260 lines
3.7 KiB
C#
260 lines
3.7 KiB
C#
using System;
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using System.Runtime.Serialization;
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namespace MECF.Framework.Common.Equipment
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{
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[Serializable]
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[DataContract]
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public enum ModuleName
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{
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[EnumMember]
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System = 0,
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[EnumMember]
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LP1 = 1,
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[EnumMember]
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LP2 = 2,
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[EnumMember]
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LP3 = 3,
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[EnumMember]
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LP4 = 4,
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[EnumMember]
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LP5 = 5,
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[EnumMember]
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LP6 = 6,
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[EnumMember]
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LP7 = 7,
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[EnumMember]
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LP8 = 8,
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[EnumMember]
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LP9 = 9,
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[EnumMember]
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LP10 = 10,
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[EnumMember]
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VaccumRobot = 11,
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[EnumMember]
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LoadRobot = 12,
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[EnumMember]
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EfemRobot = 13,
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[EnumMember]
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TMRobot = 14,
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[EnumMember]
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Upender = 15,
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[EnumMember]
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EFEM = 16,
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[EnumMember]
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Aligner = 17,
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[EnumMember]
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Aligner1 = 18,
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[EnumMember]
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Aligner2 = 19,
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[EnumMember]
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AlignerA = 20,
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[EnumMember]
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AlignerB = 21,
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[EnumMember]
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LL1 = 22,
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[EnumMember]
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LL2 = 23,
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[EnumMember]
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LL3 = 24,
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[EnumMember]
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LL4 = 25,
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[EnumMember]
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LL5 = 26,
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[EnumMember]
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LL6 = 27,
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[EnumMember]
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LL7 = 28,
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[EnumMember]
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LL8 = 29,
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[EnumMember]
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LLA = 30,
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[EnumMember]
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LLB = 31,
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[EnumMember]
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LLC = 32,
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[EnumMember]
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LLD = 33,
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[EnumMember]
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LLE = 34,
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[EnumMember]
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LLF = 35,
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[EnumMember]
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LLG = 36,
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[EnumMember]
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LLH = 37,
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[EnumMember]
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VCE1 = 38,
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[EnumMember]
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VCE2 = 39,
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[EnumMember]
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VCEA = 40,
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[EnumMember]
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VCEB = 41,
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[EnumMember]
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TM = 42,
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[EnumMember]
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Cooling1 = 43,
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[EnumMember]
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Cooling2 = 44,
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[EnumMember]
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Buffer = 45,
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[EnumMember]
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Buffer1 = 46,
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[EnumMember]
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Buffer2 = 47,
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[EnumMember]
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Buffer3 = 48,
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[EnumMember]
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Buffer4 = 49,
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[EnumMember]
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Buffer5 = 50,
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[EnumMember]
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Buffer6 = 51,
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[EnumMember]
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PM = 52,
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[EnumMember]
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PM1 = 53,
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[EnumMember]
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PM2 = 54,
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[EnumMember]
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PM3 = 55,
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[EnumMember]
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PM4 = 56,
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[EnumMember]
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PM5 = 57,
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[EnumMember]
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PM6 = 58,
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[EnumMember]
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PM7 = 59,
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[EnumMember]
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PM8 = 60,
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[EnumMember]
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PMA = 61,
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[EnumMember]
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PMB = 62,
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[EnumMember]
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PMC = 63,
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[EnumMember]
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PMD = 64,
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[EnumMember]
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Spin1L = 65,
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[EnumMember]
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Spin1H = 66,
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[EnumMember]
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Spin2L = 67,
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[EnumMember]
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Spin2H = 68,
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[EnumMember]
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Spin3L = 69,
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[EnumMember]
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Spin3H = 70,
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[EnumMember]
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Spin4L = 71,
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[EnumMember]
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Spin4H = 72,
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[EnumMember]
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Spin5L = 73,
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[EnumMember]
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Spin5H = 74,
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[EnumMember]
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Spin6L = 75,
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[EnumMember]
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Spin6H = 76,
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[EnumMember]
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LDULD = 77,
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[EnumMember]
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BufferOut = 78,
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[EnumMember]
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BufferIn = 79,
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[EnumMember]
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Dryer = 80,
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[EnumMember]
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QDR = 81,
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[EnumMember]
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Robot = 82,
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[EnumMember]
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Handler = 83,
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[EnumMember]
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WIDReader1 = 84,
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[EnumMember]
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WIDReader2 = 85,
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[EnumMember]
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LL1IN = 86,
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[EnumMember]
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LL1OUT = 87,
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[EnumMember]
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LL2IN = 88,
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[EnumMember]
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LL2OUT = 89,
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[EnumMember]
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TurnOverStation = 90,
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[EnumMember]
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Host = 91,
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[EnumMember]
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PTR = 92,
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[EnumMember]
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Cooling = 93,
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[EnumMember]
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Cassette = 94,
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[EnumMember]
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CassInnerL = 95,
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[EnumMember]
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CassInnerR = 96,
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[EnumMember]
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CassOuterL = 97,
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[EnumMember]
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CassOuterR = 98,
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[EnumMember]
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CassAL = 99,
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[EnumMember]
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CassAR = 100,
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[EnumMember]
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CassBL = 101,
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[EnumMember]
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CassBR = 102,
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[EnumMember]
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Shuttle = 103,
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[EnumMember]
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CoolingBuffer1 = 104,
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[EnumMember]
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CoolingBuffer2 = 105,
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[EnumMember]
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LoadLock = 106,
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[EnumMember]
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SMIFLeft = 107,
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[EnumMember]
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SMIFRight = 108,
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[EnumMember]
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SMIFA = 109,
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[EnumMember]
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SMIFB = 110,
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[EnumMember]
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SPM1 = 111,
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[EnumMember]
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SPM2 = 112,
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[EnumMember]
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BRM1 = 113,
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[EnumMember]
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BRM2 = 114,
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[EnumMember]
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CCU = 115,
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[EnumMember]
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Buffer7 = 116,
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[EnumMember]
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Buffer8 = 117,
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[EnumMember]
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TurnStation = 122,
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[EnumMember]
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UnLoad = 138,
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[EnumMember]
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WaferRobot = 139,
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[EnumMember]
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TrayRobot = 140,
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[EnumMember]
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Load = 141
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}
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}
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