using Aitex.Core.RT.Device; using MECF.Framework.Common.Equipment; namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.EFEM { public class EFEM : BaseDevice, IDevice, IEFEM { public virtual double AtmPressureBase { get; } public virtual bool IsMapped { get; set; } public EFEM(string module) : base(module, module, module, module) { } public virtual bool Initialize() { return true; } public void Monitor() { } public void Terminate() { } public virtual void Reset() { } public virtual bool IsEnableTransferWafer(out string reason) { reason = ""; return true; } public virtual bool IsEnableMapWafer(out string reason) { reason = ""; return true; } public virtual void ConfirmWaferPresent() { } public virtual bool CheckSlitValveOpen(ModuleName module, ModuleName robot) { return true; } public virtual bool CheckSlitValveClose(ModuleName module, ModuleName robot) { return true; } public virtual bool SetSlitValve(ModuleName module, ModuleName robot, bool isOpen, out string reason) { reason = string.Empty; return true; } } }