Sic.Framework/MECF.Framework.UI.Client/CenterViews/Modules/PM/PMProcessViewModel.cs

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54 KiB
C#
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using System.Collections.Generic;
using Aitex.Core.Common.DeviceData;
using Aitex.Core.Util;
using Caliburn.Micro;
using MECF.Framework.Common.OperationCenter;
using System;
using MECF.Framework.Common.DataCenter;
using MECF.Framework.UI.Client.CenterViews.Editors.Recipe;
using MECF.Framework.UI.Client.ClientBase;
using System.Windows;
using Caliburn.Micro.Core;
using System.Windows.Media;
using System.Windows.Threading;
using System.Data;
using System.Linq;
using System.Threading.Tasks;
using OpenSEMI.ClientBase;
using Sicentury.Core;
using MECF.Framework.UI.Client.CenterViews.Editors;
using MECF.Framework.UI.Client.RecipeEditorLib.DGExtension.CustomColumn;
using MECF.Framework.UI.Client.RecipeEditorLib.RecipeModel;
using MECF.Framework.UI.Client.RecipeEditorLib.RecipeModel.Params;
using Action = System.Action;
using Newtonsoft.Json;
using System.Dynamic;
using Aitex.Core.RT.Device.PmDevices;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MfcCalculation;
using SicUI.Models.PMs;
namespace MECF.Framework.UI.Client.CenterViews.Modules.PM
{
public class PMProcessViewModel : SicModuleUIViewModelBase, ISupportMultipleSystem
{
private double _tmaFlowRatio = 1;
private double _tcsFlowRatio = 1;
private double _hclFlowRatio = 1;
private double _C2H4FlowRatio = 1;
private double _sih4FlowRatio = 1;
private double _pn2FlowRatio = 1;
private bool _isHideRecipeValue = false;
private bool _allowSaveRecipe = false;
private bool _allowRipRecipe = false;
private readonly IRecipeGasFlowCalculator _recipeGasFlowCalculator;
private string _currectProcessingRecipe;
private IProgress<int> _progressRecipeStepChanged;
private IProgress<string> _progressLoadRecipe;
private readonly object _lockerLoadingRecipe = new object();
public string title { get; set; } = "123";
public PMProcessGasFlowCounterViewModel GasFlowCounterVm { get; private set; }
public PMProcessViewModel()
{
_recipeGasFlowCalculator = IoC.Get<IRecipeGasFlowCalculator>();
Subscribe("System.IsEngMode");
}
#region properties
public bool IsPermission { get => this.Permission == 3; }
public bool AllowSaveRecipe
{
get => _allowSaveRecipe;
set
{
_allowSaveRecipe = value;
NotifyOfPropertyChange();
}
}
public bool AllowRipRecipe
{
get => _allowRipRecipe;
set
{
_allowRipRecipe = value;
NotifyOfPropertyChange();
}
}
public bool IsEngMode { get; private set; }
[Subscription("IsBusy")]
public bool IsBusy { get; set; }
[Subscription("Status")]
public string Status { get; set; }
public bool IsPMProcess => Status == "Process" || Status == "PostProcess" || Status == "Paused" || Status == "PMMacroPause" || Status == "PMMacro" || Status == "PostPMMacro";
public bool IsPreProcess => Status == "PreProcess" || Status == "PrePMMacro";
[Subscription("IsOnline")]
public bool IsOnline { get; set; }
[Subscription("Recipe.DeviceData")]
public AITDeviceData Recipe { get; set; }
public float[] RecipeData1 => RecipeData;
public float[] RecipeData = new float[] { 1, 2, 3, 4, 5, 6, 7, 8, 9, 9, 10, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 11, 1, 1, 1, 1, 11, 1, 1, 1, 1, 1, 1, 1, 1, 1, 11, 1, 11, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1, 1 };
private string selectedRecipe;
public string SelectedRecipe
{
set
{
selectedRecipe = value;
}
get
{
return selectedRecipe;
}
}
[Subscription("SelectedRecipeName")]
public string CurrentProcessingRecipeName
{
get => _currectProcessingRecipe;
set
{
if (_currectProcessingRecipe != value)
{
_currectProcessingRecipe = value;
DisplayingRecipeName = value;
}
}
}
[Subscription("RecipeStepName")]
public string RecipeStepName { get; set; }
[Subscription("RecipeStepNumber")]
public int RecipeStepNumber { get; set; }
[Subscription("ArH2Switch")]
public string ArH2Switch { get; set; }
[Subscription("N2FlowMode")]
public string N2FlowMode { get; set; }
[Subscription("RecipeStepElapseTime")]
public int RecipeStepElapseTime { get; set; }
[Subscription("RecipeStepTime")]
public int RecipeStepTime { get; set; }
[Subscription("RecipeStepElapseTime2")]
public int RecipeStepElapseTime2 { get; set; }
[Subscription("RecipeTotalElapseTime")]
public int RecipeTotalElapseTime { get; set; }
[Subscription("RecipeTotalTime")]
public int RecipeTotalTime { get; set; }
[Subscription("RecipeTotalElapseTime2")]
public int RecipeTotalElapseTime2 { get; set; }
public string StepNumber
{
get
{
if (IsPMProcess)
{
return $"{RecipeStepNumber}";
}
else if (IsPreProcess)
{
return "0";
}
return "--";
}
set
{
}
}
public string StepName
{
get
{
if (IsPMProcess)
{
return $"{RecipeStepName}";
}
else if (IsPreProcess)
{
return "0";
}
return "--";
}
}
public string StepTime
{
get
{
if (IsPMProcess)
{
return $"{RecipeStepElapseTime}/{RecipeStepTime}";
}
else if (IsPreProcess)
{
return "0";
}
return "--";
}
}
public string RecipeTime
{
get
{
if (IsPMProcess)
{
return $"{RecipeTotalElapseTime}/{RecipeTotalTime}";
}
else if (IsPreProcess)
{
return "0";
}
return "--";
}
}
private string _displayingRecipeName;
public string DisplayingRecipeName
{
get => _displayingRecipeName;
private set
{
if (_displayingRecipeName != value)
{
_displayingRecipeName = value;
_progressLoadRecipe.Report(value);
NotifyOfPropertyChange();
}
}
}
private bool _isRecipeLoading;
public bool IsRecipeLoading
{
get => _isRecipeLoading;
set
{
if (_isRecipeLoading != value)
{
_isRecipeLoading = value;
NotifyOfPropertyChange();
}
}
}
//qbh 20220523
private int x = 0;
private DispatcherTimer timer;
//
public RecipeData CurrentRecipe { get; set; } = new RecipeData(null);
public List<EditorDataGridTemplateColumnBase> Columns { get; set; } = new List<EditorDataGridTemplateColumnBase>();
private RecipeFormatBuilder _columnBuilder = new RecipeFormatBuilder();
public bool IsSelectButtonEnable => !string.IsNullOrEmpty(Status) && !Status.Equals("Process")
&& !Status.Equals("PreProcess") && !Status.Equals("PostProcess") && !Status.Equals("Paused") && !IsOnline && !IsRecipeLoading;
public bool IsStartButtonEnable => !string.IsNullOrEmpty(SelectedRecipe) && !string.IsNullOrEmpty(Status)
&& !Status.Equals("Process") && !Status.Equals("PreProcess") && !Status.Equals("PostProcess") &&
!Status.Equals("PrePMMacro") && !Status.Equals("PMMacro") && !Status.Equals("PostPMMacro") &&
!Status.Equals("Paused") && !IsOnline;// !IsProcessRunning;
public bool IsStopButtonEnable => !string.IsNullOrEmpty(Status) && (Status.Equals("Process") || Status.Equals("PMMacro")) && !IsOnline;
public bool IsAbortButtonEnable => !string.IsNullOrEmpty(Status) && (Status.Equals("Process") || Status.Equals("PMMacro")) && !IsOnline; //|| Status.Equals("PreProcess") || Status.Equals("PostProcess") || Status.Equals("Paused"));//IsProcessRunning;
public bool IsPauseButtonEnable => !string.IsNullOrEmpty(Status) && (Status.Equals("Process") || Status.Equals("PMMacro")) && !IsOnline;
public bool IsSkipButtonEnable => !string.IsNullOrEmpty(Status) && Status.Equals("Process") && !IsOnline;
public bool IsContinueButtonEnable => !string.IsNullOrEmpty(Status) && (Status.Equals("Paused") || Status.Equals("PMMacroPause")) && !IsOnline;
public WaferInfo MLLWafer
{
get
{
if (ModuleManager.ModuleInfos["LLH"].WaferManager.Wafers.Count > 0)
return ModuleManager.ModuleInfos["LLH"].WaferManager.Wafers[0];
return null;
}
}
public bool MLLHasWafer
{
get
{
return MLLWafer.WaferStatus > 0;
}
}
public WaferInfo PMWafer
{
get
{
if (ModuleManager.ModuleInfos[SystemName].WaferManager.Wafers.Count > 0)
return ModuleManager.ModuleInfos[SystemName].WaferManager.Wafers[0];
return null;
}
}
public bool PMHasWafer => PMWafer.WaferStatus > 0;
public Dictionary<int, string> DicGas { get; set; }
public int MLLCurrentWafer { get; set; }
public int MLLTotalWafer { get; set; }
// public bool IsEnableGasMap => !IsBusy && IsMaintainMode;
//public string SystemName { get => throw new NotImplementedException(); set => throw new NotImplementedException(); }
public object View { get; set; }
public string CurrentProcessType { get; set; }
private bool needLoadRecipe = false;
#endregion
/// <summary>
/// 获取角色权限配置.
/// </summary>
/// <returns></returns>
private void LoadRolePermissions()
{
var roleID = BaseApp.Instance.UserContext.RoleID;
_isHideRecipeValue = RoleAccountProvider.Instance.GetMenuPermission(roleID, "Recipe.Behaviour.ShowValueInProcessView") == (int)MenuPermissionEnum.MP_NONE;
AllowSaveRecipe = RoleAccountProvider.Instance.GetMenuPermission(roleID, "Recipe.Behaviour.AllowSaveInProcessView") != (int)MenuPermissionEnum.MP_NONE;
AllowRipRecipe = RoleAccountProvider.Instance.GetMenuPermission(roleID, "Recipe.Behaviour.AllowRipInProcessView") != (int)MenuPermissionEnum.MP_NONE;
}
protected override void OnActivate()
{
try
{
LoadRolePermissions();
if (string.IsNullOrEmpty(DisplayingRecipeName))
{
needLoadRecipe = false;
var recipeName =
(string)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.LastRecipeName");
DisplayingRecipeName = recipeName;
selectedRecipe = recipeName;
}
// 更新Recipe参数值显示状态
SetRecipeValueVisibilityByCurrentRole();
((PMProcessView)View)?.recipeLocker.Lock();
//流量需要乘以此系数
//_tmaFlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.TMAFlowRatio");
//_tcsFlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.TCSFlowRatio");
//_hclFlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.HCLFlowRatio");
//_C2H4FlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.C2H4FlowRatio");
//_sih4FlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.SiH4FlowRatio");
//_pn2FlowRatio = (double)QueryDataClient.Instance.Service.GetConfig($"PM.{SystemName}.PN2FlowRatio");
base.OnActivate();
}
catch (Exception ex)
{ }
}
protected override void OnDeactivate(bool close)
{
ActiveUpdateData = true;
base.OnDeactivate(close);
}
protected override void OnInitialize()
{
base.OnInitialize();
//权限
var roleID = BaseApp.Instance.UserContext.RoleID;
stepsVisibility = RoleAccountProvider.Instance.GetMenuPermission(roleID, "PM1.Process.Steps") == 3;
_progressLoadRecipe = new Progress<string>(ProgLoadRecipeOnUiThread);
_progressRecipeStepChanged = new Progress<int>(RecipeStepInProcessChanged);
UpdateRecipeFormat();
GasFlowCounterVm = new PMProcessGasFlowCounterViewModel(this);
GasFlowCounterVm.EnableTimer(true);
}
private bool stepsVisibility;
public bool StepsVisibility
{
get { return stepsVisibility; }
}
protected override void Poll()
{
try
{
base.Poll();
}
catch (Exception ex)
{
}
}
protected override void InvokeAfterUpdateProperty(Dictionary<string, object> data)
{
try
{
if (data.TryGetValue("System.IsEngMode", out var isEngMode) && isEngMode is bool b)
IsEngMode = b;
if (needLoadRecipe)
needLoadRecipe = false;
base.InvokeAfterUpdateProperty(data);
}
catch (Exception ex)
{
}
}
public void ParamsExpanded(ExpanderColumn col)
{
int index = this.Columns.IndexOf(col);
for (var i = index + 1; i < this.Columns.Count; i++)
{
if (this.Columns[i] is ExpanderColumn)
break;
this.Columns[i].Visibility = Visibility.Visible;
}
}
public void ParamsCollapsed(ExpanderColumn col)
{
int index = this.Columns.IndexOf(col);
for (var i = index + 1; i < this.Columns.Count; i++)
{
if (this.Columns[i] is ExpanderColumn)
break;
this.Columns[i].Visibility = Visibility.Collapsed;
}
}
protected override void OnViewLoaded(object view)
{
View = view;
base.OnViewLoaded(view);
ViewWin = (PMProcessView)view;
StartDateTime = DateTime.Now.Date;
EndDateTime = DateTime.Now.Date.AddDays(1).AddTicks(-1);
string str = "[{\"Name\":\"Ar\",\"RunVolume\":5.8561316539732289,\"VentVolume\":0.078784436017824339},{\"Name\":\"H2\",\"RunVolume\":0.0,\"VentVolume\":0.0},{\"Name\":\"C2H4\",\"RunVolume\":0.0,\"VentVolume\":0.0},{\"Name\":\"SiH4\",\"RunVolume\":0.0,\"VentVolume\":0.0},{\"Name\":\"HCL\",\"RunVolume\":0.0,\"VentVolume\":0.0},{\"Name\":\"PN2\",\"RunVolume\":0.0,\"VentVolume\":0.0},{\"Name\":\"TCS\",\"RunVolume\":0.0,\"VentVolume\":0.0},{\"Name\":\"TMA\",\"RunVolume\":0.0,\"VentVolume\":0.0}]";
var o= JsonConvert.DeserializeObject<List<DataFlow>>(str);
}
public void SelectRecipe()
{
var dialog = new RecipeSelectDialogViewModel(false, false, ProcessTypeFileItem.ProcessFileTypes.Process);
dialog.DisplayName = "Select Recipe";
var wm = new WindowManager();
var bret = wm.ShowDialog(dialog);
if ((bool)bret)
{
var recipeName = dialog.DialogResult;
if (recipeName.StartsWith("Sic\\Process"))
{
CurrentProcessType = "Process";
}
else if (recipeName.StartsWith("Sic\\Routine"))
{
CurrentProcessType = "Routine";
}
DisplayingRecipeName = recipeName;
SelectedRecipe = recipeName;
InvokeClient.Instance.Service.DoOperation($"{SystemName}.SelectRecipe", recipeName);
InvokeClient.Instance.Service.DoOperation("System.SetConfig", $"PM.{SystemName}.LastRecipeName",
recipeName);
}
}
public void DeleteProcessData()
{
}
private static void RenderStepsWithSameValue(IReadOnlyList<Param> previousStep, IReadOnlyList<Param> currentStep)
{
for (var i = 0; i < currentStep.Count; i++)
{
if (currentStep[i] is DoubleParam currDblParam && previousStep[i] is DoubleParam prevDblParam)
{
currDblParam.IsEqualsToPrevious =
GlobalDefs.IsDoubleValueEquals(currDblParam.Value, prevDblParam.Value);
}
else if (currentStep[i] is ComboxParam currCbxParam && previousStep[i] is ComboxParam prevCbxParam)
{
if (currCbxParam.Value != prevCbxParam.Value)
{
currCbxParam.IsEqualsToPrevious = false;
}
else
{
currCbxParam.IsEqualsToPrevious = true;
}
}
}
}
/// <summary>
/// 将发生变更的配方推送到当前工艺。
/// </summary>
public void PushRecipeToCurrentProcess()
{
// 如果配方没变,不需要推送
if (!CurrentRecipe.IsChanged)
{
DialogBox.ShowWarning("The recipe does not change.");
return;
}
if (!CurrentRecipe.Validate())
{
var ret = DialogBox.ShowDialog(DialogButton.Yes | DialogButton.No, DialogType.WARNING,
$"{CurrentRecipe.ValidationErrorSummary}\r\n Are you sure to push changes to current process?");
if (ret == DialogButton.No)
return;
/*var mbr = MessageBox.Show($"{errors}\r\n Are you sure to push changes to current process", "Warning",
MessageBoxButton.YesNo, MessageBoxImage.Warning);
if (mbr == MessageBoxResult.No)
return;*/
}
var xmlRecipe = CurrentRecipe.GetXmlString();
InvokeClient.Instance.Service.DoOperation($"PM1.ReloadRecipe", xmlRecipe);
//InvokeClient.Instance.Service.DoOperation($"PM2.ReloadRecipe");
}
public void SaveToBaselineRecipe()
{
if (string.IsNullOrEmpty(CurrentRecipe.Name))
{
DialogBox.ShowError("Recipe name can't be empty");
return;
}
// 如果配方没变,不需要推送
if (!CurrentRecipe.IsChanged)
{
DialogBox.ShowInfo("The recipe does not change.");
return;
}
if (!CurrentRecipe.Validate())
{
var ret = DialogBox.ShowDialog(DialogButton.Yes | DialogButton.No, DialogType.WARNING,
$"{CurrentRecipe.ValidationErrorSummary}\r\n Are you sure to save to baseline recipe?");
if (ret == DialogButton.No)
return;
}
var result = false;
CurrentRecipe.Revisor = BaseApp.Instance.UserContext.LoginName;
CurrentRecipe.ReviseTime = DateTime.Now;
var recipeProvider = new RecipeProvider();
result = recipeProvider.WriteRecipeFile(CurrentRecipe.PrefixPath, CurrentRecipe.Name, CurrentRecipe.GetXmlString());
if (result)
{
CurrentRecipe.MarkAsSaved();
}
else
{
MessageBox.Show("Save failed!");
}
}
/// <summary>
/// 重新加载配方,当前修改的参数被抛弃。
/// </summary>
public void RestoreToBaselineRecipe()
{
// 如果改变,提示
if (CurrentRecipe.IsChanged)
{
if (DialogBox.Confirm(
"The recipe has changed, are you sure to discard changes and reload baseline recipe?") == false)
return;
}
if (CurrentRecipe != null
&& !string.IsNullOrEmpty(CurrentRecipe.FullName))
_progressLoadRecipe.Report(CurrentRecipe.FullName);
}
/// <summary>
/// 根据配置获取Cascade方式呈现Recipe的Dispatcher或返回null。
/// </summary>
/// <returns></returns>
private static Dispatcher GetLoadingDispatcher()
{
// 判断Step呈现方式
var isCascadeLoading = (bool)QueryDataClient.Instance.Service.GetConfig("System.RecipeCascadeLoading");
var dispatcher = isCascadeLoading ? Application.Current?.Dispatcher : null;
if (dispatcher == null || !dispatcher.CheckAccess())
return null;
return dispatcher;
}
#region Recipe相关控制函数
public void UpdateRecipeFormat()
{
CurrentRecipe = new RecipeData(_recipeGasFlowCalculator);
CurrentRecipe.BuildFormat($"Sic\\Process", "PM1", BaseApp.Instance.UserContext.RoleName);
}
/// <summary>
/// 根据权限设置Recipe参数的可见性。
/// </summary>
private void SetRecipeValueVisibilityByCurrentRole()
{
// 是否在编辑器中隐藏Recipe参数值
// CurrentRecipe.Steps.IsHideValue = _isHideRecipeValue; // 当权限为None时隐藏其它时显示。
// 白名单的Param显示出来
ApplyRecipeCellAccessPermissionWhitelist();
}
/// <summary>
/// 从数据库读取单元格访问白名单。
/// </summary>
/// <returns></returns>
private DataTable ReadRecipeCellAccessPermissionWhitelist()
{
if (CurrentRecipe == null)
return null;
var cmd = $"select * from recipe_cell_access_permission_whitelist where \"recipeName\" = '{CurrentRecipe.FullName}'";
var dt = QueryDataClient.Instance.Service.QueryData(cmd);
return dt;
}
/// <summary>
/// 如果Recipe参数设置为隐藏将白名单中的单元格显示出来。
/// </summary>
private void ApplyRecipeCellAccessPermissionWhitelist()
{
/*var dt = ReadRecipeCellAccessPermissionWhitelist();
if (dt != null && dt.Rows.Count > 0)
{
foreach (DataRow dataRow in dt.Rows)
{
var stepUid = dataRow["stepUid"].ToString();
var controlName = dataRow["columnName"].ToString();
var step = CurrentRecipe.Steps.FirstOrDefault(s => s.StepUid == stepUid);
var param = step?.FirstOrDefault(p => p.Name == controlName);
if (param != null)
param.IsHideValue = false;
}
}*/
}
/// <summary>
/// 正在工艺中的Recipe Step发生改变。
/// </summary>
/// <param name="currentStepNum"></param>
private void RecipeStepInProcessChanged(int currentStepNum)
{
UpdateRecipeStepProcessedStatus(currentStepNum);
}
/// <summary>
/// 更新Recipe步骤。
/// </summary>
/// <param name="currentStepNum"></param>
private void UpdateRecipeStepProcessedStatus(int currentStepNum)
{
if (CurrentRecipe == null)
return;
if (CurrentRecipe.Steps.Count <= 0)
return;
// Recipe不是当前正在运行的Recipe。
if (CurrentRecipe.FullName != DisplayingRecipeName)
return;
foreach (var step in CurrentRecipe.Steps)
{
if (step.StepNo.HasValue)
{
if (step.StepNo < currentStepNum)
step.IsProcessed = true;
else if (step.StepNo == currentStepNum)
{
if (IsPMProcess)
step.IsProcessed = false;
else
step.IsProcessed = true;
}
else
{
step.IsProcessed = false;
}
}
}
// 自动滚到当前做工艺的Step
var dg = ((PMProcessView)View)?.dgCustom;
if (currentStepNum > 0)
{
var stepScrollTo = currentStepNum - 1;
if (stepScrollTo < 0)
stepScrollTo = 0;
dg?.ScrollToRecipeStep(CurrentRecipe.Steps[stepScrollTo]);
}
}
/// <summary>
/// 在UI线程加载Recipe
/// </summary>
/// <param name="recipeName"></param>
private void ProgLoadRecipeOnUiThread(string recipeName)
{
lock (_lockerLoadingRecipe)
{
if (IsRecipeLoading)
return;
IsRecipeLoading = true;
NotifyOfPropertyChange(nameof(IsSelectButtonEnable));
}
if (recipeName.StartsWith("Sic\\Process"))
{
CurrentProcessType = "Process";
}
else if (recipeName.StartsWith("Sic\\Routine"))
{
CurrentProcessType = "Routine";
}
//UpdateRecipeFormat();
LoadRecipe(recipeName).ContinueWith(t =>
{
if (!t.IsCanceled && !t.IsFaulted && t.IsCompleted)
{
Application.Current?.Dispatcher.Invoke(() =>
{
UpdateRecipeStepProcessedStatus(RecipeStepNumber);
});
}
}).ContinueWith(t =>
{
Application.Current?.Dispatcher.BeginInvoke(DispatcherPriority.Background, new Action(() =>
{
lock (_lockerLoadingRecipe)
{
IsRecipeLoading = false;
}
}));
});
}
#endregion
private async Task LoadRecipe(string selectedRecipePath)
{
CurrentRecipe.Clear();
var array = selectedRecipePath.Split(new char[] { '\\' });
string recipeName = array[array.Length - 1];
string prefixPath = selectedRecipePath.Replace(recipeName, "").TrimEnd('\\');
var _recipeProvider = new RecipeProvider();
var recipeContent = _recipeProvider.ReadRecipeFile(prefixPath, recipeName);
if (string.IsNullOrEmpty(recipeContent))
{
MessageBox.Show($"{prefixPath}\\{recipeName} is empty, please confirm the file is valid.");
return;
}
CurrentRecipe.RecipeChamberType = _columnBuilder.RecipeChamberType;
CurrentRecipe.RecipeVersion = _columnBuilder.RecipeVersion;
await CurrentRecipe.LoadFile(prefixPath, recipeName, recipeContent,
SystemName, GetLoadingDispatcher());
// 显示Cell访问白名单中的参数
SetRecipeValueVisibilityByCurrentRole();
}
public void StartProcess()
{
if (IsEngMode)
{
DialogBox.ShowError("Interlock is bypassed, can not start process.");
return;
}
var ret = DialogBox.ShowDialog(DialogButton.Yes | DialogButton.No, DialogType.WARNING, "Please Check All Gas Ready Before Start Process!\r\n\r\nAre you sure to start process?");
if (ret == DialogButton.No)
return;
var array = DisplayingRecipeName.Split(new char[] { '\\' });
if (array[1] == "Process")
{
InvokeClient.Instance.Service.DoOperation($"{SystemName}.RunRecipe", DisplayingRecipeName, false, true);
}
else if (array[1] == "Routine")
{
InvokeClient.Instance.Service.DoOperation($"{SystemName}.RunPMMacro", DisplayingRecipeName);
}
}
public void Skip()
{
InvokeClient.Instance.Service.DoOperation($"{SystemName}.RecipeSkipStep");
}
public void Stop()
{
InvokeClient.Instance.Service.DoOperation($"{SystemName}.Abort");
}
public void Pause()
{
InvokeClient.Instance.Service.DoOperation($"{SystemName}.Pause");
}
public void Continue()
{
InvokeClient.Instance.Service.DoOperation($"{SystemName}.Continue", "Step continue");
}
public void Abort()
{
InvokeClient.Instance.Service.DoOperation($"{SystemName}.Abort");
}
#region
[Subscription("TC1.L1InputTempSetPoint")]
public float L1InputTemp { get; set; }
[Subscription("TC1.L2InputTempSetPoint")]
public float L2InputTemp { get; set; }
[Subscription("TC1.L3InputTempSetPoint")]
public float L3InputTemp { get; set; }
[Subscription("TC2.L3InputTempSetPoint")]
public float SCRL3InputTemp { get; set; }
[Subscription("TC1.L1TargetSPSetPoint")]
public float L1TargetSP { get; set; }
[Subscription("TC1.L2TargetSPSetPoint")]
public float L2TargetSP { get; set; }
[Subscription("TC1.L3TargetSPSetPoint")]
public float L3TargetSP { get; set; }
[Subscription("TC2.L3TargetSPSetPoint")]
public float SCRL3TargetSP { get; set; }
[Subscription("TC1.TempCtrlTCIN")]
public float PM1Temprature { get; set; }
//底部温度
[Subscription("TC1.TempCtrlTCIN")]
public float TC1Temp2 { get; set; }
[Subscription("TC1.HeaterModeSetPoint")]
public float TC1HeaterMode { get; set; }
public string TC1Mode
{
get
{
int mode = (int)TC1HeaterMode;
return Enum.GetName(typeof(DicMode.HeaterControlMode), mode);
}
}
[Subscription("TC2.HeaterModeSetPoint")]
public float TC2HeaterMode { get; set; }
public string TC2Mode
{
get
{
switch (TC2HeaterMode)
{
case 0: return "Power";
case 1: return "TC";
case 2: return "Pyro";
}
return "Power";
}
}
[Subscription("SCR1.PowerFeedBack")]
public float SCR1Power { get; set; }
[Subscription("SCR2.PowerFeedBack")]
public float SCR2Power { get; set; }
[Subscription("SCR3.PowerFeedBack")]
public float SCR3Power { get; set; }
[Subscription("PSU1.OutputPowerFeedBack")]
public float PSU1Power { get; set; }
[Subscription("PSU2.OutputPowerFeedBack")]
public float PSU2Power { get; set; }
[Subscription("PSU3.OutputPowerFeedBack")]
public float PSU3Power { get; set; }
[Subscription("PMServo.ActualSpeedFeedback")]
public float ActualSpeedFeedback { get; set; }
[Subscription("PT1.FeedBack")]
public float PT1Pressure { get; set; }
#endregion
#region MFC
[Subscription("Mfc1.DeviceData")]
public AITMfcData Mfc1Data { get; set; }
[Subscription("Mfc2.DeviceData")]
public AITMfcData Mfc2Data { get; set; }
[Subscription("Mfc3.DeviceData")]
public AITMfcData Mfc3Data { get; set; }
[Subscription("Mfc4.DeviceData")]
public AITMfcData Mfc4Data { get; set; }
[Subscription("Mfc5.DeviceData")]
public AITMfcData Mfc5Data { get; set; }
[Subscription("Mfc6.DeviceData")]
public AITMfcData Mfc6Data { get; set; }
[Subscription("Mfc7.DeviceData")]
public AITMfcData Mfc7Data { get; set; }
[Subscription("Mfc8.DeviceData")]
public AITMfcData Mfc8Data { get; set; }
[Subscription("Mfc9.DeviceData")]
public AITMfcData Mfc9Data { get; set; }
[Subscription("Mfc10.DeviceData")]
public AITMfcData Mfc10Data { get; set; }
[Subscription("Mfc11.DeviceData")]
public AITMfcData Mfc11Data { get; set; }
[Subscription("Mfc12.DeviceData")]
public AITMfcData Mfc12Data { get; set; }
[Subscription("Mfc13.DeviceData")]
public AITMfcData Mfc13Data { get; set; }
[Subscription("Mfc14.DeviceData")]
public AITMfcData Mfc14Data { get; set; }
[Subscription("Mfc15.DeviceData")]
public AITMfcData Mfc15Data { get; set; }
[Subscription("Mfc16.DeviceData")]
public AITMfcData Mfc16Data { get; set; }
[Subscription("Mfc19.DeviceData")]
public AITMfcData Mfc19Data { get; set; }
[Subscription("Mfc20.DeviceData")]
public AITMfcData Mfc20Data { get; set; }
[Subscription("Mfc22.DeviceData")]
public AITMfcData Mfc22Data { get; set; }
[Subscription("Mfc23.DeviceData")]
public AITMfcData Mfc23Data { get; set; }
[Subscription("Mfc25.DeviceData")]
public AITMfcData Mfc25Data { get; set; }
[Subscription("Mfc26.DeviceData")]
public AITMfcData Mfc26Data { get; set; }
[Subscription("Mfc27.DeviceData")]
public AITMfcData Mfc27Data { get; set; }
[Subscription("Mfc28.DeviceData")]
public AITMfcData Mfc28Data { get; set; }
[Subscription("Mfc29.DeviceData")]
public AITMfcData Mfc29Data { get; set; }
[Subscription("Mfc30.DeviceData")]
public AITMfcData Mfc30Data { get; set; }
[Subscription("Mfc31.DeviceData")]
public AITMfcData Mfc31Data { get; set; }
[Subscription("Mfc32.DeviceData")]
public AITMfcData Mfc32Data { get; set; }
[Subscription("Mfc33.DeviceData")]
public AITMfcData Mfc33Data { get; set; }
[Subscription("Mfc35.DeviceData")]
public AITMfcData Mfc35Data { get; set; }
[Subscription("Mfc36.DeviceData")]
public AITMfcData Mfc36Data { get; set; }
[Subscription("Mfc37.DeviceData")]
public AITMfcData Mfc37Data { get; set; }
[Subscription("Mfc38.DeviceData")]
public AITMfcData Mfc38Data { get; set; }
[Subscription("Mfc40.DeviceData")]
public AITMfcData Mfc40Data { get; set; }
#endregion
#region Valve
[Subscription("V27.DeviceData")]
public AITValveData V27 { get; set; }
[Subscription("V25.DeviceData")]
public AITValveData V25 { get; set; }
[Subscription("V31.DeviceData")]
public AITValveData V31 { get; set; }
[Subscription("V32.DeviceData")]
public AITValveData V32 { get; set; }
[Subscription("V33.DeviceData")]
public AITValveData V33 { get; set; }
[Subscription("V33s.DeviceData")]
public AITValveData V33s { get; set; }
[Subscription("V35.DeviceData")]
public AITValveData V35 { get; set; }
[Subscription("V36.DeviceData")]
public AITValveData V36 { get; set; }
[Subscription("V37.DeviceData")]
public AITValveData V37 { get; set; }
[Subscription("V37s.DeviceData")]
public AITValveData V37s { get; set; }
[Subscription("V39.DeviceData")]
public AITValveData V39 { get; set; }
[Subscription("V39s.DeviceData")]
public AITValveData V39s { get; set; }
[Subscription("V40.DeviceData")]
public AITValveData V40 { get; set; }
[Subscription("V40s.DeviceData")]
public AITValveData V40s { get; set; }
[Subscription("V41.DeviceData")]
public AITValveData V41 { get; set; }
[Subscription("V41s.DeviceData")]
public AITValveData V41s { get; set; }
[Subscription("V42.DeviceData")]
public AITValveData V42 { get; set; }
[Subscription("V43.DeviceData")]
public AITValveData V43 { get; set; }
[Subscription("V43s.DeviceData")]
public AITValveData V43s { get; set; }
[Subscription("V45.DeviceData")]
public AITValveData V45 { get; set; }
[Subscription("V46.DeviceData")]
public AITValveData V46 { get; set; }
[Subscription("V46s.DeviceData")]
public AITValveData V46s { get; set; }
[Subscription("V48.DeviceData")]
public AITValveData V48 { get; set; }
[Subscription("V48s.DeviceData")]
public AITValveData V48s { get; set; }
[Subscription("V49.DeviceData")]
public AITValveData V49 { get; set; }
[Subscription("V50.DeviceData")]
public AITValveData V50 { get; set; }
[Subscription("V50s.DeviceData")]
public AITValveData V50s { get; set; }
[Subscription("V51.DeviceData")]
public AITValveData V51 { get; set; }
[Subscription("V51s.DeviceData")]
public AITValveData V51s { get; set; }
[Subscription("V52.DeviceData")]
public AITValveData V52 { get; set; }
[Subscription("V52s.DeviceData")]
public AITValveData V52s { get; set; }
[Subscription("V53.DeviceData")]
public AITValveData V53 { get; set; }
[Subscription("V53s.DeviceData")]
public AITValveData V53s { get; set; }
[Subscription("V54.DeviceData")]
public AITValveData V54 { get; set; }
[Subscription("V54s.DeviceData")]
public AITValveData V54s { get; set; }
[Subscription("V55.DeviceData")]
public AITValveData V55 { get; set; }
[Subscription("V56.DeviceData")]
public AITValveData V56 { get; set; }
[Subscription("V58.DeviceData")]
public AITValveData V58 { get; set; }
[Subscription("V58s.DeviceData")]
public AITValveData V58s { get; set; }
[Subscription("V59.DeviceData")]
public AITValveData V59 { get; set; }
[Subscription("V60.DeviceData")]
public AITValveData V60 { get; set; }
[Subscription("V61.DeviceData")]
public AITValveData V61 { get; set; }
[Subscription("V62.DeviceData")]
public AITValveData V62 { get; set; }
[Subscription("V63.DeviceData")]
public AITValveData V63 { get; set; }
//[Subscription("V64.DeviceData")]
//public AITValveData V64 { get; set; }
//[Subscription("V65.DeviceData")]
//public AITValveData V65 { get; set; }
[Subscription("V68.DeviceData")]
public AITValveData V68 { get; set; }
[Subscription("V69.DeviceData")]
public AITValveData V69 { get; set; }
[Subscription("V70.DeviceData")]
public AITValveData V70 { get; set; }
[Subscription("V72.DeviceData")]
public AITValveData V72 { get; set; }
[Subscription("V73.DeviceData")]
public AITValveData V73 { get; set; }
[Subscription("V74.DeviceData")]
public AITValveData V74 { get; set; }
[Subscription("V75.DeviceData")]
public AITValveData V75 { get; set; }
[Subscription("V76.DeviceData")]
public AITValveData V76 { get; set; }
[Subscription("V87.DeviceData")]
public AITValveData V87 { get; set; }
[Subscription("V88.DeviceData")]
public AITValveData V88 { get; set; }
[Subscription("V89.DeviceData")]
public AITValveData V89 { get; set; }
[Subscription("V90.DeviceData")]
public AITValveData V90 { get; set; }
[Subscription("V91.DeviceData")]
public AITValveData V91 { get; set; }
[Subscription("V92.DeviceData")]
public AITValveData V92 { get; set; }
[Subscription("V93.DeviceData")]
public AITValveData V93 { get; set; }
[Subscription("V94.DeviceData")]
public AITValveData V94 { get; set; }
[Subscription("V95.DeviceData")]
public AITValveData V95 { get; set; }
[Subscription("V96.DeviceData")]
public AITValveData V96 { get; set; }
[Subscription("V97.DeviceData")]
public AITValveData V97 { get; set; }
[Subscription("EPV1.DeviceData")]
public AITValveData EPV1 { get; set; }
[Subscription("EPV2.DeviceData")]
public AITValveData EPV2 { get; set; }
[Subscription("V99.DeviceData")]
public AITValveData V99 { get; set; }
[Subscription("V99s.DeviceData")]
public AITValveData V99s { get; set; }
#endregion
#region Pressure
[Subscription("Pressure1.DeviceData")]
public AITPressureMeterData PT1Data { get; set; }
[Subscription("Pressure2.DeviceData")]
public AITPressureMeterData PT2Data { get; set; }
[Subscription("Pressure3.DeviceData")]
public AITPressureMeterData PT3Data { get; set; }
[Subscription("Pressure4.DeviceData")]
public AITPressureMeterData PT4Data { get; set; }
[Subscription("Pressure5.DeviceData")]
public AITPressureMeterData PT5Data { get; set; }
[Subscription("Pressure6.DeviceData")]
public AITPressureMeterData PT6Data { get; set; }
[Subscription("Pressure7.DeviceData")]
public AITPressureMeterData PT7Data { get; set; }
[Subscription("PT1.DeviceData")]
public AITPressureMeterData ChamPress { get; set; }
[Subscription("PT2.DeviceData")]
public AITPressureMeterData ForelinePress { get; set; }
#endregion
#region
public SolidColorBrush PN2Color
{
get
{
if (IsPN2RunMode)
{
return new SolidColorBrush(Color.FromRgb(0, 0, 0));
}
else
{
return new SolidColorBrush(Color.FromRgb(255, 0, 0));
}
}
}
public SolidColorBrush C2H4Color
{
get
{
if (IsC2H4RunMode)
{
return new SolidColorBrush(Color.FromRgb(0, 0, 0));
}
else
{
return new SolidColorBrush(Color.FromRgb(255, 0, 0));
}
}
}
public SolidColorBrush SIH4Color
{
get
{
if (IsSiH4RunMode)
{
return new SolidColorBrush(Color.FromRgb(0, 0, 0));
}
else
{
return new SolidColorBrush(Color.FromRgb(255, 0, 0));
}
}
}
public SolidColorBrush HCLColor
{
get
{
if (IsHCLRunMode)
{
return new SolidColorBrush(Color.FromRgb(0, 0, 0));
}
else
{
return new SolidColorBrush(Color.FromRgb(255, 0, 0));
}
}
}
public SolidColorBrush TMAColor
{
get
{
if (IsTMARunMode)
{
return new SolidColorBrush(Color.FromRgb(0, 0, 0));
}
else
{
return new SolidColorBrush(Color.FromRgb(255, 0, 0));
}
}
}
public SolidColorBrush TCSColor
{
get
{
if (IsTCSRunMode)
{
return new SolidColorBrush(Color.FromRgb(0, 0, 0));
}
else
{
return new SolidColorBrush(Color.FromRgb(255, 0, 0));
}
}
}
public SolidColorBrush PN2FlowColor
{
get
{
if (IsPN2RunMode)
{
return new SolidColorBrush(Color.FromArgb(255, 0, 255, 255));
}
else
{
return new SolidColorBrush(Color.FromArgb(255, 190, 190, 190));
}
}
}
public SolidColorBrush C2H4FlowColor
{
get
{
if (IsC2H4RunMode)
{
return new SolidColorBrush(Color.FromArgb(255, 0, 255, 255));
}
else
{
return new SolidColorBrush(Color.FromArgb(255, 190, 190, 190));
}
}
}
public SolidColorBrush SIH4FlowColor
{
get
{
if (IsSiH4RunMode)
{
return new SolidColorBrush(Color.FromArgb(255, 0, 255, 255));
}
else
{
return new SolidColorBrush(Color.FromArgb(255, 190, 190, 190));
}
}
}
public SolidColorBrush HCLFlowColor
{
get
{
if (IsHCLRunMode)
{
return new SolidColorBrush(Color.FromArgb(255, 0, 255, 255));
}
else
{
return new SolidColorBrush(Color.FromArgb(255, 190, 190, 190));
}
}
}
public SolidColorBrush TMAFlowColor
{
get
{
if (IsTMARunMode)
{
return new SolidColorBrush(Color.FromArgb(255, 0, 255, 255));
}
else
{
return new SolidColorBrush(Color.FromArgb(255, 190, 190, 190));
}
}
}
public SolidColorBrush TCSFlowColor
{
get
{
if (IsTCSRunMode)
{
return new SolidColorBrush(Color.FromArgb(255, 0, 255, 255));
}
else
{
return new SolidColorBrush(Color.FromArgb(255, 190, 190, 190));
}
}
}
#endregion
public bool IsPN2RunMode => V37s.IsOpen && (V39.IsOpen || V40.IsOpen);//N2FlowMode == "Run";按照洪膺要求修改 2023年6月9日10:34:54
public bool IsHCLRunMode => V54.IsOpen;
public bool IsSiH4RunMode => V55.IsOpen && !V56.IsOpen;
public bool IsC2H4RunMode => V59.IsOpen && !V60.IsOpen;
public bool IsTCSRunMode => V53.IsOpen;
public bool IsTMARunMode => V41.IsOpen && !V42.IsOpen;
[Subscription("Flow.Ar_Run.FeedBack")]
public double ArFlow_Run { get; set; }
[Subscription("Flow.Ar_Vent.FeedBack")]
public double ArFlow_Vent { get; set; }
public double ArFlow => ArFlow_Run>0 ? ArFlow_Run : ArFlow_Vent;
public double ArMol => GetMol(ArFlow_Run);
[Subscription("Flow.H2_Run.FeedBack")]
public double H2_Run { get; set; }
[Subscription("Flow.H2_Vent.FeedBack")]
public double H2_Vent { get; set; }
public double H2Flow => H2_Run>0 ? H2_Run : H2_Vent;
public double H2Mol => GetMol(H2_Run);
[Subscription("Flow.PN2_Run.FeedBack")]
public double PN2_Run { get; set; }
[Subscription("Flow.PN2_Vent.FeedBackSpecial")]
public double PN2_Vent { get; set; }
public double PN2Flow => PN2_Run + PN2_Vent;//=> GetPN2MFCFlow(IsPN2RunMode) * _pn2FlowRatio;
public double PN2Mol => GetMol(PN2Flow);
[Subscription("Flow.HCL_Run.FeedBack")]
public double HCL_Run { get; set; }
[Subscription("Flow.HCL_Vent.FeedBack")]
public double HCL_Vent { get; set; }
public double HCLFlow => HCL_Run + HCL_Vent;
public double HCLMol => GetMol(HCLFlow);
[Subscription("Flow.SiH4_Run.FeedBack")]
public double SiH4_Run { get; set; }
[Subscription("Flow.SiH4_Vent.FeedBack")]
public double SiH4_Vent { get; set; }
public double SiH4Flow => SiH4_Run + SiH4_Vent;
public double SIH4Mol => GetMol(SiH4Flow);
[Subscription("Flow.C2H4_Run.FeedBack")]
public double C2H4_Run { get; set; }
[Subscription("Flow.C2H4_Vent.FeedBack")]
public double C2H4_Vent { get; set; }
public double C2H4Flow => C2H4_Run + C2H4_Vent;
public double C2H4Mol => GetMol(C2H4Flow);
[Subscription("Flow.TCS_Run.FeedBack")]
public double TCS_Run { get; set; }
[Subscription("Flow.TCS_Vent.FeedBack")]
public double TCS_Vent { get; set; }
public double TCSFlow => TCS_Run + TCS_Vent;
public double TCSMol => GetMol(TCSFlow);
[Subscription("Flow.TMA_Run.FeedBack")]
public double TMA_Run { get; set; }
[Subscription("Flow.TMA_Vent.FeedBack")]
public double TMA_Vent { get; set; }
public double TMAFlow => TMA_Run + TMA_Vent;
public double TMAMol => GetMol(TMAFlow);
public bool ISPN2Flow => PN2Flow > 0 && IsPN2RunMode;
public bool ISHCLFlow => HCLFlow > 0 && IsHCLRunMode;
public bool ISSiH4Flow => SiH4Flow > 0 && IsSiH4RunMode;
public bool ISC2H4Flow => C2H4Flow > 0 && IsC2H4RunMode;
public bool ISArFlow => ArFlow_Run > 0;
public bool ISH2Flow => H2_Run > 0;
public bool ISTCSFlow => TCSFlow > 0 && IsTCSRunMode;
public bool ISTMAFlow => TMAFlow > 0 && IsTMARunMode;
private double GetMol(double fedback)
{
return fedback / 1000 / 22.4141;
}
#region
/// <summary>
/// 返回ViewModel绑定的视图对象。
/// </summary>
public PMProcessView ViewWin { get; private set; }
public DateTime StartDateTime
{
get => ViewWin.wfTimeFrom.Value;
set
{
ViewWin.wfTimeFrom.Value = value;
}
}
public DateTime EndDateTime
{
get => ViewWin.wfTimeTo.Value;
set
{
ViewWin.wfTimeTo.Value = value;
}
}
private string _mfcManagerDataFlow;
[Subscription("MfcManager.DataFlow")]
public string MfcManagerDataFlow
{
get => _mfcManagerDataFlow;
set
{
if (_mfcManagerDataFlow != value && value != null)
{
DataFlowList = JsonConvert.DeserializeObject<List<DataFlow>>(value);
}
_mfcManagerDataFlow = value;
}
}
public List<DataFlow> DataFlowList { get; set; }
public List<string> FlowNameList { get; set; } = new List<string>()
{
"All",
"Ar",
"H2",
"C2H4",
"SiH4",
"HCL",
"PN2",
"TCS",
"TMA"
};
public string FlowName { get; set; }
private string CacheName;
private DateTime CacheStartDateTime;
private DateTime CacheEndDateTime;
public void Query()
{
if (FlowName is null)
{
MessageBox.Show("查询名称为空");
return;
}
if (CacheStartDateTime== StartDateTime && CacheEndDateTime == EndDateTime && CacheName == FlowName)
{
MessageBox.Show("重复查询");
return;
}
if (StartDateTime > EndDateTime)
{
MessageBox.Show("time range invalid, start time should be early than end time.", "Error",
MessageBoxButton.OK,
MessageBoxImage.Error);
return;
}
InvokeClient.Instance.Service.DoOperation($"{SystemName}.FlowName.Query", new object[] { FlowName, StartDateTime, EndDateTime });
CacheStartDateTime = StartDateTime;
CacheEndDateTime = EndDateTime;
CacheName = FlowName;
}
#endregion
/// <summary>
/// 打开 ProcessMonitor
/// </summary>
public void ShowMonitorWindow()
{
var wins = Application.Current.Windows.OfType<ProcessMonitorView>().ToArray();
if (wins.Any())
{
foreach (var w in wins)
{
if (w.WindowState == WindowState.Minimized)
w.WindowState = WindowState.Normal;
w.Show();
w.Activate();
}
}
else
{
var wm = new WindowManager();
var model = new ProcessMonitorViewModel();
dynamic settings = new ExpandoObject();
settings.WindowStartupLocation = WindowStartupLocation.CenterOwner;
wm.ShowWindow(model, null, settings);
}
}
}
}