_device.Blade1Target = ModuleHelper.Converter(_device.Name);
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_device.Blade2Target = ModuleHelper.Converter(_device.Name);
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}
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protected override void update(string[] data)
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{
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_device.Initalized = true;
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_device.Swap = false;
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}
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}
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public class RbClearErrorHandler : RobotMotionHandler
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{
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public RbClearErrorHandler()
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{
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background = true;
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}
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//$,<UNo>(,<SeqNo>),CCLR,<CMode>(,<Sum>)<CR>
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public override string package(params object[] args)
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{
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return ",CCLR,E,";
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}
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}
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public class RbGripHandler : RobotMotionHandler
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{
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Hand _hand;
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public RbGripHandler()
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{
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background = true;
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}
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//$,<UNo>(,<SeqNo>),CSOL,<Sol>,<Sw>,<Wait>(,<Sum>)<CR>
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//sol Solenoid control specification (1 byte) • ‘1’ : Blade 1. • ‘2’ : Blade 2. • ‘F’ : Blade 1 + Blade 2.
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// Solenoid command (1 byte) • ‘0’ : Wafer release. / Lifter down. • ‘1’ : Wafer hold. / Lifter up.
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public override string package(params object[] args)
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{
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_hand = (Hand)args[0];
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bool bHold = (bool)args[1];
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if(bHold)
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return string.Format(",CSOL,{0},1,0,",RobotConvertor.hand2string(_hand));
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return string.Format(",CSOL,{0},0,0,", RobotConvertor.hand2string(_hand));
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}
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}
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public class RbStopHandler : RobotMotionHandler
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{
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public RbStopHandler()
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{
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background = true;
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}
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//$,<UNo>(,<SeqNo>),CSTP,<Sw>(,<Sum>)<CR>
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//• ‘H’ : Deceleration to a stop.
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//• ‘E’ : Emergency stop.
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public override string package(params object[] args)
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{
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bool isEmergency = (bool)args[0];
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if (isEmergency)
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return ",CSTP,E,";
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return ",CSTP,H,";
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}
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}
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public class RbResumeHandler : RobotMotionHandler
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{
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public RbResumeHandler()
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{
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background = true;
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}
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|||
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//[Command Message] $,<UNo>(,<SeqNo>),CRSM(,<Sum>)<CR>
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|||
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//• UNo : Unit number(1 byte)
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|||
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// • ‘1’ : Manipulator.
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|||
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// • ‘2’ : Pre-aligner.
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|||
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//• SeqNo : Sequence number(None / 2 bytes)
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|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
return ",CRSM,";
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class PickExtendHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
public PickExtendHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
// $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return string.Format(",MTRS,G,{0},{1:D2},A,{2},Gb,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot),
|
|||
|
|
RobotConvertor.hand2string(_hand));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class PickRetractHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
public PickRetractHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//$,<UNo>(,<SeqNo>),MPNT,<TrsPnt>(,<Sum>)<CR>
|
|||
|
|
// $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return ",MPNT,G4,";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
if (_hand == Hand.Both)
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)Hand.Blade1);
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleHelper.Converter(_device.Name), (int)Hand.Blade2);
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)_hand);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = "0";
|
|||
|
|
_device.CmdBlade2Extend = "0";
|
|||
|
|
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class PickHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
public PickHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
// $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return string.Format(",MTRS,G,{0},{1:D2},A,{2},G4,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot),
|
|||
|
|
RobotConvertor.hand2string(_hand));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
if (_hand == Hand.Both)
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)Hand.Blade1);
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleHelper.Converter(_device.Name), (int)Hand.Blade2);
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)_hand);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = "0";
|
|||
|
|
_device.CmdBlade2Extend = "0";
|
|||
|
|
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class PlaceHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
|
|||
|
|
public PlaceHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
// $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
updateBefore();
|
|||
|
|
return string.Format(",MTRS,P,{0},{1:D2},A,{2},P4,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot),
|
|||
|
|
RobotConvertor.hand2string(_hand));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
if (_hand == Hand.Both)
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade1, _chamber, _slot);
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade2, _chamber, _slot + 1);
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)_hand, _chamber, _slot);
|
|||
|
|
}
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = "0";
|
|||
|
|
_device.CmdBlade2Extend = "0";
|
|||
|
|
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class PlaceExtendHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
|
|||
|
|
public PlaceExtendHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
// $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
updateBefore();
|
|||
|
|
return string.Format(",MTRS,P,{0},{1:D2},A,{2},Pb,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot),
|
|||
|
|
RobotConvertor.hand2string(_hand));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class PlaceRetractHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
|
|||
|
|
public PlaceRetractHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//$,<UNo>(,<SeqNo>),MPNT,<TrsPnt>(,<Sum>)<CR>
|
|||
|
|
// $,<UNo>(,<SeqNo>),MPNT,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
updateBefore();
|
|||
|
|
return ",MPNT,P4,";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
if (_hand == Hand.Both)
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade1, _chamber, _slot);
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade2, _chamber, _slot + 1);
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)_hand, _chamber, _slot);
|
|||
|
|
}
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = "0";
|
|||
|
|
_device.CmdBlade2Extend = "0";
|
|||
|
|
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class ExchangHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
|
|||
|
|
|
|||
|
|
public ExchangHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
// $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
if (_hand == Hand.Blade1)
|
|||
|
|
_hand = Hand.Blade2;
|
|||
|
|
else
|
|||
|
|
_hand = Hand.Blade1;
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return string.Format(",MTRS,E,{0},{1:D2},A,{2},P4,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot),
|
|||
|
|
RobotConvertor.hand2string(_hand));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
_device.Swap = true;
|
|||
|
|
_device.PlaceBalde = _hand;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
if (_hand == Hand.Blade2)
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)Hand.Blade2);
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade1, _chamber, _slot);
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)Hand.Blade1);
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade2, _chamber, _slot);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_device.Swap = false;
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class GotoHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
public GotoHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
// $,<UNo>(,<SeqNo>),MTCH,<TrsSt>,<Slot>,<Posture>,<Hand>,<PMode> (,< OfstX >,< OfstY >,< OfstZ >)(,< Sum >)< CR >
|
|||
|
|
//• ‘M’ : Intermediate position (position with XYZ direction offset value applied).
|
|||
|
|
//• ‘R’ : Ready position (position with XYZ direction offset value applied).
|
|||
|
|
// • ‘O’ : Offset position (position with XYZ direction offset values applied).
|
|||
|
|
//// • ‘S’ : Registered position.
|
|||
|
|
/// • ‘B’ : Mapping start position.
|
|||
|
|
// • ‘E’ : Mapping finish position.
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
return string.Format(",MTCH,{0},{1:D2},A,{2},R,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot),
|
|||
|
|
RobotConvertor.hand2string(_hand));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class MoveToHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
private bool _isPick;
|
|||
|
|
public MoveToHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
// $,<UNo>(,<SeqNo>),MTCH,<TrsSt>,<Slot>,<Posture>,<Hand>,<PMode> (,< OfstX >,< OfstY >,< OfstZ >)(,< Sum >)< CR >
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
_isPick = (bool)args[3];
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
return string.Format(",MTRS,G,{0},{1:D2},A,{2},G4,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot),
|
|||
|
|
RobotConvertor.IsPick2Position(_isPick));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class PickHandlerEx : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
public PickHandlerEx()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
// Move to ready position and get wafer with adjustment offset(MTRO+MGET)
|
|||
|
|
// $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt> (,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
|
|||
|
|
// UNo: Unit number (1 byte)
|
|||
|
|
// • ‘1’ : Manipulator.
|
|||
|
|
// • SeqNo : Sequence number (None / 2 bytes)
|
|||
|
|
// • Mtn : Motion mode (1 byte)
|
|||
|
|
// • ‘G’ : Get motion.
|
|||
|
|
// • ‘P’ : Put motion.
|
|||
|
|
// • ‘E’ : Exchange motion.
|
|||
|
|
// • TrsSt : Transfer station (3 bytes)
|
|||
|
|
// • “C01” - “C08” : Cassette stage.
|
|||
|
|
// • “S01” - “S12” : Transfer stage.
|
|||
|
|
// • “P01” : P/A stage.
|
|||
|
|
// • Slot : Slot number (2 bytes)
|
|||
|
|
// <Cassette stage>
|
|||
|
|
// • “01” - “30” : When cassette stage specified.
|
|||
|
|
// <Transfer stage, Pre-aligner stage>
|
|||
|
|
// • “00” : Fixed slot(because this type of station does not have multiple slots.).
|
|||
|
|
// Note) If value is less than 2 digits, fill the higher digit with ‘0’ so that the field always has 2 digits.
|
|||
|
|
// Note) If <Hand> is ‘F’(Blade 1 + Blade 2), specifies the slot accessed by Blade 1.
|
|||
|
|
// Note) If <TrsST> is “S01”-“S12” or “P01”, the slot no. is ignored.
|
|||
|
|
// • Posture : Arm Posture (1 byte)
|
|||
|
|
// • ‘L’ : Left elbow.
|
|||
|
|
// • ‘R’ : Right elbow.
|
|||
|
|
// • ‘A’ : Automatic (Automatically selected posture with the proper path).
|
|||
|
|
// • Hand : Blade (1 byte)
|
|||
|
|
// • ‘1’ : Blade 1.
|
|||
|
|
// • ‘2’ : Blade 2.
|
|||
|
|
// • ‘F’ : Blade 1 + Blade 2 (WGet/WPut operation).
|
|||
|
|
// Note) Except for <TrsPnt> is [C01-C08: Cassette stage], ‘F’(Blade 1 + Blade 2) cannot be
|
|||
|
|
// specified.
|
|||
|
|
// Note) If <Mtn> is ‘E’( Exchange motion), ‘F’(Blade 1 + Blade 2) cannot be specified.
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
int x = (int)args[3];
|
|||
|
|
int y = (int)args[4];
|
|||
|
|
int z = (int)args[5];
|
|||
|
|
if (x < -5000) x = -5000;
|
|||
|
|
if (x > 5000) x = 5000;
|
|||
|
|
if (y < -5000) y = -5000;
|
|||
|
|
if (y > 5000) y = 5000;
|
|||
|
|
if (z < -2500) z = -5000;
|
|||
|
|
if (z > 2500) z = 2500;
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return string.Format(",MTRS,G,{0},{1:D2},A,{2},G4,{3},{4},{5},",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot),
|
|||
|
|
RobotConvertor.hand2string(_hand),
|
|||
|
|
RobotConvertor.Offset2String(x),
|
|||
|
|
RobotConvertor.Offset2String(y),
|
|||
|
|
RobotConvertor.Offset2String(z)
|
|||
|
|
);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
if (_hand == Hand.Both)
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleName.Robot, (int)Hand.Blade1);
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleName.Robot, (int)Hand.Blade2);
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleName.Robot, (int)_hand);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_device.Blade1Target = ModuleName.Robot;
|
|||
|
|
_device.Blade2Target = ModuleName.Robot;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class PlaceHandlerEx : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
|
|||
|
|
public PlaceHandlerEx()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
int x = (int)args[3];
|
|||
|
|
int y = (int)args[4];
|
|||
|
|
int z = (int)args[5];
|
|||
|
|
if (x < -5000) x = -5000;
|
|||
|
|
if (x > 5000) x = 5000;
|
|||
|
|
if (y < -5000) y = -5000;
|
|||
|
|
if (y > 5000) y = 5000;
|
|||
|
|
if (z < -2500) z = -5000;
|
|||
|
|
if (z > 2500) z = 2500;
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return string.Format(",MTRS,P,{0},{1:D2},A,{2},P4,{3},{4},{5},",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot),
|
|||
|
|
RobotConvertor.hand2string(_hand),
|
|||
|
|
RobotConvertor.Offset2String(x),
|
|||
|
|
RobotConvertor.Offset2String(y),
|
|||
|
|
RobotConvertor.Offset2String(z)
|
|||
|
|
);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
if (_hand == Hand.Both)
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleName.Robot, (int)Hand.Blade1, _chamber, _slot);
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleName.Robot, (int)Hand.Blade2, _chamber, _slot + 1);
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleName.Robot, (int)_hand, _chamber, _slot);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
_device.Blade1Target = ModuleName.Robot;
|
|||
|
|
_device.Blade2Target = ModuleName.Robot;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class ExchangeHandlerEx : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
|
|||
|
|
|
|||
|
|
public ExchangeHandlerEx()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
// $,<UNo>(,<SeqNo>),MTRS,<Mtn>,<TrsSt>,<Slot>,<Posture>,<Hand>,<TrsPnt>(,<OfstX>,<OfstY>,<OfstZ>)(,<Angle>)(,<Sum>)<CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
if (_hand == Hand.Blade1)
|
|||
|
|
_hand = Hand.Blade2;
|
|||
|
|
else
|
|||
|
|
_hand = Hand.Blade1;
|
|||
|
|
int x = (int)args[3];
|
|||
|
|
int y = (int)args[4];
|
|||
|
|
int z = (int)args[5];
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return string.Format(",MTRS,E,{0},{1:D2},A,{2},P4,{3},{4},{5},",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot),
|
|||
|
|
RobotConvertor.hand2string(_hand),
|
|||
|
|
RobotConvertor.Offset2String(x),
|
|||
|
|
RobotConvertor.Offset2String(y),
|
|||
|
|
RobotConvertor.Offset2String(z));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
_device.Swap = true;
|
|||
|
|
_device.PlaceBalde = _hand;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
if (_hand == Hand.Blade2)
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleName.Robot, (int)Hand.Blade2);
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleName.Robot, (int)Hand.Blade1, _chamber, _slot);
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleName.Robot, (int)Hand.Blade1);
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleName.Robot, (int)Hand.Blade2, _chamber, _slot);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_device.Swap = false;
|
|||
|
|
_device.Blade1Target = ModuleName.Robot;
|
|||
|
|
_device.Blade2Target = ModuleName.Robot;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class RBWaferMappingHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
//private int _slot;
|
|||
|
|
//private Hand _hand;
|
|||
|
|
public RBWaferMappingHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//$,<UNo>(,<SeqNo>),MMAP,<TrsSt>,<Slot>(,<Safe>)(,<Sum>)<CR>
|
|||
|
|
//TrsSt : Transfer station (3 bytes)
|
|||
|
|
//“C01” - “C08” : Cassette stage.
|
|||
|
|
//“S01” - “S12” : Transfer stage.
|
|||
|
|
//“P01” : P/A stage.
|
|||
|
|
//• Slot : Slot number (2 bytes)
|
|||
|
|
//<Cassette stage>
|
|||
|
|
//• “01” - “30” : When specifying individual cassette stage slot.
|
|||
|
|
//• “00” : When specifying all slots.
|
|||
|
|
//<Transfer stage, P/A stage>
|
|||
|
|
//• “00” : Fixed value t(because this type of station does not have multiple slots.)
|
|||
|
|
//Note) If value is less than 2 digits, fill the higher digit with ‘0’ so that the field always has 8 digits.
|
|||
|
|
//Note) If <TrsST> is “S01”-“S12” or “P01”, the slot no. is ignored.
|
|||
|
|
//• Safe : Specifies wafer protrusion detection operation yes/no (1 byte)
|
|||
|
|
//• ‘0’ : No wafer protrusion detection operation.
|
|||
|
|
//• ‘1’ : Wafer protrusion detection operation performed.
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
//_slot = (int)args[1];
|
|||
|
|
//_hand = (Hand)args[2];
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
return string.Format(",MMAP,{0},00,1,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class RBQueryWaferMapHandler : ITransferMsg
|
|||
|
|
{
|
|||
|
|
public bool background { get; protected set; }
|
|||
|
|
public bool evt { get { return false; } }
|
|||
|
|
public string deviceID { private get; set; }
|
|||
|
|
|
|||
|
|
public string _cmd = string.Empty;
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
public IDevice Robot { set { _device = (Robot)value; } }
|
|||
|
|
protected Robot _device;
|
|||
|
|
|
|||
|
|
public RBQueryWaferMapHandler()
|
|||
|
|
{
|
|||
|
|
background = false;
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
//$,<UNo>(,<SeqNo>),RMAP,<TrsSt>,<Slot>(,<Sum>)<CR>
|
|||
|
|
public string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
|
|||
|
|
return string.Format(",RMAP,{0},00,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool unpackage(string type, string[] items)
|
|||
|
|
{
|
|||
|
|
//$,<UNo>(,<SeqNo>),<Sts>,<Ackcd>,RMAP,<TrsSt>,<Slot>,
|
|||
|
|
//01:<Result1>…,N:<ResultN>(,<Sum>)<CR>
|
|||
|
|
//• UNo : Unit number (1 byte)
|
|||
|
|
//• SeqNo : Sequence number (None / 2 bytes)
|
|||
|
|
//• Sts : Status (2 bytes)
|
|||
|
|
//• Ackcd : Response code (4 bytes)
|
|||
|
|
//• TrsSt : Transfer station (3 bytes)
|
|||
|
|
//• Slot : Slot number (2 bytes)
|
|||
|
|
//• Result* : Mapping result (2 bytes each)
|
|||
|
|
//• “--” : No wafer detected.
|
|||
|
|
//• “OK” : Wafer inserted correctly.
|
|||
|
|
//• “CW” : Wafer inserted incorrectly (inclined).
|
|||
|
|
//• “DW” : Wafer inserted incorrectly (duplicated).
|
|||
|
|
//Note) Responds with the number of slots of the specified transfer station.
|
|||
|
|
//$,1,00,0000,RMAP,C02,00,
|
|||
|
|
//01:OK,02:DW,03:OK,04:CW,05:CW,06:OK,07:OK,08:--,09:OK,10:OK
|
|||
|
|
// No wafer: "0", Wafer: "1", Crossed:"2", Undefined: "?", Overlapping wafers: "W"
|
|||
|
|
if (items.Length > 7)
|
|||
|
|
{
|
|||
|
|
StringBuilder sb = new StringBuilder();
|
|||
|
|
for (int i = 8; i < items.Length-1; i++)
|
|||
|
|
{
|
|||
|
|
string value = items[i].Substring(3);
|
|||
|
|
switch (value)
|
|||
|
|
{
|
|||
|
|
case "--":
|
|||
|
|
sb.Append("0");
|
|||
|
|
break;
|
|||
|
|
case "OK":
|
|||
|
|
sb.Append("1");
|
|||
|
|
break;
|
|||
|
|
case "CW":
|
|||
|
|
sb.Append("2");
|
|||
|
|
break;
|
|||
|
|
case "DW":
|
|||
|
|
sb.Append("W");
|
|||
|
|
break;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_device.NotifySlotMapResult(_chamber, sb.ToString());
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return !background;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
public class RbSetSpeedHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private int _speed = 0;
|
|||
|
|
public RbSetSpeedHandler()
|
|||
|
|
{
|
|||
|
|
background = false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
_speed = (int)args[0];
|
|||
|
|
|
|||
|
|
return string.Format(",SSLV,{0},", _speed);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
public class RBQueryStateHandler : ITransferMsg
|
|||
|
|
{
|
|||
|
|
public bool background { get; protected set; }
|
|||
|
|
public bool evt { get { return false; } }
|
|||
|
|
public string deviceID { private get; set; }
|
|||
|
|
|
|||
|
|
public string _cmd = string.Empty;
|
|||
|
|
|
|||
|
|
public IDevice Robot { set { _device = (Robot)value; } }
|
|||
|
|
protected Robot _device;
|
|||
|
|
|
|||
|
|
public RBQueryStateHandler()
|
|||
|
|
{
|
|||
|
|
background = false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
//$,<UNo>(,<SeqNo>),RSTS(,<Sum>)<CR>
|
|||
|
|
|
|||
|
|
public string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
return ",RSTS,";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool unpackage(string type, string[] items)
|
|||
|
|
{
|
|||
|
|
/*
|
|||
|
|
(Positive Response Message)
|
|||
|
|
$,<UNo>(,<SeqNo>),<Sts>,<Ackcd>,RSTS,<Errcd>,<Status>(,<Sum>)<CR>
|
|||
|
|
• UNo : Unit number (1 byte)
|
|||
|
|
• SeqNo : Sequence number (None / 2 bytes)
|
|||
|
|
• Sts : Status (2 bytes)
|
|||
|
|
• Ackcd : Response code (4 bytes)
|
|||
|
|
• Errcd : Error code (4 bytes)
|
|||
|
|
Note) Responds with the currently occurring error for the specified unit.
|
|||
|
|
(When there is no error, responds “0000”)
|
|||
|
|
• Status : Status information (4 bytes)
|
|||
|
|
• Refer to the supplementary explanation.
|
|||
|
|
(Negative Response Message)
|
|||
|
|
$,<UNo>(,<SeqNo>),<Sts>,<Ackcd>,RSTS(,<Sum>)<CR>
|
|||
|
|
• UNo : Unit number (1 byte)
|
|||
|
|
• SeqNo : Sequence number (None / 2 bytes)
|
|||
|
|
• Sts : Status (2 bytes)
|
|||
|
|
• Ackcd : Response code (4 bytes)
|
|||
|
|
*/
|
|||
|
|
|
|||
|
|
if (items.Length > 7)
|
|||
|
|
{
|
|||
|
|
int errorCode = Convert.ToInt32(items[6], 16);
|
|||
|
|
_device.ErrorCode = errorCode;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
if (items.Length > 8)
|
|||
|
|
{
|
|||
|
|
int status = Convert.ToInt32(items[7], 16);
|
|||
|
|
_device.StateWaferOnBlade1 = (status & 0x01) == 0x01;
|
|||
|
|
_device.StateWaferOnBlade2 = (status & 0x02) == 0x02;
|
|||
|
|
_device.StateBlade1Gripped = (status & 0x04) == 0x04;
|
|||
|
|
_device.StateBlade2Gripped = (status & 0x08) == 0x08;
|
|||
|
|
|
|||
|
|
_device.StateInterlock1 = (status & 0x0100) == 0x0100;
|
|||
|
|
_device.StateInterlock2 = (status & 0x0200) == 0x0200;
|
|||
|
|
_device.StateInterlock3 = (status & 0x0400) == 0x0400;
|
|||
|
|
_device.StateInterlock4 = (status & 0x0800) == 0x0800;
|
|||
|
|
|
|||
|
|
_device.StateInterlock5 = (status & 0x010000) == 0x010000;
|
|||
|
|
_device.StateInterlock6 = (status & 0x020000) == 0x020000;
|
|||
|
|
_device.StateInterlock7 = (status & 0x040000) == 0x040000;
|
|||
|
|
_device.StateInterlock8 = (status & 0x080000) == 0x080000;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return !background;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class RbEventHandler : ITransferMsg
|
|||
|
|
{
|
|||
|
|
public bool background { get { return false; } }
|
|||
|
|
public bool evt { get { return true; } }
|
|||
|
|
public string deviceID { private get; set; }
|
|||
|
|
|
|||
|
|
public string _cmd = string.Empty;
|
|||
|
|
|
|||
|
|
public IDevice Robot { set { _device = (Robot)value; } }
|
|||
|
|
protected Robot _device;
|
|||
|
|
|
|||
|
|
public RbEventHandler()
|
|||
|
|
{
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
//$,<UNo>(,<SeqNo>),RSTS(,<Sum>)<CR>
|
|||
|
|
|
|||
|
|
public string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
return "";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool unpackage(string type, string[] items)
|
|||
|
|
{
|
|||
|
|
string evtType = items[3];
|
|||
|
|
if (evtType.Equals(ProtocolTag.resp_evt_error))
|
|||
|
|
{
|
|||
|
|
int error = Convert.ToInt32(items[5], 16);
|
|||
|
|
_device.ErrorCode = error;
|
|||
|
|
if (error > 0)
|
|||
|
|
_device.LastErrorCode = error;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class RBQueryPositionHandler : ITransferMsg
|
|||
|
|
{
|
|||
|
|
public bool background { get; protected set; }
|
|||
|
|
public bool evt { get { return false; } }
|
|||
|
|
public string deviceID { private get; set; }
|
|||
|
|
|
|||
|
|
public string _cmd = string.Empty;
|
|||
|
|
public IDevice Robot { set { _device = (Robot)value; } }
|
|||
|
|
protected Robot _device;
|
|||
|
|
|
|||
|
|
public RBQueryPositionHandler()
|
|||
|
|
{
|
|||
|
|
background = false;
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
//$,<UNo>(,<SeqNo>),RPOS,<PType>(,<Sum>)<CR>
|
|||
|
|
//• ‘R’ : Command position.• ‘F’ : Feedback position.
|
|||
|
|
public string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
return ",RPOS,F,";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool unpackage(string type, string[] items)
|
|||
|
|
{
|
|||
|
|
//Positive $,<UNo>(,<SeqNo>),<Sts>,<Ackcd>,RPOS,<PType>,<Value1>…,<ValueN>(,<Sum>)<CR>
|
|||
|
|
//Negative $,<UNo>(,<SeqNo>),<Sts>,<Ackcd>,RPOS,<PType>(,<Sum>)<CR>
|
|||
|
|
|
|||
|
|
if (items.Length > 11)
|
|||
|
|
{
|
|||
|
|
_device.Rotation = int.Parse(items[7]);
|
|||
|
|
_device.Extension = int.Parse(items[8]);
|
|||
|
|
_device.Wrist1 = int.Parse(items[9]);
|
|||
|
|
_device.Wrist2 = int.Parse(items[10]);
|
|||
|
|
_device.Evevation = int.Parse(items[11]);
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return !background;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class PositionAdjustmentHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private Axis axis;
|
|||
|
|
//private int _slot;
|
|||
|
|
//private Motion _next;
|
|||
|
|
private Hand _hand;
|
|||
|
|
public PositionAdjustmentHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
// $,< UNo > (,< SeqNo >),MABS,< Axis >,< Hand >,< Mode >,< Value > (,< Sum >) < CR >
|
|||
|
|
// $，< UNo >（,< Saqno >),MREL,< Axis >，< mode >< Value >（< Sum >）< CR >
|
|||
|
|
// UNo : Unit number(1 byte)
|
|||
|
|
//‘1’ : Manipulator.
|
|||
|
|
//‘2’ : Edge grip type pre-alinger.
|
|||
|
|
//SeqNo : Sequence number(None / 2 bytes)
|
|||
|
|
//Axis: Axis(1 byte)
|
|||
|
|
//< Manipulator >
|
|||
|
|
//‘S’ : Rotation axis.
|
|||
|
|
//‘A’ : Extension axis.
|
|||
|
|
//‘H’ : Wrist axis 1.
|
|||
|
|
//‘I’ : Wrist axis 2.
|
|||
|
|
//‘Z’ : Elevation axis.
|
|||
|
|
//< Edge grip type pre - alinger >
|
|||
|
|
//‘S’ : Rotation axis.
|
|||
|
|
//Hand: Blade(1 byte)
|
|||
|
|
//‘1’ : Blade 1.
|
|||
|
|
//‘2’ : Blade 2.
|
|||
|
|
//Note) If the<Axis> specification is “A: Extension axis”, specify the access blade.
|
|||
|
|
//If the<Axis> specification is not “A: Extension axis”, specify ‘1’
|
|||
|
|
//Mode: Passive blade operation mode(1 byte)
|
|||
|
|
//‘C’ : Maintain passive blade posture.
|
|||
|
|
//‘H’ : Passive blade fixed to wafer center.
|
|||
|
|
//Note) Valid if the < Axis > specification is “A: Extension axis”.
|
|||
|
|
//If the<Axis> specification is not “A: Extension axis”, specify ‘C’.
|
|||
|
|
//Value: Coordinate(8 bytes, Resolution: 0.001[mm] /[deg])
|
|||
|
|
//Note) Specified in the range between “-9999999” and “99999999”.
|
|||
|
|
//If value is less than 8 digits, fill the higher digit(s) with ‘0’ so that the field always has 8 digits.
|
|||
|
|
//A sign is added to the highest digit.
|
|||
|
|
//Note) If the operation range is exceeded a stroke limit error will be notified.
|
|||
|
|
|
|||
|
|
axis = (Axis)args[0];
|
|||
|
|
_hand = (Hand)args[1];
|
|||
|
|
int x = (int)args[2];
|
|||
|
|
return string.Format(",MREL,{0},{1},C,{2},",//MABS
|
|||
|
|
RobotConvertor.AxisToStr(axis),
|
|||
|
|
RobotConvertor.hand2string(_hand),
|
|||
|
|
RobotConvertor.Offset2String(x)
|
|||
|
|
|
|||
|
|
|
|||
|
|
);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
}
|