Sic.Framework/MECF.Framework.RT.Equipment.../HardwareUnits
SL 90fa3468e0 [RT.Equipment]
优化Hiwin Aligner执行命令出错时的信息。

[Simulator]
Aligner模拟器增加BAL返回ERR的选项,允许人为产生错误。
2023-08-22 17:53:38 +08:00
..
Aligners [RT.Equipment] 2023-08-22 17:53:38 +08:00
Breakers/NSXCOM Add project files. 2023-04-13 11:51:03 +08:00
CarrierIdReaders Add project files. 2023-04-13 11:51:03 +08:00
Chillers Add project files. 2023-04-13 11:51:03 +08:00
Common Add project files. 2023-04-13 11:51:03 +08:00
Efems [Common] 2023-05-09 18:11:51 +08:00
FFUs Add project files. 2023-04-13 11:51:03 +08:00
GasFlow [UI.Client] 2023-08-10 16:18:48 +08:00
LoadPorts 1.整理WaferInfoRt类 2023-08-10 14:20:55 +08:00
MFCs Add project files. 2023-04-13 11:51:03 +08:00
MachineVision/Keyence [Common] 2023-04-24 14:11:23 +08:00
OcrReaders 1.整理WaferInfoRt类 2023-08-10 14:20:55 +08:00
OffsetManage [RT.EquipmentLibrary] 2023-08-22 10:27:15 +08:00
Pumps Add project files. 2023-04-13 11:51:03 +08:00
RFMatchs Add project files. 2023-04-13 11:51:03 +08:00
RFs Add project files. 2023-04-13 11:51:03 +08:00
Robots 1.解决WaferRobot PickWafer问题 2023-08-16 10:29:57 +08:00
SMIFs/Brooks Add project files. 2023-04-13 11:51:03 +08:00
Sensors Add project files. 2023-04-13 11:51:03 +08:00
Sevor/NAIS Add project files. 2023-04-13 11:51:03 +08:00
Temps 1.AE开放3通道 2023-07-14 10:17:38 +08:00
ThrottleValves Add project files. 2023-04-13 11:51:03 +08:00
TurboPumps Add project files. 2023-04-13 11:51:03 +08:00
UPS Add project files. 2023-04-13 11:51:03 +08:00
VCE Add project files. 2023-04-13 11:51:03 +08:00
Vacuometer Add project files. 2023-04-13 11:51:03 +08:00
WalkingAixs Add project files. 2023-04-13 11:51:03 +08:00
AsyncSerial.cs Add project files. 2023-04-13 11:51:03 +08:00
AsyncSocket.cs Add project files. 2023-04-13 11:51:03 +08:00
ICommunication.cs Add project files. 2023-04-13 11:51:03 +08:00