808 lines
76 KiB
XML
808 lines
76 KiB
XML
<?xml version="1.0" encoding="UTF-8"?>
|
|
<IO_DEFINE xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
|
|
<VersionID Name="V2.2.3.0" />
|
|
<Dig_In>
|
|
<DI_ITEM Index="0" Name="DI_ChamLidClosed" BufferOffset="0" Addr="0" Description="" />
|
|
<DI_ITEM Index="3" Name="DI_ChamCabDoorClosed" BufferOffset="3" Addr="3" Description="" />
|
|
<DI_ITEM Index="4" Name="DI_ChamPressAboveATMSW" BufferOffset="4" Addr="4" Description="" />
|
|
<DI_ITEM Index="5" Name="DI_ChamAtSafeProcessPressSW" BufferOffset="5" Addr="5" Description=""/>
|
|
<DI_ITEM Index="6" Name="DI_DORPressVacSW" BufferOffset="6" Addr="6" Description="" />
|
|
<DI_ITEM Index="7" Name="DI_DORPressATMSW" BufferOffset="7" Addr="7" Description="" />
|
|
<DI_ITEM Index="9" Name="DI_PMATMSW" BufferOffset="9" Addr="9" Description="" />
|
|
<DI_ITEM Index="10" Name="DI_HeaterTempUpLimitSW" BufferOffset="10" Addr="10" Description="" />
|
|
<DI_ITEM Index="11" Name="DI_HeaterTempLowLimitSW" BufferOffset="11" Addr="11" Description="" />
|
|
<DI_ITEM Index="12" Name="DI_ConfinementRingUp" BufferOffset="12" Addr="12" Description="" />
|
|
<DI_ITEM Index="13" Name="DI_SusceptorAtSafeSpeed" BufferOffset="13" Addr="13" Description="" />
|
|
<DI_ITEM Index="15" Name="DI_SHFlowSW" BufferOffset="15" Addr="15" Description="" />
|
|
<DI_ITEM Index="16" Name="DI_ChamTopFlowSW" BufferOffset="16" Addr="16" Description="" />
|
|
<DI_ITEM Index="17" Name="DI_ChamMiddleFlow1SW" BufferOffset="17" Addr="17" Description="" />
|
|
<DI_ITEM Index="18" Name="DI_ChamBottomFlowSW" BufferOffset="18" Addr="18" Description="" />
|
|
<DI_ITEM Index="19" Name="DI_ChamBottomPlateSW" BufferOffset="19" Addr="19" Description="" />
|
|
<DI_ITEM Index="20" Name="DI_PowerRod1FlowSW" BufferOffset="20" Addr="20" Description="" />
|
|
<DI_ITEM Index="21" Name="DI_PowerRod2FlowSW" BufferOffset="21" Addr="21" Description="" />
|
|
<DI_ITEM Index="22" Name="DI_ForelineFlow2SW" BufferOffset="22" Addr="22" Description="" />
|
|
<DI_ITEM Index="23" Name="DI_ElectrodeWFlowSW" BufferOffset="23" Addr="23" Description="" />
|
|
<DI_ITEM Index="24" Name="DI_TMPumpFlowSW" BufferOffset="24" Addr="24" Description="" />
|
|
<DI_ITEM Index="25" Name="DI_TransformerFlowSW" BufferOffset="25" Addr="25" Description="" />
|
|
<DI_ITEM Index="26" Name="DI_TMTopLidFlowSW" BufferOffset="26" Addr="26" Description=""/>
|
|
<DI_ITEM Index="27" Name="DI_InletTotalFlowLowSW" BufferOffset="27" Addr="27" Description="" />
|
|
<DI_ITEM Index="28" Name="DI_InletTotalFlowHighSW" BufferOffset="28" Addr="28" Description="" />
|
|
<DI_ITEM Index="29" Name="DI_PowerRackExhaustDPSW" BufferOffset="29" Addr="29" Description="" />
|
|
<DI_ITEM Index="30" Name="DI_PMH2DetectorSW" BufferOffset="30" Addr="30" Description="" />
|
|
<DI_ITEM Index="31" Name="DI_GBHCLDetectorSW" BufferOffset="31" Addr="31" Description="" />
|
|
<DI_ITEM Index="32" Name="DI_GBExhaustDPSW" BufferOffset="32" Addr="32" Description="" />
|
|
<DI_ITEM Index="33" Name="DI_GBDoorClosed" BufferOffset="33" Addr="33" Description="" />
|
|
<DI_ITEM Index="35" Name="DI_GasPipeTempCtrlAlarm" BufferOffset="35" Addr="35" Description="" />
|
|
<DI_ITEM Index="36" Name="DI_DryPumpAlarm" BufferOffset="36" Addr="36" Description="" />
|
|
<DI_ITEM Index="38" Name="DI_PumpExhaustPressSW" BufferOffset="38" Addr="38" Description="" />
|
|
<DI_ITEM Index="39" Name="DI_PMAExhaustDPSW" BufferOffset="39" Addr="39" Description="" />
|
|
<DI_ITEM Index="40" Name="DI_PumpExhaustDPSW" BufferOffset="40" Addr="40" Description="" />
|
|
<DI_ITEM Index="41" Name="DI_ScrubberIntlkSW" BufferOffset="41" Addr="41" Description="" />
|
|
<DI_ITEM Index="42" Name="DI_FacilityIntlkSW" BufferOffset="42" Addr="42" Description="" />
|
|
<DI_ITEM Index="43" Name="DI_TCSAlarm" BufferOffset="43" Addr="43" Description="" />
|
|
<DI_ITEM Index="45" Name="DI_ServoDriverFaultSW" BufferOffset="45" Addr="45" Description="" />
|
|
<DI_ITEM Index="46" Name="DI_ChamMiddleFlow2SW" BufferOffset="46" Addr="46" Description="" />
|
|
<DI_ITEM Index="47" Name="DI_SpareSW" BufferOffset="47" Addr="47" Description="" />
|
|
<DI_ITEM Index="48" Name="DI_ReactorWaterLeakSW" BufferOffset="48" Addr="48" Description="" />
|
|
<DI_ITEM Index="49" Name="DI_ChamLidPushButtonLocal" BufferOffset="49" Addr="49" Description="" />
|
|
<DI_ITEM Index="50" Name="DI_ConfinementRingDown" BufferOffset="50" Addr="50" Description="" />
|
|
<DI_ITEM Index="51" Name="DI_ReactorSuspectorCheck" BufferOffset="51" Addr="51" Description="" />
|
|
<DI_ITEM Index="52" Name="DI_ReactorHCLDetectorSW" BufferOffset="52" Addr="52" Description="" />
|
|
<DI_ITEM Index="55" Name="DI_GN2InletPressSW" BufferOffset="55" Addr="55" Description="" />
|
|
<DI_ITEM Index="56" Name="DI_ArInletPressSW" BufferOffset="56" Addr="56" Description="" />
|
|
<DI_ITEM Index="57" Name="DI_H2PressureSW" BufferOffset="57" Addr="57" Description="" />
|
|
<DI_ITEM Index="59" Name="DI_GBH2DetectorSW" BufferOffset="59" Addr="59" Description="" />
|
|
<DI_ITEM Index="60" Name="DI_GBWaterLeakSW" BufferOffset="60" Addr="60" Description="" />
|
|
<DI_ITEM Index="61" Name="DI_ShutterUpLimitSW" BufferOffset="61" Addr="61" Description="" />
|
|
<DI_ITEM Index="62" Name="DI_ShutterDownLimitSW" BufferOffset="62" Addr="62" Description="" />
|
|
<DI_ITEM Index="65" Name="DI_DryPump1Running" BufferOffset="65" Addr="65" Description="" />
|
|
<DI_ITEM Index="67" Name="DI_DryPump1Warning" BufferOffset="67" Addr="67" Description="" />
|
|
<DI_ITEM Index="70" Name="DI_EMOStatusSW" BufferOffset="70" Addr="70" Description="" />
|
|
<DI_ITEM Index="71" Name="DI_PumpCabDoorClosed" BufferOffset="71" Addr="71" Description="" />
|
|
<DI_ITEM Index="72" Name="DI_FacilityWarningSW" BufferOffset="72" Addr="72" Description="" />
|
|
<DI_ITEM Index="76" Name="DI_MainCBStatusSW" BufferOffset="76" Addr="76" Description="" />
|
|
<DI_ITEM Index="77" Name="DI_PowerRackWaterLeakSW" BufferOffset="77" Addr="77" Description="" />
|
|
<DI_ITEM Index="78" Name="DI_UPS1Enable" BufferOffset="78" Addr="78" Description="" />
|
|
<DI_ITEM Index="79" Name="DI_UPS2Enable" BufferOffset="79" Addr="79" Description="" />
|
|
<DI_ITEM Index="81" Name="DI_ProcessStopSW" BufferOffset="81" Addr="81" Description="" />
|
|
<DI_ITEM Index="83" Name="DI_TransformerOTSW" BufferOffset="83" Addr="83" Description="" />
|
|
<DI_ITEM Index="84" Name="DI_UPS1LowBattery" BufferOffset="84" Addr="84" Description="" />
|
|
<DI_ITEM Index="85" Name="DI_UPS2LowBattery" BufferOffset="85" Addr="85" Description="" />
|
|
<DI_ITEM Index="88" Name="DI_ManualLidOPLocal" BufferOffset="88" Addr="88" Description="" />
|
|
<DI_ITEM Index="89" Name="DI_ManualLidUpPB" BufferOffset="89" Addr="89" Description="" />
|
|
<DI_ITEM Index="90" Name="DI_ManualLidDownPB" BufferOffset="90" Addr="90" Description="" />
|
|
<DI_ITEM Index="91" Name="DI_ManualLidUpLockPB" BufferOffset="91" Addr="91" Description="" />
|
|
<DI_ITEM Index="92" Name="DI_ManualLidForwardPB" BufferOffset="92" Addr="92" Description="" />
|
|
<DI_ITEM Index="93" Name="DI_ManualLidBackwardPB" BufferOffset="93" Addr="93" Description="" />
|
|
<DI_ITEM Index="96" Name="DI_ChamMoveBodyUp" BufferOffset="96" Addr="96" Description="" />
|
|
<DI_ITEM Index="97" Name="DI_ChamMoveBodyUpLatchFW" BufferOffset="97" Addr="97" Description="" />
|
|
<DI_ITEM Index="98" Name="DI_ChamMoveBodyDown" BufferOffset="98" Addr="98" Description="" />
|
|
<DI_ITEM Index="99" Name="DI_ChamMoveBodyFront" BufferOffset="99" Addr="99" Description="" />
|
|
<DI_ITEM Index="100" Name="DI_ChamMoveBodyEnd" BufferOffset="100" Addr="100" Description="" />
|
|
<DI_ITEM Index="101" Name="DI_ChamMoveBodyEndLatchBW" BufferOffset="101" Addr="101" Description="" />
|
|
<DI_ITEM Index="102" Name="DI_SHGasConnectorLoosen" BufferOffset="102" Addr="102" Description="" />
|
|
<DI_ITEM Index="103" Name="DI_SHGasConnectorTighten" BufferOffset="103" Addr="103" Description="" />
|
|
<DI_ITEM Index="104" Name="DI_SHLidLoosen" BufferOffset="104" Addr="104" Description="" />
|
|
<DI_ITEM Index="105" Name="DI_SHLidTighten" BufferOffset="105" Addr="105" Description="" />
|
|
<DI_ITEM Index="106" Name="DI_SHLidClosed" BufferOffset="106" Addr="106" Description="" />
|
|
<DI_ITEM Index="107" Name="DI_SHLidSwingLock" BufferOffset="107" Addr="107" Description="" />
|
|
<DI_ITEM Index="108" Name="DI_SHLidSwingUnlock" BufferOffset="108" Addr="108" Description="" />
|
|
<DI_ITEM Index="118" Name="DI_MiddleLidLoosen" BufferOffset="118" Addr="118" Description="" />
|
|
<DI_ITEM Index="119" Name="DI_MiddleLidTighten" BufferOffset="119" Addr="119" Description="" />
|
|
<DI_ITEM Index="120" Name="DI_MiddleLidClosed" BufferOffset="120" Addr="120" Description="" />
|
|
<DI_ITEM Index="121" Name="DI_MiddleLidSwingLock" BufferOffset="121" Addr="121" Description="" />
|
|
<DI_ITEM Index="122" Name="DI_MiddleLidSwingUnlock" BufferOffset="122" Addr="122" Description="" />
|
|
<DI_ITEM Index="152" Name="DI_SuspectorCheck" BufferOffset="152" Addr="152" Description="" />
|
|
<DI_ITEM Index="160" Name="DI_TCSSupply" BufferOffset="160" Addr="160" Description="" />
|
|
<DI_ITEM Index="161" Name="DI_H2SupplyFB(V31)" BufferOffset="161" Addr="161" Description="" />
|
|
<DI_ITEM Index="162" Name="DI_ArSupplyFB(V32)" BufferOffset="162" Addr="162" Description="" />
|
|
<DI_ITEM Index="163" Name="DI_SHH2/ArSwitchFB(V33)" BufferOffset="163" Addr="163" Description="" />
|
|
<DI_ITEM Index="165" Name="DI_H2ArLine1FB(V35)" BufferOffset="165" Addr="165" Description="" />
|
|
<DI_ITEM Index="166" Name="DI_H2ArLine2FB(V36)" BufferOffset="166" Addr="166" Description="" />
|
|
<DI_ITEM Index="167" Name="DI_N2SwitchFB(V37)" BufferOffset="167" Addr="167" Description="" />
|
|
<DI_ITEM Index="169" Name="DI_DilutedN2Run/VentFB(V39)" BufferOffset="169" Addr="169" Description="" />
|
|
<DI_ITEM Index="170" Name="DI_HighN2Run/VentFB(V40)" BufferOffset="170" Addr="170" Description="" />
|
|
<DI_ITEM Index="171" Name="DI_TMARunFB(V41)" BufferOffset="171" Addr="171" Description="" />
|
|
<DI_ITEM Index="172" Name="DI_TMAVentFB(V42)" BufferOffset="172" Addr="172" Description="" />
|
|
<DI_ITEM Index="173" Name="DI_TMAReleaseFB(V43)" BufferOffset="173" Addr="173" Description="" />
|
|
<DI_ITEM Index="175" Name="DI_TMABypassFB(V45)" BufferOffset="175" Addr="175" Description="" />
|
|
<DI_ITEM Index="176" Name="DI_TMAVacFB(V46)" BufferOffset="176" Addr="176" Description="" />
|
|
<DI_ITEM Index="178" Name="DI_TCSReleaseFB(V48)" BufferOffset="178" Addr="178" Description="" />
|
|
<DI_ITEM Index="179" Name="DI_TCSBypassFB(V49)" BufferOffset="179" Addr="179" Description="" />
|
|
<DI_ITEM Index="180" Name="DI_TCSVacFB(V50)" BufferOffset="180" Addr="180" Description="" />
|
|
<DI_ITEM Index="181" Name="DI_HCLSwitchFB(V51)" BufferOffset="181" Addr="181" Description="" />
|
|
<DI_ITEM Index="182" Name="DI_SiH4SwitchFB(V52)" BufferOffset="182" Addr="182" Description="" />
|
|
<DI_ITEM Index="183" Name="DI_TCSRun/VentFB(V53)" BufferOffset="183" Addr="183" Description="" />
|
|
<DI_ITEM Index="184" Name="DI_HCLRun/VentFB(V54)" BufferOffset="184" Addr="184" Description="" />
|
|
<DI_ITEM Index="185" Name="DI_SiH4RunFB(V55)" BufferOffset="185" Addr="185" Description="" />
|
|
<DI_ITEM Index="186" Name="DI_SiH4VentFB(V56)" BufferOffset="186" Addr="186" Description="" />
|
|
<DI_ITEM Index="188" Name="DI_C2H4SwitchFB(V58)" BufferOffset="188" Addr="188" Description="" />
|
|
<DI_ITEM Index="189" Name="DI_C2H4RunFB(V59)" BufferOffset="189" Addr="189" Description="" />
|
|
<DI_ITEM Index="190" Name="DI_C2H4VentFB(V60)" BufferOffset="190" Addr="190" Description="" />
|
|
<DI_ITEM Index="192" Name="DI_DoppingFinalFB(V61)" BufferOffset="192" Addr="192" Description="" />
|
|
<DI_ITEM Index="193" Name="DI_SilaneFinalFB(V62)" BufferOffset="193" Addr="193" Description="" />
|
|
<DI_ITEM Index="194" Name="DI_PropaneFinalFB(V63)" BufferOffset="194" Addr="194" Description="" />
|
|
<DI_ITEM Index="199" Name="DI_ChamBodyArPurgeFB(V68)" BufferOffset="199" Addr="199" Description="" />
|
|
<DI_ITEM Index="200" Name="DI_SHPurgeFinalFB(V87)" BufferOffset="200" Addr="200" Description="" />
|
|
<DI_ITEM Index="201" Name="DI_OuterGasFinalFB(V88)" BufferOffset="201" Addr="201" Description="" />
|
|
<DI_ITEM Index="202" Name="DI_ReactorLeakCheckFB(V69)" BufferOffset="202" Addr="202" Description="" />
|
|
<DI_ITEM Index="203" Name="DI_TMPressBalanceFB(V70)" BufferOffset="203" Addr="203" Description="" />
|
|
<DI_ITEM Index="205" Name="DI_GasBoxVentPumpFB(V72)" BufferOffset="205" Addr="205" Description="" />
|
|
<DI_ITEM Index="206" Name="DI_MOVacFB(V73)" BufferOffset="206" Addr="206" Description="" />
|
|
<DI_ITEM Index="207" Name="DI_GasboxLeakCheckFB(V74)" BufferOffset="207" Addr="207" Description="" />
|
|
<DI_ITEM Index="208" Name="DI_DORVacFB(V75)" BufferOffset="208" Addr="208" Description="" />
|
|
<DI_ITEM Index="209" Name="DI_DORRefillFB(V76)" BufferOffset="209" Addr="209" Description="" />
|
|
<DI_ITEM Index="212" Name="DI_PumpBypassFB(V27)" BufferOffset="212" Addr="212" Description="" />
|
|
<DI_ITEM Index="216" Name="DI_PSUEnableFB" BufferOffset="216" Addr="216" Description="" />
|
|
<DI_ITEM Index="217" Name="DI_InnerHeaterEnableFB" BufferOffset="217" Addr="217" Description="" />
|
|
<DI_ITEM Index="218" Name="DI_MiddleHeaterEnableFB" BufferOffset="218" Addr="218" Description="" />
|
|
<DI_ITEM Index="219" Name="DI_OuterHeaterEnableFB" BufferOffset="219" Addr="219" Description="" />
|
|
<DI_ITEM Index="220" Name="DI_LineHeaterEnableFB" BufferOffset="220" Addr="220" Description="" />
|
|
<DI_ITEM Index="224" Name="DI_ChamMoveBodyUpFB" BufferOffset="224" Addr="224" Description="" />
|
|
<DI_ITEM Index="225" Name="DI_ChamMoveBodyDownFB" BufferOffset="225" Addr="225" Description="" />
|
|
<DI_ITEM Index="227" Name="DI_ChamMoveBodyForwardFB" BufferOffset="227" Addr="227" Description="" />
|
|
<DI_ITEM Index="228" Name="DI_ChamMoveBodyBackwardFB" BufferOffset="228" Addr="228" Description="" />
|
|
<DI_ITEM Index="229" Name="DI_SHGasConnectorLoosenFB" BufferOffset="229" Addr="229" Description="" />
|
|
<DI_ITEM Index="230" Name="DI_SHGasConnectorTightenFB" BufferOffset="230" Addr="230" Description="" />
|
|
<DI_ITEM Index="231" Name="DI_SHLidLoosenFB" BufferOffset="231" Addr="231" Description="" />
|
|
<DI_ITEM Index="232" Name="DI_SHLidTightenFB" BufferOffset="232" Addr="232" Description="" />
|
|
<DI_ITEM Index="233" Name="DI_SHLidSwingLockFB" BufferOffset="233" Addr="233" Description="" />
|
|
<DI_ITEM Index="234" Name="DI_SHLidSwingUnlockFB" BufferOffset="234" Addr="234" Description="" />
|
|
<DI_ITEM Index="235" Name="DI_ChamMoveBodyBrakerForwardFB" BufferOffset="235" Addr="235" Description="" />
|
|
<DI_ITEM Index="236" Name="DI_ChamMoveBodyBrakerBackwardFB" BufferOffset="236" Addr="236" Description="" />
|
|
<DI_ITEM Index="243" Name="DI_MiddleLidLoosenFB" BufferOffset="243" Addr="243" Description="" />
|
|
<DI_ITEM Index="244" Name="DI_MiddleLidTightenFB" BufferOffset="244" Addr="244" Description="" />
|
|
<DI_ITEM Index="245" Name="DI_MiddleLidSwingLockFB" BufferOffset="245" Addr="245" Description="" />
|
|
<DI_ITEM Index="246" Name="DI_MiddleLidSwingUnlockFB" BufferOffset="246" Addr="246" Description="" />
|
|
<DI_ITEM Index="256" Name="DI_ConfinementRingUpFB" BufferOffset="256" Addr="256" Description="" />
|
|
<DI_ITEM Index="257" Name="DI_ConfinementRingDownFB" BufferOffset="257" Addr="257" Description="" />
|
|
<DI_ITEM Index="259" Name="DI_ChamMoveBodyUpBrakeFB" BufferOffset="259" Addr="259" Description="" />
|
|
<DI_ITEM Index="260" Name="DI_ChamMoveBodyUpDownEnableFB" BufferOffset="260" Addr="260" Description="" />
|
|
<DI_ITEM Index="263" Name="DI_TowerGreenFB" BufferOffset="263" Addr="263" Description="" />
|
|
<DI_ITEM Index="264" Name="DI_TowerYellowFB" BufferOffset="264" Addr="264" Description="" />
|
|
<DI_ITEM Index="265" Name="DI_TowerRedFB" BufferOffset="265" Addr="265" Description="" />
|
|
<DI_ITEM Index="266" Name="DI_BuzzerFB" BufferOffset="266" Addr="266" Description="" />
|
|
<DI_ITEM Index="271" Name="DI_ConfinementRingDrvRstFB" BufferOffset="271" Addr="271" Description="" />
|
|
<DI_ITEM Index="272" Name="DI_InnerGasFinalFB(V89)" BufferOffset="272" Addr="272" Description="" />
|
|
<DI_ITEM Index="273" Name="DI_MiddleGasFinalFB(V90)" BufferOffset="273" Addr="273" Description="" />
|
|
<DI_ITEM Index="274" Name="DI_OpticPurgeFinalFB(V91)" BufferOffset="274" Addr="274" Description="" />
|
|
<DI_ITEM Index="275" Name="DI_GasRingPurgeFinalFB(V92)" BufferOffset="275" Addr="275" Description="" />
|
|
<DI_ITEM Index="276" Name="DI_ChamberPurgeFinalFB(V93)" BufferOffset="276" Addr="276" Description="" />
|
|
<DI_ITEM Index="277" Name="DI_RotationUpPurgeFinalFB(V94)" BufferOffset="277" Addr="277" Description="" />
|
|
<DI_ITEM Index="278" Name="DI_ConfinementRingFinalFB(V95)" BufferOffset="278" Addr="278" Description="" />
|
|
<DI_ITEM Index="279" Name="DI_HeaterWFFinalFB(V96)" BufferOffset="279" Addr="279" Description="" />
|
|
<DI_ITEM Index="280" Name="DI_EPV1-1FB" BufferOffset="280" Addr="280" Description="" />
|
|
<DI_ITEM Index="282" Name="DI_EPV2-1FB" BufferOffset="282" Addr="282" Description="" />
|
|
<DI_ITEM Index="288" Name="DI_ServoReady" BufferOffset="288" Addr="288" Description="" />
|
|
<DI_ITEM Index="296" Name="DI_PSU1Status" BufferOffset="296" Addr="296" Description="" />
|
|
<DI_ITEM Index="297" Name="DI_PSU2Status" BufferOffset="297" Addr="297" Description="" />
|
|
<DI_ITEM Index="298" Name="DI_PSU3Status" BufferOffset="298" Addr="298" Description="" />
|
|
<DI_ITEM Index="302" Name="DI_SCR1Status" BufferOffset="302" Addr="302" Description="" />
|
|
<DI_ITEM Index="303" Name="DI_SCR2Status" BufferOffset="303" Addr="303" Description="" />
|
|
<DI_ITEM Index="304" Name="DI_SCR3Status" BufferOffset="304" Addr="304" Description="" />
|
|
<DI_ITEM Index="305" Name="DI_PSUInnerTempHAlarm" BufferOffset="305" Addr="305" Description="" />
|
|
<DI_ITEM Index="306" Name="DI_PSUMiddleTempHAlarm" BufferOffset="306" Addr="306" Description="" />
|
|
<DI_ITEM Index="307" Name="DI_PSUOuterTempHAlarm" BufferOffset="307" Addr="307" Description="" />
|
|
<DI_ITEM Index="308" Name="DI_PSUInnerTempLAlarm" BufferOffset="308" Addr="308" Description="" />
|
|
<DI_ITEM Index="309" Name="DI_PSUMiddleTempLAlarm" BufferOffset="309" Addr="309" Description="" />
|
|
<DI_ITEM Index="310" Name="DI_PSUOuterTempLAlarm" BufferOffset="310" Addr="310" Description="" />
|
|
<DI_ITEM Index="311" Name="DI_SCRUpperTempHAlarm" BufferOffset="311" Addr="311" Description="" />
|
|
<DI_ITEM Index="312" Name="DI_SCRMiddleTempHAlarm" BufferOffset="312" Addr="312" Description="" />
|
|
<DI_ITEM Index="313" Name="DI_SCRLowerTempHAlarm" BufferOffset="313" Addr="313" Description="" />
|
|
<DI_ITEM Index="314" Name="DI_SCRUpperTempLAlarm" BufferOffset="314" Addr="314" Description="" />
|
|
<DI_ITEM Index="315" Name="DI_SCRMiddleTempLAlarm" BufferOffset="315" Addr="315" Description="" />
|
|
<DI_ITEM Index="316" Name="DI_SCRLowerTempLAlarm" BufferOffset="316" Addr="316" Description="" />
|
|
<DI_ITEM Index="320" Name="DI_PSU1Alarm" BufferOffset="320" Addr="320" Description="" />
|
|
<DI_ITEM Index="321" Name="DI_PSU2Alarm" BufferOffset="321" Addr="321" Description="" />
|
|
<DI_ITEM Index="322" Name="DI_PSU3Alarm" BufferOffset="322" Addr="322" Description="" />
|
|
<DI_ITEM Index="323" Name="DI_SCR1Alarm" BufferOffset="323" Addr="323" Description="" />
|
|
<DI_ITEM Index="324" Name="DI_SCR2Alarm" BufferOffset="324" Addr="324" Description="" />
|
|
<DI_ITEM Index="325" Name="DI_SCR3Alarm" BufferOffset="325" Addr="325" Description="" />
|
|
<DI_ITEM Index="328" Name="DI_PSUdpCommunicationError" BufferOffset="328" Addr="328" Description="" />
|
|
<DI_ITEM Index="329" Name="DI_SCRTCDPCommunicationError" BufferOffset="329" Addr="329" Description="" />
|
|
<DI_ITEM Index="330" Name="DI_PSU1dpCommunicationError" BufferOffset="330" Addr="330" Description="" />
|
|
<DI_ITEM Index="331" Name="DI_PSU2dpCommunicationError" BufferOffset="331" Addr="331" Description="" />
|
|
<DI_ITEM Index="332" Name="DI_PSU3dpCommunicationError" BufferOffset="332" Addr="332" Description="" />
|
|
<DI_ITEM Index="333" Name="DI_SCRdpCommunicationError" BufferOffset="333" Addr="333" Description="" />
|
|
<DI_ITEM Index="334" Name="DI_TVDPCommunicationError" BufferOffset="334" Addr="334" Description="" />
|
|
<DI_ITEM Index="335" Name="DI_MFC60Offline" BufferOffset="335" Addr="335" Description="" />
|
|
<DI_ITEM Index="336" Name="DI_ConfinementRingDone" BufferOffset="336" Addr="336" Description="" />
|
|
<DI_ITEM Index="337" Name="DI_ConfinementRingServoOn" BufferOffset="337" Addr="337" Description="" />
|
|
<DI_ITEM Index="338" Name="DI_ConfinementRingHomed" BufferOffset="338" Addr="338" Description="" />
|
|
<DI_ITEM Index="339" Name="DI_ConfinementRingBusy" BufferOffset="339" Addr="339" Description="" />
|
|
<DI_ITEM Index="340" Name="DI_ConfinementRingOnUpPos" BufferOffset="340" Addr="340" Description="" />
|
|
<DI_ITEM Index="341" Name="DI_ConfinementRingOnDownPos" BufferOffset="341" Addr="341" Description="" />
|
|
<DI_ITEM Index="342" Name="DI_ConfinementRingServoError" BufferOffset="342" Addr="342" Description="" />
|
|
<DI_ITEM Index="345" Name="DI_ChamPressAboveATMSW2" BufferOffset="345" Addr="345" Description="" />
|
|
<DI_ITEM Index="349" Name="DI_EtherCATTcomError" BufferOffset="349" Addr="349" Description="" />
|
|
<DI_ITEM Index="350" Name="DI_HearbeatTimeout" BufferOffset="350" Addr="350" Description="" />
|
|
<DI_ITEM Index="351" Name="DI_MFC01Offline" BufferOffset="351" Addr="351" Description="" />
|
|
<DI_ITEM Index="352" Name="DI_MFC02Offline" BufferOffset="352" Addr="352" Description="" />
|
|
<DI_ITEM Index="353" Name="DI_MFC03Offline" BufferOffset="353" Addr="353" Description="" />
|
|
<DI_ITEM Index="354" Name="DI_MFC04Offline" BufferOffset="354" Addr="354" Description="" />
|
|
<DI_ITEM Index="355" Name="DI_MFC05Offline" BufferOffset="355" Addr="355" Description="" />
|
|
<DI_ITEM Index="356" Name="DI_MFC06Offline" BufferOffset="356" Addr="356" Description="" />
|
|
<DI_ITEM Index="357" Name="DI_MFC07Offline" BufferOffset="357" Addr="357" Description="" />
|
|
<DI_ITEM Index="358" Name="DI_MFC08Offline" BufferOffset="358" Addr="358" Description="" />
|
|
<DI_ITEM Index="359" Name="DI_MFC09Offline" BufferOffset="359" Addr="359" Description="" />
|
|
<DI_ITEM Index="360" Name="DI_MFC10Offline" BufferOffset="360" Addr="360" Description="" />
|
|
<DI_ITEM Index="361" Name="DI_MFC11Offline" BufferOffset="361" Addr="361" Description="" />
|
|
<DI_ITEM Index="362" Name="DI_MFC12Offline" BufferOffset="362" Addr="362" Description="" />
|
|
<DI_ITEM Index="363" Name="DI_MFC13Offline" BufferOffset="363" Addr="363" Description="" />
|
|
<DI_ITEM Index="364" Name="DI_MFC14Offline" BufferOffset="364" Addr="364" Description="" />
|
|
<DI_ITEM Index="365" Name="DI_MFC15Offline" BufferOffset="365" Addr="365" Description="" />
|
|
<DI_ITEM Index="366" Name="DI_MFC16Offline" BufferOffset="366" Addr="366" Description="" />
|
|
<DI_ITEM Index="369" Name="DI_MFC19Offline" BufferOffset="369" Addr="369" Description="" />
|
|
<DI_ITEM Index="370" Name="DI_MFC20Offline" BufferOffset="370" Addr="370" Description="" />
|
|
<DI_ITEM Index="372" Name="DI_MFC22Offline" BufferOffset="372" Addr="372" Description="" />
|
|
<DI_ITEM Index="373" Name="DI_MFC23Offline" BufferOffset="373" Addr="373" Description="" />
|
|
<DI_ITEM Index="375" Name="DI_MFC25Offline" BufferOffset="375" Addr="375" Description="" />
|
|
<DI_ITEM Index="376" Name="DI_MFC26Offline" BufferOffset="376" Addr="376" Description="" />
|
|
<DI_ITEM Index="377" Name="DI_MFC27Offline" BufferOffset="377" Addr="377" Description="" />
|
|
<DI_ITEM Index="378" Name="DI_MFC28Offline" BufferOffset="378" Addr="378" Description="" />
|
|
<DI_ITEM Index="379" Name="DI_MFC29Offline" BufferOffset="379" Addr="379" Description="" />
|
|
<DI_ITEM Index="381" Name="DI_MFC31Offline" BufferOffset="381" Addr="381" Description="" />
|
|
<DI_ITEM Index="382" Name="DI_MFC32Offline" BufferOffset="382" Addr="382" Description="" />
|
|
<DI_ITEM Index="383" Name="DI_MFC33Offline" BufferOffset="383" Addr="383" Description="" />
|
|
<DI_ITEM Index="385" Name="DI_MFC35Offline" BufferOffset="385" Addr="385" Description="" />
|
|
<DI_ITEM Index="386" Name="DI_MFC36Offline" BufferOffset="386" Addr="386" Description="" />
|
|
<DI_ITEM Index="387" Name="DI_MFC37Offline" BufferOffset="387" Addr="387" Description="" />
|
|
<DI_ITEM Index="388" Name="DI_MFC38Offline" BufferOffset="388" Addr="388" Description="" />
|
|
<DI_ITEM Index="390" Name="DI_MFC40Offline" BufferOffset="390" Addr="390" Description="" />
|
|
<DI_ITEM Index="391" Name="DI_PC01Offline" BufferOffset="391" Addr="391" Description="" />
|
|
<DI_ITEM Index="392" Name="DI_PC02Offline" BufferOffset="392" Addr="392" Description="" />
|
|
<DI_ITEM Index="393" Name="DI_PC03Offline" BufferOffset="393" Addr="393" Description="" />
|
|
<DI_ITEM Index="394" Name="DI_PC04Offline" BufferOffset="394" Addr="394" Description="" />
|
|
<DI_ITEM Index="395" Name="DI_PC05Offline" BufferOffset="395" Addr="395" Description="" />
|
|
<DI_ITEM Index="396" Name="DI_PC06Offline" BufferOffset="396" Addr="396" Description="" />
|
|
<DI_ITEM Index="397" Name="DI_PC07Offline" BufferOffset="397" Addr="397" Description="" />
|
|
</Dig_In>
|
|
<Dig_Out>
|
|
<DO_ITEM Index="0" Name="DO_TCSSupply" BufferOffset="0" Addr="0" Description="" />
|
|
<DO_ITEM Index="1" Name="DO_H2Supply(V31)" BufferOffset="1" Addr="1" Description="" />
|
|
<DO_ITEM Index="2" Name="DO_ArSupply(V32)" BufferOffset="2" Addr="2" Description="" />
|
|
<DO_ITEM Index="3" Name="DO_SHH2/ArSwitch(V33)" BufferOffset="3" Addr="3" Description="" />
|
|
<DO_ITEM Index="5" Name="DO_H2ArLine1(V35)" BufferOffset="5" Addr="5" Description="" />
|
|
<DO_ITEM Index="6" Name="DO_H2ArLine2(V36)" BufferOffset="6" Addr="6" Description="" />
|
|
<DO_ITEM Index="7" Name="DO_N2Switch(V37)" BufferOffset="7" Addr="7" Description="" />
|
|
<DO_ITEM Index="9" Name="DO_DilutedN2Run/Vent(V39)" BufferOffset="9" Addr="9" Description="" />
|
|
<DO_ITEM Index="10" Name="DO_HighN2Run/Vent(V40)" BufferOffset="10" Addr="10" Description="" />
|
|
<DO_ITEM Index="11" Name="DO_TMARun(V41)" BufferOffset="11" Addr="11" Description="" />
|
|
<DO_ITEM Index="12" Name="DO_TMAVent(V42)" BufferOffset="12" Addr="12" Description="" />
|
|
<DO_ITEM Index="13" Name="DO_TMARelease(V43)" BufferOffset="13" Addr="13" Description="" />
|
|
<DO_ITEM Index="15" Name="DO_TMABypass(V45)" BufferOffset="15" Addr="15" Description="" />
|
|
<DO_ITEM Index="16" Name="DO_TMAVac(V46)" BufferOffset="16" Addr="16" Description="" />
|
|
<DO_ITEM Index="18" Name="DO_TCSRelease(V48)" BufferOffset="18" Addr="18" Description="" />
|
|
<DO_ITEM Index="19" Name="DO_TCSBypass(V49)" BufferOffset="19" Addr="19" Description="" />
|
|
<DO_ITEM Index="20" Name="DO_TCSVac(V50)" BufferOffset="20" Addr="20" Description="" />
|
|
<DO_ITEM Index="21" Name="DO_HCLSwitch(V51)" BufferOffset="21" Addr="21" Description="" />
|
|
<DO_ITEM Index="22" Name="DO_SiH4Switch(V52)" BufferOffset="22" Addr="22" Description="" />
|
|
<DO_ITEM Index="23" Name="DO_TCSRun/Vent(V53)" BufferOffset="23" Addr="23" Description="" />
|
|
<DO_ITEM Index="24" Name="DO_HCLRun/Vent(V54)" BufferOffset="24" Addr="24" Description="" />
|
|
<DO_ITEM Index="25" Name="DO_SiH4Run(V55)" BufferOffset="25" Addr="25" Description="" />
|
|
<DO_ITEM Index="26" Name="DO_SiH4Vent(V56)" BufferOffset="26" Addr="26" Description="" />
|
|
<DO_ITEM Index="28" Name="DO_C2H4Switch(V58)" BufferOffset="28" Addr="28" Description="" />
|
|
<DO_ITEM Index="29" Name="DO_C2H4Run(V59)" BufferOffset="29" Addr="29" Description="" />
|
|
<DO_ITEM Index="30" Name="DO_C2H4Vent(V60)" BufferOffset="30" Addr="30" Description="" />
|
|
<DO_ITEM Index="32" Name="DO_DoppingFinal(V61)" BufferOffset="32" Addr="32" Description="" />
|
|
<DO_ITEM Index="33" Name="DO_SilaneFinal(V62)" BufferOffset="33" Addr="33" Description="" />
|
|
<DO_ITEM Index="34" Name="DO_PropaneFinal(V63)" BufferOffset="34" Addr="34" Description="" />
|
|
<DO_ITEM Index="39" Name="DO_ChamBodyArPurge(V68)" BufferOffset="39" Addr="39" Description="" />
|
|
<DO_ITEM Index="40" Name="DO_SHPurgeFinal(V87)" BufferOffset="40" Addr="40" Description="" />
|
|
<DO_ITEM Index="41" Name="DO_OuterGasFinal(V88)" BufferOffset="41" Addr="41" Description="" />
|
|
<DO_ITEM Index="42" Name="DO_ReactorLeakCheck(V69)" BufferOffset="42" Addr="42" Description="" />
|
|
<DO_ITEM Index="43" Name="DO_TMPressBalance(V70)" BufferOffset="43" Addr="43" Description="" Visible ="false"/>
|
|
<DO_ITEM Index="45" Name="DO_GasBoxVentPump(V72)" BufferOffset="45" Addr="45" Description="" />
|
|
<DO_ITEM Index="46" Name="DO_MOVac(V73)" BufferOffset="46" Addr="46" Description="" />
|
|
<DO_ITEM Index="47" Name="DO_GasboxLeakCheck(V74)" BufferOffset="47" Addr="47" Description="" />
|
|
<DO_ITEM Index="48" Name="DO_DORVac(V75)" BufferOffset="48" Addr="48" Description="" />
|
|
<DO_ITEM Index="49" Name="DO_DORRefill(V76)" BufferOffset="49" Addr="49" Description="" />
|
|
<DO_ITEM Index="50" Name="DO_GasBoxVentBypass(V25)" BufferOffset="50" Addr="50" Description="" Visible="false"/>
|
|
<DO_ITEM Index="52" Name="DO_PumpBypass(V27)" BufferOffset="52" Addr="52" Description="" />
|
|
<DO_ITEM Index="54" Name="DO_CarryGasFinal(V97)" BufferOffset="54" Addr="54" Description="" />
|
|
<DO_ITEM Index="56" Name="DO_HeaterEnable" BufferOffset="56" Addr="56" Description="" />
|
|
<DO_ITEM Index="57" Name="DO_InnerHeaterEnable" BufferOffset="57" Addr="57" Description="" />
|
|
<DO_ITEM Index="58" Name="DO_MiddleHeaterEnable" BufferOffset="58" Addr="58" Description="" />
|
|
<DO_ITEM Index="59" Name="DO_OuterHeaterEnable" BufferOffset="59" Addr="59" Description="" />
|
|
<DO_ITEM Index="60" Name="DO_LineHeaterEnable" BufferOffset="60" Addr="60" Description="" />
|
|
<DO_ITEM Index="64" Name="DO_ChamMoveBodyUp" BufferOffset="64" Addr="64" Description="" Visible ="false"/>
|
|
<DO_ITEM Index="65" Name="DO_ChamMoveBodyDown" BufferOffset="65" Addr="65" Description="" Visible ="false"/>
|
|
<DO_ITEM Index="66" Name="DO_ChamMoveBodyUpAirBrake" BufferOffset="66" Addr="66" Description="" />
|
|
<DO_ITEM Index="67" Name="DO_ChamMoveBodyForward" BufferOffset="67" Addr="67" Description="" Visible ="false"/>
|
|
<DO_ITEM Index="68" Name="DO_ChamMoveBodyBackward" BufferOffset="68" Addr="68" Description="" Visible ="false"/>
|
|
<DO_ITEM Index="69" Name="DO_SHGasConnectorLoosen" BufferOffset="69" Addr="69" Description="" />
|
|
<DO_ITEM Index="70" Name="DO_SHGasConnectorTighten" BufferOffset="70" Addr="70" Description="" />
|
|
<DO_ITEM Index="71" Name="DO_SHLidLoosen" BufferOffset="71" Addr="71" Description="" />
|
|
<DO_ITEM Index="72" Name="DO_SHLidTighten" BufferOffset="72" Addr="72" Description="" />
|
|
<DO_ITEM Index="73" Name="DO_SHLidSwingLock" BufferOffset="73" Addr="73" Description="" />
|
|
<DO_ITEM Index="74" Name="DO_SHLidSwingUnlock" BufferOffset="74" Addr="74" Description="" />
|
|
<DO_ITEM Index="75" Name="DO_ChamMoveBodyBrakerForward" BufferOffset="75" Addr="75" Description="" />
|
|
<DO_ITEM Index="76" Name="DO_ChamMoveBodyBrakerBackward" BufferOffset="76" Addr="76" Description="" />
|
|
<DO_ITEM Index="83" Name="DO_MiddleLidLoosen" BufferOffset="83" Addr="83" Description="" />
|
|
<DO_ITEM Index="84" Name="DO_MiddleLidTighten" BufferOffset="84" Addr="84" Description="" />
|
|
<DO_ITEM Index="85" Name="DO_MiddleLidSwingLock" BufferOffset="85" Addr="85" Description="" />
|
|
<DO_ITEM Index="86" Name="DO_MiddleLidSwingUnlock" BufferOffset="86" Addr="86" Description="" />
|
|
<DO_ITEM Index="100" Name="DO_ChamMoveBodyUpDownEnable" BufferOffset="100" Addr="100" Description="" />
|
|
<DO_ITEM Index="103" Name="DO_TowerGreen" BufferOffset="103" Addr="103" Description="" />
|
|
<DO_ITEM Index="104" Name="DO_TowerYellow" BufferOffset="104" Addr="104" Description="" />
|
|
<DO_ITEM Index="105" Name="DO_TowerRed" BufferOffset="105" Addr="105" Description="" />
|
|
<DO_ITEM Index="106" Name="DO_Buzzer" BufferOffset="106" Addr="106" Description="" />
|
|
<DO_ITEM Index="107" Name="DO_ManualLidLampChamberDown" BufferOffset="107" Addr="107" Description="" />
|
|
<DO_ITEM Index="108" Name="DO_ManualLidLampChamberFW" BufferOffset="108" Addr="108" Description="" />
|
|
<DO_ITEM Index="109" Name="DO_ManualLidLampChamberBW" BufferOffset="109" Addr="109" Description="" />
|
|
<DO_ITEM Index="110" Name="DO_TCSFluidInfusion" BufferOffset="110" Addr="110" Description="" />
|
|
<DO_ITEM Index="111" Name="DO_OpenLidPurge" BufferOffset="111" Addr="111" Description="V111" />
|
|
<DO_ITEM Index="112" Name="DO_InnerGasFinal(V89)" BufferOffset="112" Addr="112" Description="" />
|
|
<DO_ITEM Index="113" Name="DO_MiddleGasFinal(V90)" BufferOffset="113" Addr="113" Description="" />
|
|
<DO_ITEM Index="114" Name="DO_OpticPurgeFinal(V91)" BufferOffset="114" Addr="114" Description="" />
|
|
<DO_ITEM Index="115" Name="DO_GasRingPurgeFinal(V92)" BufferOffset="115" Addr="115" Description="" />
|
|
<DO_ITEM Index="116" Name="DO_ChamberPurgeFinal(V93)" BufferOffset="116" Addr="116" Description="" />
|
|
<DO_ITEM Index="117" Name="DO_RotationUpPurgeFinal(V94)" BufferOffset="117" Addr="117" Description="" />
|
|
<DO_ITEM Index="118" Name="DO_ConfinementRingFinal(V95)" BufferOffset="118" Addr="118" Description="" />
|
|
<DO_ITEM Index="119" Name="DO_HeaterWFFinal(V96)" BufferOffset="119" Addr="119" Description="" />
|
|
<DO_ITEM Index="120" Name="DO_EPV1" BufferOffset="120" Addr="120" Description="" />
|
|
<DO_ITEM Index="122" Name="DO_EPV2" BufferOffset="122" Addr="122" Description="" />
|
|
<DO_ITEM Index="128" Name="DO_ServoEnable" BufferOffset="128" Addr="128" Description="" />
|
|
<DO_ITEM Index="129" Name="DO_ServoInitial" BufferOffset="129" Addr="129" Description="" />
|
|
<DO_ITEM Index="130" Name="DO_ServoReset" BufferOffset="130" Addr="130" Description="" />
|
|
<DO_ITEM Index="131" Name="DO_PSU1Enable" BufferOffset="131" Addr="131" Description="" />
|
|
<DO_ITEM Index="132" Name="DO_PSU2Enable" BufferOffset="132" Addr="132" Description="" />
|
|
<DO_ITEM Index="133" Name="DO_PSU3Enable" BufferOffset="133" Addr="133" Description="" />
|
|
<DO_ITEM Index="134" Name="DO_SCR1Enable" BufferOffset="134" Addr="134" Description="" />
|
|
<DO_ITEM Index="135" Name="DO_SCR2Enable" BufferOffset="135" Addr="135" Description="" />
|
|
<DO_ITEM Index="136" Name="DO_SCR3Enable" BufferOffset="136" Addr="136" Description="" />
|
|
<DO_ITEM Index="140" Name="DO_TVEnable" BufferOffset="140" Addr="140" Description="" />
|
|
<DO_ITEM Index="144" Name="DO_PSU1Reset" BufferOffset="144" Addr="144" Description="" />
|
|
<DO_ITEM Index="145" Name="DO_PSU2Reset" BufferOffset="145" Addr="145" Description="" />
|
|
<DO_ITEM Index="146" Name="DO_PSU3Reset" BufferOffset="146" Addr="146" Description="" />
|
|
<DO_ITEM Index="147" Name="DO_SCR1Reset" BufferOffset="147" Addr="147" Description="" />
|
|
<DO_ITEM Index="148" Name="DO_SCR2Reset" BufferOffset="148" Addr="148" Description="" />
|
|
<DO_ITEM Index="149" Name="DO_SCR3Reset" BufferOffset="149" Addr="149" Description="" />
|
|
<DO_ITEM Index="152" Name="DO_SlitVlvClosed" BufferOffset="152" Addr="152" Description="" />
|
|
<DO_ITEM Index="160" Name="DO_ConfinementRingServoOn" BufferOffset="160" Addr="160" Description="" />
|
|
<DO_ITEM Index="161" Name="DO_ConfinementRingServoReset" BufferOffset="161" Addr="161" Description="" />
|
|
<DO_ITEM Index="162" Name="DO_ConfinementRingJogUp" BufferOffset="162" Addr="162" Description="" />
|
|
<DO_ITEM Index="163" Name="DO_ConfinementRingJogDown" BufferOffset="163" Addr="163" Description="" />
|
|
<DO_ITEM Index="164" Name="DO_ConfinementRingStop" BufferOffset="164" Addr="164" Description="" />
|
|
<DO_ITEM Index="165" Name="DO_ConfinementRingMoveStart" BufferOffset="165" Addr="165" Description="" />
|
|
<DO_ITEM Index="166" Name="DO_ConfinementRingUpPosTeach" BufferOffset="166" Addr="166" Description="" />
|
|
<DO_ITEM Index="167" Name="DO_ConfinementRingDownPosTeach" BufferOffset="167" Addr="167" Description="" />
|
|
<DO_ITEM Index="168" Name="DO_ConfinementRingMoveUp" BufferOffset="168" Addr="168" Description="" />
|
|
<DO_ITEM Index="169" Name="DO_ConfinementRingMoveDown" BufferOffset="169" Addr="169" Description="" />
|
|
<DO_ITEM Index="170" Name="DO_ReactorATMTransferReady" BufferOffset="170" Addr="170" Description="" />
|
|
<DO_ITEM Index="171" Name="DO_ReactorVACTransferReady" BufferOffset="171" Addr="171" Description="" />
|
|
<DO_ITEM Index="172" Name="DO_PurgeRoutineSucceed" BufferOffset="172" Addr="172" Description="" />
|
|
<DO_ITEM Index="173" Name="DO_CleanRoutineSucceed" BufferOffset="173" Addr="173" Description="" />
|
|
<DO_ITEM Index="174" Name="DO_ProcessRunning" BufferOffset="174" Addr="174" Description="" />
|
|
<DO_ITEM Index="175" Name="DO_PreprocessRunning" BufferOffset="175" Addr="175" Description="" />
|
|
<DO_ITEM Index="176" Name="DO_CyclePurgeRoutineRunning" BufferOffset="176" Addr="176" Description="" />
|
|
<DO_ITEM Index="177" Name="DO_ExchangeMoRoutineRunning" BufferOffset="177" Addr="177" Description="" />
|
|
<DO_ITEM Index="178" Name="DO_CleanRoutineRunning" BufferOffset="178" Addr="178" Description="" />
|
|
<DO_ITEM Index="179" Name="DO_PurgeRoutineRunning" BufferOffset="179" Addr="179" Description="" />
|
|
<DO_ITEM Index="180" Name="DO_PumpRoutineRunning" BufferOffset="180" Addr="180" Description="" />
|
|
<DO_ITEM Index="181" Name="DO_VentRoutineRunning" BufferOffset="181" Addr="181" Description="" />
|
|
<DO_ITEM Index="182" Name="DO_VACTransferAllowed" BufferOffset="182" Addr="182" Description="" />
|
|
<DO_ITEM Index="183" Name="DO_ATMTransferAllowed" BufferOffset="183" Addr="183" Description="" />
|
|
<DO_ITEM Index="184" Name="DO_PostProcessRunning" BufferOffset="184" Addr="184" Description="" />
|
|
<DO_ITEM Index="185" Name="DO_ProcessIdleRunning" BufferOffset="185" Addr="185" Description="" />
|
|
<DO_ITEM Index="186" Name="DO_ATMIdleRoutineRunning" BufferOffset="186" Addr="186" Description="" />
|
|
<DO_ITEM Index="187" Name="DO_VACIdleRoutineRunning" BufferOffset="187" Addr="187" Description="" />
|
|
<DO_ITEM Index="190" Name="DO_ConfinementRingUpDisable" BufferOffset="190" Addr="190" Description="" />
|
|
<DO_ITEM Index="192" Name="DO_ReactorPressRisingRateFast" BufferOffset="192" Addr="192" Description="" />
|
|
<DO_ITEM Index="193" Name="DO_UPSEnable" BufferOffset="193" Addr="193" Description="" Visible="false"/>
|
|
<DO_ITEM Index="194" Name="DO_UPSLowBattery" BufferOffset="194" Addr="194" Description="" Visible="false"/>
|
|
<DO_ITEM Index="195" Name="DO_ChamMiddleFlow2Temp" BufferOffset="195" Addr="195" Description="" />
|
|
<DO_ITEM Index="196" Name="DO_SHFlowTemp" BufferOffset="196" Addr="196" Description="" />
|
|
<DO_ITEM Index="197" Name="DO_ChamTopFlowTemp" BufferOffset="197" Addr="197" Description="" />
|
|
<DO_ITEM Index="198" Name="DO_ChamMiddleFlow1Temp" BufferOffset="198" Addr="198" Description="" />
|
|
<DO_ITEM Index="199" Name="DO_ChamBottomFlowTemp" BufferOffset="199" Addr="199" Description="" />
|
|
<DO_ITEM Index="200" Name="DO_ChamBottomPlateTemp" BufferOffset="200" Addr="200" Description="" />
|
|
<DO_ITEM Index="201" Name="DO_PowerRod1FlowTemp" BufferOffset="201" Addr="201" Description="" />
|
|
<DO_ITEM Index="202" Name="DO_PowerRod2FlowTemp" BufferOffset="202" Addr="202" Description="" />
|
|
<DO_ITEM Index="203" Name="DO_ForelineFlowTemp" BufferOffset="203" Addr="203" Description="" />
|
|
<DO_ITEM Index="204" Name="DO_ElectrodeWFlowTemp" BufferOffset="204" Addr="204" Description="" />
|
|
<DO_ITEM Index="205" Name="DO_TMPump1and2FlowTemp" BufferOffset="205" Addr="205" Description="" />
|
|
<DO_ITEM Index="206" Name="DO_TransformerFlowTemp" BufferOffset="206" Addr="206" Description="" />
|
|
<DO_ITEM Index="207" Name="DO_TMTopLidFlowTemp" BufferOffset="207" Addr="207" Description="" />
|
|
<DO_ITEM Index="208" Name="DO_SpareTemp" BufferOffset="208" Addr="208" Description="" />
|
|
<DO_ITEM Index="220" Name="DO_PyroCommunicationError" BufferOffset="220" Addr="220" Description="" />
|
|
<DO_ITEM Index="230" Name="DO_TC1PyroWarmMaxDiff" BufferOffset="230" Addr="230" Description="" />
|
|
<DO_ITEM Index="231" Name="DO_TC1AETempRasisingFast" BufferOffset="231" Addr="231" Description="" />
|
|
</Dig_Out>
|
|
<Ana_In>
|
|
<AI_ITEM Index="0" Name="AI_ChamPress" BufferOffset="0" Addr="0" Description="" />
|
|
<AI_ITEM Index="1" Name="AI_ForelinePress" BufferOffset="1" Addr="1" Description="" />
|
|
<AI_ITEM Index="2" Name="AI_ChamMiddleFlow2Temp" BufferOffset="2" Addr="2" Description="" />
|
|
<AI_ITEM Index="3" Name="AI_SHFlowTemp" BufferOffset="3" Addr="3" Description="" />
|
|
<AI_ITEM Index="4" Name="AI_ChamTopFlowTemp" BufferOffset="4" Addr="4" Description=""/>
|
|
<AI_ITEM Index="5" Name="AI_ChamMiddleFlow1Temp" BufferOffset="5" Addr="5" Description="" />
|
|
<AI_ITEM Index="6" Name="AI_ChamBottomFlowTemp" BufferOffset="6" Addr="6" Description="" />
|
|
<AI_ITEM Index="7" Name="AI_ChamBottomPlateTemp" BufferOffset="7" Addr="7" Description="" />
|
|
<AI_ITEM Index="8" Name="AI_PowerRod1FlowTemp" BufferOffset="8" Addr="8" Description="" />
|
|
<AI_ITEM Index="9" Name="AI_PowerRod2FlowTemp" BufferOffset="9" Addr="9" Description="" />
|
|
<AI_ITEM Index="10" Name="AI_ForelineFlow2SW" BufferOffset="10" Addr="10" Description="" />
|
|
<AI_ITEM Index="11" Name="AI_ElectrodeWFlowTemp" BufferOffset="11" Addr="11" Description="" />
|
|
<AI_ITEM Index="12" Name="AI_TMPumpFIowSW" BufferOffset="12" Addr="12" Description="" />
|
|
<AI_ITEM Index="13" Name="AI_TransformerFlowTemp" BufferOffset="13" Addr="13" Description="" />
|
|
<AI_ITEM Index="14" Name="AI_TMTopLidFlowTemp" BufferOffset="14" Addr="14" Description="" />
|
|
<AI_ITEM Index="15" Name="AI_SpareTemp" BufferOffset="15" Addr="15" Description="" />
|
|
<AI_ITEM Index="16" Name="AI_PMGauge2" BufferOffset="16" Addr="16" Description="" />
|
|
<AI_ITEM Index="17" Name="AI_SpareFlowTemp" BufferOffset="17" Addr="17" Description="" />
|
|
<AI_ITEM Index="20" Name="AI_HeatTMA" BufferOffset="20" Addr="20" Description="" />
|
|
<AI_ITEM Index="21" Name="AI_HeatTCSPanel" BufferOffset="21" Addr="21" Description="" />
|
|
<AI_ITEM Index="22" Name="AI_HeatinsidePanel" BufferOffset="22" Addr="22" Description="" />
|
|
<AI_ITEM Index="23" Name="AI_HeatoutsidePanel" BufferOffset="23" Addr="23" Description="" />
|
|
<AI_ITEM Index="24" Name="AI_HeatoutsideSH" BufferOffset="24" Addr="24" Description="" />
|
|
<AI_ITEM Index="25" Name="AI_HeatLeakBypass" BufferOffset="25" Addr="25" Description="" />
|
|
<AI_ITEM Index="32" Name="AI_M1" BufferOffset="32" Addr="32" Description="" />
|
|
<AI_ITEM Index="33" Name="AI_M2" BufferOffset="33" Addr="33" Description="" />
|
|
<AI_ITEM Index="34" Name="AI_M3" BufferOffset="34" Addr="34" Description="" />
|
|
<AI_ITEM Index="35" Name="AI_M4" BufferOffset="35" Addr="35" Description="" />
|
|
<AI_ITEM Index="36" Name="AI_M5" BufferOffset="36" Addr="36" Description="" />
|
|
<AI_ITEM Index="37" Name="AI_M6" BufferOffset="37" Addr="37" Description="" />
|
|
<AI_ITEM Index="38" Name="AI_M7" BufferOffset="38" Addr="38" Description="" />
|
|
<AI_ITEM Index="39" Name="AI_M8" BufferOffset="39" Addr="39" Description="" />
|
|
<AI_ITEM Index="40" Name="AI_M9" BufferOffset="40" Addr="40" Description="" />
|
|
<AI_ITEM Index="41" Name="AI_M10" BufferOffset="41" Addr="41" Description="" />
|
|
<AI_ITEM Index="42" Name="AI_M11" BufferOffset="42" Addr="42" Description="" />
|
|
<AI_ITEM Index="43" Name="AI_M12" BufferOffset="43" Addr="43" Description="" />
|
|
<AI_ITEM Index="44" Name="AI_M13" BufferOffset="44" Addr="44" Description="" />
|
|
<AI_ITEM Index="45" Name="AI_M14" BufferOffset="45" Addr="45" Description="" />
|
|
<AI_ITEM Index="46" Name="AI_M15" BufferOffset="46" Addr="46" Description="" />
|
|
<AI_ITEM Index="47" Name="AI_M16" BufferOffset="47" Addr="47" Description="" />
|
|
<AI_ITEM Index="50" Name="AI_M19" BufferOffset="50" Addr="50" Description="" />
|
|
<AI_ITEM Index="51" Name="AI_M20" BufferOffset="51" Addr="51" Description="" />
|
|
<AI_ITEM Index="53" Name="AI_M22" BufferOffset="53" Addr="53" Description="" />
|
|
<AI_ITEM Index="54" Name="AI_M23" BufferOffset="54" Addr="54" Description="" />
|
|
<AI_ITEM Index="56" Name="AI_M25" BufferOffset="56" Addr="56" Description="" />
|
|
<AI_ITEM Index="57" Name="AI_M26" BufferOffset="57" Addr="57" Description="" />
|
|
<AI_ITEM Index="58" Name="AI_M27" BufferOffset="58" Addr="58" Description="" />
|
|
<AI_ITEM Index="59" Name="AI_M28" BufferOffset="59" Addr="59" Description="" />
|
|
<AI_ITEM Index="60" Name="AI_M29" BufferOffset="60" Addr="60" Description="" />
|
|
<AI_ITEM Index="62" Name="AI_M31" BufferOffset="62" Addr="62" Description="" />
|
|
<AI_ITEM Index="63" Name="AI_M32" BufferOffset="63" Addr="63" Description="" />
|
|
<AI_ITEM Index="64" Name="AI_M33" BufferOffset="64" Addr="64" Description="" />
|
|
<AI_ITEM Index="66" Name="AI_M35" BufferOffset="66" Addr="66" Description="" />
|
|
<AI_ITEM Index="67" Name="AI_M36" BufferOffset="67" Addr="67" Description="" />
|
|
<AI_ITEM Index="68" Name="AI_M37" BufferOffset="68" Addr="68" Description="" />
|
|
<AI_ITEM Index="69" Name="AI_M38" BufferOffset="69" Addr="69" Description="" />
|
|
<AI_ITEM Index="71" Name="AI_M40" BufferOffset="71" Addr="71" Description="" />
|
|
<AI_ITEM Index="72" Name="AI_PC1Valve" BufferOffset="72" Addr="72" Description="" />
|
|
<AI_ITEM Index="73" Name="AI_PC2Valve" BufferOffset="73" Addr="73" Description="" />
|
|
<AI_ITEM Index="74" Name="AI_PC3Valve" BufferOffset="74" Addr="74" Description="" />
|
|
<AI_ITEM Index="75" Name="AI_PC4Valve" BufferOffset="75" Addr="75" Description="" />
|
|
<AI_ITEM Index="76" Name="AI_PC5Valve" BufferOffset="76" Addr="76" Description="" />
|
|
<AI_ITEM Index="77" Name="AI_PC6Valve" BufferOffset="77" Addr="77" Description="" />
|
|
<AI_ITEM Index="78" Name="AI_PC7Valve" BufferOffset="78" Addr="78" Description="" />
|
|
<AI_ITEM Index="92" Name="AI_SCR1Voltage" BufferOffset="92" Addr="92" Description="" />
|
|
<AI_ITEM Index="93" Name="AI_SCR1Arms" BufferOffset="93" Addr="93" Description="" />
|
|
<AI_ITEM Index="94" Name="AI_SCR1Power" BufferOffset="94" Addr="94" Description="" />
|
|
<AI_ITEM Index="95" Name="AI_SCR1Status" BufferOffset="95" Addr="95" Description="" />
|
|
<AI_ITEM Index="96" Name="AI_SCR2Voltage" BufferOffset="96" Addr="96" Description="" />
|
|
<AI_ITEM Index="97" Name="AI_SCR2Arms" BufferOffset="97" Addr="97" Description="" />
|
|
<AI_ITEM Index="98" Name="AI_SCR2Power" BufferOffset="98" Addr="98" Description="" />
|
|
<AI_ITEM Index="99" Name="AI_SCR2Status" BufferOffset="99" Addr="99" Description="" />
|
|
<AI_ITEM Index="100" Name="AI_SCR3Voltage" BufferOffset="100" Addr="100" Description="" />
|
|
<AI_ITEM Index="101" Name="AI_SCR3Arms" BufferOffset="101" Addr="101" Description="" />
|
|
<AI_ITEM Index="102" Name="AI_SCR3Power" BufferOffset="102" Addr="102" Description="" />
|
|
<AI_ITEM Index="103" Name="AI_SCR3Status" BufferOffset="103" Addr="103" Description="" />
|
|
<AI_ITEM Index="104" Name="AI_DeviceAlarmCode" BufferOffset="104" Addr="104" Description="" />
|
|
<AI_ITEM Index="105" Name="AI_DeviceWarningCode" BufferOffset="105" Addr="105" Description="" />
|
|
<AI_ITEM Index="108" Name="AI_PressCtrl1" BufferOffset="108" Addr="108" Description="" />
|
|
<AI_ITEM Index="109" Name="AI_PressCtrl2" BufferOffset="109" Addr="109" Description="" />
|
|
<AI_ITEM Index="110" Name="AI_PressCtrl3" BufferOffset="110" Addr="110" Description="" />
|
|
<AI_ITEM Index="111" Name="AI_PressCtrl4" BufferOffset="111" Addr="111" Description="" />
|
|
<AI_ITEM Index="112" Name="AI_PressCtrl5" BufferOffset="112" Addr="112" Description="" />
|
|
<AI_ITEM Index="113" Name="AI_PressCtrl6" BufferOffset="113" Addr="113" Description="" />
|
|
<AI_ITEM Index="114" Name="AI_PressCtrl7" BufferOffset="114" Addr="114" Description="" />
|
|
<AI_ITEM Index="118" Name="AI_ActualSpeed" BufferOffset="118" Addr="118" Description="" />
|
|
<AI_ITEM Index="119" Name="AI_ActualCurrent" BufferOffset="119" Addr="119" Description="" />
|
|
<AI_ITEM Index="120" Name="AI_ActualspeedACC" BufferOffset="120" Addr="120" Description="" />
|
|
<AI_ITEM Index="121" Name="AI_ActualspeedDEC" BufferOffset="121" Addr="121" Description="" />
|
|
<AI_ITEM Index="122" Name="AI_AlarmCode" BufferOffset="122" Addr="122" Description="" />
|
|
<AI_ITEM Index="123" Name="AI_ConfinementRingCurPos" BufferOffset="123" Addr="123" Description="" />
|
|
<AI_ITEM Index="124" Name="AI_ConfinementRingUpPos" BufferOffset="124" Addr="124" Description="" />
|
|
<AI_ITEM Index="125" Name="AI_ConfinementRingDownPos" BufferOffset="125" Addr="125" Description="" />
|
|
<AI_ITEM Index="127" Name="AI_TVmode" BufferOffset="127" Addr="127" Description="" />
|
|
<AI_ITEM Index="128" Name="AI_ActualPositon" BufferOffset="128" Addr="128" Description="" />
|
|
<AI_ITEM Index="129" Name="AI_ActualPressure" BufferOffset="129" Addr="129" Description="" />
|
|
<AI_ITEM Index="130" Name="AI_HeartBeat" BufferOffset="130" Addr="130" Description="" />
|
|
<AI_ITEM Index="131" Name="AI_M1ActMode" BufferOffset="131" Addr="131" Description="" />
|
|
<AI_ITEM Index="132" Name="AI_M2ActMode" BufferOffset="132" Addr="132" Description="" />
|
|
<AI_ITEM Index="133" Name="AI_M3ActMode" BufferOffset="133" Addr="133" Description="" />
|
|
<AI_ITEM Index="134" Name="AI_M4ActMode" BufferOffset="134" Addr="134" Description="" />
|
|
<AI_ITEM Index="135" Name="AI_M5ActMode" BufferOffset="135" Addr="135" Description="" />
|
|
<AI_ITEM Index="136" Name="AI_M6ActMode" BufferOffset="136" Addr="136" Description="" />
|
|
<AI_ITEM Index="137" Name="AI_M7ActMode" BufferOffset="137" Addr="137" Description="" />
|
|
<AI_ITEM Index="138" Name="AI_M8ActMode" BufferOffset="138" Addr="138" Description="" />
|
|
<AI_ITEM Index="139" Name="AI_M9ActMode" BufferOffset="139" Addr="139" Description="" />
|
|
<AI_ITEM Index="140" Name="AI_M10ActMode" BufferOffset="140" Addr="140" Description="" />
|
|
<AI_ITEM Index="141" Name="AI_M11ActMode" BufferOffset="141" Addr="141" Description="" />
|
|
<AI_ITEM Index="142" Name="AI_M12ActMode" BufferOffset="142" Addr="142" Description="" />
|
|
<AI_ITEM Index="143" Name="AI_M13ActMode" BufferOffset="143" Addr="143" Description="" />
|
|
<AI_ITEM Index="144" Name="AI_M14ActMode" BufferOffset="144" Addr="144" Description="" />
|
|
<AI_ITEM Index="145" Name="AI_M15ActMode" BufferOffset="145" Addr="145" Description="" />
|
|
<AI_ITEM Index="146" Name="AI_M16ActMode" BufferOffset="146" Addr="146" Description="" />
|
|
<AI_ITEM Index="149" Name="AI_M19ActMode" BufferOffset="149" Addr="149" Description="" />
|
|
<AI_ITEM Index="150" Name="AI_M20ActMode" BufferOffset="150" Addr="150" Description="" />
|
|
<AI_ITEM Index="152" Name="AI_M22ActMode" BufferOffset="152" Addr="152" Description="" />
|
|
<AI_ITEM Index="153" Name="AI_M23ActMode" BufferOffset="153" Addr="153" Description="" />
|
|
<AI_ITEM Index="155" Name="AI_M25ActMode" BufferOffset="155" Addr="155" Description="" />
|
|
<AI_ITEM Index="156" Name="AI_M26ActMode" BufferOffset="156" Addr="156" Description="" />
|
|
<AI_ITEM Index="157" Name="AI_M27ActMode" BufferOffset="157" Addr="157" Description="" />
|
|
<AI_ITEM Index="158" Name="AI_M28ActMode" BufferOffset="158" Addr="158" Description="" />
|
|
<AI_ITEM Index="159" Name="AI_M29ActMode" BufferOffset="159" Addr="159" Description="" />
|
|
<AI_ITEM Index="161" Name="AI_M31ActMode" BufferOffset="161" Addr="161" Description="" />
|
|
<AI_ITEM Index="162" Name="AI_M32ActMode" BufferOffset="162" Addr="162" Description="" />
|
|
<AI_ITEM Index="163" Name="AI_M33ActMode" BufferOffset="163" Addr="163" Description="" />
|
|
<AI_ITEM Index="165" Name="AI_M35ActMode" BufferOffset="165" Addr="165" Description="" />
|
|
<AI_ITEM Index="166" Name="AI_M36ActMode" BufferOffset="166" Addr="166" Description="" />
|
|
<AI_ITEM Index="167" Name="AI_M37ActMode" BufferOffset="167" Addr="167" Description="" />
|
|
<AI_ITEM Index="168" Name="AI_M38ActMode" BufferOffset="168" Addr="168" Description="" />
|
|
<AI_ITEM Index="170" Name="AI_M40ActMode" BufferOffset="170" Addr="170" Description="" />
|
|
<AI_ITEM Index="171" Name="AI_PC1ActMode" BufferOffset="171" Addr="171" Description="" />
|
|
<AI_ITEM Index="172" Name="AI_PC2ActMode" BufferOffset="172" Addr="172" Description="" />
|
|
<AI_ITEM Index="173" Name="AI_PC3ActMode" BufferOffset="173" Addr="173" Description="" />
|
|
<AI_ITEM Index="174" Name="AI_PC4ActMode" BufferOffset="174" Addr="174" Description="" />
|
|
<AI_ITEM Index="175" Name="AI_PC5ActMode" BufferOffset="175" Addr="175" Description="" />
|
|
<AI_ITEM Index="176" Name="AI_PC6ActMode" BufferOffset="176" Addr="176" Description="" />
|
|
<AI_ITEM Index="177" Name="AI_PC7ActMode" BufferOffset="177" Addr="177" Description="" />
|
|
<AI_ITEM Index="181" Name="AI_PSUInnerWorkingOP" BufferOffset="181" Addr="181" Description="" />
|
|
<AI_ITEM Index="182" Name="AI_PSUMiddleWorkingOP" BufferOffset="182" Addr="182" Description="" />
|
|
<AI_ITEM Index="183" Name="AI_PSUOuterWorkingOP" BufferOffset="183" Addr="183" Description="" />
|
|
<AI_ITEM Index="184" Name="AI_PSUInnerPV" BufferOffset="184" Addr="184" Description="" />
|
|
<AI_ITEM Index="185" Name="AI_PSUMiddlePV" BufferOffset="185" Addr="185" Description="" />
|
|
<AI_ITEM Index="186" Name="AI_PSUOuterPV" BufferOffset="186" Addr="186" Description="" />
|
|
<AI_ITEM Index="187" Name="AI_PSUInnerTempHAlarm" BufferOffset="187" Addr="187" Description="" />
|
|
<AI_ITEM Index="188" Name="AI_PSUMiddleTempHAlarm" BufferOffset="188" Addr="188" Description="" />
|
|
<AI_ITEM Index="189" Name="AI_PSUOuterTempHAlarm" BufferOffset="189" Addr="189" Description="" />
|
|
<AI_ITEM Index="190" Name="AI_PSUInnerTempLAlarm" BufferOffset="190" Addr="190" Description="" />
|
|
<AI_ITEM Index="191" Name="AI_PSUMiddleTempLAlarm" BufferOffset="191" Addr="191" Description="" />
|
|
<AI_ITEM Index="192" Name="AI_PSUOuterTempLAlarm" BufferOffset="192" Addr="192" Description="" />
|
|
<AI_ITEM Index="193" Name="AI_PSUTC" BufferOffset="193" Addr="193" Description="" />
|
|
<AI_ITEM Index="216" Name="AI_PSU1OutputVoltage" BufferOffset="216" Addr="216" Description="" />
|
|
<AI_ITEM Index="217" Name="AI_PSU1OutputArms" BufferOffset="217" Addr="217" Description="" />
|
|
<AI_ITEM Index="218" Name="AI_PSU1OutputPower" BufferOffset="218" Addr="218" Description="" />
|
|
<AI_ITEM Index="219" Name="AI_PSU1Status" BufferOffset="219" Addr="219" Description="" />
|
|
<AI_ITEM Index="220" Name="AI_PSU1SimVoltage" BufferOffset="220" Addr="220" Description="" />
|
|
<AI_ITEM Index="221" Name="AI_PSU1SimArms" BufferOffset="221" Addr="221" Description="" />
|
|
<AI_ITEM Index="222" Name="AI_PSU1Alarm" BufferOffset="222" Addr="222" Description="" />
|
|
<AI_ITEM Index="226" Name="AI_SCRUpperWorkingOP" BufferOffset="226" Addr="226" Description="" />
|
|
<AI_ITEM Index="227" Name="AI_SCRMiddleWorkingOP" BufferOffset="227" Addr="227" Description="" />
|
|
<AI_ITEM Index="228" Name="AI_SCRLowerWorkingOP" BufferOffset="228" Addr="228" Description="" />
|
|
<AI_ITEM Index="229" Name="AI_SCRUpperPV" BufferOffset="229" Addr="229" Description="" />
|
|
<AI_ITEM Index="230" Name="AI_SCRMiddlePV" BufferOffset="230" Addr="230" Description="" />
|
|
<AI_ITEM Index="231" Name="AI_SCRLowerPV" BufferOffset="231" Addr="231" Description="" />
|
|
<AI_ITEM Index="232" Name="AI_SCRUpperTempHAlarm" BufferOffset="232" Addr="232" Description="" />
|
|
<AI_ITEM Index="233" Name="AI_SCRMiddleTempHAlarm" BufferOffset="233" Addr="233" Description="" />
|
|
<AI_ITEM Index="234" Name="AI_SCRLowerTempHAlarm" BufferOffset="234" Addr="234" Description="" />
|
|
<AI_ITEM Index="235" Name="AI_SCRUpperTempLAlarm" BufferOffset="235" Addr="235" Description="" />
|
|
<AI_ITEM Index="236" Name="AI_SCRMiddleTempLAlarm" BufferOffset="236" Addr="236" Description="" />
|
|
<AI_ITEM Index="237" Name="AI_SCRLowerTempLAlarm" BufferOffset="237" Addr="237" Description="" />
|
|
<AI_ITEM Index="238" Name="AI_SCRTC" BufferOffset="238" Addr="238" Description="" />
|
|
<AI_ITEM Index="261" Name="AI_PSU2OutputVoltage" BufferOffset="261" Addr="261" Description="" />
|
|
<AI_ITEM Index="262" Name="AI_PSU2OutputArms" BufferOffset="262" Addr="262" Description="" />
|
|
<AI_ITEM Index="263" Name="AI_PSU2OutputPower" BufferOffset="263" Addr="263" Description="" />
|
|
<AI_ITEM Index="264" Name="AI_PSU2Status" BufferOffset="264" Addr="264" Description="" />
|
|
<AI_ITEM Index="265" Name="AI_PSU2SimVoltage" BufferOffset="265" Addr="265" Description="" />
|
|
<AI_ITEM Index="266" Name="AI_PSU2SimArms" BufferOffset="266" Addr="266" Description="" />
|
|
<AI_ITEM Index="267" Name="AI_PSU2Alarm" BufferOffset="267" Addr="267" Description="" />
|
|
<AI_ITEM Index="271" Name="AI_PSU3OutputVoltage" BufferOffset="271" Addr="271" Description="" />
|
|
<AI_ITEM Index="272" Name="AI_PSU3OutputArms" BufferOffset="272" Addr="272" Description="" />
|
|
<AI_ITEM Index="273" Name="AI_PSU3OutputPower" BufferOffset="273" Addr="273" Description="" />
|
|
<AI_ITEM Index="274" Name="AI_PSU3Status" BufferOffset="274" Addr="274" Description="" />
|
|
<AI_ITEM Index="275" Name="AI_PSU3SimVoltage" BufferOffset="275" Addr="275" Description="" />
|
|
<AI_ITEM Index="276" Name="AI_PSU3SimArms" BufferOffset="276" Addr="276" Description="" />
|
|
<AI_ITEM Index="277" Name="AI_PSU3Alarm" BufferOffset="277" Addr="277" Description="" />
|
|
</Ana_In>
|
|
<Ana_Out>
|
|
<AO_ITEM Index="18" Name="AO_AI2_Offset" BufferOffset="18" Addr="18" Description="" />
|
|
<AO_ITEM Index="19" Name="AO_AI3_Offset" BufferOffset="19" Addr="19" Description="" />
|
|
<AO_ITEM Index="20" Name="AO_AI4_Offset" BufferOffset="20" Addr="20" Description="" />
|
|
<AO_ITEM Index="21" Name="AO_AI5_Offset" BufferOffset="21" Addr="21" Description="" />
|
|
<AO_ITEM Index="22" Name="AO_AI6_Offset" BufferOffset="22" Addr="22" Description="" />
|
|
<AO_ITEM Index="23" Name="AO_AI7_Offset" BufferOffset="23" Addr="23" Description="" />
|
|
<AO_ITEM Index="24" Name="AO_AI8_Offset" BufferOffset="24" Addr="24" Description="" />
|
|
<AO_ITEM Index="25" Name="AO_AI9_Offset" BufferOffset="25" Addr="25" Description="" />
|
|
<AO_ITEM Index="26" Name="AO_AI10_Offset" BufferOffset="26" Addr="26" Description="" />
|
|
<AO_ITEM Index="27" Name="AO_AI11_Offset" BufferOffset="27" Addr="27" Description="" />
|
|
<AO_ITEM Index="28" Name="AO_AI12_Offset" BufferOffset="28" Addr="28" Description="" />
|
|
<AO_ITEM Index="29" Name="AO_AI13_Offset" BufferOffset="29" Addr="29" Description="" />
|
|
<AO_ITEM Index="30" Name="AO_AI14_Offset" BufferOffset="30" Addr="30" Description="" />
|
|
<AO_ITEM Index="31" Name="AO_AI15_Offset" BufferOffset="31" Addr="31" Description="" />
|
|
<AO_ITEM Index="32" Name="AO_M1" BufferOffset="32" Addr="32" Description="" />
|
|
<AO_ITEM Index="33" Name="AO_M2" BufferOffset="33" Addr="33" Description="" />
|
|
<AO_ITEM Index="34" Name="AO_M3" BufferOffset="34" Addr="34" Description="" />
|
|
<AO_ITEM Index="35" Name="AO_M4" BufferOffset="35" Addr="35" Description="" />
|
|
<AO_ITEM Index="36" Name="AO_M5" BufferOffset="36" Addr="36" Description="" />
|
|
<AO_ITEM Index="37" Name="AO_M6" BufferOffset="37" Addr="37" Description="" />
|
|
<AO_ITEM Index="38" Name="AO_M7" BufferOffset="38" Addr="38" Description="" />
|
|
<AO_ITEM Index="39" Name="AO_M8" BufferOffset="39" Addr="39" Description="" />
|
|
<AO_ITEM Index="40" Name="AO_M9" BufferOffset="40" Addr="40" Description="" />
|
|
<AO_ITEM Index="41" Name="AO_M10" BufferOffset="41" Addr="41" Description="" />
|
|
<AO_ITEM Index="42" Name="AO_M11" BufferOffset="42" Addr="42" Description="" />
|
|
<AO_ITEM Index="43" Name="AO_M12" BufferOffset="43" Addr="43" Description="" />
|
|
<AO_ITEM Index="44" Name="AO_M13" BufferOffset="44" Addr="44" Description="" />
|
|
<AO_ITEM Index="45" Name="AO_M14" BufferOffset="45" Addr="45" Description="" />
|
|
<AO_ITEM Index="46" Name="AO_M15" BufferOffset="46" Addr="46" Description="" />
|
|
<AO_ITEM Index="47" Name="AO_M16" BufferOffset="47" Addr="47" Description="" />
|
|
<AO_ITEM Index="50" Name="AO_M19" BufferOffset="50" Addr="50" Description="" />
|
|
<AO_ITEM Index="51" Name="AO_M20" BufferOffset="51" Addr="51" Description="" />
|
|
<AO_ITEM Index="53" Name="AO_M22" BufferOffset="53" Addr="53" Description="" />
|
|
<AO_ITEM Index="54" Name="AO_M23" BufferOffset="54" Addr="54" Description="" />
|
|
<AO_ITEM Index="56" Name="AO_M25" BufferOffset="56" Addr="56" Description="" />
|
|
<AO_ITEM Index="57" Name="AO_M26" BufferOffset="57" Addr="57" Description="" />
|
|
<AO_ITEM Index="58" Name="AO_M27" BufferOffset="58" Addr="58" Description="" />
|
|
<AO_ITEM Index="59" Name="AO_M28" BufferOffset="59" Addr="59" Description="" />
|
|
<AO_ITEM Index="60" Name="AO_M29" BufferOffset="60" Addr="60" Description="" />
|
|
<AO_ITEM Index="62" Name="AO_M31" BufferOffset="62" Addr="62" Description="" />
|
|
<AO_ITEM Index="63" Name="AO_M32" BufferOffset="63" Addr="63" Description="" />
|
|
<AO_ITEM Index="64" Name="AO_M33" BufferOffset="64" Addr="64" Description="" />
|
|
<AO_ITEM Index="66" Name="AO_M35" BufferOffset="66" Addr="66" Description="" />
|
|
<AO_ITEM Index="67" Name="AO_M36" BufferOffset="67" Addr="67" Description="" />
|
|
<AO_ITEM Index="68" Name="AO_M37" BufferOffset="68" Addr="68" Description="" />
|
|
<AO_ITEM Index="69" Name="AO_M38" BufferOffset="69" Addr="69" Description="" />
|
|
<AO_ITEM Index="71" Name="AO_M40" BufferOffset="71" Addr="71" Description="" />
|
|
<AO_ITEM Index="72" Name="AO_PT1_Offset" BufferOffset="72" Addr="72" Description="" Visible="false"/>
|
|
<AO_ITEM Index="73" Name="AO_PT1_K" BufferOffset="73" Addr="73" Description="" Visible="false"/>
|
|
<AO_ITEM Index="74" Name="AO_PT2_Offset" BufferOffset="74" Addr="74" Description="" Visible="false"/>
|
|
<AO_ITEM Index="75" Name="AO_PT2_K" BufferOffset="75" Addr="75" Description="" Visible="false"/>
|
|
<AO_ITEM Index="76" Name="AO_PT3_Offset" BufferOffset="76" Addr="76" Description="" Visible="false"/>
|
|
<AO_ITEM Index="77" Name="AO_PT3_K" BufferOffset="77" Addr="77" Description="" Visible="false"/>
|
|
<AO_ITEM Index="78" Name="AO_PT4_Offset" BufferOffset="78" Addr="78" Description="" Visible="false"/>
|
|
<AO_ITEM Index="79" Name="AO_PT4_K" BufferOffset="79" Addr="79" Description="" Visible="false"/>
|
|
<AO_ITEM Index="80" Name="AO_PT9_Offset" BufferOffset="80" Addr="80" Description="" Visible="false"/>
|
|
<AO_ITEM Index="81" Name="AO_PT9_K" BufferOffset="81" Addr="81" Description="" Visible="false"/>
|
|
<AO_ITEM Index="82" Name="AO_PT10_Offset" BufferOffset="82" Addr="82" Description="" Visible="false"/>
|
|
<AO_ITEM Index="83" Name="AO_PT10_K" BufferOffset="83" Addr="83" Description="" Visible="false"/>
|
|
<AO_ITEM Index="88" Name="AO_ConfinementRingUpPos" BufferOffset="88" Addr="88" Description="" />
|
|
<AO_ITEM Index="89" Name="AO_ConfinementRingDownPos" BufferOffset="89" Addr="89" Description="" />
|
|
<AO_ITEM Index="90" Name="AO_ConfinementRingSpeed" BufferOffset="90" Addr="90" Description="" />
|
|
<AO_ITEM Index="91" Name="AO_ConfinementRingDistance" BufferOffset="91" Addr="91" Description="" />
|
|
<AO_ITEM Index="92" Name="AO_SCR1Enable" BufferOffset="92" Addr="92" Description="" />
|
|
<AO_ITEM Index="93" Name="AO_SCR1Reset" BufferOffset="93" Addr="93" Description="" />
|
|
<AO_ITEM Index="96" Name="AO_SCR2Enable" BufferOffset="96" Addr="96" Description="" />
|
|
<AO_ITEM Index="97" Name="AO_SCR2Reset" BufferOffset="97" Addr="97" Description="" />
|
|
<AO_ITEM Index="100" Name="AO_SCR3Enable" BufferOffset="100" Addr="100" Description="" />
|
|
<AO_ITEM Index="101" Name="AO_SCR3Reset" BufferOffset="101" Addr="101" Description="" />
|
|
<AO_ITEM Index="104" Name="AO_PSU1Y" BufferOffset="104" Addr="104" Description="" Visible="false"/>
|
|
<AO_ITEM Index="105" Name="AO_PSU2Y" BufferOffset="105" Addr="105" Description="" Visible="false"/>
|
|
<AO_ITEM Index="106" Name="AO_PSU3Y" BufferOffset="106" Addr="106" Description="" Visible="false"/>
|
|
<AO_ITEM Index="108" Name="AO_PressCtrl1" BufferOffset="108" Addr="108" Description="" />
|
|
<AO_ITEM Index="109" Name="AO_PressCtrl2" BufferOffset="109" Addr="109" Description="" />
|
|
<AO_ITEM Index="110" Name="AO_PressCtrl3" BufferOffset="110" Addr="110" Description="" />
|
|
<AO_ITEM Index="111" Name="AO_PressCtrl4" BufferOffset="111" Addr="111" Description="" />
|
|
<AO_ITEM Index="112" Name="AO_PressCtrl5" BufferOffset="112" Addr="112" Description="" />
|
|
<AO_ITEM Index="113" Name="AO_PressCtrl6" BufferOffset="113" Addr="113" Description="" />
|
|
<AO_ITEM Index="114" Name="AO_PressCtrl7" BufferOffset="114" Addr="114" Description="" />
|
|
<AO_ITEM Index="115" Name="AO_PressCtrl8" BufferOffset="115" Addr="115" Description="" />
|
|
<AO_ITEM Index="116" Name="AO_PressCtrl9" BufferOffset="116" Addr="116" Description="" />
|
|
<AO_ITEM Index="117" Name="AO_PressCtrl10" BufferOffset="117" Addr="117" Description="" />
|
|
<AO_ITEM Index="118" Name="AO_SpindleSpeed" BufferOffset="118" Addr="118" Description="" />
|
|
<AO_ITEM Index="120" Name="AO_SpindleACC" BufferOffset="120" Addr="120" Description="" />
|
|
<AO_ITEM Index="121" Name="AO_SpindleDEC" BufferOffset="121" Addr="121" Description="" />
|
|
<AO_ITEM Index="123" Name="AO_ConfinementRingMode" BufferOffset="123" Addr="123" Description="" />
|
|
<AO_ITEM Index="127" Name="AO_ValveModeSetpoint" BufferOffset="127" Addr="127" Description="" />
|
|
<AO_ITEM Index="128" Name="AO_SetpointPositon" BufferOffset="128" Addr="128" Description="" />
|
|
<AO_ITEM Index="129" Name="AO_SetpointPressure" BufferOffset="129" Addr="129" Description="" />
|
|
<AO_ITEM Index="130" Name="AO_HeartBeat" BufferOffset="130" Addr="130" Description="" />
|
|
<AO_ITEM Index="131" Name="AO_M1CtrlMode" BufferOffset="131" Addr="131" Description="" />
|
|
<AO_ITEM Index="132" Name="AO_M2CtrlMode" BufferOffset="132" Addr="132" Description="" />
|
|
<AO_ITEM Index="133" Name="AO_M3CtrlMode" BufferOffset="133" Addr="133" Description="" />
|
|
<AO_ITEM Index="134" Name="AO_M4CtrlMode" BufferOffset="134" Addr="134" Description="" />
|
|
<AO_ITEM Index="135" Name="AO_M5CtrlMode" BufferOffset="135" Addr="135" Description="" />
|
|
<AO_ITEM Index="136" Name="AO_M6CtrlMode" BufferOffset="136" Addr="136" Description="" />
|
|
<AO_ITEM Index="137" Name="AO_M7CtrlMode" BufferOffset="137" Addr="137" Description="" />
|
|
<AO_ITEM Index="138" Name="AO_M8CtrlMode" BufferOffset="138" Addr="138" Description="" />
|
|
<AO_ITEM Index="139" Name="AO_M9CtrlMode" BufferOffset="139" Addr="139" Description="" />
|
|
<AO_ITEM Index="140" Name="AO_M10CtrlMode" BufferOffset="140" Addr="140" Description="" />
|
|
<AO_ITEM Index="141" Name="AO_M11CtrlMode" BufferOffset="141" Addr="141" Description="" />
|
|
<AO_ITEM Index="142" Name="AO_M12CtrlMode" BufferOffset="142" Addr="142" Description="" />
|
|
<AO_ITEM Index="143" Name="AO_M13CtrlMode" BufferOffset="143" Addr="143" Description="" />
|
|
<AO_ITEM Index="144" Name="AO_M14CtrlMode" BufferOffset="144" Addr="144" Description="" />
|
|
<AO_ITEM Index="145" Name="AO_M15CtrlMode" BufferOffset="145" Addr="145" Description="" />
|
|
<AO_ITEM Index="146" Name="AO_M16CtrlMode" BufferOffset="146" Addr="146" Description="" />
|
|
<AO_ITEM Index="149" Name="AO_M19CtrlMode" BufferOffset="149" Addr="149" Description="" />
|
|
<AO_ITEM Index="150" Name="AO_M20CtrlMode" BufferOffset="150" Addr="150" Description="" />
|
|
<AO_ITEM Index="152" Name="AO_M22CtrlMode" BufferOffset="152" Addr="152" Description="" />
|
|
<AO_ITEM Index="153" Name="AO_M23CtrlMode" BufferOffset="153" Addr="153" Description="" />
|
|
<AO_ITEM Index="155" Name="AO_M25CtrlMode" BufferOffset="155" Addr="155" Description="" />
|
|
<AO_ITEM Index="156" Name="AO_M26CtrlMode" BufferOffset="156" Addr="156" Description="" />
|
|
<AO_ITEM Index="157" Name="AO_M27CtrlMode" BufferOffset="157" Addr="157" Description="" />
|
|
<AO_ITEM Index="158" Name="AO_M28CtrlMode" BufferOffset="158" Addr="158" Description="" />
|
|
<AO_ITEM Index="159" Name="AO_M29CtrlMode" BufferOffset="159" Addr="159" Description="" />
|
|
<AO_ITEM Index="161" Name="AO_M31CtrlMode" BufferOffset="161" Addr="161" Description="" />
|
|
<AO_ITEM Index="162" Name="AO_M32CtrlMode" BufferOffset="162" Addr="162" Description="" />
|
|
<AO_ITEM Index="163" Name="AO_M33CtrlMode" BufferOffset="163" Addr="163" Description="" />
|
|
<AO_ITEM Index="165" Name="AO_M35CtrlMode" BufferOffset="165" Addr="165" Description="" />
|
|
<AO_ITEM Index="166" Name="AO_M36CtrlMode" BufferOffset="166" Addr="166" Description="" />
|
|
<AO_ITEM Index="167" Name="AO_M37CtrlMode" BufferOffset="167" Addr="167" Description="" />
|
|
<AO_ITEM Index="168" Name="AO_M38CtrlMode" BufferOffset="168" Addr="168" Description="" />
|
|
<AO_ITEM Index="170" Name="AO_M40CtrlMode" BufferOffset="170" Addr="170" Description="" />
|
|
<AO_ITEM Index="171" Name="AO_PC1CtrlMode" BufferOffset="171" Addr="171" Description="" />
|
|
<AO_ITEM Index="172" Name="AO_PC2CtrlMode" BufferOffset="172" Addr="172" Description="" />
|
|
<AO_ITEM Index="173" Name="AO_PC3CtrlMode" BufferOffset="173" Addr="173" Description="" />
|
|
<AO_ITEM Index="174" Name="AO_PC4CtrlMode" BufferOffset="174" Addr="174" Description="" />
|
|
<AO_ITEM Index="175" Name="AO_PC5CtrlMode" BufferOffset="175" Addr="175" Description="" />
|
|
<AO_ITEM Index="176" Name="AO_PC6CtrlMode" BufferOffset="176" Addr="176" Description="" />
|
|
<AO_ITEM Index="177" Name="AO_PC7CtrlMode" BufferOffset="177" Addr="177" Description="" />
|
|
<AO_ITEM Index="181" Name="AO_PSUInnerLoopMode" BufferOffset="181" Addr="181" Description="" />
|
|
<AO_ITEM Index="182" Name="AO_PSUMiddleLoopMode" BufferOffset="182" Addr="182" Description="" />
|
|
<AO_ITEM Index="183" Name="AO_PSUOuterLoopMode" BufferOffset="183" Addr="183" Description="" />
|
|
<AO_ITEM Index="184" Name="AO_PSUInnerTargetSP" BufferOffset="184" Addr="184" Description="" />
|
|
<AO_ITEM Index="185" Name="AO_PSUMiddleTargetSP" BufferOffset="185" Addr="185" Description="" />
|
|
<AO_ITEM Index="186" Name="AO_PSUOuterTargetSP" BufferOffset="186" Addr="186" Description="" />
|
|
<AO_ITEM Index="187" Name="AO_PSUInnerTargetOP" BufferOffset="187" Addr="187" Description="" />
|
|
<AO_ITEM Index="188" Name="AO_PSUMiddleTargetOP" BufferOffset="188" Addr="188" Description="" />
|
|
<AO_ITEM Index="189" Name="AO_PSUOuterTargetOP" BufferOffset="189" Addr="189" Description="" />
|
|
<AO_ITEM Index="190" Name="AO_PSUInnerPyroTemp" BufferOffset="190" Addr="190" Description="" />
|
|
<AO_ITEM Index="191" Name="AO_PSUMiddlePyroTemp" BufferOffset="191" Addr="191" Description="" />
|
|
<AO_ITEM Index="192" Name="AO_PSUOuterPyroTemp" BufferOffset="192" Addr="192" Description="" />
|
|
<AO_ITEM Index="193" Name="AO_PSUTCPyroMode" BufferOffset="193" Addr="193" Description="" />
|
|
<AO_ITEM Index="194" Name="AO_PSUInnerTempHighLimit" BufferOffset="194" Addr="194" Description="" />
|
|
<AO_ITEM Index="195" Name="AO_PSUMiddleTempHighLimit" BufferOffset="195" Addr="195" Description="" />
|
|
<AO_ITEM Index="196" Name="AO_PSUOuterTempHighLimit" BufferOffset="196" Addr="196" Description="" />
|
|
<AO_ITEM Index="197" Name="AO_PSUInnerTempLowLimit" BufferOffset="197" Addr="197" Description="" />
|
|
<AO_ITEM Index="198" Name="AO_PSUMiddleTempLowLimit" BufferOffset="198" Addr="198" Description="" />
|
|
<AO_ITEM Index="199" Name="AO_PSUOuterTempLowLimit" BufferOffset="199" Addr="199" Description="" />
|
|
<AO_ITEM Index="200" Name="AO_PSUInnerRecipeValue" BufferOffset="200" Addr="200" Description="" />
|
|
<AO_ITEM Index="201" Name="AO_PSUMiddleRecipeValue" BufferOffset="201" Addr="201" Description="" />
|
|
<AO_ITEM Index="202" Name="AO_PSUOuterRecipeValue" BufferOffset="202" Addr="202" Description="" />
|
|
<AO_ITEM Index="203" Name="AO_PSUHeaterMode" BufferOffset="203" Addr="203" Description="" />
|
|
<AO_ITEM Index="204" Name="AO_PSUPowerRef" BufferOffset="204" Addr="204" Description="" />
|
|
<AO_ITEM Index="205" Name="AO_PSUInnerRatio" BufferOffset="205" Addr="205" Description="" />
|
|
<AO_ITEM Index="206" Name="AO_PSUMiddleRatio" BufferOffset="206" Addr="206" Description="" />
|
|
<AO_ITEM Index="207" Name="AO_PSUOuterRatio" BufferOffset="207" Addr="207" Description="" />
|
|
<AO_ITEM Index="208" Name="AO_PSUInnerRatedValue" BufferOffset="208" Addr="208" Description="" />
|
|
<AO_ITEM Index="209" Name="AO_PSUMiddleRatedValue" BufferOffset="209" Addr="209" Description="" />
|
|
<AO_ITEM Index="210" Name="AO_PSUOuterRatedValue" BufferOffset="210" Addr="210" Description="" />
|
|
<AO_ITEM Index="211" Name="AO_PSUInnerVoltageLimited" BufferOffset="211" Addr="211" Description="" />
|
|
<AO_ITEM Index="212" Name="AO_PSUMiddleVoltageLimited" BufferOffset="212" Addr="212" Description="" />
|
|
<AO_ITEM Index="213" Name="AO_PSUOuterVoltageLimited" BufferOffset="213" Addr="213" Description="" />
|
|
<AO_ITEM Index="216" Name="AO_PSU1Enable" BufferOffset="216" Addr="216" Description="" />
|
|
<AO_ITEM Index="217" Name="AO_PSU1Reset" BufferOffset="217" Addr="217" Description="" />
|
|
<AO_ITEM Index="218" Name="AO_PSU1ArmLimited" BufferOffset="218" Addr="218" Description="" />
|
|
<AO_ITEM Index="225" Name="AO_PSU1Constant" BufferOffset="225" Addr="225" Description="" />
|
|
<AO_ITEM Index="226" Name="AO_SCRUpperLoopMode" BufferOffset="226" Addr="226" Description="" />
|
|
<AO_ITEM Index="227" Name="AO_SCRMiddleLoopMode" BufferOffset="227" Addr="227" Description="" />
|
|
<AO_ITEM Index="228" Name="AO_SCRLowerLoopMode" BufferOffset="228" Addr="228" Description="" />
|
|
<AO_ITEM Index="229" Name="AO_SCRUpperTargetSP" BufferOffset="229" Addr="229" Description="" />
|
|
<AO_ITEM Index="230" Name="AO_SCRMiddleTargetSP" BufferOffset="230" Addr="230" Description="" />
|
|
<AO_ITEM Index="231" Name="AO_SCRLowerTargetSP" BufferOffset="231" Addr="231" Description="" />
|
|
<AO_ITEM Index="232" Name="AO_SCRUpperTargetOP" BufferOffset="232" Addr="232" Description="" />
|
|
<AO_ITEM Index="233" Name="AO_SCRMiddleTargetOP" BufferOffset="233" Addr="233" Description="" />
|
|
<AO_ITEM Index="234" Name="AO_SCRLowerTargetOP" BufferOffset="234" Addr="234" Description="" />
|
|
<AO_ITEM Index="235" Name="AO_SCRUpperPyroTemp" BufferOffset="235" Addr="235" Description="" />
|
|
<AO_ITEM Index="236" Name="AO_SCRMiddlePyroTemp" BufferOffset="236" Addr="236" Description="" />
|
|
<AO_ITEM Index="237" Name="AO_SCRLowerPyroTemp" BufferOffset="237" Addr="237" Description="" />
|
|
<AO_ITEM Index="238" Name="AO_SCRTCPyroMode" BufferOffset="238" Addr="238" Description="" />
|
|
<AO_ITEM Index="239" Name="AO_SCRUpperTempHighLimit" BufferOffset="239" Addr="239" Description="" />
|
|
<AO_ITEM Index="240" Name="AO_SCRMiddleTempHighLimit" BufferOffset="240" Addr="240" Description="" />
|
|
<AO_ITEM Index="241" Name="AO_SCRLowerTempHighLimit" BufferOffset="241" Addr="241" Description="" />
|
|
<AO_ITEM Index="242" Name="AO_SCRUpperTempLowLimit" BufferOffset="242" Addr="242" Description="" />
|
|
<AO_ITEM Index="243" Name="AO_SCRMiddleTempLowLimit" BufferOffset="243" Addr="243" Description="" />
|
|
<AO_ITEM Index="244" Name="AO_SCRLowerTempLowLimit" BufferOffset="244" Addr="244" Description="" />
|
|
<AO_ITEM Index="245" Name="AO_SCRUpperRecipeValue" BufferOffset="245" Addr="245" Description="" />
|
|
<AO_ITEM Index="246" Name="AO_SCRMiddleRecipeValue" BufferOffset="246" Addr="246" Description="" />
|
|
<AO_ITEM Index="247" Name="AO_SCRLowerRecipeValue" BufferOffset="247" Addr="247" Description="" />
|
|
<AO_ITEM Index="248" Name="AO_SCRHeaterMode" BufferOffset="248" Addr="248" Description="" />
|
|
<AO_ITEM Index="249" Name="AO_SCRPowerRef" BufferOffset="249" Addr="249" Description="" />
|
|
<AO_ITEM Index="250" Name="AO_SCRUpperRatio" BufferOffset="250" Addr="250" Description="" />
|
|
<AO_ITEM Index="251" Name="AO_SCRMiddleRatio" BufferOffset="251" Addr="251" Description="" />
|
|
<AO_ITEM Index="252" Name="AO_SCRLowerRatio" BufferOffset="252" Addr="252" Description="" />
|
|
<AO_ITEM Index="253" Name="AO_SCRUpperRatedValue" BufferOffset="253" Addr="253" Description="" />
|
|
<AO_ITEM Index="254" Name="AO_SCRMiddleRatedValue" BufferOffset="254" Addr="254" Description="" />
|
|
<AO_ITEM Index="255" Name="AO_SCRLowerRatedValue" BufferOffset="255" Addr="255" Description="" />
|
|
<AO_ITEM Index="256" Name="AO_SCRUpperVoltageLimited" BufferOffset="256" Addr="256" Description="" />
|
|
<AO_ITEM Index="257" Name="AO_SCRMiddleVoltageLimited" BufferOffset="257" Addr="257" Description="" />
|
|
<AO_ITEM Index="258" Name="AO_SCRLowerVoltageLimited" BufferOffset="258" Addr="258" Description="" />
|
|
<AO_ITEM Index="261" Name="AO_PSU2Enable" BufferOffset="261" Addr="261" Description="" />
|
|
<AO_ITEM Index="262" Name="AO_PSU2Reset" BufferOffset="262" Addr="262" Description="" />
|
|
<AO_ITEM Index="263" Name="AO_PSU2ArmLimited" BufferOffset="263" Addr="263" Description="" />
|
|
<AO_ITEM Index="270" Name="AO_PSU2Constant" BufferOffset="270" Addr="270" Description="" />
|
|
<AO_ITEM Index="271" Name="AO_PSU3Enable" BufferOffset="271" Addr="271" Description="" />
|
|
<AO_ITEM Index="272" Name="AO_PSU3Reset" BufferOffset="272" Addr="272" Description="" />
|
|
<AO_ITEM Index="273" Name="AO_PSU3ArmLimited" BufferOffset="273" Addr="273" Description="" />
|
|
<AO_ITEM Index="280" Name="AO_PSU3Constant" BufferOffset="280" Addr="280" Description="" />
|
|
</Ana_Out>
|
|
</IO_DEFINE> |