60 lines
1.6 KiB
C#
60 lines
1.6 KiB
C#
namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot
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{
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public enum RobotUnit
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{
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Robot = 1,
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Aligner = 2,
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}
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public enum EventType
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{
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Error = 100,
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Aligner = 140,
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}
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public enum SpeedType
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{
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H, //No-wafer transfer speed,
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M, //With-wafer transfer speed
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L, //Low speed
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O, //Home speed
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B, //Speed in low-speed-area
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}
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public enum StateBit
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{
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LowBattery = 0x10, //1: Low battery voltage, 0: Normal state
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Ready = 0x20, //1: Ready, 0: Busy
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ServorOff = 0x40, //1: Servo OFF, 0: Servo ON
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Error = 0x80, //Error occurrence, 0: No error occurrence
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CtrlLowBattery =0x01, //1: Low battery voltage, 0: Normal state
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WaferOnBlade1 = 0x02, //(1: Has wafer, 0: No wafer)
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WaferOnBlade2 = 0x04, //(1: Has wafer, 0: No wafer)
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WaferOnBlade3 = 0x08, //(1: Has wafer, 0: No wafer)
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WaferOnBlade4 = 0x10, //(1: Has wafer, 0: No wafer)
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WaferOnGrip = 0x02, //
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WaferOnCCD = 0x04, //
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}
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public class ProtocolTag
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{
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public const string tag_end = "\r";
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public const string tag_cmd_start = "$";
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public const string cmd_token = ",";
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public const string resp_tag_normal = "$";
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public const string resp_tag_error = "?";
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public const string resp_tag_excute = "!";
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public const string resp_tag_event = ">";
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public const string resp_evt_error = "100";
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}
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}
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