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Update from svn.

This commit is contained in:
DESKTOP-GPE37UV\THINKAPD 2023-03-29 09:23:47 +08:00
parent dcd4e31379
commit 7cf8f78ba5
15 changed files with 433 additions and 169 deletions
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39
FrameworkLocal/UIClient/CenterViews/Configs/SystemConfig/SystemConfigViewModel.cs
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@ -6,6 +6,7 @@ using OpenSEMI.ClientBase;
using OpenSEMI.ClientBase.Command;
using System.Globalization;
using MECF.Framework.Common.DataCenter;
namespace MECF.Framework.UI.Client.CenterViews.Configs.SystemConfig
{
@ -270,6 +271,11 @@ namespace MECF.Framework.UI.Client.CenterViews.Configs.SystemConfig
string key = String.Format("{0}{1}{2}", _CurrentNodeName, ".", item.Name);
InvokeClient.Instance.Service.DoOperation($"{SystemName}.SetConfig", key, value);
if (key == "TM.ProcessPressure")
{
SetTansferPressure(value);
}
item.TextSaved = true;
ExTrigger(key, value);
@ -366,6 +372,11 @@ namespace MECF.Framework.UI.Client.CenterViews.Configs.SystemConfig
string key = String.Format("{0}{1}{2}", _CurrentNodeName, ".", item.Name);
InvokeClient.Instance.Service.DoOperation($"{SystemName}.SetConfig", key, value);
if(key == "TM.ProcessPressure")
{
SetTansferPressure(value);
}
item.TextSaved = true;
Reload();
@ -393,6 +404,34 @@ namespace MECF.Framework.UI.Client.CenterViews.Configs.SystemConfig
}
}
//设置传盘压力相关参数
private void SetTansferPressure(string value)
{
double offset = (double)QueryDataClient.Instance.Service.GetConfig("TM.VacuumPressureBaseOffset");
double basePressure = offset + double.Parse(value);
InvokeClient.Instance.Service.DoOperation($"{SystemName}.SetConfig", "TM.VacuumPressureBase", basePressure);
InvokeClient.Instance.Service.DoOperation($"{SystemName}.SetConfig", "TM.Purge.VentBasePressure", value);
InvokeClient.Instance.Service.DoOperation($"{SystemName}.SetConfig", "TM.PressureBalance.BalancePressureForLL", value);
InvokeClient.Instance.Service.DoOperation($"{SystemName}.SetConfig", "TM.PressureBalance.BalancePressureForPM1", value);
InvokeClient.Instance.Service.DoOperation($"{SystemName}.SetConfig", "TM.PressureBalance.BalancePressureForPM2", value);
InvokeClient.Instance.Service.DoOperation($"{SystemName}.SetConfig", "PM.VacuumPressureBase", basePressure);
InvokeClient.Instance.Service.DoOperation($"{SystemName}.SetConfig", "PM.PM1.ProcessIdle.FinalPressure", value);
InvokeClient.Instance.Service.DoOperation($"{SystemName}.SetConfig", "PM.PM1.PreProcess.ChamberPressure", value);
InvokeClient.Instance.Service.DoOperation($"{SystemName}.SetConfig", "LoadLock.VacuumPressureBase", basePressure);
InvokeClient.Instance.Service.DoOperation($"{SystemName}.SetConfig", "LoadLock.Purge.VentBasePressure", value);
}
private void RecipePasswordReset(string sKey, string sValue)
{

42
Modules/Mainframe/Config/DeviceModelSystem.xml
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@ -35,20 +35,34 @@
<WcfPlc id="MainPLC" module="TM" display="" schematicId="" unit="" option="true" />
</WcfPlcs>
<IoSensors>
<IoSensor id="TMLidClosed" module="TM" display="" schematicId="" unit="" di="DI_TMLidClosed" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="LLLidClosed" module="TM" display="" schematicId="" unit="" di="DI_LLLidClosed" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="BufferLidClosed" module="TM" display="" schematicId="" unit="" di="DI_BufferLidClosed" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="PreHeatStationLidClosed" module="TM" display="" schematicId="" unit="" di="DI_PreHeatStationLidClosed" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="ForelineBasePressureReady" module="TM" display="" schematicId="" unit="" di="DI_ForelineBasePressureReady" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="LLDoorClosedFB" module="TM" display="" schematicId="" unit="" di="DI_LLDoorClosed" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="LLDoorOpenFB" module="TM" display="" schematicId="" unit="" di="DI_LLDoorOpened" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="PM1DoorClosed" module="TM" display="" schematicId="" unit="" di="DI_ReactorADoorClosed" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="PM1DoorOpenFB" module="TM" display="" schematicId="" unit="" di="DI_ReactorADoorOpened" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="PM2DoorClosedFB" module="TM" display="" schematicId="" unit="" di="DI_ReactorBDoorClosed" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="PreHeatDoorClosed" module="TM" display="" schematicId="" unit="" di="DI_PreHeatStationDoorClosed" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="LLWaferPresence" module="TM" display="" schematicId="" unit="" di="DI_LLWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="BufferWaferPresence" module="TM" display="" schematicId="" unit="" di="DI_BufferWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensors>
<IoSensor id="LLDoorClosedFB" module="TM" display="" schematicId="" unit="" di="DI_LLDoorClosed" textOutTrigValue="true" infoText="Information1 Load Lock Door Opened [TDI-0]" warningText="" alarmText="" />
<IoSensor id="LLDoorOpenFB" module="TM" display="" schematicId="" unit="" di="DI_LLDoorOpened" textOutTrigValue="true" infoText="Information2 Load Lock Door Closed [TDI-1]" warningText="" alarmText="" />
<IoSensor id="PreHeatDoorClosed" module="TM" display="" schematicId="" unit="" di="DI_PreHeatStationDoorClosed" textOutTrigValue="true" infoText="Information3 PreHeat Station Door Opened [TDI-2]" warningText="" alarmText="" />
<IoSensor id="PreHeatStationDoorOpened" module="TM" display="" schematicId="" unit="" di="DI_PreHeatStationDoorOpened" textOutTrigValue="true" infoText="Information4 PreHeat Station Door Closed [TDI-3]" warningText="" alarmText="" />
<IoSensor id="PM1DoorClosed" module="TM" display="" schematicId="" unit="" di="DI_ReactorADoorClosed" textOutTrigValue="true" infoText="Information5 ReactorA.Door.Opened [TDI-4]" warningText="" alarmText="" />
<IoSensor id="PM1DoorOpenFB" module="TM" display="" schematicId="" unit="" di="DI_ReactorADoorOpened" textOutTrigValue="true" infoText="Information6 ReactorA.Door.Closed [TDI-5]" warningText="" alarmText="" />
<IoSensor id="PM2DoorClosedFB" module="TM" display="" schematicId="" unit="" di="DI_ReactorBDoorClosed" textOutTrigValue="true" infoText="Information7 ReactorB.Door.Opened [TDI-6]" warningText="" alarmText="" />
<IoSensor id="PM2DoorOpenFB" module="TM" display="" schematicId="" unit="" di="DI_ReactorBDoorOpened" textOutTrigValue="true" infoText="Information8 ReactorB.Door.Closed [TDI-7]" warningText="" alarmText="" />
<IoSensor id="TMatATM" module="TM" display="" schematicId="" unit="" di="DI_TMatATM" textOutTrigValue="true" infoText="Information9 TM at ATM [TDI-16]" warningText="" alarmText="" />
<IoSensor id="LoadLockAtATM" module="TM" display="" schematicId="" unit="" di="DI_LoadLockAtATM" textOutTrigValue="true" infoText="Information10 Load Lock At ATM [TDI-17]" warningText="" alarmText="" />
<IoSensor id="TMUnderVac" module="TM" display="" schematicId="" unit="" di="DI_TMUnderVac" textOutTrigValue="true" infoText="Information11 TM Under Vac [TDI-18]" warningText="" alarmText="" />
<IoSensor id="LoadLockUnderVAC" module="TM" display="" schematicId="" unit="" di="DI_LoadLockUnderVAC" textOutTrigValue="true" infoText="Information12 Load Lock Under VAC [TDI-19]" warningText="" alarmText="" />
<IoSensor id="RobotOnBackPos" module="TM" display="" schematicId="" unit="" di="DI_RobotOnBackPos" textOutTrigValue="true" infoText="Information13 Robot On Back Pos [TDI-31]" warningText="" alarmText="" />
<IoSensor id="DryPumpRuning" module="TM" display="" schematicId="" unit="" di="DI_DryPumpRuning" textOutTrigValue="false" infoText="Information14 Dry Pump Not Runing [TDI-44]" warningText="" alarmText="" />
<IoSensor id="LLWaferPresence" module="TM" display="" schematicId="" unit="" di="DI_LLWaferPresence" textOutTrigValue="true" infoText="Information15 LoadLockWafer.Presence [TDI-45]" warningText="" alarmText="" />
<IoSensor id="BufferWaferPresence" module="TM" display="" schematicId="" unit="" di="DI_BufferWaferPresence" textOutTrigValue="true" infoText="Information16 BufferWafer.Presence [TDI-46]" warningText="" alarmText="" />
<IoSensor id="DryPumpWarning" module="TM" display="" schematicId="" unit="" di="DI_DryPumpWarning" textOutTrigValue="false" infoText="" warningText="Waring1 Dry Pump Warning [TDI-49]" alarmText="" />
<IoSensor id="TMLidClosed" module="TM" display="" schematicId="" unit="" di="DI_TMLidClosed" textOutTrigValue="false" infoText="" warningText="" alarmText="Alarm1 TM Lid Opened [TDI-12]" />
<IoSensor id="LLLidClosed" module="TM" display="" schematicId="" unit="" di="DI_LLLidClosed" textOutTrigValue="false" infoText="" warningText="" alarmText="Alarm2 Load Lock Lid Opened [TDI-13]" />
<IoSensor id="BufferLidClosed" module="TM" display="" schematicId="" unit="" di="DI_BufferLidClosed" textOutTrigValue="false" infoText="" warningText="" alarmText="Alarm3 Buffer Lid Opened [TDI-14]" />
<IoSensor id="PreHeatStationLidClosed" module="TM" display="" schematicId="" unit="" di="DI_PreHeatStationLidClosed" textOutTrigValue="true" infoText="" warningText="" alarmText="Alarm4 PreHeat Station Lid Opened [TDI-15]" />
<IoSensor id="DryPumpAlarm" module="TM" display="" schematicId="" unit="" di="DI_DryPumpAlarm" textOutTrigValue="false" infoText="" warningText="" alarmText="Alarm5 Dry Pump Alarm [TDI-43]" />
</IoSensors>
<IoPumps classType="Mainframe.Devices.IoPump" assembly="Mainframe">

2
Modules/Mainframe/TMs/TMPurgeRoutine.cs
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@ -30,7 +30,6 @@ namespace Mainframe.TMs
private IoSensor _bufferLid;
private IoSensor _tmLid;
private Devices.IoPump _pumpType;
private LoadLock _ll;
private IoInterLock _tmIoInterLock;
private Stopwatch _swTimer = new Stopwatch();
@ -43,7 +42,6 @@ namespace Mainframe.TMs
Name = "Purge";
_tm = DEVICE.GetDevice<SicTM>($"{ ModuleName.System.ToString()}.{ Module}");
_ll = DEVICE.GetDevice<SicLoadLock>($"LoadLock.LoadLock");
_bufferLid = DEVICE.GetDevice<IoSensor>($"TM.BufferLidClosed");
_tmLid = DEVICE.GetDevice<IoSensor>($"TM.TMLidClosed");
_pumpType = DEVICE.GetDevice<Devices.IoPump>($"TM.TMPump");

7
Modules/Mainframe/TMs/TMVentRoutine.cs
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@ -164,6 +164,11 @@ namespace Mainframe.TMs
return Result.FAIL;
}
if(_slowFastVentSwitchPressure > _ventBasePressure)
{
_slowFastVentSwitchPressure = _ventBasePressure;
}
_swTimer.Restart();
Notify("Start");
return Result.RUN;
@ -325,7 +330,7 @@ namespace Mainframe.TMs
return true;
}, () =>
{
return tm.ChamberPressure >= basePressure;
return tm.ChamberPressure >= basePressure ;
}, timeout * 1000);

261
Modules/SicPM/Config/DeviceModelPM.xml
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@ -243,87 +243,186 @@
<IoSensors classType="SicPM.Devices.IoSensor" assembly="SicPM">
<IoSensor id="SensorChamLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamLidClosed" infoText="" warningText="" alarmText="Alarm1 Chamber Lid Opened (DI-0)" textOutTrigTime="0"/>
<IoSensor id="SensorTMSlitVlvClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMSlitVlvClosed" infoText="Information1 TM Slit Valve Closed (DI-1)" warningText="" alarmText=""/>
<IoSensor id="SensorChamCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamCabDoorClosed" infoText="Cham Cab Door Closed" warningText="Waring1 Chamber Cab Door Not Closed (DI-3)" alarmText="" />
<IoSensor id="SensorPMATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PMATMSW" infoText="Information2 PM At ATM (DI-4)" warningText="" alarmText=""/>
<IoSensor id="SensorChamAtSafeProcessPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamAtSafeProcessPressSW" infoText="Information3 Chamber At Safe Process Press (DI-5)" warningText="" alarmText=""/>
<IoSensor id="SensorMiddleFlow2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamMiddleFlow2SW" infoText="" warningText="" alarmText="Alarm2 Chamber Middle2 Cooling Water Flow Abnormal U4(DI-8)" textOutTrigTime="0"/>
<IoSensor id="SensorChamPressAboveATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamPressAboveATMSW" infoText="" warningText="" alarmText="Alarm3 Chamber Press Above ATM (DI-9)" textOutTrigTime="0"/>
<IoSensor id="SensorHeaterTempUp1680CSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_HeaterTempUp1680CSW" infoText="" warningText="" alarmText="Alarm4 Heater Controller1 Present Temp High (DI-10)" textOutTrigTime="0"/>
<IoSensor id="SensorHeaterTempBelow900CSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_HeaterTempBelow900CSW" infoText="Information4 Heater Temp Below 900C (DI-11)" warningText="" alarmText=""/>
<IoSensor id="SensorConfinementRingUp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingUp" infoText="Information5 Confinement Ring At Up Position (DI-12)" warningText="" alarmText=""/>
<IoSensor id="SensorSusceptorAtSafeSpeed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SusceptorAtSafeSpeed" infoText="Information6 Susceptor At Safe Speed (DI-13)" warningText="" alarmText=""/>
<IoSensor id="SensorSHFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SHFlowSW" infoText="" warningText="" alarmText="Alarm5 SH Cooling Water Low Flow -U1 (DI-15)" textOutTrigTime="0"/>
<IoSensor id="SensorChamTopFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamTopFlowSW" infoText="" warningText="" alarmText="Alarm6 Chamber Top Cooling Water Low Flow -U2 (DI-16)" textOutTrigTime="0"/>
<IoSensor id="SensorChamMiddleFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamMiddleFlow1SW" infoText="" warningText="" alarmText="Alarm7 Chamber Middle1 Cooling Water Flow Abnormal -U3 (DI-17)" textOutTrigTime="0"/>
<IoSensor id="SensorChamBottomFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamBottomFlowSW" infoText="" warningText="" alarmText="Alarm8 Chamber Bottom Cooling Water Flow Abnormal -U5 (DI-18)" textOutTrigTime="0"/>
<IoSensor id="SensorBottomPlateFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_BottomPlateFlowSW" infoText="" warningText="" alarmText="Alarm9 Bottom Plate Cooling Water Low Flow -U6 (DI-19)" textOutTrigTime="0"/>
<IoSensor id="SensorPowerRodFlow1SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRod1FlowSW" infoText="" warningText="" alarmText="Alarm10 Power Rod1 Cooling Water Low Flow -U7 (DI-20)" textOutTrigTime="0"/>
<IoSensor id="SensorPowerRodFlow2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRod2FlowSW" infoText="" warningText="" alarmText="Alarm11 Power Rod2 Cooling Water Low Flow -U8 (DI-21)" textOutTrigTime="0"/>
<IoSensor id="SensorForelineFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ForelineFlowSW" infoText="" warningText="" alarmText="Alarm12 Foreline Cooling Water Low Flow -U9 (DI-22)" textOutTrigTime="0"/>
<IoSensor id="SensorInSituFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_InSituFlowSW" infoText="" warningText="" alarmText="Alarm13 InSitu Cooling Water Low Flow -U10 (DI-23)" textOutTrigTime="0"/>
<IoSensor id="SensorSideWallPowerRodFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SideWallPowerRodFlowSW" infoText="" warningText="" alarmText="Alarm14 SideWallPowerRod Cooling Water Low Flow -U11 (DI-24)" textOutTrigTime="0"/>
<IoSensor id="SensorTransformerFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TransformerFlowSW" infoText="" warningText="" alarmText="Alarm15 Transformer Cooling Water Low Flow -U14 (DI-25)" textOutTrigTime="0"/>
<IoSensor id="SensorTMFlow2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMFlow2SW" infoText="" warningText="" alarmText="Alarm16 TM Pump Low Flow -U12 (DI-26)" textOutTrigTime="0"/>
<IoSensor id="SensorPowerRackExhaustDP" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRackExhaustDP" infoText="" warningText="" alarmText="Alarm18 Power Rack Exhaust DP Error (DI-29)" textOutTrigTime="0"/>
<IoSensor id="SensorPMH2DetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMH2DetectorSW" infoText="" warningText="" alarmText="Alarm19 PM H2 Leak Detect (DI-30)" textOutTrigTime="0"/>
<IoSensor id="SensorGBHCLDetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBHCLDetectorSW" infoText="" warningText="" alarmText="Alarm20 Gasbox HCL Leak Detect (DI-31)" textOutTrigTime="0"/>
<IoSensor id="SensorGBExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBExhaustDPSW" infoText="" warningText="" alarmText="Alarm21 Gasbox Exhaust DP Error (DI-32)" textOutTrigTime="0"/>
<IoSensor id="SensorGBDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBDoorClosed" infoText="" warningText="Waring3 Gas Box Door Not Closed (DI-33)" alarmText=""/>
<IoSensor id="SensorGasPipeTempCtrlAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GasPipeTempCtrlAlarm" infoText="" warningText="Waring39 GasPipeTempCtrl Alarm (DI-35)" alarmText=""/>
<IoSensor id="SensorDryPumpAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPumpAlarm" infoText="" warningText="" alarmText="Alarm22 DryPump1 Alarm (DI-36)" textOutTrigTime="0"/>
<IoSensor id="SensorPumpExhaustPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpExhaustPressSW" infoText="" warningText="" alarmText="Alarm23 Pump Exhaust Pressure Abnormal (DI-38)" textOutTrigTime="0"/>
<IoSensor id="SensorPMAExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMAExhaustDPSW" infoText="" warningText="" alarmText="Alarm24 PM Exhaust DP Error (DI-39)" textOutTrigTime="0"/>
<IoSensor id="SensorScrubberIntlkSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ScrubberIntlkSW" infoText="" warningText="" alarmText="Alarm26 Scrubber System Error (DI-41)" textOutTrigTime="0"/>
<IoSensor id="SensorFacilityIntlkSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_FacilityIntlkSW" infoText="" warningText="" alarmText="Alarm27 Facility Error (DI-42)" textOutTrigTime="0"/>
<IoSensor id="SensorTCSLevelLowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TCSAlarm" infoText="" warningText="" alarmText="Alarm28 TCS Level Low (DI-43)" textOutTrigTime="0"/>
<IoSensor id="SensorReactorWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorWaterLeakSW" infoText="" warningText="Waring5 Reactor Water Leak (DI-48)" alarmText=""/>
<IoSensor id="SensorChamLidPushButtonLocal" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamLidPushButtonLocal" infoText="Information7 Chamer Lid Push Button On Local Mode (DI-49)" warningText="" alarmText=""/>
<IoSensor id="SensorConfinementRingDown" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingDown" infoText="Information8 Confinement Ring At Down position (DI-50)" warningText="" alarmText=""/>
<IoSensor id="SensorTMFlow1SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMFlow1SW" infoText="" warningText="Waring6 TM Cooling Water Low Flow -U13 (DI-51)" alarmText=""/>
<IoSensor id="SensorGN2InletPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_GN2InletPressSW" infoText="" warningText="" alarmText="Alarm30 Gasbox N2 Pressure Low (DI-55)" textOutTrigTime="0"/>
<IoSensor id="SensorArInletPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ArInletPressSW" infoText="" warningText="" alarmText="Alarm31 Gasbox Ar Pressure Low (DI-56)" textOutTrigTime="0"/>
<IoSensor id="SensorH2PressureSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_H2PressureSW" infoText="" warningText="" alarmText="Alarm32 Gasbox H2 Pressure Low (DI-57)" textOutTrigTime="0"/>
<IoSensor id="SensorGBH2DetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBH2DetectorSW" infoText="" warningText="" alarmText="Alarm33 Gasbox H2 Leak Detect (DI-59)" textOutTrigTime="0"/>
<IoSensor id="SensorGBWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBWaterLeakSW" infoText="" warningText="Waring7 Gas Box Water Leak (DI-60)" alarmText=""/>
<IoSensor id="SensorDryPump1Running" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPump1Running" infoText="" warningText="" alarmText="Alarm34 DryPump1 Not Running (DI-65)" textOutTrigTime="0"/>
<IoSensor id="SensorDryPump1Warning" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPump1Warning" infoText="" warningText="Warning8 DryPump1 Warning (DI-67)" alarmText=""/>
<IoSensor id="SensorFacilityWarningSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_FacilityWarningSW" infoText="" warningText="" alarmText="Alarm35 Facility Equipment Alarm (DI-72)" textOutTrigTime="0"/>
<IoSensor id="SensorMainCBStatusSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_MainCBStatusSW" infoText="" warningText="" alarmText="Alarm36 Main CB Status Off (DI-76)" textOutTrigTime="0"/>
<IoSensor id="SensorPRWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRackWaterLeakSW" infoText="" warningText="Waring9 Power Rack Water Leak (DI-77)" alarmText=""/>
<IoSensor id="SensorProcessStopSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ProcessStopSW" infoText="" warningText="" alarmText="Alarm37 Process Stop (DI-81)" textOutTrigTime="0"/>
<IoSensor id="SensorSHLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SHLidClosed" infoText="" warningText="Warning10 SH Lid Opened (DI-106)" alarmText=""/>
<IoSensor id="SensorTopLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TopLidClosed" infoText="" warningText="Warning11 Top Lid Opened (DI-113)" alarmText=""/>
<IoSensor id="SensorMiddleLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_MiddleLidClosed" infoText="" warningText="Warning12 Middle Lid Opened (DI-120)" alarmText=""/>
<IoSensor id="SensorInletCoolingWaterPressHigh" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletCoolingWaterPressHigh" infoText="" warningText="" alarmText="Alarm17 Chamber Cooling Water Pressure High (DI-125)" textOutTrigTime="0"/>
<IoSensor id="SensorInletCoolingWaterPressLow" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletCoolingWaterPressLow" infoText="" warningText="" alarmText="Alarm17 Chamber Cooling Water Pressure Low (DI-126)" textOutTrigTime="0"/>
<IoSensor id="SensorPSUInnerTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUInnerTempHAlarm" infoText="" warningText="Warning19 PSU Inner.Temp High (DI-305)" alarmText=""/>
<IoSensor id="SensorPSUMiddleTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUMiddleTempHAlarm" infoText="" warningText="Warning20 PSU Middle.Temp High (DI-306)" alarmText=""/>
<IoSensor id="SensorPSUOuterTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUOuterTempHAlarm" infoText="" warningText="Warning21 PSU Outer.Temp High (DI-307)" alarmText=""/>
<IoSensor id="SensorSCRUpperTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRUpperTempHAlarm" infoText="" warningText="Warning22 SCR Upper TempHigh (DI-311)" alarmText=""/>
<IoSensor id="SensorSCRMiddleTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRMiddleTempHAlarm" infoText="" warningText="Warning23 SCR Middle TempHigh (DI-312)" alarmText=""/>
<IoSensor id="SensorSCRLowerTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRLowerTempHAlarm" infoText="" warningText="Warning24 SCR Lower TempHigh (DI-313)" alarmText=""/>
<IoSensor id="SensorInletTotalTempHigh" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletTotalTempHigh" infoText="" warningText="" alarmText="Alarm78 InletTotalTempHigh (DI-344)" textOutTrigTime="0"/>
<IoSensor id="SensorHearbeatTimeout" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_HearbeatTimeout" infoText="" warningText="" alarmText="Alarm100 PM Hearbeat Timeout (DI-350)" textOutTrigTime="0"/>
<IoSensor id="SensorSHFlowTempU1OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHFlowTempU1OT" infoText="" warningText="Warning25 SH Cooling Water Temp Over Temp -U1 (AI-3)" alarmText=""/>
<IoSensor id="SensorChamTopFlowTempU2OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamTopFlowTempU2OT" infoText="" warningText="Warning26 Chamber Top Cooling Water Over Temp -U2 (AI-4)" alarmText=""/>
<IoSensor id="SensorChamMiddleFlow1TempU3OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMiddleFlow1TempU3OT" infoText="" warningText="Warning27 Chamber Middle1 Cooling Water Over Temp -U3 (AI-5)" alarmText=""/>
<IoSensor id="SensorChamMiddleFlow2TempU4OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMiddleFlow2TempU4OT" infoText="" warningText="Warning28 Chamber Middle2 Cooling Water Over Temp -U4 (AI-2)" alarmText=""/>
<IoSensor id="SensorChamBottomFlowTempU5OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamBottomFlowTempU5OT" infoText="" warningText="Warning29 Chamber Bottom Cooling Water Over Temp -U5 (AI-6)" alarmText=""/>
<IoSensor id="SensorBottomPlateFlowTempU6OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_BottomPlateFlowTempU6OT" infoText="" warningText="Warning30 Bottom Plate Cooling Water Over Temp -U6 (AI-7)" alarmText=""/>
<IoSensor id="SensorPowerRodFlow1TempU7OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PowerRodFlow1TempU7OT" infoText="" warningText="Warning31 Power Rod1 Cooling Water Over Temp -U7 (AI-8)" alarmText=""/>
<IoSensor id="SensorPowerRodFlow2TempU8OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PowerRodFlow2TempU8OT" infoText="" warningText="Warning32 Power Rod2 Cooling Water Over Temp -U8 (AI-9)" alarmText=""/>
<IoSensor id="SensorForelineColdTrapFlowTempU9OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ForelineColdTrapFlowTempU9OT" infoText="" warningText="Warning33 Foreline.ColdTrap Cooling Water Over Temp -U9 (AI-10)" alarmText=""/>
<IoSensor id="SensorInSituFlowTempU10OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InSituFlowTempU10OT" infoText="" warningText="Warning34 InSitu Cooling Water Over Temp -U10 (AI-11)" alarmText=""/>
<IoSensor id="SensorSideWallPowerRodFlowTempU11OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SideWallPowerRodFlowTempU11OT" infoText="" warningText="Warning35 SideWallPowerRod Cooling Water Over Temp -U11 (AI-12)" alarmText=""/>
<IoSensor id="SensorTransformerFlowTempU14OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TransformerFlowTempU14OT" infoText="" warningText="Warning36 Transformer Cooling Water Over Temp -U14 (AI-13)" alarmText=""/>
<IoSensor id="SensorTMFlow1TempU12OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TMFlow1TempU12OT" infoText="" warningText="Warning37 TM1 Cooling Water Over Temp -U12 (AI-14)" alarmText=""/>
<IoSensor id="SensorTMFlow2TempU13OT" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TMFlow2TempU13OT" infoText="" warningText="Warning38 TM2 Cooling Water Over Temp -U13 (AI-15)" alarmText=""/>
<IoSensor id="SensorDORPressATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_DORPressATMSW" infoText="" warningText="Waring06 DOR Press ATM" alarmText=""/>
<IoSensor id="SensorPumpExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpExhaustDPSW" infoText="" warningText="" alarmText="Alarm31 Pump Exhaust DP Error " textOutTrigTime="0"/>
<IoSensor id="SensorPSUEnable" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PSUEnable_FB" infoText="" warningText="Warning19 PSU and SCR Status Is Off [DI-216]" alarmText=""/>
<IoSensor id="SensorPMATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMATMSW" infoText="Information1 PM At ATM [DI-4]" warningText="" alarmText=""/>
<IoSensor id="SensorChamAtSafeProcessPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamAtSafeProcessPressSW" infoText="Information2 Chamber At Safe Process Pressure [DI-5]" warningText="" alarmText=""/>
<IoSensor id="SensorDORPressATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_DORPressATMSW" infoText="Information3 DOR Press ATM [DI-7]" warningText="" alarmText=""/>
<IoSensor id="SensorHeaterTempBelow900CSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_HeaterTempBelow900CSW" infoText="Information4 Heater Temp Below 900C [DI-11]" warningText="" alarmText=""/>
<IoSensor id="SensorConfinementRingUp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingUp" infoText="Information5 Confinement Ring At Up Position [DI-12]" warningText="" alarmText=""/>
<IoSensor id="SensorSusceptorAtSafeSpeed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SusceptorAtSafeSpeed" infoText="Information6 Susceptor At Safe Speed [DI-13]" warningText="" alarmText=""/>
<IoSensor id="SensorTMN2FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMN2FlowSW" infoText="Information7 TM N2 Flow Abnormity [DI-34]" warningText="" alarmText=""/>
<IoSensor id="SensorChamLidPushButtonLocal" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamLidPushButtonLocal" infoText="Information8 Chamer Lid Push Button On Local Mode [DI-49]" warningText="" alarmText=""/>
<IoSensor id="SensorConfinementRingDown" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingDown" infoText="Information9 Confinement Ring At Down position [DI-50]" warningText="" alarmText=""/>
<IoSensor id="SensorChamMoveBodyUp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyUp" infoText="Information10 Cham Move Body Up [DI-96]" warningText="" alarmText=""/>
<IoSensor id="SensorChamMoveBodyUpLatchFW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyUpLatchFW" infoText="Information11 Cham Move Body Up LatchFW [DI-97]" warningText="" alarmText=""/>
<IoSensor id="SensorChamMoveBodyDown" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyDown" infoText="Information12 Cham Move Body Down [DI-98]" warningText="" alarmText=""/>
<IoSensor id="SensorChamMoveBodyFront" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyFront" infoText="Information13 Cham Move Body Front [DI-99]" warningText="" alarmText=""/>
<IoSensor id="SensorChamMoveBodyEnd" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyEnd" infoText="Information14 Cham Move Body End [DI-100]" warningText="" alarmText=""/>
<IoSensor id="SensorChamMoveBodyEndLatchBW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyEndLatchBW" infoText="Information15 Cham Move Body End LatchBW [DI-101]" warningText="" alarmText=""/>
<IoSensor id="SensorSHGasConnectorLoosen" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHGasConnectorLoosen" infoText="Information16 SH Gas Connector Loosen [DI-102]" warningText="" alarmText=""/>
<IoSensor id="SensorSHGasConnectorTighten" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHGasConnectorTighten" infoText="Information17 SH Gas Connector Tighten [DI-103]" warningText="" alarmText=""/>
<IoSensor id="SensorSHLidLoosen1" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHLidLoosen1" infoText="Information18 SH Lid Loosen [DI-104]" warningText="" alarmText=""/>
<IoSensor id="SensorSHLidTighten1" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHLidTighten1" infoText="Information19 SH Lid Tighten [DI-105]" warningText="" alarmText=""/>
<IoSensor id="SensorSHLidSwingLock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHLidSwingLock" infoText="Information20 SH Lid Swing Lock [DI-107]" warningText="" alarmText=""/>
<IoSensor id="SensorSHLidSwingUnlock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHLidSwingUnlock" infoText="Information21 SH Lid Swing Unlock [DI-108]" warningText="" alarmText=""/>
<IoSensor id="SensorMiddleLidLoosen1" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidLoosen1" infoText="Information22 Middle Lid Loosen [DI-118]" warningText="" alarmText=""/>
<IoSensor id="SensorMiddleLidTighten1" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidTighten1" infoText="Information23 Middle Lid Tighten [DI-119]" warningText="" alarmText=""/>
<IoSensor id="SensorMiddleLidSwingLock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidSwingLock" infoText="Information24 Middle Lid Swing Lock [DI-121]" warningText="" alarmText=""/>
<IoSensor id="SensorMiddleLidSwingUnlock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidSwingUnlock" infoText="Information25 Middle Lid Swing Unlock [DI-122]" warningText="" alarmText=""/>
<IoSensor id="SensorLocalChamMoveBodyUpSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_LocalChamMoveBodyUpSW" infoText="Information26 Cham Move Body Latch Local [DI-123]" warningText="" alarmText=""/>
<IoSensor id="SensorDI_ServoReady" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ServoReady" infoText="Information27 Servo Not Ready [DI-288]" warningText="" alarmText=""/>
<IoSensor id="SensorPSUInnerTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUInnerTempLAlarm" infoText="Information28 PSU Inner Temp Low [DI-308]" warningText="" alarmText=""/>
<IoSensor id="SensorPSUMiddleTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUMiddleTempLAlarm" infoText="Information29 PSU Middle Temp Low [DI-309]" warningText="" alarmText=""/>
<IoSensor id="SensorPSUOuterTempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUOuterTempLAlarm" infoText="Information30 PSU Outer Temp Low [DI-310]" warningText="" alarmText=""/>
<IoSensor id="SensorChamCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamCabDoorClosed" infoText="" warningText="Waring1 Cham Cab Door Not All Closed [DI-3]" alarmText="" />
<IoSensor id="SensorDORPressVacSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DORPressVacSW" infoText="" warningText="Waring2 DOR Press Vac [DI-6]" alarmText="" />
<IoSensor id="SensorTMFlow2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMFlow2SW" infoText="" warningText="Waring3 TMFlow2 Water Flow Abnormity -U12 [DI-26]" alarmText="" textOutTrigTime="0"/>
<IoSensor id="SensorGBDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBDoorClosed" infoText="" warningText="Waring4 Gas Box Door Not Closed [DI-33]" alarmText=""/>
<IoSensor id="SensorGasPipeTempCtrlAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GasPipeTempCtrlAlarm" infoText="" warningText="Waring5 Gas PipeTempCtrl Abnormity [DI-35]" alarmText=""/>
<IoSensor id="SensorReactorWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorWaterLeakSW" infoText="" warningText="Waring7 ReactorWaterLeak [DI-48]" alarmText=""/>
<IoSensor id="SensorTMFlow1SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMFlow1SW" infoText="" warningText="Waring8 TMFlow1 Water Flow Abnormity -U13 [DI-51]" alarmText=""/>
<IoSensor id="SensorGBWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBWaterLeakSW" infoText="" warningText="Waring9 Gas Box Water Leak [DI-60]" alarmText=""/>
<IoSensor id="SensorTMPumpFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMPumpFlowSW" infoText="" warningText="Waring10 TM Pump Flow Abnormity [DI-61]" alarmText=""/>
<IoSensor id="SensorDryPumpFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPumpFlowSW" infoText="" warningText="Waring11 PM Dry Pump Flow Abnormity [DI-62]" alarmText=""/>
<IoSensor id="SensorDryPump1Warning" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPump1Warning" infoText="" warningText="Waring12 PM1 Dry Pump1 Warning [DI-67]" alarmText=""/>
<IoSensor id="SensorPRWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRackWaterLeakSW" infoText="" warningText="Waring13 Power Rack Water Leak [DI-77]" alarmText=""/>
<IoSensor id="SensorSHLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SHLidClosed" infoText="" warningText="Warning14 SH Lid Opened [DI-106]" alarmText=""/>
<IoSensor id="SensorTopLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TopLidClosed" infoText="" warningText="Warning15 Top Lid Opened [DI-113]" alarmText=""/>
<IoSensor id="SensorMiddleLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_MiddleLidClosed" infoText="" warningText="Warning16 Middle Lid Opened [DI-120]" alarmText=""/>
<IoSensor id="SensorBottomLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_BottomLidClosed" infoText="" warningText="Warning17 Bottom Lid Opened [DI-129]" alarmText=""/>
<IoSensor id="SensorPSU1Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PSU1Status" infoText="" warningText="Warning18 PSU1 Status Is Off [DI-296]" alarmText=""/>
<IoSensor id="SensorPSU2Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PSU2Status" infoText="" warningText="Warning19 PSU1 Status Is Off [DI-297]" alarmText=""/>
<IoSensor id="SensorPSU3Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PSU3Status" infoText="" warningText="Warning20 PSU1 Status Is Off [DI-298]" alarmText=""/>
<IoSensor id="SensorSCR1Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR1Status" infoText="" warningText="Warning21 PSU1 Status Is Off [DI-302]" alarmText=""/>
<IoSensor id="SensorSCR2Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR2Status" infoText="" warningText="Warning22 PSU1 Status Is Off [DI-303]" alarmText=""/>
<IoSensor id="SensorSCR3Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR3Status" infoText="" warningText="Warning23 PSU1 Status Is Off [DI-304]" alarmText=""/>
<IoSensor id="SensorPSUInnerTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUInnerTempHAlarm" infoText="" warningText="Warning24 PSU Inner Temp High [DI-305]" alarmText=""/>
<IoSensor id="SensorPSUMiddleTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUMiddleTempHAlarm" infoText="" warningText="Warning25 PSU Middle Temp High [DI-306]" alarmText=""/>
<IoSensor id="SensorPSUOuterTempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUOuterTempHAlarm" infoText="" warningText="Warning25 PSU Outer Temp High [DI-307]" alarmText=""/>
<IoSensor id="SensorChamLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamLidClosed" infoText="" warningText="" alarmText="Alarm1 Cham Lid Not All Closed [DI-0]" textOutTrigTime="0"/>
<IoSensor id="SensorMiddleFlow2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamMiddleFlow2SW" infoText="" warningText="" alarmText="Alarm2 Chamber Middle2 Cooling Water Flow Abnormity U4 [DI-8]" textOutTrigTime="0"/>
<IoSensor id="SensorChamPressAboveATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamPressAboveATMSW" infoText="" warningText="" alarmText="Alarm3 Chamber Press Above ATM [DI-9]"/>
<IoSensor id="SensorHeaterTempUp1680CSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_HeaterTempUp1680CSW" infoText="" warningText="" alarmText="Alarm4 Heater Controller1 Present Temp High [DI-10]" textOutTrigTime="0"/>
<IoSensor id="SensorSHFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SHFlowSW" infoText="" warningText="" alarmText="Alarm5 SH Cooling Water Flow Abnormity -U1 [DI-15]" textOutTrigTime="0"/>
<IoSensor id="SensorChamTopFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamTopFlowSW" infoText="" warningText="" alarmText="Alarm6 Chamber Top Cooling Water Flow Abnormity-U2 [DI-16]" textOutTrigTime="0"/>
<IoSensor id="SensorChamMiddleFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamMiddleFlow1SW" infoText="" warningText="" alarmText="Alarm7 Chamber Middle1 Cooling Water Flow Abnormity -U3 [DI-17]" textOutTrigTime="0"/>
<IoSensor id="SensorChamBottomFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamBottomFlowSW" infoText="" warningText="" alarmText="Alarm8 Chamber Bottom Cooling Water Flow Abnormity -U5 [DI-18]" textOutTrigTime="0"/>
<IoSensor id="SensorBottomPlateFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_BottomPlateFlowSW" infoText="" warningText="" alarmText="Alarm9 Bottom Plate Water Flow Abnormity -U6 [DI-19]" textOutTrigTime="0"/>
<IoSensor id="SensorPowerRodFlow1SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRod1FlowSW" infoText="" warningText="" alarmText="Alarm10 Power Rod1 Cooling Water Flow Abnormity-U7 [DI-20]" textOutTrigTime="0"/>
<IoSensor id="SensorPowerRodFlow2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRod2FlowSW" infoText="" warningText="" alarmText="Alarm11 Power Rod2 Cooling Water Flow Abnormity-U8 [DI-21]" textOutTrigTime="0"/>
<IoSensor id="SensorForelineFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ForelineFlowSW" infoText="" warningText="" alarmText="Alarm12 Foreline Cooling Water Flow Abnormity -U9 [DI-22]" textOutTrigTime="0"/>
<IoSensor id="SensorInSituFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_InSituFlowSW" infoText="" warningText="" alarmText="Alarm13 InSitu Cooling Water Flow Abnormity -U10 [DI-23]" textOutTrigTime="0"/>
<IoSensor id="SensorSideWallPowerRodFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SideWallPowerRodFlowSW" infoText="" warningText="" alarmText="Alarm14 Side Wall Power Rod Water Flow Abnormity -U11 [DI-24]" textOutTrigTime="0"/>
<IoSensor id="SensorTransformerFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TransformerFlowSW" infoText="" warningText="" alarmText="Alarm15 Transformer Water Flow Abnormity -U14 [DI-25]" textOutTrigTime="0"/>
<IoSensor id="SensorPowerRackExhaustDP" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRackExhaustDP" infoText="" warningText="" alarmText="Alarm16 Power Rack Exhaust DP Error [DI-29]" textOutTrigTime="0"/>
<IoSensor id="SensorPMH2DetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMH2DetectorSW" infoText="" warningText="" alarmText="Alarm17 PM H2 Leak Detect [DI-30]" textOutTrigTime="0"/>
<IoSensor id="SensorGBHCLDetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBHCLDetectorSW" infoText="" warningText="" alarmText="Alarm18 Gasbox HCL Leak Detect [DI-31]" textOutTrigTime="0"/>
<IoSensor id="SensorGBExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBExhaustDPSW" infoText="" warningText="" alarmText="Alarm19 Gasbox Exhaust DP Error [DI-32]" textOutTrigTime="0"/>
<IoSensor id="SensorDryPumpAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPumpAlarm" infoText="" warningText="" alarmText="Alarm20 PM1 Dry Pump Alarm [DI-36]" textOutTrigTime="0"/>
<IoSensor id="SensorPumpExhaustPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpExhaustPressSW" infoText="" warningText="" alarmText="Alarm21 Pump Exhaust Pressure Abnormity [DI-38]" textOutTrigTime="0"/>
<IoSensor id="SensorPMAExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMAExhaustDPSW" infoText="" warningText="" alarmText="Alarm22 PM Exhaust DP Error [DI-39]" textOutTrigTime="0"/>
<IoSensor id="SensorScrubberIntlkSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ScrubberIntlkSW" infoText="" warningText="" alarmText="Alarm24 Scrubber System Error [DI-41]" textOutTrigTime="0"/>
<IoSensor id="SensorFacilityIntlkSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_FacilityIntlkSW" infoText="" warningText="" alarmText="Alarm25 Facility Error [DI-42]" textOutTrigTime="0"/>
<IoSensor id="SensorTCSLevelLowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TCSAlarm" infoText="" warningText="" alarmText="Alarm26 TCS Alarm [DI-43]" textOutTrigTime="0"/>
<IoSensor id="SensorServoDriverFaultSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ServoDriverFaultSW" infoText="" warningText="" alarmText="Alarm27 Rotation Servo Driver Error [DI-45]" textOutTrigTime="0"/>
<IoSensor id="SensorGN2InletPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_GN2InletPressSW" infoText="" warningText="" alarmText="Alarm28 Gasbox N2 Pressure Low [DI-55]" textOutTrigTime="0"/>
<IoSensor id="SensorArInletPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ArInletPressSW" infoText="" warningText="" alarmText="Alarm29 Gasbox Ar Pressure Low [DI-56]" textOutTrigTime="0"/>
<IoSensor id="SensorH2PressureSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_H2PressureSW" infoText="" warningText="" alarmText="Alarm30 Gasbox H2 Pressure Low [DI-57]" textOutTrigTime="0"/>
<IoSensor id="SensorGBH2DetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBH2DetectorSW" infoText="" warningText="" alarmText="Alarm31 Gasbox H2 Leak Detect [DI-59]" textOutTrigTime="0"/>
<IoSensor id="SensorDryPump1Running" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPump1Running" infoText="" warningText="" alarmText="Alarm32 PM1 Dry Pump1 Not Running [DI-65]" textOutTrigTime="0"/>
<IoSensor id="SensorFacilityWarningSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_FacilityWarningSW" infoText="" warningText="" alarmText="Alarm33 Facility Equipment Alarm [DI-72]" textOutTrigTime="0"/>
<IoSensor id="SensorMainCBStatusSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_MainCBStatusSW" infoText="" warningText="" alarmText="Alarm34 Main CB Status Off [DI-76]" textOutTrigTime="0"/>
<IoSensor id="SensorProcessStopSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ProcessStopSW" infoText="" warningText="" alarmText="Alarm35 Soft Stop [DI-81]" textOutTrigTime="0"/>
<IoSensor id="SensorInletCoolingWaterPressHigh" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletCoolingWaterPressHigh" infoText="" warningText="" alarmText="Alarm36 Chamber Cooling Water Pressure Low [DI-125]" textOutTrigTime="0"/>
<IoSensor id="SensorInletCoolingWaterPressLow" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletCoolingWaterPressLow" infoText="" warningText="" alarmText="Alarm37 Chamber Cooling Water Pressure High [DI-126]" textOutTrigTime="0"/>
<IoSensor id="SensorPumpExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpExhaustDPSW" infoText="" warningText="" alarmText="Alarm38 Pump Exhaust DP Error [DI-159]" textOutTrigTime="0"/>
<IoSensor id="SensorPSU1Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU1Alarm" infoText="" warningText="Alarm39 PSU1.Alarm [DI-320]" alarmText=""/>
<IoSensor id="SensorPSU2Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU2Alarm" infoText="" warningText="Alarm40 PSU2.Alarm [DI-321]" alarmText=""/>
<IoSensor id="SensorPSU3Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU3Alarm" infoText="" warningText="Alarm41 PSU3.Alarm [DI-322]" alarmText=""/>
<IoSensor id="SensorSCR1Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCR1Alarm" infoText="" warningText="Alarm42 SCR1.Alarm [DI-323]" alarmText=""/>
<IoSensor id="SensorSCR2Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCR2Alarm" infoText="" warningText="Alarm43 SCR2.Alarm [DI-324]" alarmText=""/>
<IoSensor id="SensorSCR3Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCR3Alarm" infoText="" warningText="Alarm44 SCR3.Alarm [DI-325]" alarmText=""/>
<IoSensor id="SensorPSUTCDPCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSUTCDPCommunicationError" infoText="" warningText="Alarm45 PSU dp Communication Error [DI-328]" alarmText=""/>
<IoSensor id="SensorSCRTCDPCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRTCDPCommunicationError" infoText="" warningText="Alarm46 SCR dp Communication Error [DI-329]" alarmText=""/>
<IoSensor id="SensorPSU1dpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU1dpCommunicationError" infoText="" warningText="Alarm47 PSU-1 dp Communication Error [DI-330]" alarmText=""/>
<IoSensor id="SensorPSU2dpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU2dpCommunicationError" infoText="" warningText="Alarm48 PSU-2 dp Communication Error [DI-331]" alarmText=""/>
<IoSensor id="SensorPSU3dpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU3dpCommunicationError" infoText="" warningText="Alarm49 PSU-3 dp Communication Error [DI-332]" alarmText=""/>
<IoSensor id="SensorSCRdpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRdpCommunicationError" infoText="" warningText="Alarm50 SCR dp Communication Error [DI-333]" alarmText=""/>
<IoSensor id="SensorInletTotalTempHigh" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletTotalTempHigh" infoText="" warningText="Alarm51 Inlet Total Temp High [DI-344]" alarmText=""/>
<IoSensor id="SensorChamPressAboveATM2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamPressAboveATM2SW" infoText="" warningText="Alarm52 Cham Press Above ATM2 [DI-345]" alarmText=""/>
<IoSensor id="SensorHearbeatTimeout" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_HearbeatTimeout" infoText="" warningText="" alarmText="Alarm100 PM Hearbeat Timeout [DI-350]" textOutTrigTime="0"/>
<IoSensor id = "SensorMFC01Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC01Offline" infoText="" warningText="" alarmText="Alarm101 MFC01 Offline [DI-351]" />
<IoSensor id = "SensorMFC02Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC02Offline" infoText="" warningText="" alarmText="Alarm102 MFC02 Offline [DI-352]" />
<IoSensor id = "SensorMFC03Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC03Offline" infoText="" warningText="" alarmText="Alarm103 MFC03 Offline [DI-353]" />
<IoSensor id = "SensorMFC04Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC04Offline" infoText="" warningText="" alarmText="Alarm104 MFC04 Offline [DI-354]" />
<IoSensor id = "SensorMFC05Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC05Offline" infoText="" warningText="" alarmText="Alarm105 MFC05 Offline [DI-355]" />
<IoSensor id = "SensorMFC06Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC06Offline" infoText="" warningText="" alarmText="Alarm106 MFC06 Offline [DI-356]" />
<IoSensor id = "SensorMFC07Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC07Offline" infoText="" warningText="" alarmText="Alarm107 MFC07 Offline [DI-357]" />
<IoSensor id = "SensorMFC08Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC08Offline" infoText="" warningText="" alarmText="Alarm108 MFC08 Offline [DI-358]" />
<IoSensor id = "SensorMFC09Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC09Offline" infoText="" warningText="" alarmText="Alarm109 MFC09 Offline [DI-359]" />
<IoSensor id = "SensorMFC10Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC10Offline" infoText="" warningText="" alarmText="Alarm110 MFC10 Offline [DI-360]" />
<IoSensor id = "SensorMFC11Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC11Offline" infoText="" warningText="" alarmText="Alarm111 MFC11 Offline [DI-361]" />
<IoSensor id = "SensorMFC12Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC12Offline" infoText="" warningText="" alarmText="Alarm112 MFC12 Offline [DI-362]" />
<IoSensor id = "SensorMFC13Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC13Offline" infoText="" warningText="" alarmText="Alarm113 MFC13 Offline [DI-363]" />
<IoSensor id = "SensorMFC14Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC14Offline" infoText="" warningText="" alarmText="Alarm114 MFC14 Offline [DI-364]" />
<IoSensor id = "SensorMFC15Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC15Offline" infoText="" warningText="" alarmText="Alarm115 MFC15 Offline [DI-365]" />
<IoSensor id = "SensorMFC16Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC16Offline" infoText="" warningText="" alarmText="Alarm116 MFC16 Offline [DI-366]" />
<IoSensor id = "SensorMFC17Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC17Offline" infoText="" warningText="" alarmText="Alarm117 MFC17 Offline [DI-367]" />
<IoSensor id = "SensorMFC18Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC18Offline" infoText="" warningText="" alarmText="Alarm118 MFC18 Offline [DI-368]" />
<IoSensor id = "SensorMFC19Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC19Offline" infoText="" warningText="" alarmText="Alarm119 MFC19 Offline [DI-369]" />
<IoSensor id = "SensorMFC20Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC20Offline" infoText="" warningText="" alarmText="Alarm120 MFC20 Offline [DI-370]" />
<IoSensor id = "SensorMFC21Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC21Offline" infoText="" warningText="" alarmText="Alarm121 MFC20 Offline [DI-371]" />
<IoSensor id = "SensorMFC22Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC22Offline" infoText="" warningText="" alarmText="Alarm122 MFC22 Offline [DI-372]" />
<IoSensor id = "SensorMFC23Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC23Offline" infoText="" warningText="" alarmText="Alarm123 MFC23 Offline [DI-373]" />
<IoSensor id = "SensorMFC24Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC24Offline" infoText="" warningText="" alarmText="Alarm124 MFC24 Offline [DI-374]" />
<IoSensor id = "SensorMFC25Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC25Offline" infoText="" warningText="" alarmText="Alarm125 MFC25 Offline [DI-375]" />
<IoSensor id = "SensorMFC26Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC26Offline" infoText="" warningText="" alarmText="Alarm126 MFC26 Offline [DI-376]" />
<IoSensor id = "SensorMFC27Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC27Offline" infoText="" warningText="" alarmText="Alarm127 MFC27 Offline [DI-377]" />
<IoSensor id = "SensorMFC28Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC28Offline" infoText="" warningText="" alarmText="Alarm128 MFC28 Offline [DI-378]" />
<IoSensor id = "SensorMFC29Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC29Offline" infoText="" warningText="" alarmText="Alarm129 MFC29 Offline [DI-379]" />
<IoSensor id = "SensorMFC30Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC30Offline" infoText="" warningText="" alarmText="Alarm130 MFC30 Offline [DI-380]" />
<IoSensor id = "SensorMFC31Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC31Offline" infoText="" warningText="" alarmText="Alarm131 MFC31 Offline [DI-381]" />
<IoSensor id = "SensorMFC32Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC32Offline" infoText="" warningText="" alarmText="Alarm132 MFC32 Offline [DI-382]" />
<IoSensor id = "SensorMFC33Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC33Offline" infoText="" warningText="" alarmText="Alarm133 MFC33 Offline [DI-383]" />
<IoSensor id = "SensorMFC34Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC34Offline" infoText="" warningText="" alarmText="Alarm134 MFC35 Offline [DI-384]" />
<IoSensor id = "SensorMFC35Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC35Offline" infoText="" warningText="" alarmText="Alarm135 MFC35 Offline [DI-385]" />
<IoSensor id = "SensorMFC36Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC36Offline" infoText="" warningText="" alarmText="Alarm136 MFC36 Offline [DI-386]" />
<IoSensor id = "SensorMFC37Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC37Offline" infoText="" warningText="" alarmText="Alarm137 MFC37 Offline [DI-387]" />
<IoSensor id = "SensorMFC38Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC38Offline" infoText="" warningText="" alarmText="Alarm138 MFC38 Offline [DI-388]" />
<IoSensor id = "SensorMFC39Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC39Offline" infoText="" warningText="" alarmText="Alarm139 MFC38 Offline [DI-389]" />
<IoSensor id = "SensorMFC40Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC40Offline" infoText="" warningText="" alarmText="Alarm140 MFC38 Offline [DI-390]" />
<IoSensor id = "SensorPC01Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC01Offline" infoText="" warningText="" alarmText="Alarm141 PC1 Offline [DI-391]" />
<IoSensor id = "SensorPC02Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC02Offline" infoText="" warningText="" alarmText="Alarm142 PC2 Offline [DI-392]" />
<IoSensor id = "SensorPC03Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC03Offline" infoText="" warningText="" alarmText="Alarm143 PC3 Offline [DI-393]" />
<IoSensor id = "SensorPC04Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC04Offline" infoText="" warningText="" alarmText="Alarm144 PC4 Offline [DI-394]" />
<IoSensor id = "SensorPC05Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC05Offline" infoText="" warningText="" alarmText="Alarm145 PC5 Offline [DI-395]" />
<IoSensor id = "SensorPC06Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC06Offline" infoText="" warningText="" alarmText="Alarm146 PC6 Offline [DI-396]" />
<IoSensor id = "SensorPC07Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC07Offline" infoText="" warningText="" alarmText="Alarm147 PC7 Offline [DI-397]" />
<IoSensor id = "SensorPC08Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC08Offline" infoText="" warningText="" alarmText="Alarm148 PC8 Offline [DI-398]" />
<IoSensor id = "SensorPC09Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC09Offline" infoText="" warningText="" alarmText="Alarm149 PC9 Offline [DI-399]" />
<IoSensor id = "SensorPC10Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC10Offline" infoText="" warningText="" alarmText="Alarm150 PC10 Offline [DI-400]" />
<IoSensor id = "SensorReactorPressRisingRateFast" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ReactorPressRisingRateFast" infoText="" warningText="" alarmText="Alarm53 Reactor Press Rising Rate Fast [DO192]" />
<IoSensor id = "SensorUPSEnable" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_UPSEnable" infoText="" warningText="" alarmText="Alarm54 UPS Enable [DO193]" />
<IoSensor id = "SensorUPSLowBattery" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_UPSLowBattery" infoText="" warningText="" alarmText="Alarm55 UPS Low Battery [DO194]" />
<IoSensor id = "SensorChamMiddleFlow2Temp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamMiddleFlow2Temp" infoText="" warningText="" alarmText="Alarm56 Chamber Middle Flow2 Cooling Water Over Temp -U4 [DO195]" />
<IoSensor id = "SensorSHFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_SHFlowTemp" infoText="" warningText="" alarmText="Alarm57 SH Cooling Water Temp Over Temp -U1 [DO196]" />
<IoSensor id = "SensorChamTopFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamTopFlowTemp" infoText="" warningText="" alarmText="Alarm58 Chamber Top Cooling Water Over Temp -U2 [DO197]" />
<IoSensor id = "SensorChamMiddleFlow1Temp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamMiddleFlow1Temp" infoText="" warningText="" alarmText="Alarm59 Chamber Middle Flow1 Cooling Water Over Temp -U3 [DO198]" />
<IoSensor id = "SensorChamBottomFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamBottomFlowTemp" infoText="" warningText="" alarmText="Alarm60 Chamber Bottom Cooling Water Over Temp -U5 [DO199]" />
<IoSensor id = "SensorBottomPlateFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_BottomPlateFlowTemp" infoText="" warningText="" alarmText="Alarm61 Bottom Plate Cooling Water Over Temp -U6 [DO200]" />
<IoSensor id = "SensorPowerRod1FlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_PowerRod1FlowTemp" infoText="" warningText="" alarmText="Alarm62 Power Rod1 Cooling Water Over Temp -U7 [DO201]" />
<IoSensor id = "SensorPowerRod2FlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_PowerRod2FlowTemp" infoText="" warningText="" alarmText="Alarm63 Power Rod2 Cooling Water Over Temp -U8 [DO202]" />
<IoSensor id = "SensorInSituFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_InSituFlowTemp" infoText="" warningText="" alarmText="Alarm64 Foreline Cooling Water Over Temp -U9 [DO203]" />
<IoSensor id = "SensorSideWallPowerRodFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_SideWallPowerRodFlowTemp" infoText="" warningText="" alarmText="Alarm65 InSitu Cooling Water Over Temp -U10 [DO204]" />
<IoSensor id = "SensorTransformerFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_TransformerFlowTemp" infoText="" warningText="" alarmText="Alarm66 Side Wall Power Rod Cooling Water Over Temp -U11 [DO205]" />
<IoSensor id = "SensorForelineColdTrapFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ForelineColdTrapFlowTemp" infoText="" warningText="" alarmText="Alarm67 Transformer Cooling Water Over Temp -U14 [DO206]" />
<IoSensor id = "SensorTMFlow1Temp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_TMFlow1Temp" infoText="" warningText="" alarmText="Alarm68 TMFlow1 Cooling Water Over Temp -U13 [DO207]" />
<IoSensor id = "SensorTMFlow2Temp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_TMFlow2Temp" infoText="" warningText="" alarmText="Alarm69 TMFlow2 Cooling Water Over Temp -U12 [DO208]" />
<IoSensor id = "SensorPyroCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_PyroCommunicationError" infoText="" warningText="" alarmText="Alarm70 Pyro Communication Error [DO220]" />
<IoSensor id = "SensorPryoTempMaxDiff" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_PryoTempMaxDiff" infoText="" warningText="" alarmText="Alarm71 Pyro Warm Max Diff [DO230]" />
<IoSensor id = "SensorPryoTempRasisingFast" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_PryoTempRasisingFast" infoText="" warningText="" alarmText="Alarm72 PyroTemp Raising Fast [DO231]" />
<IoSensor id = "SensorHeaterResistanceAnomaly" module = "" display = "" schematicId = "" unit = "" aioType = "" textOutTrigValue = "true" do = "DO_HeaterResistanceAnomaly" infoText = "" warningText = "" alarmText = "Alarm73 Heater Resistance Abnormity [DO232]" />
</IoSensors>

47
Modules/SicPM/Config/_ioDefinePM.xml
View File

@ -39,7 +39,7 @@
<DI_ITEM Index="39" Name="DI_PMAExhaustDPSW" BufferOffset="39" Addr="39" Description=""/>
<DI_ITEM Index="41" Name="DI_ScrubberIntlkSW" BufferOffset="41" Addr="41" Description=""/>
<DI_ITEM Index="42" Name="DI_FacilityIntlkSW" BufferOffset="42" Addr="42" Description=""/>
<DI_ITEM Index="43" Name="DI_TCSAlarm" BufferOffset="43" Addr="43" Description=""/>
<DI_ITEM Index="43" Name="DI_TCSAlarm" BufferOffset="43" Addr="43" Description=""/>
<DI_ITEM Index="45" Name="DI_ServoDriverFaultSW" BufferOffset="45" Addr="45" Description=""/>
<DI_ITEM Index="48" Name="DI_ReactorWaterLeakSW" BufferOffset="48" Addr="48" Description=""/>
<DI_ITEM Index="49" Name="DI_ChamLidPushButtonRemote" BufferOffset="49" Addr="49" Description=""/>
@ -51,26 +51,28 @@
<DI_ITEM Index="58" Name="DI_InletTotalTempHighSW" BufferOffset="58" Addr="58" Description=""/>
<DI_ITEM Index="59" Name="DI_GBH2DetectorSW" BufferOffset="59" Addr="59" Description=""/>
<DI_ITEM Index="60" Name="DI_GBWaterLeakSW" BufferOffset="60" Addr="60" Description=""/>
<DI_ITEM Index="61" Name="DI_TMPumpFlowSW" BufferOffset="61" Addr="61" Description=""/>
<DI_ITEM Index="62" Name="DI_DryPumpFlowSW" BufferOffset="62" Addr="62" Description=""/>
<DI_ITEM Index="65" Name="DI_DryPump1Running" BufferOffset="65" Addr="65" Description=""/>
<DI_ITEM Index="67" Name="DI_DryPump1Warning" BufferOffset="67" Addr="67" Description=""/>
<DI_ITEM Index="72" Name="DI_FacilityWarningSW" BufferOffset="72" Addr="72" Description=""/>
<DI_ITEM Index="76" Name="DI_MainCBStatusSW" BufferOffset="76" Addr="76" Description=""/>
<DI_ITEM Index="77" Name="DI_PowerRackWaterLeakSW" BufferOffset="77" Addr="77" Description=""/>
<DI_ITEM Index="81" Name="DI_ProcessStopSW" BufferOffset="81" Addr="81" Description=""/>
<DI_ITEM Index="96" Name="DI_ChamMoveBodyUp" BufferOffset="96" Addr="96" Description=""/>
<DI_ITEM Index="97" Name="DI_ChamMoveBodyUpLatchFW" BufferOffset="97" Addr="97" Description=""/>
<DI_ITEM Index="98" Name="DI_ChamMoveBodyDown" BufferOffset="98" Addr="98" Description=""/>
<DI_ITEM Index="99" Name="DI_ChamMoveBodyFront" BufferOffset="99" Addr="99" Description=""/>
<DI_ITEM Index="100" Name="DI_ChamMoveBodyEnd" BufferOffset="100" Addr="100" Description=""/>
<DI_ITEM Index="96" Name="DI_ChamMoveBodyUp" BufferOffset="96" Addr="96" Description=""/>
<DI_ITEM Index="97" Name="DI_ChamMoveBodyUpLatchFW" BufferOffset="97" Addr="97" Description=""/>
<DI_ITEM Index="98" Name="DI_ChamMoveBodyDown" BufferOffset="98" Addr="98" Description=""/>
<DI_ITEM Index="99" Name="DI_ChamMoveBodyFront" BufferOffset="99" Addr="99" Description=""/>
<DI_ITEM Index="100" Name="DI_ChamMoveBodyEnd" BufferOffset="100" Addr="100" Description=""/>
<DI_ITEM Index="101" Name="DI_ChamMoveBodyEndLatchBW" BufferOffset="101" Addr="101" Description=""/>
<DI_ITEM Index="102" Name="DI_SHGasConnectorLoosen" BufferOffset="102" Addr="102" Description=""/>
<DI_ITEM Index="102" Name="DI_SHGasConnectorLoosen" BufferOffset="102" Addr="102" Description=""/>
<DI_ITEM Index="103" Name="DI_SHGasConnectorTighten" BufferOffset="103" Addr="103" Description=""/>
<DI_ITEM Index="104" Name="DI_SHLidLoosen1" BufferOffset="104" Addr="104" Description=""/>
<DI_ITEM Index="105" Name="DI_SHLidTighten1" BufferOffset="105" Addr="105" Description=""/>
<DI_ITEM Index="106" Name="DI_SHLidClosed" BufferOffset="106" Addr="106" Description=""/>
<DI_ITEM Index="107" Name="DI_SHLidSwingLock" BufferOffset="107" Addr="107" Description=""/>
<DI_ITEM Index="108" Name="DI_SHLidSwingUnlock" BufferOffset="108" Addr="108" Description=""/>
<DI_ITEM Index="111" Name="DI_TopLidLoosen1" BufferOffset="111" Addr="111" Description="Visibility.Hidden"/>
<DI_ITEM Index="104" Name="DI_SHLidLoosen1" BufferOffset="104" Addr="104" Description=""/>
<DI_ITEM Index="105" Name="DI_SHLidTighten1" BufferOffset="105" Addr="105" Description=""/>
<DI_ITEM Index="106" Name="DI_SHLidClosed" BufferOffset="106" Addr="106" Description=""/>
<DI_ITEM Index="107" Name="DI_SHLidSwingLock" BufferOffset="107" Addr="107" Description=""/>
<DI_ITEM Index="108" Name="DI_SHLidSwingUnlock" BufferOffset="108" Addr="108" Description=""/>
<DI_ITEM Index="111" Name="DI_TopLidLoosen1" BufferOffset="111" Addr="111" Description="Visibility.Hidden"/>
<DI_ITEM Index="112" Name="DI_TopLidTighten1" BufferOffset="112" Addr="112" Description="Visibility.Hidden"/>
<DI_ITEM Index="113" Name="DI_TopLidClosed" BufferOffset="113" Addr="113" Description="Visibility.Hidden"/>
<DI_ITEM Index="114" Name="DI_TopLidSwingLock" BufferOffset="114" Addr="114" Description="Visibility.Hidden"/>
@ -82,8 +84,9 @@
<DI_ITEM Index="122" Name="DI_MiddleLidSwingUnlock" BufferOffset="122" Addr="122" Description=""/>
<DI_ITEM Index="123" Name="DI_LocalChamMoveBodyUpSW" BufferOffset="123" Addr="123" Description=""/>
<DI_ITEM Index="125" Name="DI_InletCoolingWaterPressHigh" BufferOffset="125" Addr="125" Description=""/>
<DI_ITEM Index="126" Name="DI_InletCoolingWaterPressLow" BufferOffset="126" Addr="126" Description=""/>
<DI_ITEM Index="159" Name="DI_PumpExhaustDPSW" BufferOffset="159" Addr="159" Description=""/>
<DI_ITEM Index="126" Name="DI_InletCoolingWaterPressLow" BufferOffset="126" Addr="126" Description=""/>
<DI_ITEM Index="129" Name="DI_BottomLidClosed" BufferOffset="129" Addr="129" Description=""/>
<DI_ITEM Index="159" Name="DI_PumpExhaustDPSW" BufferOffset="159" Addr="159" Description=""/>
<DI_ITEM Index="160" Name="DI_TCSSupply_FB" BufferOffset="160" Addr="160" Description=""/>
<DI_ITEM Index="161" Name="DI_H2Supply_FB" BufferOffset="161" Addr="161" Description="V31"/>
<DI_ITEM Index="162" Name="DI_ArSupply_FB" BufferOffset="162" Addr="162" Description="V32"/>
@ -208,6 +211,7 @@
<DI_ITEM Index="332" Name="DI_PSU3dpCommunicationError" BufferOffset="332" Addr="332" Description=""/>
<DI_ITEM Index="333" Name="DI_SCRdpCommunicationError" BufferOffset="333" Addr="333" Description=""/>
<DI_ITEM Index="344" Name="DI_InletTotalTempHigh" BufferOffset="344" Addr="344" Description=""/>
<DI_ITEM Index="345" Name="DI_ChamPressAboveATM2SW" BufferOffset="345" Addr="345" Description=""/>
<DI_ITEM Index="350" Name="DI_HearbeatTimeout" BufferOffset="350" Addr="350" Description=""/>
<DI_ITEM Index="351" Name="DI_MFC01Offline" BufferOffset="351" Addr="351" Description=""/>
<DI_ITEM Index="352" Name="DI_MFC02Offline" BufferOffset="352" Addr="352" Description=""/>
@ -225,15 +229,20 @@
<DI_ITEM Index="364" Name="DI_MFC14Offline" BufferOffset="364" Addr="364" Description=""/>
<DI_ITEM Index="365" Name="DI_MFC15Offline" BufferOffset="365" Addr="365" Description=""/>
<DI_ITEM Index="366" Name="DI_MFC16Offline" BufferOffset="366" Addr="366" Description=""/>
<DI_ITEM Index="369" Name="DI_MFC19Offline" BufferOffset="369" Addr="369" Description=""/>
<DI_ITEM Index="367" Name="DI_MFC17Offline" BufferOffset="367" Addr="367" Description=""/>
<DI_ITEM Index="368" Name="DI_MFC18Offline" BufferOffset="368" Addr="368" Description=""/>
<DI_ITEM Index="369" Name="DI_MFC19Offline" BufferOffset="369" Addr="369" Description=""/>
<DI_ITEM Index="370" Name="DI_MFC20Offline" BufferOffset="370" Addr="370" Description=""/>
<DI_ITEM Index="371" Name="DI_MFC21Offline" BufferOffset="371" Addr="371" Description=""/>
<DI_ITEM Index="372" Name="DI_MFC22Offline" BufferOffset="372" Addr="372" Description=""/>
<DI_ITEM Index="373" Name="DI_MFC23Offline" BufferOffset="373" Addr="373" Description=""/>
<DI_ITEM Index="374" Name="DI_MFC24Offline" BufferOffset="374" Addr="374" Description=""/>
<DI_ITEM Index="375" Name="DI_MFC25Offline" BufferOffset="375" Addr="375" Description=""/>
<DI_ITEM Index="376" Name="DI_MFC26Offline" BufferOffset="376" Addr="376" Description=""/>
<DI_ITEM Index="377" Name="DI_MFC27Offline" BufferOffset="377" Addr="377" Description=""/>
<DI_ITEM Index="378" Name="DI_MFC28Offline" BufferOffset="378" Addr="378" Description=""/>
<DI_ITEM Index="379" Name="DI_MFC29Offline" BufferOffset="379" Addr="379" Description=""/>
<DI_ITEM Index="380" Name="DI_MFC30Offline" BufferOffset="380" Addr="380" Description=""/>
<DI_ITEM Index="381" Name="DI_MFC31Offline" BufferOffset="381" Addr="381" Description=""/>
<DI_ITEM Index="382" Name="DI_MFC32Offline" BufferOffset="382" Addr="382" Description=""/>
<DI_ITEM Index="383" Name="DI_MFC33Offline" BufferOffset="383" Addr="383" Description=""/>
@ -241,6 +250,7 @@
<DI_ITEM Index="386" Name="DI_MFC36Offline" BufferOffset="386" Addr="386" Description=""/>
<DI_ITEM Index="387" Name="DI_MFC37Offline" BufferOffset="387" Addr="387" Description=""/>
<DI_ITEM Index="388" Name="DI_MFC38Offline" BufferOffset="388" Addr="388" Description=""/>
<DI_ITEM Index="389" Name="DI_MFC39Offline" BufferOffset="389" Addr="389" Description=""/>
<DI_ITEM Index="390" Name="DI_MFC40Offline" BufferOffset="390" Addr="390" Description=""/>
<DI_ITEM Index="391" Name="DI_PC01Offline" BufferOffset="391" Addr="391" Description=""/>
<DI_ITEM Index="392" Name="DI_PC02Offline" BufferOffset="392" Addr="392" Description=""/>
@ -249,6 +259,9 @@
<DI_ITEM Index="395" Name="DI_PC05Offline" BufferOffset="395" Addr="395" Description=""/>
<DI_ITEM Index="396" Name="DI_PC06Offline" BufferOffset="396" Addr="396" Description=""/>
<DI_ITEM Index="397" Name="DI_PC07Offline" BufferOffset="397" Addr="397" Description=""/>
<DI_ITEM Index="398" Name="DI_PC08Offline" BufferOffset="398" Addr="398" Description=""/>
<DI_ITEM Index="399" Name="DI_PC09Offline" BufferOffset="399" Addr="399" Description=""/>
<DI_ITEM Index="400" Name="DI_PC10Offline" BufferOffset="400" Addr="400" Description=""/>
<DI_ITEM Index="401" Name="DI_SHFlowTempU1OT" BufferOffset="401" Addr="401" Description="Visibility.Hidden"/>
<DI_ITEM Index="402" Name="DI_ChamTopFlowTempU2OT" BufferOffset="402" Addr="402" Description="Visibility.Hidden"/>
<DI_ITEM Index="403" Name="DI_ChamMiddleFlow1TempU3OT" BufferOffset="403" Addr="403" Description="Visibility.Hidden"/>
@ -408,6 +421,8 @@
<DO_ITEM Index="204" Name="DO_SideWallPowerRodFlowTemp" BufferOffset="204" Addr="204" Description=""/>
<DO_ITEM Index="205" Name="DO_TransformerFlowTemp" BufferOffset="205" Addr="205" Description=""/>
<DO_ITEM Index="206" Name="DO_ForelineColdTrapFlowTemp" BufferOffset="206" Addr="206" Description=""/>
<DO_ITEM Index="207" Name="DO_TMFlow1Temp" BufferOffset="207" Addr="207" Description=""/>
<DO_ITEM Index="208" Name="DO_TMFlow2Temp" BufferOffset="208" Addr="208" Description=""/>
<DO_ITEM Index="220" Name="DO_PyroCommunicationError" BufferOffset="220" Addr="220" Description=""/>
<DO_ITEM Index="230" Name="DO_PryoTempMaxDiff" BufferOffset="230" Addr="230" Description=""/>
<DO_ITEM Index="231" Name="DO_PryoTempRasisingFast" BufferOffset="231" Addr="231" Description=""/>

55
Modules/SicPM/PmDevices/IoPurgeArH2Switch.cs
View File

@ -75,27 +75,54 @@ namespace SicPM.Devices
switch (gas)
{
case ArH2Switch.Ar:
if (!_valve1.TurnValve(false, out reason))
return false;
//if (!_valve2.TurnValve(true, out reason))
// return false;
if (!_valve3.TurnValve(true, out reason))
return false;
_openValveInfo = 2;
{
if (!_valve3.TurnValve(true, out reason))
return false;
//如果已在此状态，则不执行该操作
if (!_diOpenValve1.Value && !_diOpenValve2.Value)
{
return true;
}
else
{
if (!_valve1.TurnValve(false, out reason))
return false;
//if (!_valve2.TurnValve(true, out reason))
// return false;
_openValveInfo = 2;
}
}
break;
case ArH2Switch.H2:
//if (!_valve1.TurnValve(true, out reason))
// return false;
if (!_valve2.TurnValve(false, out reason))
return false;
if (!_valve3.TurnValve(true, out reason))
return false;
_openValveInfo = 1;
{
if (!_valve3.TurnValve(true, out reason))
return false;
//如果已在此状态，则不执行该操作
if (_diOpenValve1.Value && _diOpenValve2.Value)
{
return true;
}
else
{
//if (!_valve1.TurnValve(true, out reason))
// return false;
if (!_valve2.TurnValve(false, out reason))
return false;
_openValveInfo = 1;
}
}
break;
default:
break;
}
_timer.Stop();
_timer.Start(2000);
return true;

78
Modules/SicPM/PmDevices/IoSHArH2Switch.cs
View File

@ -76,37 +76,63 @@ namespace SicPM.Devices
switch (gas)
{
case ArH2Switch.Ar:
if (!_valve1.TurnValve(false, out reason))
return false;
if (!_valve2.TurnValve(true, out reason))
return false;
if (!_valve3.TurnValve(true, out reason))
return false;
if (!_valve4.TurnValve(true, out reason))
return false;
if (!_valve5.TurnValve(false, out reason))
return false;
//if (!_valve6.TurnValve(true, out reason)) //放到定时器延迟处理，防止InterLock
// return false;
{
if (!_valve1.TurnValve(false, out reason))
return false;
if (!_valve2.TurnValve(true, out reason))
return false;
if (!_valve3.TurnValve(true, out reason))
return false;
if (!_valve4.TurnValve(true, out reason))
return false;
_openValveInfo = 2;
//如果已在此状态，则不执行该操作
if(!_diOpenValve5.Value && !_diOpenValve6.Value)
{
return true;
}
else
{
if (!_valve5.TurnValve(false, out reason))
return false;
//if (!_valve6.TurnValve(true, out reason))
// return false;
_openValveInfo = 2;
}
}
break;
case ArH2Switch.H2:
if (!_valve1.TurnValve(true, out reason))
return false;
if (!_valve2.TurnValve(false, out reason))
return false;
if (!_valve3.TurnValve(true, out reason))
return false;
if (!_valve4.TurnValve(true, out reason))
return false;
//if (!_valve5.TurnValve(true, out reason))//放到定时器延迟处理，防止InterLock
// return false;
if (!_valve6.TurnValve(false, out reason))
return false;
{
if (!_valve1.TurnValve(true, out reason))
return false;
if (!_valve2.TurnValve(false, out reason))
return false;
if (!_valve3.TurnValve(true, out reason))
return false;
if (!_valve4.TurnValve(true, out reason))
return false;
_openValveInfo = 1;
//如果已在此状态，则不执行该操作
if (_diOpenValve5.Value && _diOpenValve6.Value)
{
return true;
}
else
{
//if (!_valve5.TurnValve(true, out reason))
// return false;
if (!_valve6.TurnValve(false, out reason))
return false;
_openValveInfo = 2;
}
_openValveInfo = 1;
}
break;
default:
break;

25
SicRT/Config/System.sccfg
View File

@ -66,8 +66,6 @@
<configs name="PM">
<config default="30" name="HomeTimeout" description="Home Timeout" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
<!--<config default="true" name="IsAdsSimulatorMode" description="Is Ads Simulator Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
<config default="169.254.140.156.1.1,851" name="AdsIPAddr" description="Ads IP Address" max="" min="" paramter="" tag="" unit="" type="String" />-->
<config default="120" name="PrepareTransferTimeout" description="Prepare Transfer Timeout" max="10000" min="1" paramter="" tag="" unit="s" type="Integer" />
<config default="120" name="HandoffTransferTimeout" description="Handoff Transfer Timeout" max="10000" min="1" paramter="" tag="" unit="s" type="Integer" />
<config default="120" name="PostTransferTimeout" description="Post Transfer Timeout" max="10000" min="1" paramter="" tag="" unit="s" type="Integer" />
@ -1331,6 +1329,8 @@
</configs>
<configs name="TM">
<config default="300" name="ProcessPressure" description="传盘压力基准" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="20" name="VacuumPressureBaseOffset" description="传盘压力Offset" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="192.168.1.102,102" name="SiemensIPAddr" description="Siemens IP Address" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="S1500" name="SiemensType" description="Siemens Type" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="960" name="AtmPressureBase" description="判断大气压的时候，压力值需要大于该值" max="1200" min="0" paramter="" tag="" unit="mbar" type="Double" />
@ -1369,7 +1369,7 @@
<configs name="Pump">
<config default="200" name="SlowFastPumpSwitchPressure" description="抽气的时候，快慢阀门切换的压力值" max="300" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="200" name="SlowFastPumpSwitchPressure" description="抽气的时候，快慢阀门切换的压力值" max="600" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1" name="PumpBasePressure" description="抽气的底压" max="100" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="100" name="FastPumpTimeout" description="快抽抽气超时时间" max="1000" min="100" paramter="" tag="" unit="s" type="Integer" />
<config default="100" name="PumpSlowTimeout" description="慢抽抽气超时时间" max="1000" min="100" paramter="" tag="" unit="s" type="Integer" />
@ -1378,7 +1378,7 @@
</configs>
<configs name="Vent">
<config default="200" name="SlowFastVentSwitchPressure" description="充气的时候，快慢阀门切换的压力值" max="300" min="100" paramter="" tag="" unit="mbar" type="Double" />
<config default="200" name="SlowFastVentSwitchPressure" description="充气的时候，快慢阀门切换的压力值" max="600" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="980" name="VentBasePressure" description="充气的底压" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="100" name="FastVentTimeout" description="快充气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
<config default="100" name="SlowVentTimeout" description="慢充气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer" />
@ -1435,26 +1435,27 @@
<config default="true" name="NeedMfcVentLL" description="Need flow MFC for LL Pressure Balance" max="" min="" paramter="" tag="" unit="" type="Bool" />
<config default="true" name="NeedMfcVentPM1" description="Need flow MFC for PM1 Pressure Balance" max="" min="" paramter="" tag="" unit="" type="Bool" />
<config default="true" name="NeedMfcVentPM2" description="Need flow MFC for PM2 Pressure Balance" max="" min="" paramter="" tag="" unit="" type="Bool" />
<config default="100" name="MfcBalanceFlowLL" description="MfcBalance Flow LL" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="100" name="MfcBalanceFlowPM1" description="MfcBalance Flow PM1" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="100" name="MfcBalanceFlowPM2" description="MfcBalance Flow PM2" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="10" name="MfcBalanceFlowLL" description="MfcBalance Flow LL" max="1000" min="0" paramter="" tag="" unit="L" type="Double" />
<config default="10" name="MfcBalanceFlowPM1" description="MfcBalance Flow PM1" max="1000" min="0" paramter="" tag="" unit="L" type="Double" />
<config default="10" name="MfcBalanceFlowPM2" description="MfcBalance Flow PM2" max="1000" min="0" paramter="" tag="" unit="L" type="Double" />
<config default="300" name="VentTimeout" description="Vent Timeout" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
<config default="300" name="WaitPressureAboveSetPointTimeout" description="Wait Pressure AboveSetPointTimeout" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
</configs>
<configs name="MFC">
<configs name="Mfc40">
<config default="50" name="N2Scale" description="N2 Scale" max="200" min="0" paramter="" tag="" unit="sccm" type="Double" />
<config default="50" name="N2Scale" description="N2 Scale" max="200" min="0" paramter="" tag="" unit="L" type="Double" />
<config default="false" name="EnableAlarm" description="Enable Alarm" max="0" min="0" paramter="" tag="" unit="" type="Bool" visible="false"/>
<config default="120" name="AlarmTime" description="Alarm Time" max="200" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
<config default="1000" name="AlarmRange" description="Alarm Range" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false"/>
<config default="1000" name="AlarmRange" description="Alarm Range" max="1000" min="0" paramter="" tag="" unit="L" type="Double" visible="false"/>
<config default="120" name="WarningTime" description="Warning Time" max="200" min="0" paramter="" tag="" unit="s" type="Integer" visible="false"/>
<config default="1000" name="WarningRange" description="Warning Range" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" visible="false"/>
<config default="1000" name="WarningRange" description="Warning Range" max="1000" min="0" paramter="" tag="" unit="L" type="Double" visible="false"/>
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="200" min="0" paramter="" tag="" unit="" type="Double" />
<config default="H2N2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
<config default="10" name="StableTime" description="Stable Time" max="200" min="0" paramter="" tag="" unit="s" type="Double" visible="false"/>
</configs>
</configs>
<configs name="PT">
<configs name="PT3">
<config default="0" name="PT3_Offset" description="PT3 Offset值" max="100" min="-100" paramter="" tag="" unit="" type="Double" />
@ -1515,7 +1516,7 @@
<configs name="Pump">
<config default="100" name="SlowFastPumpSwitchPressure" description="抽气的时候，快慢阀门切换的压力值" max="300" min="100" paramter="" tag="" unit="mbar" type="Double" />
<config default="100" name="SlowFastPumpSwitchPressure" description="抽气的时候，快慢阀门切换的压力值" max="600" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="0" name="PumpBasePressure" description="抽气的底压" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double"/>
<config default="100" name="SlowPumpTimeout" description="慢抽抽气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer"/>
<config default="100" name="FastPumpTimeout" description="快抽抽气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer"/>
@ -1524,7 +1525,7 @@
</configs>
<configs name="Vent">
<config default="600" name="SlowFastVentSwitchPressure" description="充气的时候，快慢阀门切换的压力值" max="1000" min="0" paramter="" tag="" unit="mbar" type="Double"/>
<config default="600" name="SlowFastVentSwitchPressure" description="充气的时候，快慢阀门切换的压力值" max="600" min="0" paramter="" tag="" unit="mbar" type="Double"/>
<config default="980" name="VentBasePressure" description="充气的底压" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double"/>
<config default="100" name="SlowVentTimeout" description="慢充气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer"/>
<config default="100" name="FastVentTimeout" description="快充气超时时间" max="1000" min="0" paramter="" tag="" unit="s" type="Integer"/>

1
SicRT/Equipments/Systems/DeviceManager.cs
View File

@ -48,6 +48,7 @@ namespace SicRT.Instances
////var pmpumpportName = SC.GetStringValue($"PMDRYVacuumPump.Address");
////var pump = new DRYVacuumPump("PM1", "PMDRYVacuumPump", "PMDRYVacuumPump", pmpumpportName);
////pump.Initialize();
///
if (SC.GetConfigItem("AETemp.EnableDevice").BoolValue)
{

2
SicRT/Properties/AssemblyInfo.cs
View File

@ -51,6 +51,6 @@ using System.Windows;
// 可以指定所有值，也可以使用以下所示的 "*" 预置版本号和修订号
// 方法是按如下所示使用“*”: :
[assembly: AssemblyVersion("2.4.15.27")]
[assembly: AssemblyVersion("2.4.17.31")]
//[assembly: AssemblyFileVersion("2.4.14.26")]

37
SicRT/ReleaseNotes.md
View File

@ -1,6 +1,43 @@

# Sic 系统更新历史记录
## Version 2.4.17.31
**2023-03-27**
- Bug修复
-
- 新特性
- 新增传盘压力依ProcessPressure为基准功能
## Version 2.4.16.30
**2023-02-20**
- Bug修复
-PM DI_PowerRackWaterLeakSW DI-44多余，去除
- 新特性
- 无
## Version 2.4.16.29
**2023-02-17**
- Bug修复
-优化 Process中如果V64-V67阀如果已在Step设置状态，则不必再操作阀门
- 新特性
- 无
## Version 2.4.16.28
**2023-02-15**
- Bug修复
- 修改PM TM中的Alarm,IO
- 新特性
- 无
## Version 2.4.15.27
**2023-02-15**

2
SicSimulator/Config/_ioDefinePM.xml
View File

@ -403,6 +403,8 @@
<DO_ITEM Index="204" Name="DO_SideWallPowerRodFlowTemp" BufferOffset="204" Addr="204" Description=""/>
<DO_ITEM Index="205" Name="DO_TransformerFlowTemp" BufferOffset="205" Addr="205" Description=""/>
<DO_ITEM Index="206" Name="DO_ForelineColdTrapFlowTemp" BufferOffset="206" Addr="206" Description=""/>
<DO_ITEM Index="207" Name="DO_TMFlow1Temp" BufferOffset="207" Addr="207" Description=""/>
<DO_ITEM Index="208" Name="DO_TMFlow2Temp" BufferOffset="208" Addr="208" Description=""/>
<DO_ITEM Index="220" Name="DO_PyroCommunicationError" BufferOffset="220" Addr="220" Description=""/>
</Dig_Out>

2
SicSimulator/Instances/SimulatorSystem.cs
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@ -250,7 +250,7 @@ namespace SicSimulator.Instances
IO.DO[$"{mod}.DO_UPSEnable"].Value = true;
IO.DO[$"{mod}.DO_UPSLowBattery"].Value = true;
IO.DO[$"{mod}.DO_PSUEnable"].Value = true;
IO.DO[$"{mod}.DO_PSUEnable"].Value = false;
IO.DO[$"{mod}.DO_EPV1"].Value = true;
IO.DO[$"{mod}.DO_CleanRoutineSucceed"].Value = true;

2
SicUI/Properties/AssemblyInfo.cs
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@ -54,5 +54,5 @@ using System.Windows;
// You can specify all the values or you can default the Build and Revision Numbers
// by using the '*' as shown below:
[assembly: AssemblyVersion("2.4.15.27")]
[assembly: AssemblyVersion("2.4.17.31")]
//[assembly: AssemblyFileVersion("2.4.14.26")]