43 lines
1.1 KiB
C#
43 lines
1.1 KiB
C#
using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Text;
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using System.Threading.Tasks;
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using Aitex.Core.RT.Device.Unit;
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namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks
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{
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public interface ILoadLock
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{
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bool CheckAtm();
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bool CheckVacuum();
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bool SetFastVentValve(bool isOpen, out string reason);
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bool SetSlowVentValve(bool isOpen, out string reason);
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bool SetFastPumpValve(bool isOpen, out string reason);
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bool SetSlowPumpValve(bool isOpen, out string reason);
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bool CheckLidOpen();
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bool CheckLidClose();
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bool SetLift(bool isUp, out string reason);
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bool CheckLiftUp();
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bool CheckLiftDown();
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bool CheckTrayClamped();
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bool CheckTrayUnClamped();
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bool SetTrayClamped(bool clamp, out string reason);
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bool CheckWaferClamped();
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bool CheckWaferUnClamped();
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bool SetWaferClamped(bool clamp, out string reason);
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bool CheckWaferPlaced();
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bool CheckTrayPlaced();
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}
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}
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