using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.Device.Devices; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Event; using Aitex.Core.RT.Log; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using MECF.Framework.Common.Communications; using MECF.Framework.Common.Equipment; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.AlignersBase; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.YaskawaRobots; using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.YaskawaAligner { public class YaskawaAligner:AlignerBaseDevice,IConnection { public YaskawaAligner(string module,string name,string scRoot,IoSensor[] dis, IoTrigger[] dos, int alignerType = 0) :base(module,name) { isSimulatorMode = SC.ContainsItem("System.IsSimulatorMode") ? SC.GetValue("System.IsSimulatorMode") : false; _scRoot = scRoot; _address = SC.GetStringValue($"{_scRoot}.{Name}.Address"); _enableLog = SC.GetValue($"{_scRoot}.{Name}.EnableLogMessage"); UnitNumber = SC.GetValue($"{_scRoot}.{Name}.UnitNumber"); IsEnableCheckSum = SC.GetValue($"{_scRoot}.{Name}.EnableCheckSum"); IsEnableSeqNo = SC.GetValue($"{_scRoot}.{Name}.EnableSeqNo"); AlignerType = alignerType; _connection = new YaskawaAlignerConnection(this,_address); _connection.EnableLog(_enableLog); SeqnoGenerator = new YaskawaTokenGenerator($"{_scRoot}.{Name}.CommunicationToken"); if(dis!= null && dis.Length >=1) _diPreAlignerWaferOn = dis[0]; if (dis != null && dis.Length >= 2) _diPreAlignerReady = dis[1]; if (dis != null && dis.Length >= 3) { _diPreAlignerError = dis[2]; _diPreAlignerError.OnSignalChanged += _diPreAlignerError_OnSignalChanged; } if (dis != null && dis.Length >= 4) { _diTPinUse = dis[3]; _diTPinUse.OnSignalChanged += _diTPinUse_OnSignalChanged; } if (dos != null && dos.Length >= 1) { _doPreAlignerHold = dos[0]; _doPreAlignerHold.SetTrigger(true, out _); } ConnectionManager.Instance.Subscribe($"{Name}", this); _thread = new PeriodicJob(100, OnTimer, $"{_scRoot}.{Name} MonitorHandler", true); ResetPropertiesAndResponses(); RegisterSpecialData(); RegisterAlarm(); } private void RegisterAlarm() { EV.Subscribe(new EventItem("Alarm", "AlignerError020", $"{Name} Error:Aligner Occurred Error:Secondary power off.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError021", $"{Name} Error:Aligner Occurred Error:Secondary power on.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError040", $"{Name} Error:Aligner Occurred Error:In TEACH Mode.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError050", $"{Name} Error:Aligner Occurred Error:Unit is in motion.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError051", $"{Name} Error:Aligner Occurred Error:Unable to set pitch between slots.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError052", $"{Name} Error:Aligner Occurred Error:Unable to restart motion.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError053", $"{Name} Error:Aligner Occurred Error:Ready position moveincomplete.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError054", $"{Name} Error:Aligner Occurred Error:Alignment Ready position move incomplete.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError055", $"{Name} Error:Aligner Occurred Error:Improper station type.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError058", $"{Name} Error:Aligner Occurred Error:Command not supported 1-1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError059", $"{Name} Error:Aligner Occurred Error:Invalid transfer point.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError05A", $"{Name} Error:Aligner Occurred Error:Linear motion failed.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError05C", $"{Name} Error:Aligner Occurred Error:Unable to reference waferalignment result.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError05d", $"{Name} Error:Aligner Occurred Error:Unable to perform armcalibration.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError05E", $"{Name} Error:Aligner Occurred Error:Unable to read mapping data.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError05F", $"{Name} Error:Aligner Occurred Error:Data Upload/Download inprogress.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError061", $"{Name} Error:Aligner Occurred Error:Unable to motion.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError064", $"{Name} Error:Aligner Occurred Error:Lifter interference error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError070", $"{Name} Error:Aligner Occurred Error:Bottom slot position recordincomplete.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError071", $"{Name} Error:Aligner Occurred Error:Top slot position record incomplete.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError088", $"{Name} Error:Aligner Occurred Error:Position generating error 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError089", $"{Name} Error:Aligner Occurred Error:Position generating error 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError08A", $"{Name} Error:Aligner Occurred Error:Position generating error 3.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError08b", $"{Name} Error:Aligner Occurred Error:Position generating error 4.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError08C", $"{Name} Error:Aligner Occurred Error:Position generating error 5.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError08d", $"{Name} Error:Aligner Occurred Error:Position generating error 6.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError090", $"{Name} Error:Aligner Occurred Error:Host parameter out of range.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError0A0", $"{Name} Error:Aligner Occurred Error:Alignment motion error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError0E0", $"{Name} Error:Aligner Occurred Error:Teach position adjustmentoffset amount limit error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError0F0", $"{Name} Error:Aligner Occurred Error:Voltage drop warning.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*06", $"{Name} Error:Aligner Occurred Error:Amplifier Type Mismatch.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*07", $"{Name} Error:Aligner Occurred Error:Encoder Type Mismatch.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*10", $"{Name} Error:Aligner Occurred Error:Overflow Current.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*30", $"{Name} Error:Aligner Occurred Error:Regeneration Error Detected.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*40", $"{Name} Error:Aligner Occurred Error:Excess Voltage (converter).", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*41", $"{Name} Error:Aligner Occurred Error:Insufficient Voltage.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*45", $"{Name} Error:Aligner Occurred Error:Brake circuit error 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*46", $"{Name} Error:Aligner Occurred Error:Converter ready signal error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*47", $"{Name} Error:Aligner Occurred Error:Input power error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*48", $"{Name} Error:Aligner Occurred Error:Converter main circuit chargeerror.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*49", $"{Name} Error:Aligner Occurred Error:Amplifier ready signal error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*51", $"{Name} Error:Aligner Occurred Error:Excessive Speed.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*71", $"{Name} Error:Aligner Occurred Error:Momentary Overload (Motor).", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*72", $"{Name} Error:Aligner Occurred Error:Continuous Overload (Motor).", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*78", $"{Name} Error:Aligner Occurred Error:Overload (Converter).", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*7b", $"{Name} Error:Aligner Occurred Error:Amplifier overheat.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*7C", $"{Name} Error:Aligner Occurred Error:Continuous Overload(Amplifier).", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*7d", $"{Name} Error:Aligner Occurred Error:Momentary Overload.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*81", $"{Name} Error:Aligner Occurred Error:Absolute Encoder Back-upError.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*83", $"{Name} Error:Aligner Occurred Error:Absolute Encoder Battery.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*84", $"{Name} Error:Aligner Occurred Error:Encoder Data Error 2-1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*85", $"{Name} Error:Aligner Occurred Error:Encoder Excessive Speed.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*86", $"{Name} Error:Aligner Occurred Error:Encoder Overheat.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*88", $"{Name} Error:Aligner Occurred Error:Encoder error 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*89", $"{Name} Error:Aligner Occurred Error:Encoder Command failed.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*8A", $"{Name} Error:Aligner Occurred Error:Encoder multi-turn range.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*8C", $"{Name} Error:Aligner Occurred Error:Encoder Reset not completed.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*98", $"{Name} Error:Aligner Occurred Error:Servo parameter error 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*9A", $"{Name} Error:Aligner Occurred Error:Feedback Over Flow.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*b4", $"{Name} Error:Aligner Occurred Error:Servo Control Board Failure.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*bC", $"{Name} Error:Aligner Occurred Error:Encoder error 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*C1", $"{Name} Error:Aligner Occurred Error:Motor runaway detection.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*C9", $"{Name} Error:Aligner Occurred Error:Encoder Communication.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*CE", $"{Name} Error:Aligner Occurred Error:Encoder error 3.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*CF", $"{Name} Error:Aligner Occurred Error:Encoder error 4.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*d0", $"{Name} Error:Aligner Occurred Error:Position deviation error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*d1", $"{Name} Error:Aligner Occurred Error:Position deviation saturation.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*d2", $"{Name} Error:Aligner Occurred Error:Motor directive position error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*d4", $"{Name} Error:Aligner Occurred Error:Servo Tracking Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError*F1", $"{Name} Error:Aligner Occurred Error:Phase loss.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorE*1", $"{Name} Error:Aligner Occurred Error:Positioning Timeout.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorE*d", $"{Name} Error:Aligner Occurred Error:Command not supported 1-2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorE*E", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 1-1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorE*F", $"{Name} Error:Aligner Occurred Error:Servo control board responsetimeout 1..", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError701", $"{Name} Error:Aligner Occurred Error:ROM Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError703", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 2-1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError704", $"{Name} Error:Aligner Occurred Error:Communication Error (internal controller) 2-2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError705", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 2-3.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError706", $"{Name} Error:Aligner Occurred Error:Servo system error 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError707", $"{Name} Error:Aligner Occurred Error:Servo system error 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError709", $"{Name} Error:Aligner Occurred Error:Current feedback error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError70A", $"{Name} Error:Aligner Occurred Error:Power Lost.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError70b", $"{Name} Error:Aligner Occurred Error:Rush Current PreventionRelay Abnormal.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError70C", $"{Name} Error:Aligner Occurred Error:Converter mismatch.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError70F", $"{Name} Error:Aligner Occurred Error:Servo control board response timeout 2..", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError713", $"{Name} Error:Aligner Occurred Error:DB error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError714", $"{Name} Error:Aligner Occurred Error:Converter charge Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError715", $"{Name} Error:Aligner Occurred Error:Servo OFF Status Error 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError716", $"{Name} Error:Aligner Occurred Error:Servo ON Status Error 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError717", $"{Name} Error:Aligner Occurred Error:Servo OFF Status Error 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError718", $"{Name} Error:Aligner Occurred Error:Servo ON Status Error 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError719", $"{Name} Error:Aligner Occurred Error:Servo On Abnormal.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError71A", $"{Name} Error:Aligner Occurred Error:Brake circuit error 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError71b", $"{Name} Error:Aligner Occurred Error:Brake circuit error 3.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError71C", $"{Name} Error:Aligner Occurred Error:Power relay error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError721", $"{Name} Error:Aligner Occurred Error:Servo parameter error 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError722", $"{Name} Error:Aligner Occurred Error:Servo parameter error 3.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError725", $"{Name} Error:Aligner Occurred Error:Converter Overheat.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError726", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 2-4.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError727", $"{Name} Error:Aligner Occurred Error:Command not supported 1-2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError728", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 2-5.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError729", $"{Name} Error:Aligner Occurred Error:Servo system error 3.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError72A", $"{Name} Error:Aligner Occurred Error:Servo system error 4.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError72b", $"{Name} Error:Aligner Occurred Error:Servo parameter error 4.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError730", $"{Name} Error:Aligner Occurred Error:Amp module disconnected..", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError732", $"{Name} Error:Aligner Occurred Error:Servo parameter error 5.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError733", $"{Name} Error:Aligner Occurred Error:Servo parameter error 6.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError734", $"{Name} Error:Aligner Occurred Error:Servo parameter error 7.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError735", $"{Name} Error:Aligner Occurred Error:Servo parameter error 8.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError73F", $"{Name} Error:Aligner Occurred Error:Undefined Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError740", $"{Name} Error:Aligner Occurred Error:Encoder Status Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError741", $"{Name} Error:Aligner Occurred Error:Servo system error 5.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError742", $"{Name} Error:Aligner Occurred Error:Servo system error 6.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError743", $"{Name} Error:Aligner Occurred Error:Servo system error 7.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError744", $"{Name} Error:Aligner Occurred Error:Servo system error 8.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError745", $"{Name} Error:Aligner Occurred Error:Servo system error 9.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError746", $"{Name} Error:Aligner Occurred Error:Servo system error 10.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError74A", $"{Name} Error:Aligner Occurred Error:Servo system error 11.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError74b", $"{Name} Error:Aligner Occurred Error:Servo system error 12.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError74C", $"{Name} Error:Aligner Occurred Error:Servo system error 13.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError74d", $"{Name} Error:Aligner Occurred Error:Servo system error 14.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7A0", $"{Name} Error:Aligner Occurred Error:Communication Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7A1", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 3-2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7A2", $"{Name} Error:Aligner Occurred Error:Command not supported 3-1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7A3", $"{Name} Error:Aligner Occurred Error:Data buffer full.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7A4", $"{Name} Error:Aligner Occurred Error:Command not supported 3-2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7A5", $"{Name} Error:Aligner Occurred Error:Encoder data error 3-1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7A6", $"{Name} Error:Aligner Occurred Error:Command not supported 3-3.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7AE", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 1-2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7AF", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 1-3.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7b0", $"{Name} Error:Aligner Occurred Error:CCD sensor abnormal 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7b4", $"{Name} Error:Aligner Occurred Error:CCD sensor abnormal 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7b5", $"{Name} Error:Aligner Occurred Error:CCD sensor abnormal 3.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7C0", $"{Name} Error:Aligner Occurred Error:PAIF board Failure 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7C1", $"{Name} Error:Aligner Occurred Error:PAIF board Failure 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7C2", $"{Name} Error:Aligner Occurred Error:PAIF board Failure 3.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7C3", $"{Name} Error:Aligner Occurred Error:CCD sensor abnormal 4.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7CF", $"{Name} Error:Aligner Occurred Error:PAIF board disconnected.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7d0", $"{Name} Error:Aligner Occurred Error:PAIF board Failure 4.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError7d1", $"{Name} Error:Aligner Occurred Error:PAIF board Failure 5.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError", $"{Name} Error:Aligner Occurred Error:.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError900", $"{Name} Error:Aligner Occurred Error:Character Interval Timeout.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError910", $"{Name} Error:Aligner Occurred Error:Received Data ChecksumError.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError920", $"{Name} Error:Aligner Occurred Error:Unit Number Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError930", $"{Name} Error:Aligner Occurred Error:Undefined CommandReceived.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError940", $"{Name} Error:Aligner Occurred Error:Message Parameter Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError950", $"{Name} Error:Aligner Occurred Error:Receiving Time-out Error for Confirmation of Execution Completion.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError960", $"{Name} Error:Aligner Occurred Error:Incorrect sequence number.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError961", $"{Name} Error:Aligner Occurred Error:Duplicated message.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError970", $"{Name} Error:Aligner Occurred Error:Delimiter error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError9A1", $"{Name} Error:Aligner Occurred Error:Message buffer overflow.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError9C0", $"{Name} Error:Aligner Occurred Error:LAN device setting error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError9C1", $"{Name} Error:Aligner Occurred Error:IP address error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError9C2", $"{Name} Error:Aligner Occurred Error:Subnet mask error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError9C3", $"{Name} Error:Aligner Occurred Error:Default gateway error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError9d0", $"{Name} Error:Aligner Occurred Error:Ethernet receive error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError9E0", $"{Name} Error:Aligner Occurred Error:During operation themaintenance tool.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerError9E1", $"{Name} Error:Aligner Occurred Error:The data abnormal.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorA01", $"{Name} Error:Aligner Occurred Error:Re-detection of a powerSupply voltage fall.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorA10", $"{Name} Error:Aligner Occurred Error:External emergency stop.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorA20", $"{Name} Error:Aligner Occurred Error:T.P emergency stop.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorA21", $"{Name} Error:Aligner Occurred Error:Interlock board failure 0.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorA30", $"{Name} Error:Aligner Occurred Error:Emergency stop.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorA40", $"{Name} Error:Aligner Occurred Error:Controller Fan 1 Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorA41", $"{Name} Error:Aligner Occurred Error:Controller Fan 2 Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorA42", $"{Name} Error:Aligner Occurred Error:Controller Fan 3 Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorA45", $"{Name} Error:Aligner Occurred Error:Unit fan 1 error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorA46", $"{Name} Error:Aligner Occurred Error:Unit fan 2 error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorA4F", $"{Name} Error:Aligner Occurred Error:Controller Battery Alarm.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAC0", $"{Name} Error:Aligner Occurred Error:Safety fence signal detection.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAC9", $"{Name} Error:Aligner Occurred Error:Protection stop signal.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAE0", $"{Name} Error:Aligner Occurred Error:HOST Mode Switching error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAE1", $"{Name} Error:Aligner Occurred Error:TEACH Mode Switching Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAE8", $"{Name} Error:Aligner Occurred Error:Deadman switch error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF0", $"{Name} Error:Aligner Occurred Error:Interlock board failure 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF1", $"{Name} Error:Aligner Occurred Error:Interlock board failure 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF2", $"{Name} Error:Aligner Occurred Error:Interlock board failure 3.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF3", $"{Name} Error:Aligner Occurred Error:Interlock board failure 4.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF4", $"{Name} Error:Aligner Occurred Error:Interlock board failure 5.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF5", $"{Name} Error:Aligner Occurred Error:Interlock board failure 6.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF6", $"{Name} Error:Aligner Occurred Error:Interlock board failure 7.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF8", $"{Name} Error:Aligner Occurred Error:Input compare error 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF9", $"{Name} Error:Aligner Occurred Error:Input compare error 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFA", $"{Name} Error:Aligner Occurred Error:Input compare error 3.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFb", $"{Name} Error:Aligner Occurred Error:Input compare error 4.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFC", $"{Name} Error:Aligner Occurred Error:Input compare error 5.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFd", $"{Name} Error:Aligner Occurred Error:Input compare error 6.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFE", $"{Name} Error:Aligner Occurred Error:Input compare error 7.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFF", $"{Name} Error:Aligner Occurred Error:Input compare error 8.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb10", $"{Name} Error:Aligner Occurred Error:Axis-1 Speed Limit Detection.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb11", $"{Name} Error:Aligner Occurred Error:Axis-2 Speed Limit Detection.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb12", $"{Name} Error:Aligner Occurred Error:Axis-3 Speed Limit Detection.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb13", $"{Name} Error:Aligner Occurred Error:Axis-4 Speed Limit Detection.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb14", $"{Name} Error:Aligner Occurred Error:Axis-5 Speed Limit Detection.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb20", $"{Name} Error:Aligner Occurred Error:Axis-1 Positive (+) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb21", $"{Name} Error:Aligner Occurred Error:Axis-2 Positive (+) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb22", $"{Name} Error:Aligner Occurred Error:Axis-3 Positive (+) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb23", $"{Name} Error:Aligner Occurred Error:Axis-4 Positive (+) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb24", $"{Name} Error:Aligner Occurred Error:Axis-5 Positive (+) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb28", $"{Name} Error:Aligner Occurred Error:Axis-1 Positive (+) Direction Software-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb29", $"{Name} Error:Aligner Occurred Error:Axis-2 Positive (+) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb2A", $"{Name} Error:Aligner Occurred Error:Axis-3 Positive (+) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb2b", $"{Name} Error:Aligner Occurred Error:Axis-4 Positive (+) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb2C", $"{Name} Error:Aligner Occurred Error:Axis-5 Positive (+) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb30", $"{Name} Error:Aligner Occurred Error:Axis-1 Negative (-) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb31", $"{Name} Error:Aligner Occurred Error:Axis-2 Negative (-) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb32", $"{Name} Error:Aligner Occurred Error:Axis-3 Negative (-) Direction Software-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb33", $"{Name} Error:Aligner Occurred Error:Axis-4 Negative (-) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb34", $"{Name} Error:Aligner Occurred Error:Axis-5 Negative (-) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb38", $"{Name} Error:Aligner Occurred Error:Axis-1 Negative (-) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb39", $"{Name} Error:Aligner Occurred Error:Axis-2 Negative (-) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb3A", $"{Name} Error:Aligner Occurred Error:Axis-3 Negative (-) Direction Software-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb3b", $"{Name} Error:Aligner Occurred Error:Axis-4 Negative (-) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb3C", $"{Name} Error:Aligner Occurred Error:Axis-5 Negative (-) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb40", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 1Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb41", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 2Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb42", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 3Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb43", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 4Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb44", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 5 Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb45", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 6Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb46", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 7Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb47", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 8Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb48", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 9Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb49", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 10 Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4A", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 11Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4b", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 12Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4C", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 13Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4d", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 14Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4E", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 15Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4F", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 16Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb60", $"{Name} Error:Aligner Occurred Error:Access Permission to P/A Stage Time-out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb61", $"{Name} Error:Aligner Occurred Error:Access Permission to P/AStage Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb62", $"{Name} Error:Aligner Occurred Error:Access Permission to P/A Stage Time-out Error 3.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb63", $"{Name} Error:Aligner Occurred Error:Access Permission to P/A Stage Time-out Error 4.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb64", $"{Name} Error:Aligner Occurred Error:Access Permission to P/AStage Time-out Error 5.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb65", $"{Name} Error:Aligner Occurred Error:Access Permission to P/AStage Time-out Error 6.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb66", $"{Name} Error:Aligner Occurred Error:Access Permission to P/AStage Time-out Error 7.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb68", $"{Name} Error:Aligner Occurred Error:P/A motion permission timeout error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb70", $"{Name} Error:Aligner Occurred Error:SS signal detection.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb80", $"{Name} Error:Aligner Occurred Error:Fork 1/Pre-aligner: Wafer Presence Confirmation Time-out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb81", $"{Name} Error:Aligner Occurred Error:Fork 1/Pre-aligner: WaferAbsence Confirmation Time- out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb82", $"{Name} Error:Aligner Occurred Error:Fork 1/Pre-aligner: Wafer Presence Confirmation Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb83", $"{Name} Error:Aligner Occurred Error:Fork 1/Pre-aligner: WaferAbsence Confirmation Time- out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb88", $"{Name} Error:Aligner Occurred Error:Grip sensor Time-out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb89", $"{Name} Error:Aligner Occurred Error:Grip sensor Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb8A", $"{Name} Error:Aligner Occurred Error:UnGrip sensor Time-out Error1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb8b", $"{Name} Error:Aligner Occurred Error:UnGrip sensor Time-out Error2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb8F", $"{Name} Error:Aligner Occurred Error:Fork 1: Plunger non-operationerror.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb90", $"{Name} Error:Aligner Occurred Error:Fork 2: Wafer Presence Confirmation Time-out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb91", $"{Name} Error:Aligner Occurred Error:Fork 2: Wafer AbsenceConfirmation Time-out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb92", $"{Name} Error:Aligner Occurred Error:Fork 2: Wafer PresenceConfirmation Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb93", $"{Name} Error:Aligner Occurred Error:Fork 2: Wafer AbsenceConfirmation Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb98", $"{Name} Error:Aligner Occurred Error:Lifter up sensor Time-outError 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb99", $"{Name} Error:Aligner Occurred Error:Lifter up sensor Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb9A", $"{Name} Error:Aligner Occurred Error:Lifter down sensor Time-outError 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb9b", $"{Name} Error:Aligner Occurred Error:Lifter down sensor Time-outError 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorb9F", $"{Name} Error:Aligner Occurred Error:Fork 2: Plunger non-operationerror.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorbA0", $"{Name} Error:Aligner Occurred Error:Fork 1/Pre-aligner: WaferAbsence Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorbA1", $"{Name} Error:Aligner Occurred Error:Fork 1: Sensor StatusMismatch.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorbA8", $"{Name} Error:Aligner Occurred Error:Grip sensor status Error 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorbA9", $"{Name} Error:Aligner Occurred Error:Grip sensor status Error 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorbAA", $"{Name} Error:Aligner Occurred Error:Ungrip sensor status Error 1.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorbAb", $"{Name} Error:Aligner Occurred Error:Ungrip sensor status Error 2.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorbAC", $"{Name} Error:Aligner Occurred Error:Grip sensor status mismatch.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorbAd", $"{Name} Error:Aligner Occurred Error:Lifter/Grip sensor statusmismatch.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorbb0", $"{Name} Error:Aligner Occurred Error:Fork 2: Wafer Absence Error.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorbb1", $"{Name} Error:Aligner Occurred Error:Fork 2: Sensor StatusMismatch.", EventLevel.Alarm, EventType.EventUI_Notify)); EV.Subscribe(new EventItem("Alarm", "AlignerErrorbb8", $"{Name} Error:Aligner Occurred Error:Lifter up sensor status Error 1.", EventLevel.Alarm, EventType.EventUI_Notify)); } private void _diTPinUse_OnSignalChanged(IoSensor arg1, bool arg2) { if (!arg2) SetMaintenanceMode(true); else SetMaintenanceMode(false); } private void _diPreAlignerError_OnSignalChanged(IoSensor arg1, bool arg2) { if(!arg2) OnError("Aligner error signal"); } private void RegisterSpecialData() { DATA.Subscribe($"{Module}.{Name}.CurrentArm1Position", () => CurrentArm1Position); DATA.Subscribe($"{Module}.{Name}.CurrentArm2Position", () => CurrentArm2Position); DATA.Subscribe($"{Module}.{Name}.CurrentExtensionPosition", () => CurrentExtensionPosition); DATA.Subscribe($"{Module}.{Name}.CurrentThetaPosition", () => CurrentThetaPosition); DATA.Subscribe($"{Module}.{Name}.CurrentZPosition", () => CurrentZPosition); DATA.Subscribe($"{Module}.{Name}.IsManipulatorBatteryLow", () => IsManipulatorBatteryLow); DATA.Subscribe($"{Module}.{Name}.IsCommandExecutionReady", () => IsCommandExecutionReady); DATA.Subscribe($"{Module}.{Name}.IsServoON", () => IsServoON); DATA.Subscribe($"{Module}.{Name}.IsErrorOccurred", () => IsErrorOccurred); DATA.Subscribe($"{Module}.{Name}.IsControllerBatteryLow", () => IsControllerBatteryLow); DATA.Subscribe($"{Module}.{Name}.IsWaferPresenceOnFromVacuumSensorOrGripSensor", () => IsWaferPresenceOnFromVacuumSensorOrGripSensor); DATA.Subscribe($"{Module}.{Name}.IsWaferPresenceOnFromCCDSensor", () => IsWaferPresenceOnFromCCDSensor); DATA.Subscribe($"{Module}.{Name}.ErrorCode", () => ErrorCode); DATA.Subscribe($"{Module}.{Name}.IsWaferHoldOnChuck", () => IsWaferHoldOnChuck); //DATA.Subscribe($"{Module}.{Name}.IsGrippedBlade2", () => IsGrippedBlade2); DATA.Subscribe($"{Module}.{Name}.IsCheckInterlockWaferPresenceAbsent", () => IsCheckInterlockWaferPresenceAbsent); DATA.Subscribe($"{Module}.{Name}.IsCheckInterlockManipulatorOperation", () => IsCheckInterlockManipulatorOperation); } private void ResetPropertiesAndResponses() { } private bool OnTimer() { try { if (!_connection.IsConnected || _connection.IsCommunicationError) { lock (_locker) { _lstHandlers.Clear(); } _trigRetryConnect.CLK = !_connection.IsConnected; if (_trigRetryConnect.Q) { if (!_connection.Connect()) { EV.PostAlarmLog(Module, $"Can not connect with {_connection.Address}, {Module}.{Name}"); } else { //_lstHandler.AddLast(new RobotHirataR4QueryPinHandler(this, _deviceAddress)); //_lstHandler.AddLast(new RobotHirataR4SetCommModeHandler(this, _deviceAddress, EnumRfPowerCommunicationMode.Host)); } } return true; } HandlerBase handler = null; lock (_locker) { while (_lstHandlers.Count > 0 || _connection.IsBusy) { if (!_connection.IsBusy) { if (_lstHandlers.Count > 0) { handler = _lstHandlers.First.Value; ExecuteHandler(handler); _lstHandlers.RemoveFirst(); } } else { _connection.MonitorTimeout(); _trigCommunicationError.CLK = _connection.IsCommunicationError; if (_trigCommunicationError.Q) { _lstHandlers.Clear(); //EV.PostAlarmLog(Module, $"{Module}.{Name} communication error, {_connection.LastCommunicationError}"); OnError($"{Module}.{Name} communication error, {_connection.LastCommunicationError}"); //_trigActionDone.CLK = true; } } } } } catch (Exception ex) { LOG.Write(ex); } return true; } private void ExecuteHandler(HandlerBase handler) { string commandstr = $",{UnitNumber}"; if (IsEnableSeqNo) { CurrentSeqNo = SeqnoGenerator.create(); commandstr += $",{CurrentSeqNo:D2}"; SeqnoGenerator.release(CurrentSeqNo); } commandstr += $",{handler.SendText}"; if (IsEnableCheckSum) { commandstr += ","; commandstr += Checksum(Encoding.ASCII.GetBytes(commandstr)); } handler.SendText = $"${commandstr}\r"; _connection.Execute(handler); } private string Checksum(byte[] bytes) { int sum = 0; foreach (byte code in bytes) { sum += code; } string hex = String.Format("{0:X2}", sum % 256); return hex; } public int UnitNumber { get; private set; } private bool isSimulatorMode; private string _scRoot; //private string _ipaddress; public YaskawaTokenGenerator SeqnoGenerator { get; private set; } public bool IsEnableSeqNo { get; private set; } public bool IsEnableCheckSum { get; private set; } public string AlignerSystemVersion { get; private set; } public string AlignerSoftwareVersion { get; private set; } public int CurrentSeqNo { get; set; } public int AlignerType { get; private set; } //0= Edge grip, 1=Vacuum public string PortName; private string _address; private bool _enableLog; private YaskawaAlignerConnection _connection; private R_TRIG _trigError = new R_TRIG(); private R_TRIG _trigCommunicationError = new R_TRIG(); private R_TRIG _trigRetryConnect = new R_TRIG(); public string Address => _address; private PeriodicJob _thread; private object _locker = new object(); private LinkedList _lstHandlers = new LinkedList(); private IoSensor _diPreAlignerWaferOn = null; private IoSensor _diPreAlignerReady = null; private IoSensor _diPreAlignerError = null; private IoSensor _diTPinUse = null; private IoTrigger _doPreAlignerHold = null; public ModuleName CurrentInteractiveModule { get; private set; } public bool IsConnected => _connection.IsConnected; public bool IsWaferPresenceOnFromVacuumSensorOrGripSensor { get; private set; } public bool IsWaferPresenceOnFromCCDSensor { get; private set; } public bool IsWaferHoldOnChuck { get; private set; } //public bool IsGrippedBlade2 { get; private set; } public bool IsGripSensorOnEnd { get; private set; } public bool IsUngripSensorOnEnd { get; private set; } public bool IsLifterUpperSensorOnEnd { get; private set; } public bool IsLifterDownSensorOnEnd { get; private set; } public bool IsLifterSolenoidOnUp { get; private set; } public bool IsPermittedInterlock6 { get; private set; } public bool IsPermittedInterlock7 { get; private set; } public bool IsPermittedInterlock8 { get; private set; } public float CurrentThetaPosition { get; private set; } public float CurrentExtensionPosition { get; private set; } public float CurrentArm1Position { get; private set; } public float CurrentArm2Position { get; private set; } public float CurrentZPosition { get; private set; } public float CommandThetaPosition { get; private set; } public float CommandExtensionPosition { get; private set; } public float CommandArm1Position { get; private set; } public float CommandArm2Position { get; private set; } public float CommandZPosition { get; private set; } public int SpeedLevel { get; private set; } public string ReadMemorySpec { get; private set; } public string ReadTransferStation { get; private set; } public int ReadSlotNumber { get; private set; } public string ReadArmPosture { get; private set; } public YaskawaPositonEnum ReadPositionType { get; private set; } public float ReadThetaPosition { get; private set; } public float ReadExtensionPosition { get; private set; } public float ReadArm1Position { get; private set; } public float ReadArm2Position { get; private set; } public float ReadZPosition { get; private set; } public Dictionary ReadStationItemValues { get; private set; } = new Dictionary(); public Dictionary ReadStationItemContents { get; private set; } = new Dictionary(); public string ReadParameterType { get; private set; } public string ReadParameterNo { get; private set; } public string ReadParameterValue { get; private set; } public bool IsManipulatorBatteryLow { get; private set; } public bool IsCommandExecutionReady { get; private set; } public bool IsServoON { get; private set; } public bool IsErrorOccurred { get; private set; } public bool IsControllerBatteryLow { get; private set; } public bool IsCheckInterlockWaferPresenceAbsent { get; private set; } //public bool IsCheckInterlockWaferPresenceOnBlade2 { get; private set; } //public bool IsCheckInterlockPAOp { get; private set; } //public bool IsCheckInterlockPAWaferStatus { get; private set; } public bool IsCheckInterlockManipulatorOperation { get; private set; } public bool Connect() { return _connection.Connect(); } public bool Disconnect() { return _connection.Disconnect(); } public override bool IsReady() { if (_diPreAlignerReady != null && !_diPreAlignerReady.Value) return false; if (_diPreAlignerError != null && !_diPreAlignerError.Value) return false; if (_diTPinUse != null && !_diTPinUse.Value) return false; return IsIdle; } protected override bool fStartLiftup(object[] param) { lock (_locker) { string strpara = "2,1,0"; _lstHandlers.AddLast(new YaskawaAlignerMotionHandler(this, "CSOL", strpara)); } return true; } protected override bool fStartLiftdown(object[] param) { lock (_locker) { string strpara = "2,0,0"; _lstHandlers.AddLast(new YaskawaAlignerMotionHandler(this, "CSOL", strpara)); } return true; } protected override bool fStartAlign(object[] param) { double aligneangle = (double)param[0]; int intangle = (int)(aligneangle * 1000); CurrentNotch = aligneangle; lock (_locker) { string strpara = $"0,{intangle:D8}"; _lstHandlers.AddLast(new YaskawaAlignerMotionHandler(this, "MALN", strpara)); if (AlignerType == 1) { _lstHandlers.AddLast(new YaskawaAlignerMotionHandler(this, "CSOL", "1,0,0")); } } return true; } protected override bool fStop(object[] param) { lock (_locker) { _lstHandlers.Clear(); _connection.ForceClear(); //ExecuteHandler(new YaskawaAlignerMotionHandler(this, "CSTP", "E")); } return true; } protected override bool FsmAbort(object[] param) { lock (_locker) { _lstHandlers.Clear(); _connection.ForceClear(); ExecuteHandler(new YaskawaAlignerMotionHandler(this, "CSTP", "H")); } return true; } protected override bool fClear(object[] param) { lock (_locker) { ExecuteHandler(new YaskawaAlignerMotionHandler(this, "CCLR", "E")); } return true; } protected override bool fStartReadData(object[] param) { if (param.Length < 1) return false; string readcommand = param[0].ToString(); switch (readcommand) { case "CurrentStatus": lock (_locker) { _lstHandlers.AddLast(new YaskawaAlignerReadHandler(this, "RSTS")); _lstHandlers.AddLast(new YaskawaAlignerReadHandler(this, "RPOS", "F")); _lstHandlers.AddLast(new YaskawaAlignerReadHandler(this, "RPOS", "R")); } break; default: break; } return true; } protected override bool fStartSetParameters(object[] param) { try { string strParameter; string setcommand = param[0].ToString(); switch (setcommand) { case "MotionSpeed": // SSPD Set the motion speed string strlevel = param[1].ToString(); string strspeedtype = param[2].ToString(); string strAxis = param[3].ToString(); uint speeddata = Convert.ToUInt32(param[4]); if (!"0123".Contains(strlevel)) { EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + strlevel); return false; } if (!"HMLOB".Contains(strspeedtype)) { EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + strspeedtype); return false; } if (!"SAHIZRG".Contains(strAxis)) { EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + strAxis); return false; } strParameter = $"{strlevel},{strspeedtype},{strAxis}," + speeddata.ToString("D8"); lock (_locker) { _lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SSPD", strParameter)); } break; case "TransferSpeedLevel": //SSLV Select the transfer speed level string sslvlevel = param[1].ToString(); if (!"123".Contains(sslvlevel)) { EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sslvlevel); return false; } lock (_locker) { _lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SSLV", sslvlevel)); } break; case "RegisterTheCurrentPositionAsTransferStation": // SPOS: Register the current position as the specified transfer station string sposMem = param[1].ToString(); string sposRmode = param[2].ToString(); string sposTrsSt = param[3].ToString(); uint sposSlot = Convert.ToUInt16(param[4]); string sposPosture = param[5].ToString(); string sposHand = param[6].ToString(); if (!"VN".Contains(sposMem)) { EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sposMem); return false; } if (!"AN".Contains(sposRmode)) { EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sposRmode); return false; } if (sposSlot < 1 || sposSlot > 30) { EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sposSlot.ToString()); return false; } if (!"LR".Contains(sposPosture)) { EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sposPosture); return false; } if (!"12".Contains(sposHand)) { EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sposHand); return false; } strParameter = $"{sposMem},{sposRmode},{sposTrsSt},{sposSlot},{sposPosture},{sposHand}"; lock (_locker) { _lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SPOS", strParameter)); } break; case "RegisterTheSpePostionAsTransferStation": //SABS string sabsMem = param[1].ToString(); string sabsRmode = param[2].ToString(); string sabsTrsSt = param[3].ToString(); string sabsPosture = param[4].ToString(); string sabsHand = param[5].ToString(); Int32 sabsValue1 = Convert.ToInt32(param[6]); Int32 sabsValue2 = Convert.ToInt32(param[7]); Int32 sabsValue3 = Convert.ToInt32(param[8]); Int32 sabsValue4 = Convert.ToInt32(param[9]); Int32 sabsValue5 = Convert.ToInt32(param[10]); if (!"VN".Contains(sabsMem)) { EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sabsMem); return false; } if (!"AN".Contains(sabsRmode)) { EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sabsRmode); return false; } if (!"LR".Contains(sabsPosture)) { EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sabsPosture); return false; } if (!"12".Contains(sabsHand)) { EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sabsHand); return false; } strParameter = $"{sabsMem},{sabsRmode},{sabsTrsSt},{sabsPosture},{sabsHand}," + sabsValue1.ToString("D8") + "," + sabsValue2.ToString("D8") + "," + sabsValue3.ToString("D8") + "," + sabsValue4.ToString("D8") + "," + sabsValue5.ToString("D8"); lock (_locker) { _lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SABS", strParameter)); } break; case "ModifyTheSpecStationPostionByOffset": //SAPS string sapsMem = param[1].ToString(); string sapsRmode = param[2].ToString(); string sapsTrsSt = param[3].ToString(); string sapsPosture = param[4].ToString(); string sapsHand = param[5].ToString(); Int32 sapsOffsetX = Convert.ToInt32(param[6]); Int32 sapsOffsetY = Convert.ToInt32(param[7]); Int32 sapsOffsetZ = Convert.ToInt32(param[8]); strParameter = $"{sapsMem},{sapsRmode},{sapsTrsSt},{sapsPosture},{sapsHand}," + sapsOffsetX.ToString("D8") + "," + sapsOffsetY.ToString("D8") + "," + sapsOffsetZ.ToString("D8"); lock (_locker) { _lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SAPS", strParameter)); } break; case "DeleteTheSpecStation": //SPDL string spdlMem = param[1].ToString(); string spdlTrsSt = param[2].ToString(); string spdlPosture = param[3].ToString(); string spdlHand = param[4].ToString(); strParameter = $"{spdlMem},{spdlTrsSt},{spdlPosture},{spdlHand}"; lock (_locker) { _lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SPDL", strParameter)); } break; case "RegisterThePositionDataToVolatile": //SPSV string spsvTrsSt = param[1].ToString(); string spsvPosture = param[2].ToString(); string spsvHand = param[3].ToString(); strParameter = $"{spsvTrsSt},{spsvPosture},{spsvHand}"; lock (_locker) { _lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SPSV", strParameter)); } break; case "ReadThePostionDataFromVolatile": //SPLD string spldTrsSt = param[1].ToString(); string spldPosture = param[2].ToString(); string spldHand = param[3].ToString(); strParameter = $"{spldTrsSt},{spldPosture},{spldHand}"; lock (_locker) { _lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SPLD", strParameter)); } break; case "SetTheStationParameters": //SSTR string sstrMem = param[1].ToString(); string sstrTrsSt = param[2].ToString(); string sstrItem = param[3].ToString(); Int32 sstrValue = Convert.ToInt32(param[4].ToString()); strParameter = $"{sstrMem},{sstrTrsSt},{sstrItem}," + sstrValue.ToString("D8"); lock (_locker) { _lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SSTR", strParameter)); } break; case "ChangeParameterValue": // SPRM string sprmParaType = param[1].ToString(); int sprmParaNO = Convert.ToInt32(param[2].ToString()); Int32 sprmValue = Convert.ToInt32(param[3].ToString()); strParameter = sprmParaType + "," + sprmParaNO.ToString("D4") + "," + sprmValue.ToString("D12"); lock (_locker) { _lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SPRM", strParameter)); } break; case "EnableInterLock": //SMSK int smskValid = Convert.ToInt16(param[1].ToString()); lock (_locker) { _lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SPRM", smskValid.ToString("D4"))); } break; case "RegisterTheCurrentPositionAsCoordinate": //SSTD string sstdAxis = param[1].ToString(); lock (_locker) { _lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SSTD", sstdAxis)); } break; case "ResigterTheSpecNumberAsReferencePostion": //SSTN Int32 sstnValue1 = Convert.ToInt32(param[1]); Int32 sstnValue2 = Convert.ToInt32(param[2]); Int32 sstnValue3 = Convert.ToInt32(param[3]); Int32 sstnValue4 = Convert.ToInt32(param[4]); Int32 sstnValue5 = Convert.ToInt32(param[5]); strParameter = sstnValue1.ToString("D12") + "," + sstnValue2.ToString("D12") + "," + sstnValue3.ToString("D12") + "," + sstnValue4.ToString("D12") + "," + sstnValue5.ToString("D12"); lock (_locker) { _lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SSTN", strParameter)); } break; } } catch (Exception) { string reason = ""; if (param != null) { foreach (var para in param) { reason += para.ToString() + ","; } } EV.PostAlarmLog(Name, "Set command parameter invalid:" + reason); return false; } return true; } protected override bool fStartUnGrip(object[] param) { lock (_locker) { string strpara = "1,0,0"; _lstHandlers.AddLast(new YaskawaAlignerMotionHandler(this, "CSOL", strpara)); } return true; } protected override bool fStartGrip(object[] param) { lock (_locker) { string strpara = "1,1,0"; _lstHandlers.AddLast(new YaskawaAlignerMotionHandler(this, "CSOL", strpara)); } return true; } protected override bool fResetToReady(object[] param) { if(!_connection.IsConnected) { _connection.Connect(); } return true; } protected override bool fReset(object[] param) { _lstHandlers.Clear(); _connection.ForceClear(); if (!_connection.IsConnected) { _connection.Connect(); } return true; } protected override bool fMonitorReset(object[] param) { if (!_connection.IsConnected) { _address = SC.GetStringValue($"{_scRoot}.{Name}.Address"); _enableLog = SC.GetValue($"{_scRoot}.{Name}.EnableLogMessage"); UnitNumber = SC.GetValue($"{_scRoot}.{Name}.UnitNumber"); IsEnableCheckSum = SC.GetValue($"{_scRoot}.{Name}.EnableCheckSum"); IsEnableSeqNo = SC.GetValue($"{_scRoot}.{Name}.EnableSeqNo"); _connection = new YaskawaAlignerConnection(this, _address); _connection.EnableLog(_enableLog); _connection.Connect(); } return _connection.IsConnected; } public override bool IsNeedRelease { //get //{ //if (AlignerType == 1) // return true; //if (SC.ContainsItem($"{_scRoot}.{Name}.NeedReleaseBeforePick") && SC.GetValue($"{_scRoot}.{Name}.NeedReleaseBeforePick")) // return true; get { return false; } //} } protected override bool fStartInit(object[] param) { CurrentNotch = 0; lock (_locker) { string strpara = "1,1,G"; if( AlignerType==1) strpara = "1,1,N"; _lstHandlers.AddLast(new YaskawaAlignerMotionHandler(this, "INIT", strpara)); } return true; } protected override bool fError(object[] param) { return true; } public bool ParseStatus(string status) { try { int intstatus = Convert.ToInt32(status,16); IsManipulatorBatteryLow = ((intstatus & 0x1) == 0x1); IsCommandExecutionReady = ((intstatus & 0x2) == 0x2); IsServoON = ((intstatus & 0x4) == 0x4); IsErrorOccurred = ((intstatus & 0x8) == 0x8); IsControllerBatteryLow = ((intstatus & 0x10) == 0x10); IsWaferPresenceOnFromVacuumSensorOrGripSensor = ((intstatus & 0x20) == 0x20); IsWaferPresenceOnFromCCDSensor = ((intstatus & 0x40) == 0x40); return true; } catch (Exception ex) { LOG.Write(ex); return false; } } public bool ParseReadData(string _command, string[] rdata) { try { if (_command == "RSTS") { return (rdata.Length == 2 && ParseRSTSStatus(rdata)); } if (_command == "RSLV") //Read the speed level { return (rdata.Length == 1 && ParseSpeedLevel(rdata[0])); } if (_command == "RPOS") //Reference current postion { return (rdata.Length > 1 && ParsePositionData(rdata)); } if (_command == "RSTR") //Reference station item value { return (rdata.Length == 4 && ParseStationData(rdata)); } if (_command == "RPRM") //Reference the parameter values of the specified unit { return (rdata.Length == 3 && ParseParameterData(rdata)); } if (_command == "RMSK") //Reference the interlock information { return (rdata.Length == 1 && ParseInterlockInfo(rdata)); } if (_command == "RVER") //Reference the software version { return (rdata.Length == 2 && ParseSoftwareVersion(rdata)); } if (_command == "RALN") // Reference the alignment result { return true; } if (_command == "RACA") // Reference calibration result for alignment { return true; } return true; } catch (Exception ex) { LOG.Write(ex); return false; } } public bool ParseSpeedLevel(string speedlevel) { try { int level = Convert.ToInt32(speedlevel); if (level < 1 || level > 3) return false; SpeedLevel = level; return true; } catch (Exception ex) { LOG.Write(ex); return false; } } public bool ParsePositionData(string[] pdata) { try { if (pdata[0] == "R") { if(pdata.Length >=2) CommandThetaPosition = Convert.ToInt32(pdata[1]) / 1000; if(pdata.Length >=3) CommandExtensionPosition = Convert.ToInt32(pdata[2]) / 1000; if(pdata.Length >=4) CommandArm1Position = Convert.ToInt32(pdata[3]) / 1000; if (pdata.Length >= 5) CommandArm2Position = Convert.ToInt32(pdata[4]) / 1000; if (pdata.Length >= 6) CommandZPosition = Convert.ToInt32(pdata[5]) / 1000; return true; } if (pdata[0] == "F") { if (pdata.Length >= 2) { CurrentThetaPosition = Convert.ToInt32(pdata[1]) / 1000; PositionAxis1 = CurrentThetaPosition; } if (pdata.Length >= 3) { CurrentExtensionPosition = Convert.ToInt32(pdata[2]) / 1000; PositionAxis2 = CurrentExtensionPosition; } if (pdata.Length >= 4) { CurrentArm1Position = Convert.ToInt32(pdata[3]) / 1000; PositionAxis3 = CurrentArm1Position; } if (pdata.Length >= 5) { CurrentArm2Position = Convert.ToInt32(pdata[4]) / 1000; PositionAxis4 = CurrentArm2Position; } if (pdata.Length >= 6) { CurrentZPosition = Convert.ToInt32(pdata[5]) / 1000; PositionAxis5 = CurrentZPosition; } return true; } return false; } catch (Exception ex) { LOG.Write(ex); return false; } } public bool ParseStationData(string[] pdata) { try { ReadMemorySpec = pdata[0]; ReadTransferStation = pdata[1]; if (ReadStationItemValues.ContainsKey(pdata[2])) ReadStationItemValues.Remove(pdata[2]); ReadStationItemValues.Add(pdata[2], pdata[3]); return true; } catch (Exception ex) { LOG.Write(ex); return false; } } public bool ParseParameterData(string[] pdata) { try { ReadParameterType = pdata[0]; ReadParameterNo = pdata[1]; ReadParameterValue = pdata[2]; return true; } catch (Exception ex) { LOG.Write(ex); return false; } } public bool ParseInterlockInfo(string[] pdata) { try { int intdata = Convert.ToInt16(pdata[0]); IsCheckInterlockWaferPresenceAbsent = (intdata & 0x1) == 0; IsCheckInterlockManipulatorOperation = (intdata & 0x1000) == 0; return true; } catch (Exception ex) { LOG.Write(ex); return false; } } public bool ParseSoftwareVersion(string[] pdata) { try { AlignerSystemVersion = pdata[0]; AlignerSoftwareVersion = pdata[1]; return true; } catch (Exception ex) { LOG.Write(ex); return false; } } public bool ParseRSTSStatus(string[] status) { try { ErrorCode = status[0]; int intstatus = Convert.ToInt32(status[1]); IsWaferPresenceOnFromVacuumSensorOrGripSensor = ((intstatus & 0x1) == 0x1); IsWaferPresenceOnFromCCDSensor = ((intstatus & 0x2) == 0x2); IsWaferHoldOnChuck = ((intstatus & 0x4) == 0x4); //IsGrippedBlade2 = ((intstatus & 0x8) == 0x8); IsGripSensorOnEnd = ((intstatus & 0x10) == 0x10); IsUngripSensorOnEnd = ((intstatus & 0x20) == 0x20); IsLifterUpperSensorOnEnd = ((intstatus & 0x100) == 0x100); IsLifterDownSensorOnEnd = ((intstatus & 0x200) == 0x200); IsLifterSolenoidOnUp = ((intstatus & 0x400) == 0x400); return true; } catch (Exception ex) { LOG.Write(ex); return false; } } public void SenACK() { _connection.SendAck(); } public override bool OnActionDone(object[] param) { if (_lstHandlers.Count == 0) { IsBusy = false; return base.OnActionDone(param); } return true; } public override bool IsWaferPresent(int slotindex) { if (_diPreAlignerWaferOn != null) return !_diPreAlignerWaferOn.Value; return IsWaferPresenceOnFromCCDSensor || IsWaferPresenceOnFromVacuumSensorOrGripSensor; } public override void Terminate() { _thread.Stop(); if(!SC.ContainsItem($"{_scRoot}.{Name}.CloseConnectionOnShutDown") || SC.GetValue($"{_scRoot}.{Name}.CloseConnectionOnShutDown")) { LOG.Write($"Close connection for {RobotModuleName}"); _connection.Disconnect(); } base.Terminate(); } public void NotifyAlarmByErrorCode(string errorcode) { EV.Notify($"{Name}Error{errorcode}"); } } }