266 lines
3.2 KiB
C#
266 lines
3.2 KiB
C#
using System;
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using System.Runtime.Serialization;
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namespace MECF.Framework.Common.Equipment
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{
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[Serializable]
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[DataContract]
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public enum ModuleName
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{
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[EnumMember]
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System,
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[EnumMember]
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LP1,
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[EnumMember]
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LP2,
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[EnumMember]
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LP3,
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[EnumMember]
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LP4,
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[EnumMember]
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LP5,
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[EnumMember]
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LP6,
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[EnumMember]
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LP7,
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[EnumMember]
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LP8,
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[EnumMember]
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LP9,
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[EnumMember]
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LP10,
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[EnumMember]
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VaccumRobot,
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[EnumMember]
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LoadRobot,
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[EnumMember]
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EfemRobot,
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[EnumMember]
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TMRobot,
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[EnumMember]
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Upender,
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[EnumMember]
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EFEM,
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[EnumMember]
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Aligner,
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[EnumMember]
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Aligner1,
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[EnumMember]
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Aligner2,
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[EnumMember]
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AlignerA,
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[EnumMember]
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AlignerB,
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[EnumMember]
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LL1,
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[EnumMember]
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LL2,
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[EnumMember]
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LL3,
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[EnumMember]
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LL4,
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[EnumMember]
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LL5,
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[EnumMember]
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LL6,
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[EnumMember]
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LL7,
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[EnumMember]
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LL8,
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[EnumMember]
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LLA,
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[EnumMember]
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LLB,
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[EnumMember]
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LLC,
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[EnumMember]
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LLD,
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[EnumMember]
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LLE,
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[EnumMember]
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LLF,
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[EnumMember]
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LLG,
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[EnumMember]
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LLH,
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[EnumMember]
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VCE1,
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[EnumMember]
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VCE2,
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[EnumMember]
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VCEA,
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[EnumMember]
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VCEB,
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[EnumMember]
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TM,
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[EnumMember]
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Cooling1,
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[EnumMember]
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Cooling2,
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[EnumMember]
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Buffer,
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[EnumMember]
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Buffer1,
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[EnumMember]
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Buffer2,
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[EnumMember]
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Buffer3,
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[EnumMember]
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Buffer4,
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[EnumMember]
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Buffer5,
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[EnumMember]
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Buffer6,
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[EnumMember]
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PM,
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[EnumMember]
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PM1,
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[EnumMember]
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PM2,
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[EnumMember]
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PM3,
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[EnumMember]
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PM4,
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[EnumMember]
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PM5,
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[EnumMember]
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PM6,
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[EnumMember]
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PM7,
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[EnumMember]
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PM8,
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[EnumMember]
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PMA,
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[EnumMember]
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PMB,
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[EnumMember]
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PMC,
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[EnumMember]
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PMD,
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[EnumMember]
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Spin1L,
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[EnumMember]
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Spin1H,
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[EnumMember]
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Spin2L,
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[EnumMember]
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Spin2H,
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[EnumMember]
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Spin3L,
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[EnumMember]
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Spin3H,
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[EnumMember]
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Spin4L,
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[EnumMember]
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Spin4H,
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[EnumMember]
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Spin5L,
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[EnumMember]
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Spin5H,
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[EnumMember]
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Spin6L,
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[EnumMember]
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Spin6H,
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[EnumMember]
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LDULD,
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[EnumMember]
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BufferOut,
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[EnumMember]
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BufferIn,
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[EnumMember]
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Dryer,
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[EnumMember]
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QDR,
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[EnumMember]
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Robot,
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[EnumMember]
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Handler,
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[EnumMember]
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WIDReader1,
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[EnumMember]
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WIDReader2,
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[EnumMember]
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LL1IN,
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[EnumMember]
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LL1OUT,
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[EnumMember]
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LL2IN,
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[EnumMember]
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LL2OUT,
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[EnumMember]
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TurnOverStation,
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[EnumMember]
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Host,
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[EnumMember]
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PTR,
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[EnumMember]
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Cooling,
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[EnumMember]
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Cassette,
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[EnumMember]
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CassInnerL,
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[EnumMember]
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CassInnerR,
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[EnumMember]
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CassOuterL,
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[EnumMember]
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CassOuterR,
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[EnumMember]
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CassAL,
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[EnumMember]
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CassAR,
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[EnumMember]
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CassBL,
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[EnumMember]
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CassBR,
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[EnumMember]
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Shuttle,
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[EnumMember]
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CoolingBuffer1,
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[EnumMember]
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CoolingBuffer2,
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[EnumMember]
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LoadLock,
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[EnumMember]
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SMIFLeft,
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[EnumMember]
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SMIFRight,
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[EnumMember]
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SMIFA,
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[EnumMember]
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SMIFB,
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[EnumMember]
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SPM1,
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[EnumMember]
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SPM2,
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[EnumMember]
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BRM1,
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[EnumMember]
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BRM2,
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[EnumMember]
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CCU,
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[EnumMember]
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Buffer7,
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[EnumMember]
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Buffer8,
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[EnumMember]
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TurnStation,
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[EnumMember]
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UnLoad,
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[EnumMember]
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WaferRobot,
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[EnumMember]
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TrayRobot,
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[EnumMember]
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Load,
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/// <summary>
|
||
/// δ<><CEB4><EFBFBD><EFBFBD><EFBFBD><EFBFBD>ģ<EFBFBD><C4A3><EFBFBD><EFBFBD><EFBFBD>ơ<EFBFBD>
|
||
/// </summary>
|
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[EnumMember]
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UnDefined = int.MaxValue
|
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}
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}
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