1288 lines
89 KiB
C#
1288 lines
89 KiB
C#
using Aitex.Core.RT.DataCenter;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.SCCore;
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using Aitex.Core.Util;
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using MECF.Framework.Common.Communications;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.AlignersBase;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.YaskawaRobots;
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using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Text;
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using System.Threading.Tasks;
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namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Aligners.YaskawaAligner
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{
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public class YaskawaAligner:AlignerBaseDevice,IConnection
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{
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public YaskawaAligner(string module,string name,string scRoot,IoSensor[] dis, IoTrigger[] dos, int alignerType = 0) :base(module,name)
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{
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isSimulatorMode = SC.ContainsItem("System.IsSimulatorMode") ? SC.GetValue<bool>("System.IsSimulatorMode") : false;
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_scRoot = scRoot;
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_address = SC.GetStringValue($"{_scRoot}.{Name}.Address");
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_enableLog = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableLogMessage");
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UnitNumber = SC.GetValue<int>($"{_scRoot}.{Name}.UnitNumber");
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IsEnableCheckSum = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableCheckSum");
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IsEnableSeqNo = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableSeqNo");
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AlignerType = alignerType;
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_connection = new YaskawaAlignerConnection(this,_address);
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_connection.EnableLog(_enableLog);
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SeqnoGenerator = new YaskawaTokenGenerator($"{_scRoot}.{Name}.CommunicationToken");
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if(dis!= null && dis.Length >=1)
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_diPreAlignerWaferOn = dis[0];
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if (dis != null && dis.Length >= 2)
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_diPreAlignerReady = dis[1];
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if (dis != null && dis.Length >= 3)
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{
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_diPreAlignerError = dis[2];
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_diPreAlignerError.OnSignalChanged += _diPreAlignerError_OnSignalChanged;
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}
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if (dis != null && dis.Length >= 4)
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{
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_diTPinUse = dis[3];
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_diTPinUse.OnSignalChanged += _diTPinUse_OnSignalChanged;
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}
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if (dos != null && dos.Length >= 1)
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{
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_doPreAlignerHold = dos[0];
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_doPreAlignerHold.SetTrigger(true, out _);
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}
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ConnectionManager.Instance.Subscribe($"{Name}", this);
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_thread = new PeriodicJob(100, OnTimer, $"{_scRoot}.{Name} MonitorHandler", true);
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ResetPropertiesAndResponses();
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RegisterSpecialData();
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RegisterAlarm();
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}
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private void RegisterAlarm()
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{
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EV.Subscribe(new EventItem("Alarm", "AlignerError020", $"{Name} Error:Aligner Occurred Error:Secondary power off.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError021", $"{Name} Error:Aligner Occurred Error:Secondary power on.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError040", $"{Name} Error:Aligner Occurred Error:In TEACH Mode.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError050", $"{Name} Error:Aligner Occurred Error:Unit is in motion.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError051", $"{Name} Error:Aligner Occurred Error:Unable to set pitch between slots.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError052", $"{Name} Error:Aligner Occurred Error:Unable to restart motion.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError053", $"{Name} Error:Aligner Occurred Error:Ready position moveincomplete.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError054", $"{Name} Error:Aligner Occurred Error:Alignment Ready position move incomplete.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError055", $"{Name} Error:Aligner Occurred Error:Improper station type.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError058", $"{Name} Error:Aligner Occurred Error:Command not supported 1-1.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError059", $"{Name} Error:Aligner Occurred Error:Invalid transfer point.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError05A", $"{Name} Error:Aligner Occurred Error:Linear motion failed.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError05C", $"{Name} Error:Aligner Occurred Error:Unable to reference waferalignment result.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError05d", $"{Name} Error:Aligner Occurred Error:Unable to perform armcalibration.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError05E", $"{Name} Error:Aligner Occurred Error:Unable to read mapping data.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError05F", $"{Name} Error:Aligner Occurred Error:Data Upload/Download inprogress.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError061", $"{Name} Error:Aligner Occurred Error:Unable to motion.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError064", $"{Name} Error:Aligner Occurred Error:Lifter interference error.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError070", $"{Name} Error:Aligner Occurred Error:Bottom slot position recordincomplete.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError071", $"{Name} Error:Aligner Occurred Error:Top slot position record incomplete.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError088", $"{Name} Error:Aligner Occurred Error:Position generating error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError089", $"{Name} Error:Aligner Occurred Error:Position generating error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError08A", $"{Name} Error:Aligner Occurred Error:Position generating error 3.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError08b", $"{Name} Error:Aligner Occurred Error:Position generating error 4.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError08C", $"{Name} Error:Aligner Occurred Error:Position generating error 5.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError08d", $"{Name} Error:Aligner Occurred Error:Position generating error 6.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError090", $"{Name} Error:Aligner Occurred Error:Host parameter out of range.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError0A0", $"{Name} Error:Aligner Occurred Error:Alignment motion error.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError0E0", $"{Name} Error:Aligner Occurred Error:Teach position adjustmentoffset amount limit error.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError0F0", $"{Name} Error:Aligner Occurred Error:Voltage drop warning.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*06", $"{Name} Error:Aligner Occurred Error:Amplifier Type Mismatch.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*07", $"{Name} Error:Aligner Occurred Error:Encoder Type Mismatch.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*10", $"{Name} Error:Aligner Occurred Error:Overflow Current.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*30", $"{Name} Error:Aligner Occurred Error:Regeneration Error Detected.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*40", $"{Name} Error:Aligner Occurred Error:Excess Voltage (converter).", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*41", $"{Name} Error:Aligner Occurred Error:Insufficient Voltage.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*45", $"{Name} Error:Aligner Occurred Error:Brake circuit error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*46", $"{Name} Error:Aligner Occurred Error:Converter ready signal error.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*47", $"{Name} Error:Aligner Occurred Error:Input power error.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*48", $"{Name} Error:Aligner Occurred Error:Converter main circuit chargeerror.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*49", $"{Name} Error:Aligner Occurred Error:Amplifier ready signal error.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*51", $"{Name} Error:Aligner Occurred Error:Excessive Speed.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*71", $"{Name} Error:Aligner Occurred Error:Momentary Overload (Motor).", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*72", $"{Name} Error:Aligner Occurred Error:Continuous Overload (Motor).", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*78", $"{Name} Error:Aligner Occurred Error:Overload (Converter).", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*7b", $"{Name} Error:Aligner Occurred Error:Amplifier overheat.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*7C", $"{Name} Error:Aligner Occurred Error:Continuous Overload(Amplifier).", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*7d", $"{Name} Error:Aligner Occurred Error:Momentary Overload.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*81", $"{Name} Error:Aligner Occurred Error:Absolute Encoder Back-upError.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*83", $"{Name} Error:Aligner Occurred Error:Absolute Encoder Battery.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*84", $"{Name} Error:Aligner Occurred Error:Encoder Data Error 2-1.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*85", $"{Name} Error:Aligner Occurred Error:Encoder Excessive Speed.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*86", $"{Name} Error:Aligner Occurred Error:Encoder Overheat.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*88", $"{Name} Error:Aligner Occurred Error:Encoder error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*89", $"{Name} Error:Aligner Occurred Error:Encoder Command failed.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*8A", $"{Name} Error:Aligner Occurred Error:Encoder multi-turn range.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*8C", $"{Name} Error:Aligner Occurred Error:Encoder Reset not completed.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*98", $"{Name} Error:Aligner Occurred Error:Servo parameter error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*9A", $"{Name} Error:Aligner Occurred Error:Feedback Over Flow.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*b4", $"{Name} Error:Aligner Occurred Error:Servo Control Board Failure.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*bC", $"{Name} Error:Aligner Occurred Error:Encoder error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*C1", $"{Name} Error:Aligner Occurred Error:Motor runaway detection.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*C9", $"{Name} Error:Aligner Occurred Error:Encoder Communication.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*CE", $"{Name} Error:Aligner Occurred Error:Encoder error 3.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*CF", $"{Name} Error:Aligner Occurred Error:Encoder error 4.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*d0", $"{Name} Error:Aligner Occurred Error:Position deviation error.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*d1", $"{Name} Error:Aligner Occurred Error:Position deviation saturation.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*d2", $"{Name} Error:Aligner Occurred Error:Motor directive position error.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*d4", $"{Name} Error:Aligner Occurred Error:Servo Tracking Error.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError*F1", $"{Name} Error:Aligner Occurred Error:Phase loss.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerErrorE*1", $"{Name} Error:Aligner Occurred Error:Positioning Timeout.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerErrorE*d", $"{Name} Error:Aligner Occurred Error:Command not supported 1-2.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerErrorE*E", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 1-1.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerErrorE*F", $"{Name} Error:Aligner Occurred Error:Servo control board responsetimeout 1..", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError701", $"{Name} Error:Aligner Occurred Error:ROM Error.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError703", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 2-1.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError704", $"{Name} Error:Aligner Occurred Error:Communication Error (internal controller) 2-2.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError705", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 2-3.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError706", $"{Name} Error:Aligner Occurred Error:Servo system error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError707", $"{Name} Error:Aligner Occurred Error:Servo system error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError709", $"{Name} Error:Aligner Occurred Error:Current feedback error.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError70A", $"{Name} Error:Aligner Occurred Error:Power Lost.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError70b", $"{Name} Error:Aligner Occurred Error:Rush Current PreventionRelay Abnormal.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError70C", $"{Name} Error:Aligner Occurred Error:Converter mismatch.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError70F", $"{Name} Error:Aligner Occurred Error:Servo control board response timeout 2..", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError713", $"{Name} Error:Aligner Occurred Error:DB error.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError714", $"{Name} Error:Aligner Occurred Error:Converter charge Error.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError715", $"{Name} Error:Aligner Occurred Error:Servo OFF Status Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError716", $"{Name} Error:Aligner Occurred Error:Servo ON Status Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError717", $"{Name} Error:Aligner Occurred Error:Servo OFF Status Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError718", $"{Name} Error:Aligner Occurred Error:Servo ON Status Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError719", $"{Name} Error:Aligner Occurred Error:Servo On Abnormal.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError71A", $"{Name} Error:Aligner Occurred Error:Brake circuit error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError71b", $"{Name} Error:Aligner Occurred Error:Brake circuit error 3.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError71C", $"{Name} Error:Aligner Occurred Error:Power relay error.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError721", $"{Name} Error:Aligner Occurred Error:Servo parameter error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError722", $"{Name} Error:Aligner Occurred Error:Servo parameter error 3.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError725", $"{Name} Error:Aligner Occurred Error:Converter Overheat.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError726", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 2-4.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError727", $"{Name} Error:Aligner Occurred Error:Command not supported 1-2.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError728", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 2-5.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError729", $"{Name} Error:Aligner Occurred Error:Servo system error 3.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError72A", $"{Name} Error:Aligner Occurred Error:Servo system error 4.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError72b", $"{Name} Error:Aligner Occurred Error:Servo parameter error 4.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError730", $"{Name} Error:Aligner Occurred Error:Amp module disconnected..", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError732", $"{Name} Error:Aligner Occurred Error:Servo parameter error 5.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError733", $"{Name} Error:Aligner Occurred Error:Servo parameter error 6.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError734", $"{Name} Error:Aligner Occurred Error:Servo parameter error 7.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError735", $"{Name} Error:Aligner Occurred Error:Servo parameter error 8.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError73F", $"{Name} Error:Aligner Occurred Error:Undefined Error.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError740", $"{Name} Error:Aligner Occurred Error:Encoder Status Error.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError741", $"{Name} Error:Aligner Occurred Error:Servo system error 5.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError742", $"{Name} Error:Aligner Occurred Error:Servo system error 6.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError743", $"{Name} Error:Aligner Occurred Error:Servo system error 7.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError744", $"{Name} Error:Aligner Occurred Error:Servo system error 8.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError745", $"{Name} Error:Aligner Occurred Error:Servo system error 9.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError746", $"{Name} Error:Aligner Occurred Error:Servo system error 10.", EventLevel.Alarm, EventType.EventUI_Notify));
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EV.Subscribe(new EventItem("Alarm", "AlignerError74A", $"{Name} Error:Aligner Occurred Error:Servo system error 11.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError74b", $"{Name} Error:Aligner Occurred Error:Servo system error 12.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError74C", $"{Name} Error:Aligner Occurred Error:Servo system error 13.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError74d", $"{Name} Error:Aligner Occurred Error:Servo system error 14.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7A0", $"{Name} Error:Aligner Occurred Error:Communication Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7A1", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 3-2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7A2", $"{Name} Error:Aligner Occurred Error:Command not supported 3-1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7A3", $"{Name} Error:Aligner Occurred Error:Data buffer full.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7A4", $"{Name} Error:Aligner Occurred Error:Command not supported 3-2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7A5", $"{Name} Error:Aligner Occurred Error:Encoder data error 3-1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7A6", $"{Name} Error:Aligner Occurred Error:Command not supported 3-3.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7AE", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 1-2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7AF", $"{Name} Error:Aligner Occurred Error:Communication Error(internal controller) 1-3.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7b0", $"{Name} Error:Aligner Occurred Error:CCD sensor abnormal 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7b4", $"{Name} Error:Aligner Occurred Error:CCD sensor abnormal 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7b5", $"{Name} Error:Aligner Occurred Error:CCD sensor abnormal 3.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7C0", $"{Name} Error:Aligner Occurred Error:PAIF board Failure 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7C1", $"{Name} Error:Aligner Occurred Error:PAIF board Failure 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7C2", $"{Name} Error:Aligner Occurred Error:PAIF board Failure 3.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7C3", $"{Name} Error:Aligner Occurred Error:CCD sensor abnormal 4.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7CF", $"{Name} Error:Aligner Occurred Error:PAIF board disconnected.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7d0", $"{Name} Error:Aligner Occurred Error:PAIF board Failure 4.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError7d1", $"{Name} Error:Aligner Occurred Error:PAIF board Failure 5.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError", $"{Name} Error:Aligner Occurred Error:.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError900", $"{Name} Error:Aligner Occurred Error:Character Interval Timeout.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError910", $"{Name} Error:Aligner Occurred Error:Received Data ChecksumError.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError920", $"{Name} Error:Aligner Occurred Error:Unit Number Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError930", $"{Name} Error:Aligner Occurred Error:Undefined CommandReceived.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError940", $"{Name} Error:Aligner Occurred Error:Message Parameter Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError950", $"{Name} Error:Aligner Occurred Error:Receiving Time-out Error for Confirmation of Execution Completion.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError960", $"{Name} Error:Aligner Occurred Error:Incorrect sequence number.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError961", $"{Name} Error:Aligner Occurred Error:Duplicated message.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError970", $"{Name} Error:Aligner Occurred Error:Delimiter error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError9A1", $"{Name} Error:Aligner Occurred Error:Message buffer overflow.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError9C0", $"{Name} Error:Aligner Occurred Error:LAN device setting error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError9C1", $"{Name} Error:Aligner Occurred Error:IP address error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError9C2", $"{Name} Error:Aligner Occurred Error:Subnet mask error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError9C3", $"{Name} Error:Aligner Occurred Error:Default gateway error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError9d0", $"{Name} Error:Aligner Occurred Error:Ethernet receive error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError9E0", $"{Name} Error:Aligner Occurred Error:During operation themaintenance tool.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerError9E1", $"{Name} Error:Aligner Occurred Error:The data abnormal.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorA01", $"{Name} Error:Aligner Occurred Error:Re-detection of a powerSupply voltage fall.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorA10", $"{Name} Error:Aligner Occurred Error:External emergency stop.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorA20", $"{Name} Error:Aligner Occurred Error:T.P emergency stop.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorA21", $"{Name} Error:Aligner Occurred Error:Interlock board failure 0.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorA30", $"{Name} Error:Aligner Occurred Error:Emergency stop.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorA40", $"{Name} Error:Aligner Occurred Error:Controller Fan 1 Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorA41", $"{Name} Error:Aligner Occurred Error:Controller Fan 2 Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorA42", $"{Name} Error:Aligner Occurred Error:Controller Fan 3 Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorA45", $"{Name} Error:Aligner Occurred Error:Unit fan 1 error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorA46", $"{Name} Error:Aligner Occurred Error:Unit fan 2 error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorA4F", $"{Name} Error:Aligner Occurred Error:Controller Battery Alarm.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAC0", $"{Name} Error:Aligner Occurred Error:Safety fence signal detection.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAC9", $"{Name} Error:Aligner Occurred Error:Protection stop signal.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAE0", $"{Name} Error:Aligner Occurred Error:HOST Mode Switching error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAE1", $"{Name} Error:Aligner Occurred Error:TEACH Mode Switching Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAE8", $"{Name} Error:Aligner Occurred Error:Deadman switch error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF0", $"{Name} Error:Aligner Occurred Error:Interlock board failure 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF1", $"{Name} Error:Aligner Occurred Error:Interlock board failure 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF2", $"{Name} Error:Aligner Occurred Error:Interlock board failure 3.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF3", $"{Name} Error:Aligner Occurred Error:Interlock board failure 4.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF4", $"{Name} Error:Aligner Occurred Error:Interlock board failure 5.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF5", $"{Name} Error:Aligner Occurred Error:Interlock board failure 6.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF6", $"{Name} Error:Aligner Occurred Error:Interlock board failure 7.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF8", $"{Name} Error:Aligner Occurred Error:Input compare error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAF9", $"{Name} Error:Aligner Occurred Error:Input compare error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFA", $"{Name} Error:Aligner Occurred Error:Input compare error 3.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFb", $"{Name} Error:Aligner Occurred Error:Input compare error 4.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFC", $"{Name} Error:Aligner Occurred Error:Input compare error 5.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFd", $"{Name} Error:Aligner Occurred Error:Input compare error 6.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFE", $"{Name} Error:Aligner Occurred Error:Input compare error 7.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorAFF", $"{Name} Error:Aligner Occurred Error:Input compare error 8.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb10", $"{Name} Error:Aligner Occurred Error:Axis-1 Speed Limit Detection.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb11", $"{Name} Error:Aligner Occurred Error:Axis-2 Speed Limit Detection.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb12", $"{Name} Error:Aligner Occurred Error:Axis-3 Speed Limit Detection.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb13", $"{Name} Error:Aligner Occurred Error:Axis-4 Speed Limit Detection.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb14", $"{Name} Error:Aligner Occurred Error:Axis-5 Speed Limit Detection.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb20", $"{Name} Error:Aligner Occurred Error:Axis-1 Positive (+) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb21", $"{Name} Error:Aligner Occurred Error:Axis-2 Positive (+) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb22", $"{Name} Error:Aligner Occurred Error:Axis-3 Positive (+) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb23", $"{Name} Error:Aligner Occurred Error:Axis-4 Positive (+) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb24", $"{Name} Error:Aligner Occurred Error:Axis-5 Positive (+) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb28", $"{Name} Error:Aligner Occurred Error:Axis-1 Positive (+) Direction Software-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb29", $"{Name} Error:Aligner Occurred Error:Axis-2 Positive (+) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb2A", $"{Name} Error:Aligner Occurred Error:Axis-3 Positive (+) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb2b", $"{Name} Error:Aligner Occurred Error:Axis-4 Positive (+) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb2C", $"{Name} Error:Aligner Occurred Error:Axis-5 Positive (+) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb30", $"{Name} Error:Aligner Occurred Error:Axis-1 Negative (-) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb31", $"{Name} Error:Aligner Occurred Error:Axis-2 Negative (-) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb32", $"{Name} Error:Aligner Occurred Error:Axis-3 Negative (-) Direction Software-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb33", $"{Name} Error:Aligner Occurred Error:Axis-4 Negative (-) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb34", $"{Name} Error:Aligner Occurred Error:Axis-5 Negative (-) DirectionSoftware-limit Detection 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb38", $"{Name} Error:Aligner Occurred Error:Axis-1 Negative (-) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb39", $"{Name} Error:Aligner Occurred Error:Axis-2 Negative (-) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb3A", $"{Name} Error:Aligner Occurred Error:Axis-3 Negative (-) Direction Software-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb3b", $"{Name} Error:Aligner Occurred Error:Axis-4 Negative (-) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb3C", $"{Name} Error:Aligner Occurred Error:Axis-5 Negative (-) DirectionSoftware-limit Detection 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb40", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 1Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb41", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 2Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb42", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 3Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb43", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 4Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb44", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 5 Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb45", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 6Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb46", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 7Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb47", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 8Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb48", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 9Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb49", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 10 Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4A", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 11Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4b", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 12Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4C", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 13Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4d", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 14Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4E", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 15Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb4F", $"{Name} Error:Aligner Occurred Error:Access Permission Signal 16Time-out Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb60", $"{Name} Error:Aligner Occurred Error:Access Permission to P/A Stage Time-out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb61", $"{Name} Error:Aligner Occurred Error:Access Permission to P/AStage Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb62", $"{Name} Error:Aligner Occurred Error:Access Permission to P/A Stage Time-out Error 3.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb63", $"{Name} Error:Aligner Occurred Error:Access Permission to P/A Stage Time-out Error 4.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb64", $"{Name} Error:Aligner Occurred Error:Access Permission to P/AStage Time-out Error 5.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb65", $"{Name} Error:Aligner Occurred Error:Access Permission to P/AStage Time-out Error 6.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb66", $"{Name} Error:Aligner Occurred Error:Access Permission to P/AStage Time-out Error 7.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb68", $"{Name} Error:Aligner Occurred Error:P/A motion permission timeout error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb70", $"{Name} Error:Aligner Occurred Error:SS signal detection.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb80", $"{Name} Error:Aligner Occurred Error:Fork 1/Pre-aligner: Wafer Presence Confirmation Time-out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb81", $"{Name} Error:Aligner Occurred Error:Fork 1/Pre-aligner: WaferAbsence Confirmation Time- out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb82", $"{Name} Error:Aligner Occurred Error:Fork 1/Pre-aligner: Wafer Presence Confirmation Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb83", $"{Name} Error:Aligner Occurred Error:Fork 1/Pre-aligner: WaferAbsence Confirmation Time- out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb88", $"{Name} Error:Aligner Occurred Error:Grip sensor Time-out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb89", $"{Name} Error:Aligner Occurred Error:Grip sensor Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb8A", $"{Name} Error:Aligner Occurred Error:UnGrip sensor Time-out Error1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb8b", $"{Name} Error:Aligner Occurred Error:UnGrip sensor Time-out Error2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb8F", $"{Name} Error:Aligner Occurred Error:Fork 1: Plunger non-operationerror.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb90", $"{Name} Error:Aligner Occurred Error:Fork 2: Wafer Presence Confirmation Time-out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb91", $"{Name} Error:Aligner Occurred Error:Fork 2: Wafer AbsenceConfirmation Time-out Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb92", $"{Name} Error:Aligner Occurred Error:Fork 2: Wafer PresenceConfirmation Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb93", $"{Name} Error:Aligner Occurred Error:Fork 2: Wafer AbsenceConfirmation Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb98", $"{Name} Error:Aligner Occurred Error:Lifter up sensor Time-outError 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb99", $"{Name} Error:Aligner Occurred Error:Lifter up sensor Time-out Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb9A", $"{Name} Error:Aligner Occurred Error:Lifter down sensor Time-outError 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb9b", $"{Name} Error:Aligner Occurred Error:Lifter down sensor Time-outError 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorb9F", $"{Name} Error:Aligner Occurred Error:Fork 2: Plunger non-operationerror.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorbA0", $"{Name} Error:Aligner Occurred Error:Fork 1/Pre-aligner: WaferAbsence Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorbA1", $"{Name} Error:Aligner Occurred Error:Fork 1: Sensor StatusMismatch.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorbA8", $"{Name} Error:Aligner Occurred Error:Grip sensor status Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorbA9", $"{Name} Error:Aligner Occurred Error:Grip sensor status Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorbAA", $"{Name} Error:Aligner Occurred Error:Ungrip sensor status Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorbAb", $"{Name} Error:Aligner Occurred Error:Ungrip sensor status Error 2.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorbAC", $"{Name} Error:Aligner Occurred Error:Grip sensor status mismatch.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorbAd", $"{Name} Error:Aligner Occurred Error:Lifter/Grip sensor statusmismatch.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorbb0", $"{Name} Error:Aligner Occurred Error:Fork 2: Wafer Absence Error.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorbb1", $"{Name} Error:Aligner Occurred Error:Fork 2: Sensor StatusMismatch.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
EV.Subscribe(new EventItem("Alarm", "AlignerErrorbb8", $"{Name} Error:Aligner Occurred Error:Lifter up sensor status Error 1.", EventLevel.Alarm, EventType.EventUI_Notify));
|
|
|
|
}
|
|
|
|
private void _diTPinUse_OnSignalChanged(IoSensor arg1, bool arg2)
|
|
{
|
|
if (!arg2)
|
|
SetMaintenanceMode(true);
|
|
else
|
|
SetMaintenanceMode(false);
|
|
}
|
|
|
|
private void _diPreAlignerError_OnSignalChanged(IoSensor arg1, bool arg2)
|
|
{
|
|
if(!arg2)
|
|
OnError("Aligner error signal");
|
|
}
|
|
|
|
private void RegisterSpecialData()
|
|
{
|
|
DATA.Subscribe($"{Module}.{Name}.CurrentArm1Position", () => CurrentArm1Position);
|
|
DATA.Subscribe($"{Module}.{Name}.CurrentArm2Position", () => CurrentArm2Position);
|
|
DATA.Subscribe($"{Module}.{Name}.CurrentExtensionPosition", () => CurrentExtensionPosition);
|
|
DATA.Subscribe($"{Module}.{Name}.CurrentThetaPosition", () => CurrentThetaPosition);
|
|
DATA.Subscribe($"{Module}.{Name}.CurrentZPosition", () => CurrentZPosition);
|
|
|
|
DATA.Subscribe($"{Module}.{Name}.IsManipulatorBatteryLow", () => IsManipulatorBatteryLow);
|
|
DATA.Subscribe($"{Module}.{Name}.IsCommandExecutionReady", () => IsCommandExecutionReady);
|
|
DATA.Subscribe($"{Module}.{Name}.IsServoON", () => IsServoON);
|
|
DATA.Subscribe($"{Module}.{Name}.IsErrorOccurred", () => IsErrorOccurred);
|
|
DATA.Subscribe($"{Module}.{Name}.IsControllerBatteryLow", () => IsControllerBatteryLow);
|
|
DATA.Subscribe($"{Module}.{Name}.IsWaferPresenceOnFromVacuumSensorOrGripSensor", () => IsWaferPresenceOnFromVacuumSensorOrGripSensor);
|
|
DATA.Subscribe($"{Module}.{Name}.IsWaferPresenceOnFromCCDSensor", () => IsWaferPresenceOnFromCCDSensor);
|
|
|
|
DATA.Subscribe($"{Module}.{Name}.ErrorCode", () => ErrorCode);
|
|
DATA.Subscribe($"{Module}.{Name}.IsWaferHoldOnChuck", () => IsWaferHoldOnChuck);
|
|
//DATA.Subscribe($"{Module}.{Name}.IsGrippedBlade2", () => IsGrippedBlade2);
|
|
DATA.Subscribe($"{Module}.{Name}.IsCheckInterlockWaferPresenceAbsent", () => IsCheckInterlockWaferPresenceAbsent);
|
|
DATA.Subscribe($"{Module}.{Name}.IsCheckInterlockManipulatorOperation", () => IsCheckInterlockManipulatorOperation);
|
|
|
|
}
|
|
|
|
private void ResetPropertiesAndResponses()
|
|
{
|
|
|
|
}
|
|
|
|
private bool OnTimer()
|
|
{
|
|
try
|
|
{
|
|
|
|
if (!_connection.IsConnected || _connection.IsCommunicationError)
|
|
{
|
|
lock (_locker)
|
|
{
|
|
_lstHandlers.Clear();
|
|
}
|
|
|
|
_trigRetryConnect.CLK = !_connection.IsConnected;
|
|
if (_trigRetryConnect.Q)
|
|
{
|
|
if (!_connection.Connect())
|
|
{
|
|
EV.PostAlarmLog(Module, $"Can not connect with {_connection.Address}, {Module}.{Name}");
|
|
}
|
|
else
|
|
{
|
|
//_lstHandler.AddLast(new RobotHirataR4QueryPinHandler(this, _deviceAddress));
|
|
//_lstHandler.AddLast(new RobotHirataR4SetCommModeHandler(this, _deviceAddress, EnumRfPowerCommunicationMode.Host));
|
|
}
|
|
}
|
|
return true;
|
|
}
|
|
|
|
HandlerBase handler = null;
|
|
|
|
lock (_locker)
|
|
{
|
|
while (_lstHandlers.Count > 0 || _connection.IsBusy)
|
|
{
|
|
if (!_connection.IsBusy)
|
|
{
|
|
if (_lstHandlers.Count > 0)
|
|
{
|
|
handler = _lstHandlers.First.Value;
|
|
ExecuteHandler(handler);
|
|
_lstHandlers.RemoveFirst();
|
|
}
|
|
}
|
|
else
|
|
{
|
|
_connection.MonitorTimeout();
|
|
|
|
_trigCommunicationError.CLK = _connection.IsCommunicationError;
|
|
if (_trigCommunicationError.Q)
|
|
{
|
|
_lstHandlers.Clear();
|
|
//EV.PostAlarmLog(Module, $"{Module}.{Name} communication error, {_connection.LastCommunicationError}");
|
|
OnError($"{Module}.{Name} communication error, {_connection.LastCommunicationError}");
|
|
//_trigActionDone.CLK = true;
|
|
}
|
|
}
|
|
}
|
|
}
|
|
}
|
|
|
|
catch (Exception ex)
|
|
{
|
|
LOG.Write(ex);
|
|
}
|
|
|
|
return true;
|
|
}
|
|
private void ExecuteHandler(HandlerBase handler)
|
|
{
|
|
string commandstr = $",{UnitNumber}";
|
|
if (IsEnableSeqNo)
|
|
{
|
|
CurrentSeqNo = SeqnoGenerator.create();
|
|
commandstr += $",{CurrentSeqNo:D2}";
|
|
SeqnoGenerator.release(CurrentSeqNo);
|
|
}
|
|
commandstr += $",{handler.SendText}";
|
|
|
|
if (IsEnableCheckSum)
|
|
{
|
|
commandstr += ",";
|
|
commandstr += Checksum(Encoding.ASCII.GetBytes(commandstr));
|
|
}
|
|
handler.SendText = $"${commandstr}\r";
|
|
_connection.Execute(handler);
|
|
|
|
}
|
|
private string Checksum(byte[] bytes)
|
|
{
|
|
int sum = 0;
|
|
foreach (byte code in bytes)
|
|
{
|
|
sum += code;
|
|
}
|
|
string hex = String.Format("{0:X2}", sum % 256);
|
|
return hex;
|
|
}
|
|
public int UnitNumber
|
|
{
|
|
get; private set;
|
|
}
|
|
private bool isSimulatorMode;
|
|
private string _scRoot;
|
|
//private string _ipaddress;
|
|
public YaskawaTokenGenerator SeqnoGenerator { get; private set; }
|
|
public bool IsEnableSeqNo { get; private set; }
|
|
public bool IsEnableCheckSum { get; private set; }
|
|
public string AlignerSystemVersion { get; private set; }
|
|
public string AlignerSoftwareVersion { get; private set; }
|
|
public int CurrentSeqNo { get; set; }
|
|
public int AlignerType { get; private set; } //0= Edge grip, 1=Vacuum
|
|
|
|
public string PortName;
|
|
private string _address;
|
|
private bool _enableLog;
|
|
private YaskawaAlignerConnection _connection;
|
|
private R_TRIG _trigError = new R_TRIG();
|
|
|
|
private R_TRIG _trigCommunicationError = new R_TRIG();
|
|
private R_TRIG _trigRetryConnect = new R_TRIG();
|
|
public string Address => _address;
|
|
private PeriodicJob _thread;
|
|
private object _locker = new object();
|
|
private LinkedList<HandlerBase> _lstHandlers = new LinkedList<HandlerBase>();
|
|
|
|
private IoSensor _diPreAlignerWaferOn = null;
|
|
private IoSensor _diPreAlignerReady = null;
|
|
private IoSensor _diPreAlignerError = null;
|
|
private IoSensor _diTPinUse = null;
|
|
|
|
private IoTrigger _doPreAlignerHold = null;
|
|
public ModuleName CurrentInteractiveModule { get; private set; }
|
|
public bool IsConnected => _connection.IsConnected;
|
|
|
|
public bool IsWaferPresenceOnFromVacuumSensorOrGripSensor { get; private set; }
|
|
public bool IsWaferPresenceOnFromCCDSensor { get; private set; }
|
|
public bool IsWaferHoldOnChuck { get; private set; }
|
|
//public bool IsGrippedBlade2 { get; private set; }
|
|
public bool IsGripSensorOnEnd { get; private set; }
|
|
public bool IsUngripSensorOnEnd { get; private set; }
|
|
public bool IsLifterUpperSensorOnEnd { get; private set; }
|
|
public bool IsLifterDownSensorOnEnd { get; private set; }
|
|
public bool IsLifterSolenoidOnUp { get; private set; }
|
|
public bool IsPermittedInterlock6 { get; private set; }
|
|
public bool IsPermittedInterlock7 { get; private set; }
|
|
public bool IsPermittedInterlock8 { get; private set; }
|
|
|
|
public float CurrentThetaPosition { get; private set; }
|
|
public float CurrentExtensionPosition { get; private set; }
|
|
public float CurrentArm1Position { get; private set; }
|
|
public float CurrentArm2Position { get; private set; }
|
|
public float CurrentZPosition { get; private set; }
|
|
|
|
public float CommandThetaPosition { get; private set; }
|
|
public float CommandExtensionPosition { get; private set; }
|
|
public float CommandArm1Position { get; private set; }
|
|
public float CommandArm2Position { get; private set; }
|
|
public float CommandZPosition { get; private set; }
|
|
|
|
public int SpeedLevel { get; private set; }
|
|
public string ReadMemorySpec { get; private set; }
|
|
public string ReadTransferStation { get; private set; }
|
|
public int ReadSlotNumber { get; private set; }
|
|
public string ReadArmPosture { get; private set; }
|
|
|
|
public YaskawaPositonEnum ReadPositionType { get; private set; }
|
|
public float ReadThetaPosition { get; private set; }
|
|
public float ReadExtensionPosition { get; private set; }
|
|
public float ReadArm1Position { get; private set; }
|
|
public float ReadArm2Position { get; private set; }
|
|
public float ReadZPosition { get; private set; }
|
|
public Dictionary<string, string> ReadStationItemValues { get; private set; } = new Dictionary<string, string>();
|
|
public Dictionary<string, string> ReadStationItemContents { get; private set; } = new Dictionary<string, string>();
|
|
|
|
public string ReadParameterType { get; private set; }
|
|
public string ReadParameterNo { get; private set; }
|
|
public string ReadParameterValue { get; private set; }
|
|
|
|
public bool IsManipulatorBatteryLow { get; private set; }
|
|
public bool IsCommandExecutionReady { get; private set; }
|
|
public bool IsServoON { get; private set; }
|
|
public bool IsErrorOccurred { get; private set; }
|
|
public bool IsControllerBatteryLow { get; private set; }
|
|
|
|
public bool IsCheckInterlockWaferPresenceAbsent { get; private set; }
|
|
//public bool IsCheckInterlockWaferPresenceOnBlade2 { get; private set; }
|
|
|
|
//public bool IsCheckInterlockPAOp { get; private set; }
|
|
//public bool IsCheckInterlockPAWaferStatus { get; private set; }
|
|
public bool IsCheckInterlockManipulatorOperation { get; private set; }
|
|
|
|
public bool Connect()
|
|
{
|
|
return _connection.Connect();
|
|
}
|
|
|
|
public bool Disconnect()
|
|
{
|
|
return _connection.Disconnect();
|
|
}
|
|
|
|
public override bool IsReady()
|
|
{
|
|
if (_diPreAlignerReady != null && !_diPreAlignerReady.Value)
|
|
return false;
|
|
if (_diPreAlignerError != null && !_diPreAlignerError.Value)
|
|
return false;
|
|
if (_diTPinUse != null && !_diTPinUse.Value)
|
|
return false;
|
|
return IsIdle;
|
|
}
|
|
|
|
protected override bool fStartLiftup(object[] param)
|
|
{
|
|
lock (_locker)
|
|
{
|
|
string strpara = "2,1,0";
|
|
_lstHandlers.AddLast(new YaskawaAlignerMotionHandler(this, "CSOL", strpara));
|
|
}
|
|
return true;
|
|
}
|
|
|
|
protected override bool fStartLiftdown(object[] param)
|
|
{
|
|
lock (_locker)
|
|
{
|
|
string strpara = "2,0,0";
|
|
_lstHandlers.AddLast(new YaskawaAlignerMotionHandler(this, "CSOL", strpara));
|
|
}
|
|
return true;
|
|
}
|
|
|
|
protected override bool fStartAlign(object[] param)
|
|
{
|
|
double aligneangle = (double)param[0];
|
|
int intangle = (int)(aligneangle * 1000);
|
|
CurrentNotch = aligneangle;
|
|
lock (_locker)
|
|
{
|
|
string strpara = $"0,{intangle:D8}";
|
|
_lstHandlers.AddLast(new YaskawaAlignerMotionHandler(this, "MALN", strpara));
|
|
if (AlignerType == 1)
|
|
{
|
|
_lstHandlers.AddLast(new YaskawaAlignerMotionHandler(this, "CSOL", "1,0,0"));
|
|
}
|
|
}
|
|
return true;
|
|
}
|
|
|
|
protected override bool fStop(object[] param)
|
|
{
|
|
lock (_locker)
|
|
{
|
|
_lstHandlers.Clear();
|
|
_connection.ForceClear();
|
|
//ExecuteHandler(new YaskawaAlignerMotionHandler(this, "CSTP", "E"));
|
|
}
|
|
return true;
|
|
}
|
|
|
|
protected override bool FsmAbort(object[] param)
|
|
{
|
|
lock (_locker)
|
|
{
|
|
_lstHandlers.Clear();
|
|
_connection.ForceClear();
|
|
ExecuteHandler(new YaskawaAlignerMotionHandler(this, "CSTP", "H"));
|
|
}
|
|
return true;
|
|
}
|
|
|
|
protected override bool fClear(object[] param)
|
|
{
|
|
lock (_locker)
|
|
{
|
|
ExecuteHandler(new YaskawaAlignerMotionHandler(this, "CCLR", "E"));
|
|
}
|
|
return true;
|
|
}
|
|
|
|
protected override bool fStartReadData(object[] param)
|
|
{
|
|
if (param.Length < 1) return false;
|
|
string readcommand = param[0].ToString();
|
|
switch (readcommand)
|
|
{
|
|
case "CurrentStatus":
|
|
lock (_locker)
|
|
{
|
|
_lstHandlers.AddLast(new YaskawaAlignerReadHandler(this, "RSTS"));
|
|
_lstHandlers.AddLast(new YaskawaAlignerReadHandler(this, "RPOS", "F"));
|
|
_lstHandlers.AddLast(new YaskawaAlignerReadHandler(this, "RPOS", "R"));
|
|
}
|
|
break;
|
|
default:
|
|
break;
|
|
}
|
|
return true;
|
|
}
|
|
|
|
protected override bool fStartSetParameters(object[] param)
|
|
{
|
|
try
|
|
{
|
|
string strParameter;
|
|
string setcommand = param[0].ToString();
|
|
switch (setcommand)
|
|
{
|
|
case "MotionSpeed": // SSPD Set the motion speed
|
|
string strlevel = param[1].ToString();
|
|
string strspeedtype = param[2].ToString();
|
|
string strAxis = param[3].ToString();
|
|
uint speeddata = Convert.ToUInt32(param[4]);
|
|
if (!"0123".Contains(strlevel))
|
|
{
|
|
EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + strlevel);
|
|
return false;
|
|
}
|
|
if (!"HMLOB".Contains(strspeedtype))
|
|
{
|
|
EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + strspeedtype);
|
|
return false;
|
|
}
|
|
if (!"SAHIZRG".Contains(strAxis))
|
|
{
|
|
EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + strAxis);
|
|
return false;
|
|
}
|
|
strParameter = $"{strlevel},{strspeedtype},{strAxis}," + speeddata.ToString("D8");
|
|
lock (_locker)
|
|
{
|
|
_lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SSPD", strParameter));
|
|
}
|
|
break;
|
|
case "TransferSpeedLevel": //SSLV Select the transfer speed level
|
|
string sslvlevel = param[1].ToString();
|
|
if (!"123".Contains(sslvlevel))
|
|
{
|
|
EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sslvlevel);
|
|
return false;
|
|
}
|
|
lock (_locker)
|
|
{
|
|
_lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SSLV", sslvlevel));
|
|
}
|
|
break;
|
|
case "RegisterTheCurrentPositionAsTransferStation": // SPOS: Register the current position as the specified transfer station
|
|
string sposMem = param[1].ToString();
|
|
string sposRmode = param[2].ToString();
|
|
string sposTrsSt = param[3].ToString();
|
|
uint sposSlot = Convert.ToUInt16(param[4]);
|
|
string sposPosture = param[5].ToString();
|
|
string sposHand = param[6].ToString();
|
|
if (!"VN".Contains(sposMem))
|
|
{
|
|
EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sposMem);
|
|
return false;
|
|
}
|
|
if (!"AN".Contains(sposRmode))
|
|
{
|
|
EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sposRmode);
|
|
return false;
|
|
}
|
|
if (sposSlot < 1 || sposSlot > 30)
|
|
{
|
|
EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sposSlot.ToString());
|
|
return false;
|
|
}
|
|
if (!"LR".Contains(sposPosture))
|
|
{
|
|
EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sposPosture);
|
|
return false;
|
|
}
|
|
if (!"12".Contains(sposHand))
|
|
{
|
|
EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sposHand);
|
|
return false;
|
|
}
|
|
strParameter = $"{sposMem},{sposRmode},{sposTrsSt},{sposSlot},{sposPosture},{sposHand}";
|
|
|
|
lock (_locker)
|
|
{
|
|
_lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SPOS", strParameter));
|
|
}
|
|
break;
|
|
case "RegisterTheSpePostionAsTransferStation": //SABS
|
|
string sabsMem = param[1].ToString();
|
|
string sabsRmode = param[2].ToString();
|
|
string sabsTrsSt = param[3].ToString();
|
|
string sabsPosture = param[4].ToString();
|
|
string sabsHand = param[5].ToString();
|
|
Int32 sabsValue1 = Convert.ToInt32(param[6]);
|
|
Int32 sabsValue2 = Convert.ToInt32(param[7]);
|
|
Int32 sabsValue3 = Convert.ToInt32(param[8]);
|
|
Int32 sabsValue4 = Convert.ToInt32(param[9]);
|
|
Int32 sabsValue5 = Convert.ToInt32(param[10]);
|
|
if (!"VN".Contains(sabsMem))
|
|
{
|
|
EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sabsMem);
|
|
return false;
|
|
}
|
|
if (!"AN".Contains(sabsRmode))
|
|
{
|
|
EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sabsRmode);
|
|
return false;
|
|
}
|
|
if (!"LR".Contains(sabsPosture))
|
|
{
|
|
EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sabsPosture);
|
|
return false;
|
|
}
|
|
if (!"12".Contains(sabsHand))
|
|
{
|
|
EV.PostAlarmLog(Name, $"Set {setcommand} with invalid parameter:" + sabsHand);
|
|
return false;
|
|
}
|
|
strParameter = $"{sabsMem},{sabsRmode},{sabsTrsSt},{sabsPosture},{sabsHand},"
|
|
+ sabsValue1.ToString("D8") + "," + sabsValue2.ToString("D8") + "," + sabsValue3.ToString("D8") +
|
|
"," + sabsValue4.ToString("D8") + "," + sabsValue5.ToString("D8");
|
|
|
|
lock (_locker)
|
|
{
|
|
_lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SABS", strParameter));
|
|
}
|
|
break;
|
|
case "ModifyTheSpecStationPostionByOffset": //SAPS
|
|
string sapsMem = param[1].ToString();
|
|
string sapsRmode = param[2].ToString();
|
|
string sapsTrsSt = param[3].ToString();
|
|
string sapsPosture = param[4].ToString();
|
|
string sapsHand = param[5].ToString();
|
|
Int32 sapsOffsetX = Convert.ToInt32(param[6]);
|
|
Int32 sapsOffsetY = Convert.ToInt32(param[7]);
|
|
Int32 sapsOffsetZ = Convert.ToInt32(param[8]);
|
|
strParameter = $"{sapsMem},{sapsRmode},{sapsTrsSt},{sapsPosture},{sapsHand},"
|
|
+ sapsOffsetX.ToString("D8") + "," + sapsOffsetY.ToString("D8") + "," + sapsOffsetZ.ToString("D8");
|
|
lock (_locker)
|
|
{
|
|
_lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SAPS", strParameter));
|
|
}
|
|
break;
|
|
case "DeleteTheSpecStation": //SPDL
|
|
string spdlMem = param[1].ToString();
|
|
string spdlTrsSt = param[2].ToString();
|
|
string spdlPosture = param[3].ToString();
|
|
string spdlHand = param[4].ToString();
|
|
|
|
strParameter = $"{spdlMem},{spdlTrsSt},{spdlPosture},{spdlHand}";
|
|
lock (_locker)
|
|
{
|
|
_lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SPDL", strParameter));
|
|
}
|
|
break;
|
|
case "RegisterThePositionDataToVolatile": //SPSV
|
|
string spsvTrsSt = param[1].ToString();
|
|
string spsvPosture = param[2].ToString();
|
|
string spsvHand = param[3].ToString();
|
|
strParameter = $"{spsvTrsSt},{spsvPosture},{spsvHand}";
|
|
lock (_locker)
|
|
{
|
|
_lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SPSV", strParameter));
|
|
}
|
|
|
|
|
|
|
|
break;
|
|
case "ReadThePostionDataFromVolatile": //SPLD
|
|
string spldTrsSt = param[1].ToString();
|
|
string spldPosture = param[2].ToString();
|
|
string spldHand = param[3].ToString();
|
|
strParameter = $"{spldTrsSt},{spldPosture},{spldHand}";
|
|
lock (_locker)
|
|
{
|
|
_lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SPLD", strParameter));
|
|
}
|
|
|
|
break;
|
|
case "SetTheStationParameters": //SSTR
|
|
string sstrMem = param[1].ToString();
|
|
string sstrTrsSt = param[2].ToString();
|
|
string sstrItem = param[3].ToString();
|
|
Int32 sstrValue = Convert.ToInt32(param[4].ToString());
|
|
strParameter = $"{sstrMem},{sstrTrsSt},{sstrItem}," + sstrValue.ToString("D8");
|
|
lock (_locker)
|
|
{
|
|
_lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SSTR", strParameter));
|
|
}
|
|
break;
|
|
case "ChangeParameterValue": // SPRM
|
|
string sprmParaType = param[1].ToString();
|
|
int sprmParaNO = Convert.ToInt32(param[2].ToString());
|
|
Int32 sprmValue = Convert.ToInt32(param[3].ToString());
|
|
strParameter = sprmParaType + "," + sprmParaNO.ToString("D4") + "," + sprmValue.ToString("D12");
|
|
lock (_locker)
|
|
{
|
|
_lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SPRM", strParameter));
|
|
}
|
|
break;
|
|
case "EnableInterLock": //SMSK
|
|
int smskValid = Convert.ToInt16(param[1].ToString());
|
|
lock (_locker)
|
|
{
|
|
_lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SPRM", smskValid.ToString("D4")));
|
|
}
|
|
break;
|
|
case "RegisterTheCurrentPositionAsCoordinate": //SSTD
|
|
string sstdAxis = param[1].ToString();
|
|
lock (_locker)
|
|
{
|
|
_lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SSTD", sstdAxis));
|
|
}
|
|
break;
|
|
case "ResigterTheSpecNumberAsReferencePostion": //SSTN
|
|
Int32 sstnValue1 = Convert.ToInt32(param[1]);
|
|
Int32 sstnValue2 = Convert.ToInt32(param[2]);
|
|
Int32 sstnValue3 = Convert.ToInt32(param[3]);
|
|
Int32 sstnValue4 = Convert.ToInt32(param[4]);
|
|
Int32 sstnValue5 = Convert.ToInt32(param[5]);
|
|
|
|
strParameter = sstnValue1.ToString("D12") + "," + sstnValue2.ToString("D12") + ","
|
|
+ sstnValue3.ToString("D12") + "," + sstnValue4.ToString("D12") + ","
|
|
+ sstnValue5.ToString("D12");
|
|
lock (_locker)
|
|
{
|
|
_lstHandlers.AddLast(new YaskawaAlignerSetHandler(this, "SSTN", strParameter));
|
|
}
|
|
break;
|
|
}
|
|
}
|
|
catch (Exception)
|
|
{
|
|
string reason = "";
|
|
if (param != null)
|
|
{
|
|
foreach (var para in param)
|
|
{
|
|
reason += para.ToString() + ",";
|
|
}
|
|
}
|
|
EV.PostAlarmLog(Name, "Set command parameter invalid:" + reason);
|
|
return false;
|
|
}
|
|
return true;
|
|
}
|
|
|
|
protected override bool fStartUnGrip(object[] param)
|
|
{
|
|
lock (_locker)
|
|
{
|
|
string strpara = "1,0,0";
|
|
_lstHandlers.AddLast(new YaskawaAlignerMotionHandler(this, "CSOL", strpara));
|
|
}
|
|
return true;
|
|
}
|
|
|
|
protected override bool fStartGrip(object[] param)
|
|
{
|
|
lock (_locker)
|
|
{
|
|
string strpara = "1,1,0";
|
|
_lstHandlers.AddLast(new YaskawaAlignerMotionHandler(this, "CSOL", strpara));
|
|
}
|
|
return true;
|
|
}
|
|
|
|
|
|
protected override bool fResetToReady(object[] param)
|
|
{
|
|
if(!_connection.IsConnected)
|
|
{
|
|
_connection.Connect();
|
|
}
|
|
return true;
|
|
}
|
|
|
|
protected override bool fReset(object[] param)
|
|
{
|
|
_lstHandlers.Clear();
|
|
_connection.ForceClear();
|
|
if (!_connection.IsConnected)
|
|
{
|
|
_connection.Connect();
|
|
}
|
|
return true;
|
|
}
|
|
protected override bool fMonitorReset(object[] param)
|
|
{
|
|
if (!_connection.IsConnected)
|
|
{
|
|
_address = SC.GetStringValue($"{_scRoot}.{Name}.Address");
|
|
_enableLog = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableLogMessage");
|
|
UnitNumber = SC.GetValue<int>($"{_scRoot}.{Name}.UnitNumber");
|
|
IsEnableCheckSum = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableCheckSum");
|
|
IsEnableSeqNo = SC.GetValue<bool>($"{_scRoot}.{Name}.EnableSeqNo");
|
|
_connection = new YaskawaAlignerConnection(this, _address);
|
|
_connection.EnableLog(_enableLog);
|
|
_connection.Connect();
|
|
}
|
|
return _connection.IsConnected;
|
|
}
|
|
|
|
public override bool IsNeedRelease
|
|
{
|
|
//get
|
|
//{
|
|
//if (AlignerType == 1)
|
|
// return true;
|
|
//if (SC.ContainsItem($"{_scRoot}.{Name}.NeedReleaseBeforePick") && SC.GetValue<bool>($"{_scRoot}.{Name}.NeedReleaseBeforePick"))
|
|
// return true;
|
|
get { return false; }
|
|
//}
|
|
}
|
|
|
|
protected override bool fStartInit(object[] param)
|
|
{
|
|
CurrentNotch = 0;
|
|
lock (_locker)
|
|
{
|
|
string strpara = "1,1,G";
|
|
if( AlignerType==1)
|
|
strpara = "1,1,N";
|
|
_lstHandlers.AddLast(new YaskawaAlignerMotionHandler(this, "INIT", strpara));
|
|
|
|
|
|
|
|
}
|
|
return true;
|
|
}
|
|
|
|
protected override bool fError(object[] param)
|
|
{
|
|
return true;
|
|
}
|
|
|
|
public bool ParseStatus(string status)
|
|
{
|
|
try
|
|
{
|
|
int intstatus = Convert.ToInt32(status,16);
|
|
IsManipulatorBatteryLow = ((intstatus & 0x1) == 0x1);
|
|
IsCommandExecutionReady = ((intstatus & 0x2) == 0x2);
|
|
IsServoON = ((intstatus & 0x4) == 0x4);
|
|
IsErrorOccurred = ((intstatus & 0x8) == 0x8);
|
|
IsControllerBatteryLow = ((intstatus & 0x10) == 0x10);
|
|
IsWaferPresenceOnFromVacuumSensorOrGripSensor = ((intstatus & 0x20) == 0x20);
|
|
IsWaferPresenceOnFromCCDSensor = ((intstatus & 0x40) == 0x40);
|
|
return true;
|
|
|
|
}
|
|
catch (Exception ex)
|
|
{
|
|
LOG.Write(ex);
|
|
return false;
|
|
}
|
|
}
|
|
public bool ParseReadData(string _command, string[] rdata)
|
|
{
|
|
try
|
|
{
|
|
if (_command == "RSTS")
|
|
{
|
|
return (rdata.Length == 2 && ParseRSTSStatus(rdata));
|
|
|
|
}
|
|
if (_command == "RSLV") //Read the speed level
|
|
{
|
|
return (rdata.Length == 1 && ParseSpeedLevel(rdata[0]));
|
|
}
|
|
if (_command == "RPOS") //Reference current postion
|
|
{
|
|
return (rdata.Length > 1 && ParsePositionData(rdata));
|
|
|
|
}
|
|
|
|
if (_command == "RSTR") //Reference station item value
|
|
{
|
|
return (rdata.Length == 4 && ParseStationData(rdata));
|
|
}
|
|
if (_command == "RPRM") //Reference the parameter values of the specified unit
|
|
{
|
|
return (rdata.Length == 3 && ParseParameterData(rdata));
|
|
}
|
|
if (_command == "RMSK") //Reference the interlock information
|
|
{
|
|
return (rdata.Length == 1 && ParseInterlockInfo(rdata));
|
|
|
|
}
|
|
if (_command == "RVER") //Reference the software version
|
|
{
|
|
return (rdata.Length == 2 && ParseSoftwareVersion(rdata));
|
|
}
|
|
|
|
if (_command == "RALN") // Reference the alignment result
|
|
{
|
|
return true;
|
|
}
|
|
if (_command == "RACA") // Reference calibration result for alignment
|
|
{
|
|
return true;
|
|
}
|
|
return true;
|
|
}
|
|
catch (Exception ex)
|
|
{
|
|
LOG.Write(ex);
|
|
return false;
|
|
}
|
|
}
|
|
public bool ParseSpeedLevel(string speedlevel)
|
|
{
|
|
try
|
|
{
|
|
int level = Convert.ToInt32(speedlevel);
|
|
if (level < 1 || level > 3) return false;
|
|
SpeedLevel = level;
|
|
return true;
|
|
|
|
}
|
|
catch (Exception ex)
|
|
{
|
|
LOG.Write(ex);
|
|
return false;
|
|
}
|
|
}
|
|
|
|
public bool ParsePositionData(string[] pdata)
|
|
{
|
|
try
|
|
{
|
|
if (pdata[0] == "R")
|
|
{
|
|
if(pdata.Length >=2)
|
|
CommandThetaPosition = Convert.ToInt32(pdata[1]) / 1000;
|
|
if(pdata.Length >=3)
|
|
CommandExtensionPosition = Convert.ToInt32(pdata[2]) / 1000;
|
|
if(pdata.Length >=4)
|
|
CommandArm1Position = Convert.ToInt32(pdata[3]) / 1000;
|
|
if (pdata.Length >= 5)
|
|
CommandArm2Position = Convert.ToInt32(pdata[4]) / 1000;
|
|
if (pdata.Length >= 6)
|
|
CommandZPosition = Convert.ToInt32(pdata[5]) / 1000;
|
|
return true;
|
|
}
|
|
if (pdata[0] == "F")
|
|
{
|
|
if (pdata.Length >= 2)
|
|
{
|
|
CurrentThetaPosition = Convert.ToInt32(pdata[1]) / 1000;
|
|
PositionAxis1 = CurrentThetaPosition;
|
|
}
|
|
if (pdata.Length >= 3)
|
|
{
|
|
CurrentExtensionPosition = Convert.ToInt32(pdata[2]) / 1000;
|
|
PositionAxis2 = CurrentExtensionPosition;
|
|
}
|
|
if (pdata.Length >= 4)
|
|
{
|
|
CurrentArm1Position = Convert.ToInt32(pdata[3]) / 1000;
|
|
PositionAxis3 = CurrentArm1Position;
|
|
}
|
|
if (pdata.Length >= 5)
|
|
{
|
|
CurrentArm2Position = Convert.ToInt32(pdata[4]) / 1000;
|
|
PositionAxis4 = CurrentArm2Position;
|
|
}
|
|
if (pdata.Length >= 6)
|
|
{
|
|
CurrentZPosition = Convert.ToInt32(pdata[5]) / 1000;
|
|
PositionAxis5 = CurrentZPosition;
|
|
}
|
|
return true;
|
|
}
|
|
return false;
|
|
}
|
|
catch (Exception ex)
|
|
{
|
|
LOG.Write(ex);
|
|
return false;
|
|
}
|
|
}
|
|
|
|
|
|
public bool ParseStationData(string[] pdata)
|
|
{
|
|
try
|
|
{
|
|
ReadMemorySpec = pdata[0];
|
|
ReadTransferStation = pdata[1];
|
|
if (ReadStationItemValues.ContainsKey(pdata[2]))
|
|
ReadStationItemValues.Remove(pdata[2]);
|
|
ReadStationItemValues.Add(pdata[2], pdata[3]);
|
|
return true;
|
|
}
|
|
catch (Exception ex)
|
|
{
|
|
LOG.Write(ex);
|
|
return false;
|
|
}
|
|
}
|
|
public bool ParseParameterData(string[] pdata)
|
|
{
|
|
try
|
|
{
|
|
ReadParameterType = pdata[0];
|
|
ReadParameterNo = pdata[1];
|
|
ReadParameterValue = pdata[2];
|
|
return true;
|
|
}
|
|
catch (Exception ex)
|
|
{
|
|
LOG.Write(ex);
|
|
return false;
|
|
}
|
|
}
|
|
public bool ParseInterlockInfo(string[] pdata)
|
|
{
|
|
try
|
|
{
|
|
int intdata = Convert.ToInt16(pdata[0]);
|
|
IsCheckInterlockWaferPresenceAbsent = (intdata & 0x1) == 0;
|
|
IsCheckInterlockManipulatorOperation = (intdata & 0x1000) == 0;
|
|
return true;
|
|
}
|
|
catch (Exception ex)
|
|
{
|
|
LOG.Write(ex);
|
|
return false;
|
|
}
|
|
}
|
|
public bool ParseSoftwareVersion(string[] pdata)
|
|
{
|
|
try
|
|
{
|
|
AlignerSystemVersion = pdata[0];
|
|
AlignerSoftwareVersion = pdata[1];
|
|
return true;
|
|
}
|
|
catch (Exception ex)
|
|
{
|
|
LOG.Write(ex);
|
|
return false;
|
|
}
|
|
}
|
|
public bool ParseRSTSStatus(string[] status)
|
|
{
|
|
try
|
|
{
|
|
ErrorCode = status[0];
|
|
int intstatus = Convert.ToInt32(status[1]);
|
|
IsWaferPresenceOnFromVacuumSensorOrGripSensor = ((intstatus & 0x1) == 0x1);
|
|
IsWaferPresenceOnFromCCDSensor = ((intstatus & 0x2) == 0x2);
|
|
IsWaferHoldOnChuck = ((intstatus & 0x4) == 0x4);
|
|
//IsGrippedBlade2 = ((intstatus & 0x8) == 0x8);
|
|
IsGripSensorOnEnd = ((intstatus & 0x10) == 0x10);
|
|
IsUngripSensorOnEnd = ((intstatus & 0x20) == 0x20);
|
|
|
|
IsLifterUpperSensorOnEnd = ((intstatus & 0x100) == 0x100);
|
|
IsLifterDownSensorOnEnd = ((intstatus & 0x200) == 0x200);
|
|
IsLifterSolenoidOnUp = ((intstatus & 0x400) == 0x400);
|
|
return true;
|
|
|
|
}
|
|
catch (Exception ex)
|
|
{
|
|
LOG.Write(ex);
|
|
return false;
|
|
}
|
|
}
|
|
|
|
public void SenACK()
|
|
{
|
|
_connection.SendAck();
|
|
}
|
|
|
|
public override bool OnActionDone(object[] param)
|
|
{
|
|
if (_lstHandlers.Count == 0)
|
|
{
|
|
IsBusy = false;
|
|
return base.OnActionDone(param);
|
|
}
|
|
return true;
|
|
}
|
|
|
|
public override bool IsWaferPresent(int slotindex)
|
|
{
|
|
if (_diPreAlignerWaferOn != null)
|
|
return !_diPreAlignerWaferOn.Value;
|
|
return IsWaferPresenceOnFromCCDSensor || IsWaferPresenceOnFromVacuumSensorOrGripSensor;
|
|
}
|
|
|
|
public override void Terminate()
|
|
{
|
|
_thread.Stop();
|
|
if(!SC.ContainsItem($"{_scRoot}.{Name}.CloseConnectionOnShutDown") || SC.GetValue<bool>($"{_scRoot}.{Name}.CloseConnectionOnShutDown"))
|
|
{
|
|
LOG.Write($"Close connection for {RobotModuleName}");
|
|
_connection.Disconnect();
|
|
}
|
|
base.Terminate();
|
|
}
|
|
public void NotifyAlarmByErrorCode(string errorcode)
|
|
{
|
|
EV.Notify($"{Name}Error{errorcode}");
|
|
}
|
|
}
|
|
|
|
|
|
}
|