67 lines
2.2 KiB
C#
67 lines
2.2 KiB
C#
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using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Text;
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using System.Threading.Tasks;
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namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Efems.Rorzes
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{
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public enum RorzeEfemBasicMessage
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{
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READY, //Ready , ACK, INF
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INIT, //EFEM initialization MOV, ACK, INF
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ORGSH, //Origin search
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LOCK, //Pod lock MOV, ACK, INF
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UNLOCK, //Pod unlock
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DOCK, //Moving to pod dock position MOV, ACK, INF
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UNDOCK, //Moving to pod undock position MOV, ACK, INF
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OPEN, //Pod open MOV, ACK, INF
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CLOSE, //Pod close MOV, ACK, INF
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WAFSH, //Wafer mapping MOV, ACK, INF
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MAPDT, //Wafer map information GET, ACK, INF, EVT
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LOAD, //Wafer carry-out MOV, ACK, INF
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UNLOAD, //Wafer carry-in MOV, ACK, INF
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GOTO, //Move to specified object MOV, ACK, INF
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TRANS, //Wafer transfer MOV, ACK, INF
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CHANGE, //Wafer exchange MOV, ACK, INF
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ALIGN, //Alignment MOV, SET, ACK, INF
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HOME, //Home MOV, ACK, INF
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HOLD, //Hold MOV, ACK, INF
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RESTR, //Restart MOV, ACK
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ABORT, //Abort termination MOV, ACK, INF
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EMS, //Emergency stop MOV, ACK, INF
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ERROR, //Error GET, SET, ACK, INF
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CLAMP, //Clamp output, get state GET, SET, ACK, INF
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STATE, //Get status GET, ACK, INF
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MODE, //E84 mode setting GET, SET, ACK, INF
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TRANSREQ, //E84 automatic transfer request MOV, GET, ACK, INF, EVT
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SIGOUT, //Signal output SET, ACK
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SIGSTAT, //Signal input/output information GET, ACK, INF, EVT
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EVENT, //Event setting GET, SET, ACK, INF
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CSTID, //Carrier ID GET, ACK, INF
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USDEFINE, //User Define
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FFU, //Ffu SET,ACK,INF
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WTYPE, //Wtype Set and acquire wafer type SET,ACK,GET,ACK,INF
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PURGE, //Purge SET,ACK,GET,ACK,INF
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ADPLOCK, //Adplock MOV,ACK,INF
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ADPUNLOCK, //Adpunlock SET,ACK,INF
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LED, //Led SET,ACK,INF
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WORKCHK, //Workchk MOV,ACK,INF
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}
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}
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