2067 lines
72 KiB
C#
2067 lines
72 KiB
C#
|
using System;
|
|||
|
|
using System.Text;
|
|||
|
|
using Aitex.Core.RT.Device;
|
|||
|
|
using Aitex.Sorter.Common;
|
|||
|
|
using MECF.Framework.Common.Equipment;
|
|||
|
|
using MECF.Framework.Common.SubstrateTrackings;
|
|||
|
|
using System.Text.RegularExpressions;
|
|||
|
|
using Aitex.Core.RT.Log;
|
|||
|
|
using System.Collections.Generic;
|
|||
|
|
using Aitex.Core.Common;
|
|||
|
|
|
|||
|
|
namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot.NX100
|
|||
|
|
{
|
|||
|
|
/*
|
|||
|
|
* A command is transmitted from the host in the following format.
|
|||
|
|
* $ UNo (SeqNo) COMMAND Parameter Sum CR\
|
|||
|
|
* • $: Start mark (1 byte)
|
|||
|
|
Indicates the start of the message.
|
|||
|
|
• UNo: Unit No. (1 byte)
|
|||
|
|
Indicates the unit number
|
|||
|
|
• SeqNo: Sequence number (Non/1/2/3 bytes)
|
|||
|
|
Sequence number is used to avoid duplicate motion when sending of
|
|||
|
|
commands improperly. An integer parameter can specify the length of
|
|||
|
|
SeqNo. (Non/1/2/3 bytes). See parameter table for more details. (Default:
|
|||
|
|
Non), 设置 2bytes
|
|||
|
|
• Parameter: Parameter (Differs depending on the command.)
|
|||
|
|
Sets the operation axis, the moving amount, etc. following a command.
|
|||
|
|
• Sum: Checksum (2 bytes)
|
|||
|
|
This information is used for the communications error check.
|
|||
|
|
Calculate the sum of the ASCII characters (‘0’ to ‘9’ and ‘A’ to ‘F’), in “Uno”,
|
|||
|
|
“COMMAND” and “Parameter” section, and take the lowest tow digit.
|
|||
|
|
*/
|
|||
|
|
public class handler<T> : IHandler where T : ITransferMsg, new()
|
|||
|
|
{
|
|||
|
|
public int ID { get; set; }
|
|||
|
|
public int Unit { get; set; }
|
|||
|
|
|
|||
|
|
public bool IsBackground { get { return _imp.background; } }
|
|||
|
|
|
|||
|
|
|
|||
|
|
private static int retry_time = 3;
|
|||
|
|
private int retry_count = retry_time;
|
|||
|
|
|
|||
|
|
private object[] _objs = null;
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
private TokenGenerator _generator;
|
|||
|
|
|
|||
|
|
private T _imp = new T();
|
|||
|
|
|
|||
|
|
private List<string> _words = new List<string>();
|
|||
|
|
|
|||
|
|
public handler(IDevice device)
|
|||
|
|
{
|
|||
|
|
_imp.Robot = device;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public handler(IDevice device, ref TokenGenerator gen, params object[] objs)
|
|||
|
|
{
|
|||
|
|
_imp.Robot = device;
|
|||
|
|
this._generator = gen;
|
|||
|
|
this._objs = objs;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
public bool Execute<TPort>(ref TPort port) where TPort : ICommunication
|
|||
|
|
{
|
|||
|
|
retry_count = retry_time;
|
|||
|
|
ID = _generator.create();
|
|||
|
|
return port.Write(string.Format("{0}{1}{2}", ProtocolTag.tag_cmd_start, package().Replace(",", ""), ProtocolTag.tag_end));
|
|||
|
|
}
|
|||
|
|
/// <summary>
|
|||
|
|
/// return value: bhandle
|
|||
|
|
/// </summary>
|
|||
|
|
/// <typeparam name="TPort"></typeparam>
|
|||
|
|
/// <param name="port"></param>
|
|||
|
|
/// <param name="msg"></param>
|
|||
|
|
/// <param name="completed"></param>
|
|||
|
|
/// <returns></returns>
|
|||
|
|
///
|
|||
|
|
|
|||
|
|
public bool OnMessage<TPort>(ref TPort port, string message, out bool completed) where TPort : ICommunication
|
|||
|
|
{
|
|||
|
|
//$1E000003AC0300010
|
|||
|
|
//message = ">,1,EVNT,100,2018/11/16 17:01:06,2BA0,A1";
|
|||
|
|
//message = " !,1,36,40,2BA0,MTRS,002200,-0011931,-0610171,00179995,00049818,00186336,57";
|
|||
|
|
//message = "!,1,16,40,0000,MTCH,000483,-0011862,00000000,00179516,00090369,00172882,0A";
|
|||
|
|
//message = "$156000000RMAPC2FF01OK02OK03OK04OK05OK06OK07OK08OK09--10--11--12--13--14--15--16--17--18--19--20--21--22--23--24--25--96";
|
|||
|
|
//message =!283000000MALNE5.
|
|||
|
|
try
|
|||
|
|
{
|
|||
|
|
completed = false;
|
|||
|
|
|
|||
|
|
string package = message;
|
|||
|
|
_words.Clear();
|
|||
|
|
|
|||
|
|
|
|||
|
|
string type = package.Substring(0,1);
|
|||
|
|
_words.Add(type);
|
|||
|
|
|
|||
|
|
int unit = int.Parse(package.Substring(1, 1));
|
|||
|
|
_words.Add(package.Substring(1, 1));
|
|||
|
|
|
|||
|
|
string sum = package.Substring(package.Length - 2, 2);
|
|||
|
|
string check = Checksum(package);
|
|||
|
|
if (sum != check)
|
|||
|
|
{
|
|||
|
|
throw (new InvalidPackageException(string.Format("check sum error{0}", package)));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
if (type != ProtocolTag.resp_tag_event && type != ProtocolTag.resp_tag_error)
|
|||
|
|
{
|
|||
|
|
_words.Add(package.Substring(2, 2));
|
|||
|
|
int seq = int.Parse(package.Substring(2,2));
|
|||
|
|
|
|||
|
|
if (seq != ID)
|
|||
|
|
return false;
|
|||
|
|
|
|||
|
|
if (unit != Unit)
|
|||
|
|
{
|
|||
|
|
throw (new InvalidPackageException(string.Format("invalid unit {0}", package)));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
if (type == ProtocolTag.resp_tag_error)
|
|||
|
|
{
|
|||
|
|
//? Ackcd Sum CR
|
|||
|
|
string error = package.Substring(1,4);
|
|||
|
|
//‘1’: Warning 1 (W1), ‘2’: Warning 2 (W2), ‘3’: Important alarm 1 (A1), ‘4’: Important alarm 2 (A2),
|
|||
|
|
//‘5’: Serious alarm (F)
|
|||
|
|
|
|||
|
|
if (error[0] != '1' || error[0] != '2')
|
|||
|
|
{
|
|||
|
|
string warning = string.Format("can't execute retry, {0}", error);
|
|||
|
|
LOG.Warning(warning);
|
|||
|
|
throw (new ExcuteFailedException(warning));
|
|||
|
|
}
|
|||
|
|
if (retry_count-- <= 0)
|
|||
|
|
{
|
|||
|
|
string warning = string.Format("retry over {0} times", retry_time);
|
|||
|
|
LOG.Warning(warning);
|
|||
|
|
throw (new ExcuteFailedException(warning));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
port.Write(string.Format("{0}{1}{2}", ProtocolTag.tag_cmd_start, this.package(), ProtocolTag.tag_end));
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
else if (type == ProtocolTag.resp_tag_event)
|
|||
|
|
{
|
|||
|
|
//0 1 2-3 4-7 8-10
|
|||
|
|
//> UNo SeqNo COMMAND EvNo EvData Sum CR
|
|||
|
|
//• COMMAND : Command (4 Byte) EVNT(Fixed length)
|
|||
|
|
//• EvNo: Event number(
|
|||
|
|
|
|||
|
|
_words.Add(package.Substring(4, 4)); //stsN
|
|||
|
|
|
|||
|
|
string evtType = package.Substring(8, 10);
|
|||
|
|
_words.Add(evtType); //Errcd
|
|||
|
|
|
|||
|
|
string evtInfo = package.Substring(11, package.Length - 10 -2 );
|
|||
|
|
_words.Add(evtInfo); //Errcd
|
|||
|
|
|
|||
|
|
if (_imp.evt)
|
|||
|
|
completed = _imp.unpackage(type, _words.ToArray());
|
|||
|
|
return _imp.evt;
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
//0 1 2,3 4,5 6-9
|
|||
|
|
//! UNo (SeqNo) StsN Errcd COMMAND Sum
|
|||
|
|
|
|||
|
|
_words.Add(package.Substring(4, 2)); //stsN
|
|||
|
|
string error = package.Substring(6, 4);
|
|||
|
|
//int intError = Convert.ToInt32(error, 16);
|
|||
|
|
if (error != "0000")
|
|||
|
|
{
|
|||
|
|
string warning = string.Format("Robot execute failed, return error {0}", error);
|
|||
|
|
throw (new ExcuteFailedException(warning));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_words.Add(error); //Errcd
|
|||
|
|
|
|||
|
|
|
|||
|
|
_words.Add(package.Substring(10, package.Length - 10 -2)) ; //COMMAND
|
|||
|
|
|
|||
|
|
completed = _imp.unpackage(type, _words.ToArray());
|
|||
|
|
if (completed)
|
|||
|
|
{
|
|||
|
|
_generator.release(ID);
|
|||
|
|
if (_imp.background)
|
|||
|
|
{
|
|||
|
|
ID = this._generator.create();
|
|||
|
|
port.Write(string.Format("{0}{1}{2}", ProtocolTag.tag_cmd_start, ackn(), ProtocolTag.tag_end));
|
|||
|
|
_generator.release(ID);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
//wait 2ms
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
catch (ExcuteFailedException e)
|
|||
|
|
{
|
|||
|
|
throw (e);
|
|||
|
|
}
|
|||
|
|
catch (InvalidPackageException e)
|
|||
|
|
{
|
|||
|
|
throw e;
|
|||
|
|
}
|
|||
|
|
catch (Exception ex)
|
|||
|
|
{
|
|||
|
|
LOG.Write(ex);
|
|||
|
|
|
|||
|
|
throw (new InvalidPackageException(message));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private string Checksum(string package)
|
|||
|
|
{
|
|||
|
|
int start = package.IndexOf(ProtocolTag.cmd_token);
|
|||
|
|
int end = package.LastIndexOf(ProtocolTag.cmd_token);
|
|||
|
|
|
|||
|
|
start = 1;
|
|||
|
|
end = package.Length - 2 - 1;
|
|||
|
|
|
|||
|
|
|
|||
|
|
int len = end - start + 1;
|
|||
|
|
if (len > 1)
|
|||
|
|
{
|
|||
|
|
string data = package.Substring(start, len);
|
|||
|
|
return Checksum(Encoding.Default.GetBytes(data));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return "";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private string Checksum(byte[] bytes)
|
|||
|
|
{
|
|||
|
|
int sum = 0;
|
|||
|
|
foreach (byte code in bytes)
|
|||
|
|
{
|
|||
|
|
sum += code;
|
|||
|
|
}
|
|||
|
|
string hex = String.Format("{0:X2}", sum % 256);
|
|||
|
|
return hex;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
private string package()
|
|||
|
|
{
|
|||
|
|
//$,<UNo>(,<SeqNo>),<Command>,<Parameter>(,<Sum>)<CR>
|
|||
|
|
string data = string.Empty;
|
|||
|
|
data = string.Format("{0:D1}{1:D2}{2}", Unit, ID, _imp.package(this._objs).Replace(",",""));
|
|||
|
|
|
|||
|
|
string sum = Checksum(Encoding.ASCII.GetBytes(data));
|
|||
|
|
|
|||
|
|
return data + sum;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private string ackn()
|
|||
|
|
{
|
|||
|
|
//$<UNo>(<SeqNo>)ACKN(<Sum>)<CR>
|
|||
|
|
string data = string.Empty;
|
|||
|
|
data = string.Format("{0:D1}{1:D2}ACKN", Unit, ID);
|
|||
|
|
|
|||
|
|
string sum = Checksum(Encoding.ASCII.GetBytes(data));
|
|||
|
|
|
|||
|
|
return data + sum;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class RobotMotionHandler : ITransferMsg
|
|||
|
|
{
|
|||
|
|
public bool background { get; protected set; }
|
|||
|
|
public bool evt { get { return false; } }
|
|||
|
|
|
|||
|
|
public string deviceID { private get; set; }
|
|||
|
|
|
|||
|
|
public string _cmd = string.Empty;
|
|||
|
|
|
|||
|
|
public IDevice Robot { set { _device = (Robot)value; } }
|
|||
|
|
protected Robot _device;
|
|||
|
|
|
|||
|
|
public RobotMotionHandler()
|
|||
|
|
{
|
|||
|
|
background = false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public virtual string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
return "";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool unpackage(string type, string[] items)
|
|||
|
|
{
|
|||
|
|
//! <UNo> (<SeqNo>) <StsN> <Errcd> MTRG <Sum> <CR>
|
|||
|
|
int value = Convert.ToInt32(items[3],16);
|
|||
|
|
|
|||
|
|
_device.Status = value;
|
|||
|
|
|
|||
|
|
int error = Convert.ToInt32(items[4], 16);
|
|||
|
|
_device.ErrorCode = error;
|
|||
|
|
if(error > 0)
|
|||
|
|
_device.LastErrorCode = error;
|
|||
|
|
|
|||
|
|
|
|||
|
|
if (type.Equals(ProtocolTag.resp_tag_excute))
|
|||
|
|
{
|
|||
|
|
//_device.ElapseTime = int.Parse(items[6]);
|
|||
|
|
|
|||
|
|
//_device.Rotation = int.Parse(items[7]);
|
|||
|
|
//_device.Extension = int.Parse(items[8]);
|
|||
|
|
//_device.Wrist1= int.Parse(items[9]);
|
|||
|
|
//_device.Wrist2= int.Parse(items[10]);
|
|||
|
|
//_device.Evevation = int.Parse(items[11]);
|
|||
|
|
|
|||
|
|
if (error == 0)
|
|||
|
|
{
|
|||
|
|
update(items);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return !background;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
protected virtual void update(string[] data)
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class RbInitHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
public RbInitHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//$ <UNo> (<SeqNo>) INIT<IMode> <Sum> <CR>
|
|||
|
|
// IMode: Initialization mode(2 Byte)
|
|||
|
|
//• ”00”: Error clear, servo ON and all axes move to home position
|
|||
|
|
//• ”01”: Servo ON and all axes move to home position
|
|||
|
|
//• ”05”: Error clear, servo ON and arm moves to home position.
|
|||
|
|
//• ”06”: Servo ON and arm moves to home position
|
|||
|
|
//• ”10”: Error clear and servo ON
|
|||
|
|
updateBefore();
|
|||
|
|
return ",INIT,00,";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
_device.Initalized = true;
|
|||
|
|
_device.Swap = false;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class RbHomeHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
public RbHomeHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//$ < UNo > > (< SeqNo >) MHOM<MMode> < Sum > < CR >
|
|||
|
|
//• UNo: Unit number(1 byte)
|
|||
|
|
//• ‘1’ to ‘4’: Unit specified
|
|||
|
|
//• SeqNo: Sequence number(Non/ 1 / 2 / 3 byte)
|
|||
|
|
//• MMode: Motion mode(1 byte)
|
|||
|
|
//• ‘F’: All axes
|
|||
|
|
//• ‘A’: Arm(s) only
|
|||
|
|
updateBefore();
|
|||
|
|
return ",MHOM,F,";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
|
|||
|
|
_device.CmdBladeTarget = $"{_device.Name}.A";
|
|||
|
|
_device.CmdBlade1Extend = "0";
|
|||
|
|
_device.CmdBlade2Extend = "0";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
_device.Initalized = true;
|
|||
|
|
_device.Swap = false;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class RbArmHomeHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
public RbArmHomeHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//$ < UNo > > (< SeqNo >) MHOM<MMode> < Sum > < CR >
|
|||
|
|
//• UNo: Unit number(1 byte)
|
|||
|
|
//• ‘1’ to ‘4’: Unit specified
|
|||
|
|
//• SeqNo: Sequence number(Non/ 1 / 2 / 3 byte)
|
|||
|
|
//• MMode: Motion mode(1 byte)
|
|||
|
|
//• ‘F’: All axes
|
|||
|
|
//• ‘A’: Arm(s) only
|
|||
|
|
updateBefore();
|
|||
|
|
return ",MHOM,A,";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
|
|||
|
|
_device.CmdBladeTarget = $"{_device.Name}.A";
|
|||
|
|
_device.CmdBlade1Extend = "0";
|
|||
|
|
_device.CmdBlade2Extend = "0";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
_device.Initalized = true;
|
|||
|
|
_device.Swap = false;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class RbClearErrorHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
public RbClearErrorHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
//$ <UNo> (<SeqNo>) CCLR <CMode> <Sum> <CR>
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//• CMode: Clear mode(1 byte)
|
|||
|
|
//• ‘E’: Releases the error status.
|
|||
|
|
//• ‘H’: Clears the error history.
|
|||
|
|
return ",CCLR,E,";
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
public class RbGripHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
Hand _hand;
|
|||
|
|
public RbGripHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
//Command wafer hold/release signal to the solenoid of the specified unit.
|
|||
|
|
//$ <UNo> (<SeqNo>) CSOL <Fork> <Sw> <Sum> <CR>
|
|||
|
|
//• Fork: Fork specified(1 byte)
|
|||
|
|
//• ‘A’: Extension axis 1 (Blade 1), pre-aligner
|
|||
|
|
//• ‘B’: Extension axis 2 (Blade 2)
|
|||
|
|
//• Sw: Chucking command(1 byte)
|
|||
|
|
//• ‘0’: Chucking OFF
|
|||
|
|
//• ‘1’: Chucking ON
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
_hand = (Hand)args[0];
|
|||
|
|
bool bHold = (bool)args[1];
|
|||
|
|
if(bHold)
|
|||
|
|
return string.Format(",CSOL,{0},1,",RobotConvertor.hand2string(_hand));
|
|||
|
|
|
|||
|
|
return string.Format(",CSOL,{0},0,", RobotConvertor.hand2string(_hand));
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class RbStopHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
public RbStopHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
//$ <UNo> (<SeqNo>) CHLTs <Sum> <CR>
|
|||
|
|
//Pause (decelerate and stop) the motion of the specified unit during the drive command execution.
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
bool isEmergency = (bool)args[0];
|
|||
|
|
if (isEmergency)
|
|||
|
|
return ",CEMG,";
|
|||
|
|
|
|||
|
|
//$ < UNo > (< SeqNo >) CHLT<Sum> < CR >
|
|||
|
|
return ",CHLT,";
|
|||
|
|
//return ",MHOM,F,";
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class RbResumeHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
public RbResumeHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
//$ <UNo> (<SeqNo>) CRSM <Sum> <CR>
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
return ",CRSM,";
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class PickHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
public PickHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//Move To Ready position and wafer Get motion(MTRS+MGET)
|
|||
|
|
//$ <UNo> (<SeqNo>) MTRG <TrsSt> <SlotNo> <MtnMode> <Posture> <Sum> <CR>
|
|||
|
|
// • TrsSt: Transfer station(2 bytes)
|
|||
|
|
//• "C1" to "C8": When cassette stage specified
|
|||
|
|
//• "S1" to "SC": When transfer stage specified
|
|||
|
|
//• "P1" to “P2”: When P/ A stage specified
|
|||
|
|
//Note: P2 station is effective only when two or more PA stations exist.
|
|||
|
|
//• SlotNo: Slot number(2 bytes)
|
|||
|
|
//< Manipulator >
|
|||
|
|
//• "01" to "XX": When cassette stage is specified by < TrsST >
|
|||
|
|
//(The maximum value of "XX" is in the ASCII code of the number of slots specified by parameter.)
|
|||
|
|
//• "00": When transfer stage or P / A stage specified by < TrsSt >
|
|||
|
|
//• MtnMode: Motion mode(2 bytes)
|
|||
|
|
//• "GA": Wafer Get motion at extension axis 1(Blade 1).
|
|||
|
|
//• "GB": Wafer Get motion at extension axis 2(Blade 2).
|
|||
|
|
//• "GW": Wafer Get motion with extension axis 1 and 2(Blade 1 and 2). < WGet motion >
|
|||
|
|
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
if (_hand == Hand.Both)
|
|||
|
|
{
|
|||
|
|
return string.Format(",MTRG,{0},{1:D2},G{2},A,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1) ,
|
|||
|
|
RobotConvertor.hand2string(_hand));
|
|||
|
|
}
|
|||
|
|
return string.Format(",MTRG,{0},{1:D2},G{2},A,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot),
|
|||
|
|
RobotConvertor.hand2string(_hand));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
if (_hand == Hand.Blade1)
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)Hand.Blade1);
|
|||
|
|
}
|
|||
|
|
else if (_hand == Hand.Blade2)
|
|||
|
|
{
|
|||
|
|
for (int i = 0; i < _device.Blade2Slots; i++)
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot + i, ModuleHelper.Converter(_device.Name), (int)Hand.Blade2 + i);
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
for (int i = 0; i < _device.Blade2Slots + 1; i++)
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot + i, ModuleHelper.Converter(_device.Name), (int)Hand.Blade1 + i);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = "0";
|
|||
|
|
_device.CmdBlade2Extend = "0";
|
|||
|
|
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class PickExtendHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
public PickExtendHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//$ <UNo> (<SeqNo>) MTPT <TrsSt> <SlotNo> <NextMtn> <Posture> <TrsPnt> <Sum> <CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return string.Format(",MTPT,{0},{1:D2},G{2},A,Gb,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1),
|
|||
|
|
RobotConvertor.hand2string(_hand));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class PickRetractHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
public PickRetractHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//$ <UNo> (<SeqNo>) MPNT <TrsPnt> <Sum> <CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return ",MPNT,G4,";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
if (_hand == Hand.Both)
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)Hand.Blade1);
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot + 1, ModuleHelper.Converter(_device.Name), (int)Hand.Blade2);
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)_hand);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = "0";
|
|||
|
|
_device.CmdBlade2Extend = "0";
|
|||
|
|
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class PickReadyPositionHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
public PickReadyPositionHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//$ <UNo> (<SeqNo>) MTRS <TrsSt> <SlotNo> <NextMtn> <Posture> <Sum> <CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return string.Format(",MTRS,{0},{1:D2},G{2},A,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1),
|
|||
|
|
RobotConvertor.hand2string(_hand));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class PlaceHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
|
|||
|
|
public PlaceHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
// $ <UNo> (<SeqNo>) MTRP <TrsSt> <SlotNo> <MtnMode> <Posture> <Sum> <CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
if (_hand == Hand.Both)
|
|||
|
|
{
|
|||
|
|
return string.Format(",MTRP,{0},{1:D2},P{2},A,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1),
|
|||
|
|
RobotConvertor.hand2string(_hand));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
return string.Format(",MTRP,{0},{1:D2},P{2},A,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot),
|
|||
|
|
RobotConvertor.hand2string(_hand));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
if (_hand == Hand.Blade1)
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade1, _chamber, _slot);
|
|||
|
|
}
|
|||
|
|
else if (_hand == Hand.Blade2)
|
|||
|
|
{
|
|||
|
|
for (int i = 0; i < _device.Blade2Slots; i++)
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade2 +i, _chamber, _slot + i);
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
for (int i = 0; i < _device.Blade2Slots + 1; i++)
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade1 + i, _chamber, _slot + i);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = "0";
|
|||
|
|
_device.CmdBlade2Extend = "0";
|
|||
|
|
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class PlaceExtendHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
|
|||
|
|
public PlaceExtendHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//$ <UNo> (<SeqNo>) MTPT <TrsSt> <SlotNo> <NextMtn> <Posture> <TrsPnt> <Sum> <CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return string.Format(",MTPT,{0},{1:D2},P{2},A,Pb,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1),
|
|||
|
|
RobotConvertor.hand2string(_hand));
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class PlaceRetractHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
|
|||
|
|
public PlaceRetractHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//$ <UNo> (<SeqNo>) MPNT <TrsPnt> <Sum> <CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return ",MPNT,P4,";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
if (_hand == Hand.Both)
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade1, _chamber, _slot);
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade2, _chamber, _slot + 1);
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)_hand, _chamber, _slot);
|
|||
|
|
}
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = "0";
|
|||
|
|
_device.CmdBlade2Extend = "0";
|
|||
|
|
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class PlaceReadyPositionHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
public PlaceReadyPositionHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//$ <UNo> (<SeqNo>) MTRS <TrsSt> <SlotNo> <NextMtn> <Posture> <Sum> <CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return string.Format(",MTRS,{0},{1:D2},P{2},A,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1),
|
|||
|
|
RobotConvertor.hand2string(_hand));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class ExchangeReadyPositionHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _pickHand;
|
|||
|
|
private Hand _placeHand;
|
|||
|
|
public ExchangeReadyPositionHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
////$ <UNo> (<SeqNo>) MTRS <TrsSt> <SlotNo> <NextMtn> <Posture> <Sum> <CR>
|
|||
|
|
//_chamber = (ModuleName)args[0];
|
|||
|
|
//_slot = (int)args[1];
|
|||
|
|
//_pickHand = (Hand)args[2];
|
|||
|
|
//_placeHand = (Hand)args[3];
|
|||
|
|
|
|||
|
|
//updateBefore();
|
|||
|
|
|
|||
|
|
//return string.Format(",MTRS,{0},{1:D2},E{2},A,",
|
|||
|
|
// RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
// RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1),
|
|||
|
|
// RobotConvertor.hand2string(_pickHand));
|
|||
|
|
|
|||
|
|
//$ <UNo> (<SeqNo>) MTPT <TrsSt> <SlotNo> <NextMtn> <Posture> <TrsPnt> <Sum> <CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_pickHand = (Hand)args[2];
|
|||
|
|
_placeHand = (Hand)args[3];
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return string.Format(",MTPT,{0},{1:D2},E{2},A,G1,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1),
|
|||
|
|
RobotConvertor.hand2string(_pickHand));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _pickHand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = "0";
|
|||
|
|
_device.CmdBlade2Extend = "0";
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class ExchangePickExtendHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
|
|||
|
|
public ExchangePickExtendHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//$ <UNo> (<SeqNo>) MPNT <TrsPnt> <Sum> <CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return ",MPNT,Gb,";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class ExchangePlaceExtendHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _pickHand;
|
|||
|
|
private Hand _placeHand;
|
|||
|
|
|
|||
|
|
public ExchangePlaceExtendHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//$ <UNo> (<SeqNo>) MPNT <TrsPnt> <Sum> <CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_pickHand = (Hand)args[2];
|
|||
|
|
_placeHand = (Hand)args[3];
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return ",MPNT,Pb,";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _placeHand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _placeHand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _placeHand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class ExchangePlaceRetractHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _pickHand;
|
|||
|
|
private Hand _placeHand;
|
|||
|
|
|
|||
|
|
public ExchangePlaceRetractHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//$ <UNo> (<SeqNo>) MPNT <TrsPnt> <Sum> <CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_pickHand = (Hand)args[2];
|
|||
|
|
_placeHand = (Hand)args[3];
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return ",MPNT,P4,";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _placeHand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = "0";
|
|||
|
|
_device.CmdBlade2Extend = "0";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
if (_placeHand == Hand.Blade1)
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)Hand.Blade2);
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade1, _chamber, _slot);
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)Hand.Blade1);
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade2, _chamber, _slot);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_device.Swap = false;
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class ExchangeHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
|
|||
|
|
|
|||
|
|
public ExchangeHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
// $ <UNo> (<SeqNo>) MTRE <TrsSt> <SlotNo> <MtnMode> <Posture> <Sum> <CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
if (_hand == Hand.Blade1)
|
|||
|
|
_hand = Hand.Blade2;
|
|||
|
|
else
|
|||
|
|
_hand = Hand.Blade1;
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return string.Format(",MTRE,{0},{1:D2},E{2},A,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot),
|
|||
|
|
RobotConvertor.hand2string(_hand));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
_device.Swap = true;
|
|||
|
|
_device.PlaceBalde = _hand;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
if (_hand == Hand.Blade2)
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)Hand.Blade2);
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade1, _chamber, _slot);
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)Hand.Blade1);
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade2, _chamber, _slot);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_device.Swap = false;
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class ExchangeReadyExtHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _pickHand;
|
|||
|
|
private Hand _placeHand;
|
|||
|
|
public ExchangeReadyExtHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
////$ <UNo> (<SeqNo>) MTRS <TrsSt> <SlotNo> <NextMtn> <Posture> <Sum> <CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_pickHand = (Hand)args[2];
|
|||
|
|
_placeHand = (Hand)args[3];
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return string.Format(",MTRS,{0},{1:D2},E{2},A,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1),
|
|||
|
|
RobotConvertor.hand2string(_pickHand));
|
|||
|
|
|
|||
|
|
//$ <UNo> (<SeqNo>) MTPT <TrsSt> <SlotNo> <NextMtn> <Posture> <TrsPnt> <Sum> <CR>
|
|||
|
|
//_chamber = (ModuleName)args[0];
|
|||
|
|
//_slot = (int)args[1];
|
|||
|
|
//_pickHand = (Hand)args[2];
|
|||
|
|
//_placeHand = (Hand)args[3];
|
|||
|
|
|
|||
|
|
//updateBefore();
|
|||
|
|
|
|||
|
|
//return string.Format(",MTPT,{0},{1:D2},E{2},A,G1,",
|
|||
|
|
// RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
// RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1),
|
|||
|
|
// RobotConvertor.hand2string(_pickHand));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _pickHand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = "0";
|
|||
|
|
_device.CmdBlade2Extend = "0";
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class ExchangeAfterReadyHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
|
|||
|
|
|
|||
|
|
public ExchangeAfterReadyHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
// $ <UNo> (<SeqNo>) MEXG <Sum> <CR>
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
//if (_hand == Hand.Blade1)
|
|||
|
|
// _hand = Hand.Blade2;
|
|||
|
|
//else
|
|||
|
|
// _hand = Hand.Blade1;
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
|
|||
|
|
return ",MEXG,";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
_device.Swap = true;
|
|||
|
|
_device.PlaceBalde = _hand;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
if (_hand == Hand.Blade2)
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)Hand.Blade2);
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade1, _chamber, _slot);
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)Hand.Blade1);
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade2, _chamber, _slot);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_device.Swap = false;
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class GotoHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Motion _next;
|
|||
|
|
private Hand _hand;
|
|||
|
|
public GotoHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//Move to ready position with specified adjustment offset
|
|||
|
|
//$<UNo>(<SeqNo>) MTRO <TrsSt> <SlotNo> <NextMtn> <Posture> <OffsetX> <OffsetY> <OffsetZ> <Sum>
|
|||
|
|
|
|||
|
|
//• OffsetN: Offset(5 bytes each)
|
|||
|
|
//• OffsetX: X direction offset
|
|||
|
|
//• OffsetY: Y direction offset
|
|||
|
|
//• OffsetZ: Z direction offset
|
|||
|
|
//• Specified in the range between "-9999" and "99999"(Resolution: 0.01[mm])
|
|||
|
|
//• If value is less than 5 digits, fill the higher digit with ‘0’ so that the field always has 5 digits.
|
|||
|
|
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_next = (Motion)args[2];
|
|||
|
|
_hand = (Hand)args[3];
|
|||
|
|
|
|||
|
|
int x = (int)args[4];
|
|||
|
|
int y = (int)args[5];
|
|||
|
|
int z = (int)args[6];
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
return string.Format(",MTRO,{0},{1:D2},{2},A,{3},{4},{5}",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot),
|
|||
|
|
RobotConvertor.NextMotion2String(_next, _hand),
|
|||
|
|
RobotConvertor.Offset2String(x),
|
|||
|
|
RobotConvertor.Offset2String(y),
|
|||
|
|
RobotConvertor.Offset2String(z)
|
|||
|
|
); ;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
if(_hand == Hand.Blade1)
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
else if (_hand == Hand.Blade2)
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
public class PickHandlerEx : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
public PickHandlerEx()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//Move to ready position and get wafer with adjustment offset(MTRO+MGET)
|
|||
|
|
//$ < UNo > (< SeqNo >) MTGO<TrsSt> < SlotNo > < NextMtn > < Posture > < OffsetX > < OffsetY > < OffsetZ > < Sum > < CR >
|
|||
|
|
//• UNo: Unit number(1 byte)
|
|||
|
|
//• ‘1’ to ‘4’: Unit specified
|
|||
|
|
//• SeqNo: Sequence number(Non/ 1 / 2 / 3 byte)
|
|||
|
|
//• TrsSt: Transfer station(2 bytes)
|
|||
|
|
//• "C1" to "C8": When cassette stage specified
|
|||
|
|
//• "S1" to "SC": When transfer stage specified
|
|||
|
|
//• "P1" to “P2”: When P/ A stage specified
|
|||
|
|
//Note: P2 station is effective only when two or more PA stations exist.
|
|||
|
|
//• SlotNo: Slot number(2 bytes)
|
|||
|
|
//• "01" to "XX": When cassette stage specified by<TrsST>
|
|||
|
|
//(The maximum value of "XX" is in the ASCII code of the number of slots specified by parameter.)
|
|||
|
|
//• "00": When transfer stage or P / A stage specified by < TrsSt >
|
|||
|
|
//• NextMtn: Next motion mode(2 bytes)
|
|||
|
|
//• "GA": Next motion is wafer Get motion with extension axis 1(Blade 1).
|
|||
|
|
//• "GB": Next motion is wafer Get motion with extension axis 2(Blade 2).
|
|||
|
|
//• "GW": Next motion is wafer Get motion with extension axis 1 and 2(Blade 1 and 2). < WGet motion >
|
|||
|
|
//Note 1.The motion of extension axis 2(or blade 2) is available only for a dual-arm manipulator and dual blade
|
|||
|
|
//linear motion manipulator.
|
|||
|
|
//2.The WGet motion is available for a dual-arm manipulator and dual blade linear motion manipulator.
|
|||
|
|
|
|||
|
|
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
int x = (int)args[3];
|
|||
|
|
int y = (int)args[4];
|
|||
|
|
int z = (int)args[5];
|
|||
|
|
updateBefore();
|
|||
|
|
if (_hand == Hand.Both)
|
|||
|
|
{
|
|||
|
|
return string.Format(",MTGO,{0},{1:D2},G{2},A,{3},{4},{5}",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1),
|
|||
|
|
RobotConvertor.hand2string(_hand),
|
|||
|
|
RobotConvertor.Offset2String(x),
|
|||
|
|
RobotConvertor.Offset2String(y),
|
|||
|
|
RobotConvertor.Offset2String(z)
|
|||
|
|
);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return string.Format(",MTGO,{0},{1:D2},G{2},A,{3},{4},{5}",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot),
|
|||
|
|
RobotConvertor.hand2string(_hand),
|
|||
|
|
RobotConvertor.Offset2String(x),
|
|||
|
|
RobotConvertor.Offset2String(y),
|
|||
|
|
RobotConvertor.Offset2String(z)
|
|||
|
|
);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
if (_hand == Hand.Blade1)
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleHelper.Converter(_device.Name), (int)Hand.Blade1);
|
|||
|
|
}
|
|||
|
|
else if (_hand == Hand.Blade2)
|
|||
|
|
{
|
|||
|
|
for (int i = 0; i < _device.Blade2Slots; i++)
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot + i, ModuleHelper.Converter(_device.Name), (int)Hand.Blade2 + i);
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
for (int i = 0; i < _device.Blade2Slots + 1; i++)
|
|||
|
|
WaferManager.Instance.WaferMoved(_chamber, _slot + i, ModuleHelper.Converter(_device.Name), (int)Hand.Blade1 + i);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = "0";
|
|||
|
|
_device.CmdBlade2Extend = "0";
|
|||
|
|
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
public class PlaceHandlerEx : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
private int _slot;
|
|||
|
|
private Hand _hand;
|
|||
|
|
|
|||
|
|
public PlaceHandlerEx()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
_slot = (int)args[1];
|
|||
|
|
_hand = (Hand)args[2];
|
|||
|
|
int x = (int)args[3];
|
|||
|
|
int y = (int)args[4];
|
|||
|
|
int z = (int)args[5];
|
|||
|
|
updateBefore();
|
|||
|
|
if (_hand == Hand.Both)
|
|||
|
|
{
|
|||
|
|
return string.Format(",MTPO,{0},{1:D2},P{2},A,{3},{4},{5}",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1),
|
|||
|
|
RobotConvertor.hand2string(_hand),
|
|||
|
|
RobotConvertor.Offset2String(x),
|
|||
|
|
RobotConvertor.Offset2String(y),
|
|||
|
|
RobotConvertor.Offset2String(z)
|
|||
|
|
);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return string.Format(",MTPO,{0},{1:D2},P{2},A,{3},{4},{5}",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
RobotConvertor.chamberSlot2Slot(_chamber, _slot),
|
|||
|
|
RobotConvertor.hand2string(_hand),
|
|||
|
|
RobotConvertor.Offset2String(x),
|
|||
|
|
RobotConvertor.Offset2String(y),
|
|||
|
|
RobotConvertor.Offset2String(z)
|
|||
|
|
);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = _hand == Hand.Blade1 ? "1" : "0";
|
|||
|
|
_device.CmdBlade2Extend = _hand == Hand.Blade1 ? "0" : "1";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
if (_hand == Hand.Blade1)
|
|||
|
|
{
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade1, _chamber, _slot);
|
|||
|
|
}
|
|||
|
|
else if (_hand == Hand.Blade2)
|
|||
|
|
{
|
|||
|
|
for (int i = 0; i < _device.Blade2Slots; i++)
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade2 + i, _chamber, _slot + i);
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
for (int i = 0; i < _device.Blade2Slots + 1; i++)
|
|||
|
|
WaferManager.Instance.WaferMoved(ModuleHelper.Converter(_device.Name), (int)Hand.Blade1 + i, _chamber, _slot + i);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
|
|||
|
|
string arm = _hand == Hand.Blade1 ? "A" : "B";
|
|||
|
|
_device.CmdBladeTarget = $"{_chamber}.{arm}";
|
|||
|
|
_device.CmdBlade1Extend = "0";
|
|||
|
|
_device.CmdBlade2Extend = "0";
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
//NOT SUPPORT with OFFSET
|
|||
|
|
//public class ExchangeHandlerEx : RobotMotionHandler
|
|||
|
|
//{
|
|||
|
|
// private ModuleName _chamber;
|
|||
|
|
// private int _slot;
|
|||
|
|
// private Hand _hand;
|
|||
|
|
|
|||
|
|
|
|||
|
|
// public ExchangeHandlerEx()
|
|||
|
|
// {
|
|||
|
|
// background = true;
|
|||
|
|
// }
|
|||
|
|
|
|||
|
|
// public override string package(params object[] args)
|
|||
|
|
// {
|
|||
|
|
// // $ <UNo> (<SeqNo>) MEXG <Sum> <CR>
|
|||
|
|
// _chamber = (ModuleName)args[0];
|
|||
|
|
// _slot = (int)args[1];
|
|||
|
|
// _hand = (Hand)args[2];
|
|||
|
|
// if (_hand == Hand.Blade1)
|
|||
|
|
// _hand = Hand.Blade2;
|
|||
|
|
// else
|
|||
|
|
// _hand = Hand.Blade1;
|
|||
|
|
|
|||
|
|
// updateBefore();
|
|||
|
|
|
|||
|
|
// int x = (int)args[3];
|
|||
|
|
// int y = (int)args[4];
|
|||
|
|
// int z = (int)args[5];
|
|||
|
|
// updateBefore();
|
|||
|
|
// if (_hand == Hand.Both)
|
|||
|
|
// {
|
|||
|
|
// return string.Format(",MTPO,{0},{1:D2},G{2},A,{3},{4},{5}",
|
|||
|
|
// RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
// RobotConvertor.chamberSlot2Slot(_chamber, _slot + 1),
|
|||
|
|
// RobotConvertor.hand2string(_hand),
|
|||
|
|
// RobotConvertor.Offset2String(x),
|
|||
|
|
// RobotConvertor.Offset2String(y),
|
|||
|
|
// RobotConvertor.Offset2String(z)
|
|||
|
|
// );
|
|||
|
|
// }
|
|||
|
|
|
|||
|
|
// return string.Format(",MTPO,{0},{1:D2},G{2},A,{3},{4},{5}",
|
|||
|
|
// RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
// RobotConvertor.chamberSlot2Slot(_chamber, _slot),
|
|||
|
|
// RobotConvertor.hand2string(_hand),
|
|||
|
|
// RobotConvertor.Offset2String(x),
|
|||
|
|
// RobotConvertor.Offset2String(y),
|
|||
|
|
// RobotConvertor.Offset2String(z));
|
|||
|
|
|
|||
|
|
// }
|
|||
|
|
|
|||
|
|
// private void updateBefore()
|
|||
|
|
// {
|
|||
|
|
// _device.Blade1Target = _chamber;
|
|||
|
|
// _device.Blade2Target = _chamber;
|
|||
|
|
// _device.Swap = true;
|
|||
|
|
// _device.PlaceBalde = _hand;
|
|||
|
|
// }
|
|||
|
|
|
|||
|
|
// protected override void update(string[] data)
|
|||
|
|
// {
|
|||
|
|
// if (_hand == Hand.Blade2)
|
|||
|
|
// {
|
|||
|
|
// WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleName.Robot, (int)Hand.Blade2);
|
|||
|
|
// WaferManager.Instance.WaferMoved(ModuleName.Robot, (int)Hand.Blade1, _chamber, _slot);
|
|||
|
|
// }
|
|||
|
|
// else
|
|||
|
|
// {
|
|||
|
|
// WaferManager.Instance.WaferMoved(_chamber, _slot, ModuleName.Robot, (int)Hand.Blade1);
|
|||
|
|
// WaferManager.Instance.WaferMoved(ModuleName.Robot, (int)Hand.Blade2, _chamber, _slot);
|
|||
|
|
// }
|
|||
|
|
|
|||
|
|
// _device.Swap = false;
|
|||
|
|
// _device.Blade1Target = ModuleName.Robot;
|
|||
|
|
// _device.Blade2Target = ModuleName.Robot;
|
|||
|
|
// }
|
|||
|
|
//}
|
|||
|
|
|
|||
|
|
public class RBWaferMappingHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
|
|||
|
|
public RBWaferMappingHandler()
|
|||
|
|
{
|
|||
|
|
background = true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//$ <UNo> (<SeqNo>) MMAP <TrsSt> <SlotNo> <Sum> <CR>
|
|||
|
|
// SlotNo: Slot number(2 bytes)
|
|||
|
|
//• "FF": When all slots specified
|
|||
|
|
//• ”01” to ”XX”: When cassette stage is specified by < TrsSt >
|
|||
|
|
//(The maximum value of "XX" is in ASCII code of the number of slots specified by parameter.)
|
|||
|
|
//• ”00”: When transfer stage or P / A stage specified by<TrsSt>
|
|||
|
|
// Note: Specific slot section definition cannot be performed.
|
|||
|
|
//• Reception rejected: Responds with the error code.
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
//_slot = (int)args[1];
|
|||
|
|
//_hand = (Hand)args[2];
|
|||
|
|
|
|||
|
|
updateBefore();
|
|||
|
|
return string.Format(",MMAP,{0},FF,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
private void updateBefore()
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = _chamber;
|
|||
|
|
_device.Blade2Target = _chamber;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
protected override void update(string[] data)
|
|||
|
|
{
|
|||
|
|
_device.Blade1Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
_device.Blade2Target = ModuleHelper.Converter(_device.Name);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class RBQueryWaferMapHandler : ITransferMsg
|
|||
|
|
{
|
|||
|
|
public bool background { get; protected set; }
|
|||
|
|
public bool evt { get { return false; } }
|
|||
|
|
public string deviceID { private get; set; }
|
|||
|
|
|
|||
|
|
public string _cmd = string.Empty;
|
|||
|
|
private ModuleName _chamber;
|
|||
|
|
public IDevice Robot { set { _device = (Robot)value; } }
|
|||
|
|
protected Robot _device;
|
|||
|
|
|
|||
|
|
public RBQueryWaferMapHandler()
|
|||
|
|
{
|
|||
|
|
background = false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
//$ <UNo> (<SeqNo>) RMAP <TrsSt> <SlotNo> <Sum> <CR>
|
|||
|
|
public string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
_chamber = (ModuleName)args[0];
|
|||
|
|
|
|||
|
|
return string.Format(",RMAP,{0},FF,",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber));
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool unpackage(string type, string[] items)
|
|||
|
|
{
|
|||
|
|
//$,<UNo>(,<SeqNo>),<Sts>,<Ackcd>,RMAP,<TrsSt>,<Slot>,
|
|||
|
|
//01:<Result1>…,N:<ResultN>(,<Sum>)<CR>
|
|||
|
|
//• UNo : Unit number (1 byte)
|
|||
|
|
//• SeqNo : Sequence number (None / 2 bytes)
|
|||
|
|
//• Sts : Status (2 bytes)
|
|||
|
|
//• Ackcd : Response code (4 bytes)
|
|||
|
|
//• TrsSt : Transfer station (3 bytes)
|
|||
|
|
//• Slot : Slot number (2 bytes)
|
|||
|
|
//• Result* : Mapping result (2 bytes each)
|
|||
|
|
//• “--” : No wafer detected.
|
|||
|
|
//• “OK” : Wafer inserted correctly.
|
|||
|
|
//• “CW” : Wafer inserted incorrectly (inclined).
|
|||
|
|
//• “DW” : Wafer inserted incorrectly (duplicated).
|
|||
|
|
//Note) Responds with the number of slots of the specified transfer station.
|
|||
|
|
//$,1,00,0000,RMAP,C02,00,
|
|||
|
|
//01:OK,02:DW,03:OK,04:CW,05:CW,06:OK,07:OK,08:--,09:OK,10:OK
|
|||
|
|
// No wafer: "0", Wafer: "1", Crossed:"2", Undefined: "?", Overlapping wafers: "W"
|
|||
|
|
if (items.Length > 5)
|
|||
|
|
{
|
|||
|
|
string data = items[5];
|
|||
|
|
StringBuilder sb = new StringBuilder();
|
|||
|
|
|
|||
|
|
|
|||
|
|
for (int i = 0; i < data.Length; i += 4)
|
|||
|
|
{
|
|||
|
|
string value = data.Substring(i + 2, 2);
|
|||
|
|
switch (value)
|
|||
|
|
{
|
|||
|
|
case "--":
|
|||
|
|
sb.Append("0");
|
|||
|
|
break;
|
|||
|
|
case "OK":
|
|||
|
|
sb.Append("1");
|
|||
|
|
break;
|
|||
|
|
case "CW":
|
|||
|
|
sb.Append("2");
|
|||
|
|
break;
|
|||
|
|
case "DW":
|
|||
|
|
sb.Append("W");
|
|||
|
|
break;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_device.NotifySlotMapResult(_chamber, sb.ToString());
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return !background;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
// Transfer speed level setting
|
|||
|
|
public class RbSetSpeedHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
private int _speed = 0;
|
|||
|
|
public RbSetSpeedHandler()
|
|||
|
|
{
|
|||
|
|
background = false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
_speed = (int)args[0];
|
|||
|
|
//$ < UNo > (< SeqNo >) SSLV<Level> < Sum > < CR >
|
|||
|
|
///
|
|||
|
|
/// • ’H’ : High speed level
|
|||
|
|
//• ’M’ : Medium speed level
|
|||
|
|
//• ’L’ : Low speed level
|
|||
|
|
///
|
|||
|
|
if(_speed == 1)
|
|||
|
|
return string.Format(",SSLV,H,");
|
|||
|
|
else if (_speed == 2)
|
|||
|
|
return string.Format(",SSLV,M,");
|
|||
|
|
|
|||
|
|
return string.Format(",SSLV,L,");
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
// Transfer speed level setting
|
|||
|
|
public class RbSetOffsetHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
public RbSetOffsetHandler()
|
|||
|
|
{
|
|||
|
|
background = false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
//$ <UNo> (<SeqNo>) SOFS <Mem> <TrsSt> <Offset1> <Offset2> … <Offset5> <Sum> <CR>
|
|||
|
|
///Mem: Memory (1 byte) ‘V’: Volatile memory ‘N’: Non -volatile memory
|
|||
|
|
//• TrsSt: Transfer station(2 bytes)
|
|||
|
|
//• "C1" to "C8": When cassette stage specified
|
|||
|
|
//• "S1" to "SC": When transfer stage specified
|
|||
|
|
//• "P1" to “P2”: When P/ A stage specified
|
|||
|
|
//Note: P2 station is effective only when two or more PA stations exist.
|
|||
|
|
//• Offset: Transfer offset(4 bytes each)
|
|||
|
|
//• Offset1: Downward offset
|
|||
|
|
//• Offset2: Upward offset
|
|||
|
|
//• Offset3: Offset in the extending direction(with the edge - grip - type fork)
|
|||
|
|
//• Offset4: Offset in the retracting direction(with the edge - grip - type fork)
|
|||
|
|
//• Offset5: Put downward offset(with the edge - grip - type fork)
|
|||
|
|
//Note: Offset3 to Offset5 are omitted when the fork type is not the edge - grip type.
|
|||
|
|
//• About Offset3 to Offset5, it is omissible with a parameter setup.
|
|||
|
|
//• Specified in the range between "-999" and "9999"(resolution: 0.01[mm])
|
|||
|
|
//• If a value is less than specified digits, fill the higher digit with ‘0’ so that the field always has specfied digits.
|
|||
|
|
ModuleName _chamber = (ModuleName)args[0];
|
|||
|
|
int down = (int)args[1];
|
|||
|
|
int up = (int)args[2];
|
|||
|
|
int extend = (int)args[2];
|
|||
|
|
int retract = (int)args[2];
|
|||
|
|
int pdown = (int)args[2];
|
|||
|
|
|
|||
|
|
return string.Format(",SOFS,V，{0},{1:D4},{2:D4},{3:D4},{4:D4},",
|
|||
|
|
RobotConvertor.chamber2staion(_chamber),
|
|||
|
|
down,
|
|||
|
|
up,
|
|||
|
|
extend,
|
|||
|
|
retract,
|
|||
|
|
pdown
|
|||
|
|
);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class RBQueryStateHandler : ITransferMsg
|
|||
|
|
{
|
|||
|
|
public bool background { get; protected set; }
|
|||
|
|
public bool evt { get { return false; } }
|
|||
|
|
public string deviceID { private get; set; }
|
|||
|
|
|
|||
|
|
public string _cmd = string.Empty;
|
|||
|
|
|
|||
|
|
public IDevice Robot { set { _device = (Robot)value; } }
|
|||
|
|
protected Robot _device;
|
|||
|
|
public RBQueryStateHandler()
|
|||
|
|
{
|
|||
|
|
background = false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
//$ <UNo> (<SeqNo>) <StsN> <Ackcd> <Sum> <CR>
|
|||
|
|
//$ <UNo> (<SeqNo>) <StsN> <Ackcd> <Errcd> <Status1> … <Status4> <Sum> <CR>
|
|||
|
|
|
|||
|
|
public string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
return ",RSTS,";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool unpackage(string type, string[] items)
|
|||
|
|
{
|
|||
|
|
//status1 bit 0 --blade 1 wafer status 0=wafer present, 1=wafer absent. Here balde 1 is upper
|
|||
|
|
//status1 bit 1 --blade 2 wafer status 0=wafer present, 1=wafer absent. Here balde 2 is lower
|
|||
|
|
//$,1,10,A0,0000,29D05000 status1 = 5 measn blade1 has wafer, blade2 no wafer
|
|||
|
|
int status1 = 0;
|
|||
|
|
if (items!=null && items.Length >= 6 && items[5].Length > 4)
|
|||
|
|
{
|
|||
|
|
var content = items[5];
|
|||
|
|
var status1Bit = content[4];
|
|||
|
|
if (status1Bit >= 'A' && status1Bit <= 'F')
|
|||
|
|
status1 = status1Bit - 'A' + 10;
|
|||
|
|
else if (status1Bit >= 'a' && status1Bit <= 'f')
|
|||
|
|
status1 = status1Bit - 'a' + 10;
|
|||
|
|
else
|
|||
|
|
int.TryParse(status1Bit.ToString(), out status1);
|
|||
|
|
|
|||
|
|
//Here balde 1 is upper,balde 2 is lower
|
|||
|
|
((Robot)_device).NotifyWaferPresent(Hand.Blade2, (status1&0x0001) == 0 ? WaferStatus.Normal : WaferStatus.Empty);
|
|||
|
|
((Robot)_device).NotifyWaferPresent(Hand.Blade1, (status1&0x0002) == 0 ? WaferStatus.Normal : WaferStatus.Empty);
|
|||
|
|
}
|
|||
|
|
return !background;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class RbEventHandler : ITransferMsg
|
|||
|
|
{
|
|||
|
|
public bool background { get { return false; } }
|
|||
|
|
public bool evt { get { return true; } }
|
|||
|
|
public string deviceID { private get; set; }
|
|||
|
|
|
|||
|
|
public string _cmd = string.Empty;
|
|||
|
|
|
|||
|
|
public IDevice Robot { set { _device = (Robot)value; } }
|
|||
|
|
protected Robot _device;
|
|||
|
|
public RbEventHandler()
|
|||
|
|
{
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
//$,<UNo>(,<SeqNo>),RSTS(,<Sum>)<CR>
|
|||
|
|
|
|||
|
|
public string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
return "";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool unpackage(string type, string[] items)
|
|||
|
|
{
|
|||
|
|
string evtType = items[3];
|
|||
|
|
if (evtType.Equals(ProtocolTag.resp_evt_error))
|
|||
|
|
{
|
|||
|
|
int error = Convert.ToInt32(items[5], 16);
|
|||
|
|
_device.ErrorCode = error;
|
|||
|
|
if (error > 0)
|
|||
|
|
_device.LastErrorCode = error;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public class RBQueryPositionHandler : ITransferMsg
|
|||
|
|
{
|
|||
|
|
public bool background { get; protected set; }
|
|||
|
|
public bool evt { get { return false; } }
|
|||
|
|
public string deviceID { private get; set; }
|
|||
|
|
|
|||
|
|
public string _cmd = string.Empty;
|
|||
|
|
|
|||
|
|
public IDevice Robot { set { _device = (Robot)value; } }
|
|||
|
|
protected Robot _device;
|
|||
|
|
|
|||
|
|
public RBQueryPositionHandler()
|
|||
|
|
{
|
|||
|
|
background = false;
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
//$ <UNo> (<SeqNo>) RPOS <TrsSt> <Fork> <Posture> <Sum> <CR>
|
|||
|
|
// • TrsSt: Transfer station(2 bytes)
|
|||
|
|
//• "C1" to "C8": When the lowest-layer position of the cassette stage specified
|
|||
|
|
//• "H1" to "H8": When the highest-layer position of the cassette stage specified
|
|||
|
|
//• "S1" to "SC": When transfer stage specified
|
|||
|
|
//• "P1" to “P2”: When P/A stage specified
|
|||
|
|
//Note: P2 station is effective only when two or more PA stations exist.
|
|||
|
|
//• "FF": When current position specified
|
|||
|
|
//• "FE": When specify the feedback of present location
|
|||
|
|
//<Three-axis pre-aligner, Edge-grip pre-aligner>
|
|||
|
|
//• "FF": When current position specified
|
|||
|
|
//• "FE": When specify the feedback of present location
|
|||
|
|
//• Fork: Fork specified(1 byte)
|
|||
|
|
//• ‘A’: When extension axis 1 (Blade 1) specified
|
|||
|
|
//• ‘B’: When extension axis 2 (Blade 2) specified(for dual-arm manipulator and dual blade linear motion
|
|||
|
|
//manipulator only)
|
|||
|
|
//Note: Fixed to ‘A’ when the current position and feedback of present location are specified at<TrsSt>
|
|||
|
|
public string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
return ",RPOS,FF,A,A,";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool unpackage(string type, string[] items)
|
|||
|
|
{
|
|||
|
|
//$ <UNo> (<SeqNo>) <StsN> <Ackcd> <Value1> … <ValueN> <Sum> <CR>
|
|||
|
|
// • ValueN: Coordinate(8 bytes each)
|
|||
|
|
//• Specified in the range as follows (The resolution is 0.01[mm] or[deg])
|
|||
|
|
//8 Byte: between "-9999999" ~"99999999"
|
|||
|
|
//• If a value is less than specified digits, fill the higher digit with ‘0’ so that the field always has specfied digits.
|
|||
|
|
//• The sign is added to the highest digit.
|
|||
|
|
//• The number of “ValueN” depends on the unit type.
|
|||
|
|
//Responds with as many axis numbers as the specified unit has.See the table bellow.
|
|||
|
|
//Unit Value1 Value2 Value3 Value4 Value5 Value6
|
|||
|
|
//Single - arm manipulator Rotation //Elevation //(Track
|
|||
|
|
//Dual - arm manipulator Rotation //Extension //axis 1 //axis 2 //(Track
|
|||
|
|
|
|||
|
|
if (items.Length > 7)
|
|||
|
|
{
|
|||
|
|
_device.Rotation = int.Parse(items[7]);
|
|||
|
|
_device.Extension = int.Parse(items[8]);
|
|||
|
|
_device.Wrist1 = int.Parse(items[9]);
|
|||
|
|
_device.Wrist2 = int.Parse(items[10]);
|
|||
|
|
_device.Evevation = int.Parse(items[11]);
|
|||
|
|
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return !background;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
public class RbSetWaferSizeHandler : RobotMotionHandler
|
|||
|
|
{
|
|||
|
|
public RbSetWaferSizeHandler()
|
|||
|
|
{
|
|||
|
|
background = false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
////$ < UNo > (< SeqNo >) SPRM<Type> < PrmNo > < Value > < Sum > < CR >
|
|||
|
|
//// UNo: Unit No. (1 Byte)
|
|||
|
|
//// ‘1’ : RB
|
|||
|
|
//// ‘2’ : PA
|
|||
|
|
//// SeqNo: Sequence No. (None / 1 / 2 / 3 Byte)
|
|||
|
|
//// Type: Parameter type(3 Byte)
|
|||
|
|
//// ”CIU” : Common integral number parameter
|
|||
|
|
//// ”CRU” : Common real number parameter
|
|||
|
|
//// ”CRS” : Common real number system parameter
|
|||
|
|
//// ”UIU” : Unit integral number parameter
|
|||
|
|
//// ”URU” : Unit real number parameter
|
|||
|
|
//// ”URS” : Unit real number system parameter
|
|||
|
|
//// PrmNo: Parameter No. (4 Byte)
|
|||
|
|
//// Designate in the range of ”0000” - ”9999”
|
|||
|
|
//// In case of less than 4 - digit, put 0 in front of the numbers. Always designate numbers in
|
|||
|
|
////4 - digit format.
|
|||
|
|
//// Value: Parameter value(12 Byte)
|
|||
|
|
//// Designate in the range of ”-99999999999” - ”999999999999” (Resolving power of real
|
|||
|
|
////number parameter is 0.0001) In case of less than 12 - digit, put 0 in front of the numbers. Always designate numbers in
|
|||
|
|
////12 - digit format.
|
|||
|
|
//// Simbol is added on most significant bit
|
|||
|
|
////[Response format](Response message) $ < UNo > (< SeqNo >) < StsN > < Ackcd > < Sum > < CR >
|
|||
|
|
//// UNo: Unit No.(1 Byte)
|
|||
|
|
//// ‘1’ : RB
|
|||
|
|
//// ‘2’ : PA
|
|||
|
|
//// SeqNo: Sequence No. (None / 1 / 2 / 3 Byte)
|
|||
|
|
//// StsN: Status(1 / 2 Byte)
|
|||
|
|
//// Ackcd: Response code(4 Byte)
|
|||
|
|
//// In case of reception normally Response ”0000”
|
|||
|
|
//// Incase of reception denial Response error code
|
|||
|
|
///
|
|||
|
|
//SPRMCRS0000 000000625000 68
|
|||
|
|
int cmd = (int)args[0];
|
|||
|
|
WaferSize size = (WaferSize)args[1];
|
|||
|
|
|
|||
|
|
string package = "";
|
|||
|
|
switch (cmd)
|
|||
|
|
{
|
|||
|
|
case 0x0000:
|
|||
|
|
package = string.Format("SPRM,CRS,0000,{0:D12},",
|
|||
|
|
RobotConvertor.WaferSize2Int(size)
|
|||
|
|
);
|
|||
|
|
break;
|
|||
|
|
|
|||
|
|
case 0x0114:
|
|||
|
|
package = string.Format("SPRM,URS,0114,{0:D12},",
|
|||
|
|
RobotConvertor.MappingOffset2Int(size)
|
|||
|
|
);
|
|||
|
|
break;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
return package;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
/*
|
|||
|
|
public class RBQueryWaferSizeHandler : ITransferMsg
|
|||
|
|
{
|
|||
|
|
public bool background { get; protected set; }
|
|||
|
|
public bool evt { get { return false; } }
|
|||
|
|
public string deviceID { private get; set; }
|
|||
|
|
|
|||
|
|
public string _cmd = string.Empty;
|
|||
|
|
|
|||
|
|
public IDevice Robot { set { _device = (Robot)value; } }
|
|||
|
|
protected Robot _device;
|
|||
|
|
public RBQueryWaferSizeHandler()
|
|||
|
|
{
|
|||
|
|
background = false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
//$ <UNo> (<SeqNo>) <StsN> <Ackcd> <Sum> <CR>
|
|||
|
|
//$ <UNo> (<SeqNo>) <StsN> <Ackcd> <Errcd> <Status1> … <Status4> <Sum> <CR>
|
|||
|
|
|
|||
|
|
public string package(params object[] args)
|
|||
|
|
{
|
|||
|
|
return ",RSTS,";
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool unpackage(string type, string[] items)
|
|||
|
|
{
|
|||
|
|
//status1 bit 0 --blade 1 wafer status 0=wafer present, 1=wafer absent. Here balde 1 is upper
|
|||
|
|
//status1 bit 1 --blade 2 wafer status 0=wafer present, 1=wafer absent. Here balde 2 is lower
|
|||
|
|
//$,1,10,A0,0000,29D05000 status1 = 5 measn blade1 has wafer, blade2 no wafer
|
|||
|
|
int status1 = 0;
|
|||
|
|
if (items != null && items.Length >= 6 && items[5].Length > 4)
|
|||
|
|
{
|
|||
|
|
var content = items[5];
|
|||
|
|
var status1Bit = content[4];
|
|||
|
|
if (status1Bit >= 'A' && status1Bit <= 'F')
|
|||
|
|
status1 = status1Bit - 'A' + 10;
|
|||
|
|
else if (status1Bit >= 'a' && status1Bit <= 'f')
|
|||
|
|
status1 = status1Bit - 'a' + 10;
|
|||
|
|
else
|
|||
|
|
int.TryParse(status1Bit.ToString(), out status1);
|
|||
|
|
|
|||
|
|
//Here balde 1 is upper,balde 2 is lower
|
|||
|
|
((Robot)_device).NotifyWaferPresent(Hand.Blade2, (status1 & 0x0001) == 0 ? WaferStatus.Normal : WaferStatus.Empty);
|
|||
|
|
((Robot)_device).NotifyWaferPresent(Hand.Blade1, (status1 & 0x0002) == 0 ? WaferStatus.Normal : WaferStatus.Empty);
|
|||
|
|
}
|
|||
|
|
return !background;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
*/
|
|||
|
|
}
|