312 lines
11 KiB
XML
312 lines
11 KiB
XML
<?xml version="1.0" encoding="utf-8"?>
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<root>
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<resheader name="resmimetype">
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<value>text/microsoft-resx</value>
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</resheader>
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<resheader name="version">
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<value>1.3</value>
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</resheader>
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<resheader name="reader">
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<value>System.Resources.ResXResourceReader, System.Windows.Forms, Version=2.0.0.0, Culture=neutral, PublicKeyToken=b77a5c561934e089</value>
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</resheader>
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<resheader name="writer">
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<value>System.Resources.ResXResourceWriter, System.Windows.Forms, Version=2.0.0.0, Culture=neutral, PublicKeyToken=b77a5c561934e089</value>
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</resheader>
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<data name="ID_BTN_ProcessStart_Content" xml:space="preserve">
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<value>启动</value>
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</data>
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<data name="ID_BTN_ProcessStart_ToolTip" xml:space="preserve">
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<value>启动工艺</value>
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</data>
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<data name="ID_BTN_ProcessSkip_Content" xml:space="preserve">
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<value>跳步</value>
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</data>
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<data name="ID_BTN_ProcessSkip_ToolTip" xml:space="preserve">
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<value>跳过当前步骤</value>
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</data>
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<data name="ID_BTN_ProcessPause_ToolTip" xml:space="preserve">
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<value>当前步骤结束后暂停工艺</value>
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</data>
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<data name="ID_BTN_ProcessPause_Content" xml:space="preserve">
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<value>暂停</value>
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</data>
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<data name="ID_BTN_ProcessContinue_Content" xml:space="preserve">
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<value>继续</value>
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</data>
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<data name="ID_BTN_ProcessContinue_ToolTip" xml:space="preserve">
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<value>继续工艺</value>
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</data>
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<data name="ID_BTN_ProcessAbort_Content" xml:space="preserve">
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<value>终止</value>
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</data>
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<data name="ID_BTN_ProcessAbort_ToolTip" xml:space="preserve">
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<value>终止工艺</value>
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</data>
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<data name="ID_BTN_ProcessMonitor_Content" xml:space="preserve">
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<value>监视器</value>
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</data>
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<data name="ID_BTN_ProcessMonitor_ToolTip" xml:space="preserve">
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<value>打开试试工艺数据监视器</value>
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</data>
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<data name="ID_BTN_SelectRecipe_Content" xml:space="preserve">
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<value>选择</value>
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</data>
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<data name="ID_BTN_SelectRecipe_ToolTip" xml:space="preserve">
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<value>选择配方</value>
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</data>
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<data name="ID_TXT_Recipe" xml:space="preserve">
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<value>配方</value>
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</data>
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<data name="ID_TXT_RecipeName" xml:space="preserve">
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<value>配方</value>
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</data>
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<data name="ID_TXT_RecipeStepTime" xml:space="preserve">
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<value>步骤时长(秒)</value>
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</data>
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<data name="ID_TXT_RecipeStepName" xml:space="preserve">
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<value>步骤名称</value>
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</data>
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<data name="ID_TXT_RecipeTime" xml:space="preserve">
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<value>配方时长(秒)</value>
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</data>
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<data name="ID_TXT_GasMol" xml:space="preserve">
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<value>摩尔</value>
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</data>
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<data name="ID_TXT_GasFlow" xml:space="preserve">
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<value>流量</value>
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</data>
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<data name="ID_TXT_GasSource" xml:space="preserve">
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<value>气源</value>
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</data>
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<data name="ID_TXT_RecipeStepNo" xml:space="preserve">
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<value>步骤</value>
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</data>
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<data name="ID_BTN_LockRecipe_Content" xml:space="preserve">
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<value>锁定</value>
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</data>
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<data name="ID_BTN_LockRecipe_ToolTip" xml:space="preserve">
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<value>锁定配方</value>
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</data>
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<data name="ID_BTN_UpdateRecipeInProcess_Content" xml:space="preserve">
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<value>在线更新</value>
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</data>
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<data name="ID_BTN_UpdateRecipeInProcess_ToolTip" xml:space="preserve">
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<value>立即更新正在工艺的配方</value>
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</data>
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<data name="ID_TXT_GasFlowStat" xml:space="preserve">
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<value>气体流量统计</value>
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</data>
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<data name="ID_TXT_GasFlowHistorySearch" xml:space="preserve">
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<value>气体流量历史查询</value>
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</data>
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<data name="ID_TXT_GasName" xml:space="preserve">
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<value>名称</value>
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</data>
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<data name="ID_TXT_RunVolume" xml:space="preserve">
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<value>沉积(m³)</value>
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</data>
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<data name="ID_TXT_VentVolume" xml:space="preserve">
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<value>充气(m³)</value>
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</data>
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<data name="ID_TXT_TotalVolume" xml:space="preserve">
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<value>总计(m³)</value>
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</data>
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<data name="ID_TXT_Duration" xml:space="preserve">
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<value>时间范围</value>
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</data>
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<data name="ID_TXT_PowerKWH" xml:space="preserve">
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<value>功率(kWh)</value>
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</data>
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<data name="ID_BTN_OP_AtmIdle_Content" xml:space="preserve">
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<value>大气空闲</value>
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</data>
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<data name="ID_BTN_OP_AtmIdle_ToolTip" xml:space="preserve">
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<value>切换到空闲状态并保持在大气压下</value>
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</data>
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<data name="ID_BTN_OP_VacIdle_Content" xml:space="preserve">
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<value>真空空闲</value>
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</data>
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<data name="ID_BTN_OP_VacIdle_ToolTip" xml:space="preserve">
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<value>切换到空闲状态并保持在真空下</value>
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</data>
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<data name="ID_BTN_OP_ProcessIdle_Content" xml:space="preserve">
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<value>工艺空闲</value>
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</data>
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<data name="ID_BTN_OP_ProcessIdle_ToolTip" xml:space="preserve">
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<value>切换到空闲模式并准备好运行工艺</value>
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</data>
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<data name="ID_BTN_Exchange_TCS_Content" xml:space="preserve">
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<value>更换TCS</value>
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</data>
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<data name="ID_BTN_Exchange_TCS_ToolTip" xml:space="preserve">
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<value>更换到TCS</value>
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</data>
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<data name="ID_BTN_Exchange_TMA_Content" xml:space="preserve">
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<value>更换TMA</value>
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</data>
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<data name="ID_BTN_Exchange_TMA_ToolTip" xml:space="preserve">
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<value>更换到TMA</value>
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</data>
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<data name="ID_BTN_Isolation_Content" xml:space="preserve">
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<value>腔体隔离</value>
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</data>
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<data name="ID_BTN_Isolation_ToolTip" xml:space="preserve">
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<value>腔体隔离</value>
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</data>
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<data name="ID_BTN_LeakCheck_Content" xml:space="preserve">
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<value>设备检漏</value>
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</data>
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<data name="ID_BTN_LeakCheck_ToolTip" xml:space="preserve">
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<value>腔体漏气检查</value>
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</data>
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<data name="ID_TXT_Reactor_Status" xml:space="preserve">
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<value>腔体状态</value>
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</data>
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<data name="ID_TXT_Reactor_Service" xml:space="preserve">
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<value>腔体服务</value>
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</data>
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<data name="ID_TXT_Sensor" xml:space="preserve">
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<value>感应器</value>
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</data>
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<data name="ID_TXT_Cooling_Water" xml:space="preserve">
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<value>水冷系统</value>
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</data>
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<data name="ID_TXT_Resistance" xml:space="preserve">
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<value>加热丝监控</value>
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</data>
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<data name="ID_TXT_Cham_Lid_Closed" xml:space="preserve">
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<value>腔体盖子关闭</value>
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</data>
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<data name="ID_TXT_Cham_Cab_Door_Closed" xml:space="preserve">
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<value>反应腔模块门关闭</value>
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</data>
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<data name="ID_TXT_GB_Door_Closed" xml:space="preserve">
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<value>气柜门关闭</value>
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</data>
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<data name="ID_TXT_GB_Water_Leak" xml:space="preserve">
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<value>气柜漏水</value>
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</data>
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<data name="ID_TXT_PR_Water_Leak" xml:space="preserve">
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<value>电柜漏水</value>
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</data>
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<data name="ID_TXT_Reactor_Water_Leak" xml:space="preserve">
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<value>腔体漏水</value>
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</data>
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<data name="ID_TXT_Cham_Press_Above_ATM" xml:space="preserve">
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<value>腔体超压</value>
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</data>
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<data name="ID_TXT_DOR_Press_VAC" xml:space="preserve">
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<value>双密封圈内真空</value>
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</data>
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<data name="ID_TXT_Water1" xml:space="preserve">
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<value>水温1</value>
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</data>
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<data name="ID_TXT_Water2" xml:space="preserve">
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<value>水温2</value>
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</data>
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<data name="ID_TXT_R" xml:space="preserve">
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<value>电阻 (Ω)</value>
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</data>
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<data name="ID_TXT_PSU1_Resistance" xml:space="preserve">
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<value>内部电阻1 (Ω)</value>
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</data>
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<data name="ID_TXT_PSU2_Resistance" xml:space="preserve">
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<value>中部电阻2 (Ω)</value>
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</data>
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<data name="ID_TXT_PSU3_Resistance" xml:space="preserve">
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<value>外部电阻3 (Ω)</value>
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</data>
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<data name="ID_TXT_SCR1_Resistance" xml:space="preserve">
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<value>上部电阻1 (Ω)</value>
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</data>
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<data name="ID_TXT_SCR2_Resistance" xml:space="preserve">
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<value>中部电阻2 (Ω)</value>
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</data>
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<data name="ID_TXT_SCR3_Resistance" xml:space="preserve">
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<value>下部电阻3 (Ω)</value>
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</data>
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<data name="ID_TXT_MFC_Set" xml:space="preserve">
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<value>MFC设置</value>
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</data>
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<data name="ID_TXT_Reactor_Pressure" xml:space="preserve">
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<value>腔体压力(mbar)</value>
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</data>
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<data name="ID_TXT_Flow" xml:space="preserve">
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<value>流量(sccm)</value>
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</data>
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<data name="ID_TXT_Ramp_Time" xml:space="preserve">
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<value>渐变时间(s)</value>
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</data>
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<data name="ID_TXT_Standard_MFC" xml:space="preserve">
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<value>基准MFC</value>
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</data>
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<data name="ID_TXT_Differential_Pressure" xml:space="preserve">
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<value>腔体压差</value>
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</data>
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<data name="ID_TXT_Pressure1" xml:space="preserve">
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<value>压力1(mbar)</value>
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</data>
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<data name="ID_TXT_Pressure2" xml:space="preserve">
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<value>压力2(mbar)</value>
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</data>
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<data name="ID_TXT_Pressure3" xml:space="preserve">
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<value>压力3(mbar)</value>
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</data>
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<data name="ID_TXT_Pressure4" xml:space="preserve">
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<value>压力4(mbar)</value>
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</data>
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<data name="ID_TXT_Mean_Pressure_Difference" xml:space="preserve">
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<value>腔体平均压差(mbar)</value>
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</data>
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<data name="ID_TXT_MFC_Actual_Flow" xml:space="preserve">
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<value>MFC实际流量(sccm)</value>
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</data>
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<data name="ID_TXT_MFC_Set_Flow" xml:space="preserve">
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<value>MFC设定流量(sccm)</value>
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</data>
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<data name="ID_TXT_Set_Flow" xml:space="preserve">
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<value>设定流量 (sccm)</value>
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</data>
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<data name="ID_TXT_Reactor_Temp" xml:space="preserve">
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<value>反应腔温度</value>
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</data>
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<data name="ID_TXT_Reactor_Volume" xml:space="preserve">
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<value>腔体体积</value>
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</data>
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<data name="ID_TXT_Pressure_Recording_Interval" xml:space="preserve">
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<value>压力记录时间间隔 (s)</value>
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</data>
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<data name="ID_TXT_Pressure" xml:space="preserve">
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<value>压力 (mbar)</value>
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</data>
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<data name="ID_TXT_Set_Standard_MFC" xml:space="preserve">
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<value>设定为标准MFC</value>
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</data>
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<data name="ID_TXT_MFC_Range" xml:space="preserve">
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<value>MFC量程 (sccm)</value>
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</data>
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<data name="ID_TXT_Deviation" xml:space="preserve">
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<value>偏差</value>
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</data>
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<data name="ID_TXT_ROR_Test_Result" xml:space="preserve">
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<value>ROR测试结果</value>
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</data>
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<data name="ID_BTN_Restore_Content" xml:space="preserve">
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<value>还原</value>
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</data>
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<data name="ID_BTN_Restore_ToolTip" xml:space="preserve">
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<value>放弃更改并恢复到修改前的基准配方</value>
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</data>
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<data name="ID_TXT_To_Baseline_Recipe" xml:space="preserve">
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<value>基准配方</value>
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</data>
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<data name="ID_BTN_Save_Content" xml:space="preserve">
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<value>保存</value>
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</data>
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<data name="ID_BTN_Save_ToolTip" xml:space="preserve">
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<value>保存对基准配方的更改</value>
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</data>
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<data name="ID_TXT_Accumulated_Gas_Flow_Statistic" xml:space="preserve">
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<value>累计气体流量统计 (sccm)</value>
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</data>
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</root> |