Sic.Framework/MECF.Framework.Common/MECF/Framework/Common/Equipment/ModuleName.cs

266 lines
3.2 KiB
C#
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using System;
using System.Runtime.Serialization;
namespace MECF.Framework.Common.Equipment
{
[Serializable]
[DataContract]
public enum ModuleName
{
[EnumMember]
System,
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[EnumMember]
LP1,
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[EnumMember]
LP2,
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[EnumMember]
LP3,
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[EnumMember]
LP4,
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[EnumMember]
LP5,
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[EnumMember]
LP6,
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[EnumMember]
LP7,
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[EnumMember]
LP8,
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[EnumMember]
LP9,
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[EnumMember]
LP10,
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[EnumMember]
VaccumRobot,
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[EnumMember]
LoadRobot,
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[EnumMember]
EfemRobot,
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[EnumMember]
TMRobot,
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[EnumMember]
Upender,
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[EnumMember]
EFEM,
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[EnumMember]
Aligner,
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[EnumMember]
Aligner1,
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[EnumMember]
Aligner2,
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[EnumMember]
AlignerA,
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[EnumMember]
AlignerB,
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[EnumMember]
LL1,
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[EnumMember]
LL2,
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[EnumMember]
LL3,
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[EnumMember]
LL4,
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[EnumMember]
LL5,
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[EnumMember]
LL6,
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[EnumMember]
LL7,
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[EnumMember]
LL8,
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[EnumMember]
LLA,
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[EnumMember]
LLB,
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[EnumMember]
LLC,
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[EnumMember]
LLD,
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[EnumMember]
LLE,
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[EnumMember]
LLF,
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[EnumMember]
LLG,
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[EnumMember]
LLH,
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[EnumMember]
VCE1,
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[EnumMember]
VCE2,
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[EnumMember]
VCEA,
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[EnumMember]
VCEB,
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[EnumMember]
TM,
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[EnumMember]
Cooling1,
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[EnumMember]
Cooling2,
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[EnumMember]
Buffer,
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[EnumMember]
Buffer1,
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[EnumMember]
Buffer2,
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[EnumMember]
Buffer3,
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[EnumMember]
Buffer4,
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[EnumMember]
Buffer5,
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[EnumMember]
Buffer6,
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[EnumMember]
PM,
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[EnumMember]
PM1,
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[EnumMember]
PM2,
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[EnumMember]
PM3,
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[EnumMember]
PM4,
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[EnumMember]
PM5,
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[EnumMember]
PM6,
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[EnumMember]
PM7,
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[EnumMember]
PM8,
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[EnumMember]
PMA,
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[EnumMember]
PMB,
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[EnumMember]
PMC,
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[EnumMember]
PMD,
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[EnumMember]
Spin1L,
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[EnumMember]
Spin1H,
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[EnumMember]
Spin2L,
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[EnumMember]
Spin2H,
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[EnumMember]
Spin3L,
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[EnumMember]
Spin3H,
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[EnumMember]
Spin4L,
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[EnumMember]
Spin4H,
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[EnumMember]
Spin5L,
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[EnumMember]
Spin5H,
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[EnumMember]
Spin6L,
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[EnumMember]
Spin6H,
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[EnumMember]
LDULD,
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[EnumMember]
BufferOut,
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[EnumMember]
BufferIn,
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[EnumMember]
Dryer,
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[EnumMember]
QDR,
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[EnumMember]
Robot,
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[EnumMember]
Handler,
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[EnumMember]
WIDReader1,
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[EnumMember]
WIDReader2,
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[EnumMember]
LL1IN,
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[EnumMember]
LL1OUT,
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[EnumMember]
LL2IN,
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[EnumMember]
LL2OUT,
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[EnumMember]
TurnOverStation,
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[EnumMember]
Host,
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[EnumMember]
PTR,
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[EnumMember]
Cooling,
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[EnumMember]
Cassette,
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[EnumMember]
CassInnerL,
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[EnumMember]
CassInnerR,
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[EnumMember]
CassOuterL,
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[EnumMember]
CassOuterR,
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[EnumMember]
CassAL,
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[EnumMember]
CassAR,
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[EnumMember]
CassBL,
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[EnumMember]
CassBR,
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[EnumMember]
Shuttle,
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[EnumMember]
CoolingBuffer1,
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[EnumMember]
CoolingBuffer2,
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[EnumMember]
LoadLock,
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[EnumMember]
SMIFLeft,
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[EnumMember]
SMIFRight,
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[EnumMember]
SMIFA,
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[EnumMember]
SMIFB,
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[EnumMember]
SPM1,
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[EnumMember]
SPM2,
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[EnumMember]
BRM1,
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[EnumMember]
BRM2,
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[EnumMember]
CCU,
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[EnumMember]
Buffer7,
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[EnumMember]
Buffer8,
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[EnumMember]
TurnStation,
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[EnumMember]
UnLoad,
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[EnumMember]
WaferRobot,
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[EnumMember]
TrayRobot,
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[EnumMember]
Load,
/// <summary>
/// δ<><CEB4><EFBFBD><EFBFBD><EFBFBD><EFBFBD>ģ<EFBFBD><C4A3><EFBFBD><EFBFBD><EFBFBD>ơ<EFBFBD>
/// </summary>
[EnumMember]
UnDefined = int.MaxValue
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}
}