527 lines
16 KiB
C#
527 lines
16 KiB
C#
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using Aitex.Core.Common;
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using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.OperationCenter;
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using Aitex.Core.RT.SCCore;
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using Aitex.Core.Util;
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using MECF.Framework.Common.Communications;
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using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Text;
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namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.HwAligner
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{
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public class HwAlignerGuide : BaseDevice, IConnection, IDevice
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{
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private HwAlignerGuideConnection _connection;
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private bool _activeMonitorStatus;
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private R_TRIG _trigCommunicationError = new R_TRIG();
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private R_TRIG _trigRetryConnect = new R_TRIG();
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private bool bIsDisconnect = false;
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private PeriodicJob _thread;
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private LinkedList<HandlerBase> _lstHandler = new LinkedList<HandlerBase>();
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private object _locker = new object();
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private bool _enableLog = true;
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private string _scRoot;
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public bool HaveWafer
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{
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get; set;
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}
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public string Address
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{
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get; set;
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}
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public bool IsConnected
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{
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get
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{
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return _connection != null && _connection.IsConnected;
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}
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}
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private bool isBusy;
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public bool IsBusy
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{
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get
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{
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return isBusy || _lstHandler.Count > 0;
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}
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}
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public string WaferSize { get; set; }
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public string WaferType { get; set; }
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public string WaferMaterial { get; set; }
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public string WaferOrientation { get; set; }
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public bool Connect()
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{
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return true;
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}
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public bool Disconnect()
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{
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return true;
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}
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public HwAlignerGuide(string module, string scRoot, string name) : base(module, name, name, name)
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{
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_scRoot = scRoot;
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_activeMonitorStatus = true;
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}
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public bool Initialize()
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{
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string portName = SC.GetStringValue($"{Name}.Address");
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Address = portName;
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_enableLog = SC.GetValue<bool>($"{Name}.EnableLogMessage");
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_connection = new HwAlignerGuideConnection(portName);
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_connection.EnableLog(_enableLog);
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if (_connection.Connect())
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{
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EV.PostInfoLog(Module, $"{Module}.{Name} connected");
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}
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isBusy = false;
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_thread = new PeriodicJob(500, OnTimer, $"{Name} MonitorHandler", true);
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//
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SetData();
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SetOP();
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IniUIData();
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//
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ConnectionManager.Instance.Subscribe($"{Name}", this);
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return true;
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}
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private void IniUIData()
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{
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WaferSize = SC.GetStringValue("HiWinAligner.WaferSize");
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WaferType = SC.GetStringValue("HiWinAligner.WaferType");
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WaferMaterial = SC.GetStringValue("HiWinAligner.WaferMaterial");
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WaferOrientation = SC.GetStringValue("HiWinAligner.WaferOrientation");
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}
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private void SetData()
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{
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//DATA.Subscribe($"{Module}.{Name}.HwisBusy", () => isBusy);
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DATA.Subscribe($"{Module}.{Name}.HwHaveWafer", () => HaveWafer);
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DATA.Subscribe($"{Module}.{Name}.WaferSize", () => WaferSize);
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DATA.Subscribe($"{Module}.{Name}.WaferType", () => WaferType);
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DATA.Subscribe($"{Module}.{Name}.WaferMaterial", () => WaferMaterial);
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DATA.Subscribe($"{Module}.{Name}.WaferOrientation", () => WaferOrientation);
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}
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/// <summary>
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/// 设置操作
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/// </summary>
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private void SetOP()
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{
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//------------------------------------------------------------
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//参数保存
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OP.Subscribe($"{Module}.{Name}.HwSaveParameters", (cmd, param) =>
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{
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Set("SPS", "SPS");
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return true;
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});
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//读取/设定晶圆尺寸
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OP.Subscribe($"{Module}.{Name}.HwWaferSize", (cmd, param) =>
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{
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Set("WSZ","WSZ" + " " + param[0]);
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GetParameterForUI("WaferSize", param[0].ToString());
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return true;
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});
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//晶圆种类
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OP.Subscribe($"{Module}.{Name}.HwWaferType", (cmd, param) =>
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{
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Set("_WT","_WT" + " " + param[0]);
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GetParameterForUI("WaferType", param[0].ToString());
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return true;
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});
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//寻边材质
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OP.Subscribe($"{Module}.{Name}.HwWaferMaterial", (cmd, param) =>
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{
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Set("GLM", "GLM" + " " + param[0]);
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GetParameterForUI("WaferMaterial", param[0].ToString());
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return true;
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});
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//晶圆方向
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OP.Subscribe($"{Module}.{Name}.HwWaferOrientation", (cmd, param) =>
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{
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Set("FWO", "FWO" + " " + param[0]);
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GetParameterForUI("WaferOrientation", param[0].ToString());
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return true;
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});
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//------------------------------------------------------------
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//原点复归
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OP.Subscribe($"{Module}.{Name}.HwHome", (cmd, param) =>
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{
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Set("HOM", "HOM");
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return true;
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});
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//晶圆确认
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OP.Subscribe($"{Module}.{Name}.HwCheckWafer", (cmd, param) =>
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{
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this.HaveWafer = false;
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Set("DOC", "DOC");
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return true;
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});
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//开启真空
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OP.Subscribe($"{Module}.{Name}.HwVacuumOn", (cmd, param) =>
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{
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Set("CVN", "CVN");
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return true;
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});
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//寻边补正
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OP.Subscribe($"{Module}.{Name}.HwAlign", (cmd, param) =>
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{
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Set("BAL", "BAL");
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return true;
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});
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//关闭真空
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OP.Subscribe($"{Module}.{Name}.HwVacuumOff", (cmd, param) =>
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{
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Set("CVF", "CVF");
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return true;
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});
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//读取真空值
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OP.Subscribe($"{Module}.{Name}.HwCVD", (cmd, param) =>
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{
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Set("CVD", "CVD");
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return true;
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});
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//移至测量中心点
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OP.Subscribe($"{Module}.{Name}.HwMoveToMeasurement", (cmd, param) =>
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{
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Set("MTM", "MTM");
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return true;
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});
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//读取最后错误信息
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OP.Subscribe($"{Module}.{Name}.HwPER", (cmd, param) =>
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{
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Set("PER", "PER");
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return true;
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});
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//清除报警
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OP.Subscribe($"{Module}.{Name}.HwClearError", (cmd, param) =>
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{
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Set("ERS", "ERS");
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return true;
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});
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//马达激磁
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OP.Subscribe($"{Module}.{Name}.HwSetMagnetizerEnable", (cmd, param) =>
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{
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Set("SME11","SME11");
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return true;
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});
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//Not Used------------------------------------------------------------
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//相对位移
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OP.Subscribe($"{Module}.{Name}.HwMVR", (cmd, param) =>
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{
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Set("MVR","MVR");
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return true;
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});
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//
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OP.Subscribe($"{Module}.{Name}.HwAbort", (cmd, param) =>
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{
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Abort();
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return true;
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});
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}
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public void Abort()
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{
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}
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public void GetParameterForUI(string _name , string data)
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{
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switch (_name)
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{
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case "WaferSize":
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WaferSize = data;
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break;
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case "WaferType":
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WaferType = data;
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break;
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case "WaferMaterial":
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WaferMaterial = data;
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break;
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case "WaferOrientation":
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WaferOrientation = data;
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break;
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}
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SC.SetItemValue($"{Name}.{_name}" , data);
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}
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//--------------------------------------------------------
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public void Set(string sName, string sCmd, int iTimeOut = 30)
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{
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_lstHandler.Clear();
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lock (_locker)
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{
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_lstHandler.AddLast(new HwAlignerGuideSetAHandler(this, sName, sCmd, iTimeOut));
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}
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}
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private void NotifyError(string errorInfo)
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{
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string _errorInfo = $"Hiwin Aligner Command :" + errorInfo;
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EV.PostAlarmLog(Module, _errorInfo);
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LOG.Write($"{Module}.{Name} " + _errorInfo);
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}
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private void NotifyWarning(string warningInfo)
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{
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string _warningInfo = $"Hiwin Aligner Command :" + warningInfo;
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EV.PostWarningLog(Module, _warningInfo);
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LOG.Write($"{Module}.{Name} " + _warningInfo);
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}
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//--------------------------------------------------------
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public int _connecteTimes { get; set; }
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private bool OnTimer()
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{
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try
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{
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_connection.MonitorTimeout();
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//若断，重连
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if ((!_connection.IsConnected) || _connection.IsCommunicationError || this.bIsDisconnect)
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{
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_trigRetryConnect.CLK = this.bIsDisconnect;
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//
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if (_connection.Connect())
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{
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this.bIsDisconnect = false;
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//
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EV.PostInfoLog(Module, $"{Module}.{Name} connected");
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LOG.Write($"{Module}.{Name} connected");
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}
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else
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{
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if (_trigRetryConnect.Q)
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{
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EV.PostInfoLog(Module, $"Trying to connect {Module}.{Name} with address: {_connection.Address}");
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LOG.Write($"Trying to connect {Module}.{Name} with address: {_connection.Address}");
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}
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}
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}
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//处理命令队列
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HandlerBase handler = null;
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if (!_connection.IsBusy)
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{
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lock (_locker)
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{
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if (_lstHandler.Count == 0 && _activeMonitorStatus && !isBusy)
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{
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//Query();
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}
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if (_lstHandler.Count > 0)
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{
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handler = _lstHandler.First.Value;
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_lstHandler.RemoveFirst();
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}
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}
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if (handler != null)
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{
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if (!this.isBusy)
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{
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this.isBusy = true;
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_connection.Execute(handler);
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}
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}
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}
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//
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return true;
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}
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catch (Exception ex)
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{
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LOG.Write(ex);
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}
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return true;
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}
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internal void NoteError()
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{
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}
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public void Monitor()
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{
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try
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{
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_connection.EnableLog(_enableLog);
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//if (_connecteTimes < 4) return;
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_trigCommunicationError.CLK = _connection.IsCommunicationError;
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if (_trigCommunicationError.Q)
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|
|
{
|
|||
|
|
EV.PostAlarmLog(Module, $"{Module}.{Name} communication error, {_connection.LastCommunicationError}");
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
catch (Exception ex)
|
|||
|
|
{
|
|||
|
|
LOG.Write(ex);
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void Terminate()
|
|||
|
|
{
|
|||
|
|
try
|
|||
|
|
{
|
|||
|
|
if (_connection != null)
|
|||
|
|
{
|
|||
|
|
_connection.Disconnect();
|
|||
|
|
_connection = null;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
catch (Exception ex)
|
|||
|
|
{
|
|||
|
|
LOG.Write(ex);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public void Reset()
|
|||
|
|
{
|
|||
|
|
this.bIsDisconnect = _connection.IsCommunicationError;
|
|||
|
|
_connecteTimes = 0;
|
|||
|
|
_connection.SetCommunicationError(false, "");
|
|||
|
|
_enableLog = SC.GetValue<bool>($"{Name}.EnableLogMessage");
|
|||
|
|
|
|||
|
|
_trigCommunicationError.RST = true;
|
|||
|
|
_trigRetryConnect.RST = true;
|
|||
|
|
|
|||
|
|
_lstHandler.Clear();
|
|||
|
|
this.isBusy = false;
|
|||
|
|
this.HaveWafer = false; //需要重新检测wafer
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public bool PraseDataA(string name, byte[] buffer,out bool bResult)
|
|||
|
|
{
|
|||
|
|
bResult = true;
|
|||
|
|
string sAnswer = Encoding.ASCII.GetString(buffer);
|
|||
|
|
if (sAnswer.Contains("END"))
|
|||
|
|
{
|
|||
|
|
if(name.Contains("DOC"))
|
|||
|
|
{
|
|||
|
|
if ( sAnswer.Contains("1\r\nEND"))
|
|||
|
|
{
|
|||
|
|
this.HaveWafer = true;
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
this.HaveWafer = false;
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
if(name.Contains("CVD"))
|
|||
|
|
{
|
|||
|
|
if(sAnswer != null)
|
|||
|
|
{
|
|||
|
|
string vacValue = sAnswer.Replace("\r\nEND\r\n", "");
|
|||
|
|
NotifyWarning($"the aligner vacuum value is {vacValue}");
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
if (name.Contains("PER"))
|
|||
|
|
{
|
|||
|
|
if (sAnswer != null)
|
|||
|
|
{
|
|||
|
|
string errCode = sAnswer.Replace("\r\nEND\r\n", "");
|
|||
|
|
NotifyWarning($"the aligner lastest err code is {errCode}");
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
this.isBusy = false;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
else if (sAnswer.Contains("ERR"))
|
|||
|
|
{
|
|||
|
|
lock (_locker)
|
|||
|
|
{
|
|||
|
|
_lstHandler.Clear();
|
|||
|
|
}
|
|||
|
|
//可以根据命令名称分类错误类型，也可以直接处理错误编码
|
|||
|
|
if(name.Contains("HOM"))
|
|||
|
|
{
|
|||
|
|
//do nothing
|
|||
|
|
}
|
|||
|
|
//这里直接处理错误编码
|
|||
|
|
if(sAnswer.Contains("0101"))
|
|||
|
|
{
|
|||
|
|
NotifyError("原点复归动作异常。");
|
|||
|
|
}
|
|||
|
|
if (sAnswer.Contains("0301"))
|
|||
|
|
{
|
|||
|
|
NotifyError("发生开启真空后，压力感测器侦测负压状态低于-50kPa。");
|
|||
|
|
}
|
|||
|
|
if (sAnswer.Contains("0401"))
|
|||
|
|
{
|
|||
|
|
NotifyError("执行寻边指令(BAL)前，X轴马达位置不在测量中心点。");
|
|||
|
|
}
|
|||
|
|
if (sAnswer.Contains("0402"))
|
|||
|
|
{
|
|||
|
|
NotifyError("执行寻边指令(BAL)前，Y轴马达位置不在测量中心点。");
|
|||
|
|
}
|
|||
|
|
if (sAnswer.Contains("0403"))
|
|||
|
|
{
|
|||
|
|
NotifyError("在执行一次搜寻过程中，动作失败，θ轴马达超过控制位置。");
|
|||
|
|
}
|
|||
|
|
if (sAnswer.Contains("0412"))
|
|||
|
|
{
|
|||
|
|
NotifyError("寻边指令中,负压(真空)异常.");
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
isBusy = false;
|
|||
|
|
return true;
|
|||
|
|
}
|
|||
|
|
else
|
|||
|
|
{
|
|||
|
|
isBusy = true;
|
|||
|
|
|
|||
|
|
return false;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
|
|||
|
|
}
|
|||
|
|
}
|