780 lines
71 KiB
XML
780 lines
71 KiB
XML
<?xml version="1.0"?>
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<IO_DEFINE xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
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<VersionID Name="V2.2.3.0"/>
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<Dig_In>
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<DI_ITEM Index="0" Name="DI_ChamLidClosed" BufferOffset="0" Addr="0" Description=""/>
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<DI_ITEM Index="1" Name="DI_TMSlitVlvClosed" BufferOffset="1" Addr="1" Description=""/>
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<DI_ITEM Index="3" Name="DI_ChamCabDoorClosed" BufferOffset="3" Addr="3" Description=""/>
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<DI_ITEM Index="4" Name="DI_PMATMSW" BufferOffset="4" Addr="4" Description=""/>
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<DI_ITEM Index="5" Name="DI_ChamAtSafeProcessPressSW" BufferOffset="5" Addr="5" Description=""/>
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<DI_ITEM Index="6" Name="DI_DORPressVacSW" BufferOffset="6" Addr="6" Description=""/>
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<DI_ITEM Index="7" Name="DI_DORPressATMSW" BufferOffset="7" Addr="7" Description=""/>
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<DI_ITEM Index="8" Name="DI_ChamMiddleFlow2SW" BufferOffset="8" Addr="8" Description=""/>
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<DI_ITEM Index="9" Name="DI_ChamPressAboveATMSW" BufferOffset="9" Addr="9" Description=""/>
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<DI_ITEM Index="10" Name="DI_HeaterTempUp1680CSW" BufferOffset="10" Addr="10" Description=""/>
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<DI_ITEM Index="11" Name="DI_HeaterTempBelow900CSW" BufferOffset="11" Addr="11" Description=""/>
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<DI_ITEM Index="12" Name="DI_ConfinementRingUp" BufferOffset="12" Addr="12" Description=""/>
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<DI_ITEM Index="13" Name="DI_SusceptorAtSafeSpeed" BufferOffset="13" Addr="13" Description=""/>
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<DI_ITEM Index="15" Name="DI_SHFlowSW" BufferOffset="15" Addr="15" Description=""/>
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<DI_ITEM Index="16" Name="DI_ChamTopFlowSW" BufferOffset="16" Addr="16" Description=""/>
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<DI_ITEM Index="17" Name="DI_ChamMiddleFlow1SW" BufferOffset="17" Addr="17" Description=""/>
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<DI_ITEM Index="18" Name="DI_ChamBottomFlowSW" BufferOffset="18" Addr="18" Description=""/>
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<DI_ITEM Index="19" Name="DI_BottomPlateFlowSW" BufferOffset="19" Addr="19" Description=""/>
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<DI_ITEM Index="20" Name="DI_PowerRod1FlowSW" BufferOffset="20" Addr="20" Description=""/>
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<DI_ITEM Index="21" Name="DI_PowerRod2FlowSW " BufferOffset="21" Addr="21" Description=""/>
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<DI_ITEM Index="22" Name="DI_ForelineFlowSW" BufferOffset="22" Addr="22" Description=""/>
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<DI_ITEM Index="23" Name="DI_InSituFlowSW" BufferOffset="23" Addr="23" Description=""/>
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<DI_ITEM Index="24" Name="DI_SideWallPowerRodFlowSW" BufferOffset="24" Addr="24" Description=""/>
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<DI_ITEM Index="25" Name="DI_TransformerFlowSW" BufferOffset="25" Addr="25" Description=""/>
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<DI_ITEM Index="26" Name="DI_TMFlow2SW" BufferOffset="26" Addr="26" Description=""/>
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<DI_ITEM Index="29" Name="DI_PowerRackExhaustDP" BufferOffset="29" Addr="29" Description=""/>
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<DI_ITEM Index="30" Name="DI_PMH2DetectorSW" BufferOffset="30" Addr="30" Description=""/>
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<DI_ITEM Index="31" Name="DI_GBHCLDetectorSW" BufferOffset="31" Addr="31" Description=""/>
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<DI_ITEM Index="32" Name="DI_GBExhaustDPSW" BufferOffset="32" Addr="32" Description=""/>
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<DI_ITEM Index="33" Name="DI_GBDoorClosed" BufferOffset="33" Addr="33" Description=""/>
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<DI_ITEM Index="34" Name="DI_TMN2FlowSW" BufferOffset="34" Addr="34" Description=""/>
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<DI_ITEM Index="35" Name="DI_GasPipeTempCtrlAlarm" BufferOffset="35" Addr="35" Description=""/>
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<DI_ITEM Index="36" Name="DI_DryPumpAlarm" BufferOffset="36" Addr="36" Description=""/>
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<DI_ITEM Index="38" Name="DI_PumpExhaustPressSW" BufferOffset="38" Addr="38" Description=""/>
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<DI_ITEM Index="39" Name="DI_PMAExhaustDPSW" BufferOffset="39" Addr="39" Description=""/>
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<DI_ITEM Index="41" Name="DI_ScrubberIntlkSW" BufferOffset="41" Addr="41" Description=""/>
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<DI_ITEM Index="42" Name="DI_FacilityIntlkSW" BufferOffset="42" Addr="42" Description=""/>
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<DI_ITEM Index="43" Name="DI_TCSAlarm" BufferOffset="43" Addr="43" Description=""/>
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<DI_ITEM Index="45" Name="DI_ServoDriverFaultSW" BufferOffset="45" Addr="45" Description=""/>
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<DI_ITEM Index="48" Name="DI_ReactorWaterLeakSW" BufferOffset="48" Addr="48" Description=""/>
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<DI_ITEM Index="49" Name="DI_ChamLidPushButtonRemote" BufferOffset="49" Addr="49" Description=""/>
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<DI_ITEM Index="50" Name="DI_ConfinementRingDown" BufferOffset="50" Addr="50" Description=""/>
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<DI_ITEM Index="51" Name="DI_TMFlow1SW" BufferOffset="51" Addr="51" Description=""/>
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<DI_ITEM Index="55" Name="DI_GN2InletPressSW" BufferOffset="55" Addr="55" Description=""/>
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<DI_ITEM Index="56" Name="DI_ArInletPressSW" BufferOffset="56" Addr="56" Description=""/>
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<DI_ITEM Index="57" Name="DI_H2PressureSW" BufferOffset="57" Addr="57" Description=""/>
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<DI_ITEM Index="59" Name="DI_GBH2DetectorSW" BufferOffset="59" Addr="59" Description=""/>
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<DI_ITEM Index="60" Name="DI_GBWaterLeakSW" BufferOffset="60" Addr="60" Description=""/>
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<DI_ITEM Index="65" Name="DI_DryPump1Running" BufferOffset="65" Addr="65" Description=""/>
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<DI_ITEM Index="67" Name="DI_DryPump1Warning" BufferOffset="67" Addr="67" Description=""/>
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<DI_ITEM Index="72" Name="DI_FacilityWarningSW" BufferOffset="72" Addr="72" Description=""/>
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<DI_ITEM Index="76" Name="DI_MainCBStatusSW" BufferOffset="76" Addr="76" Description=""/>
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<DI_ITEM Index="77" Name="DI_PowerRackWaterLeakSW" BufferOffset="77" Addr="77" Description=""/>
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<DI_ITEM Index="81" Name="DI_ProcessStopSW" BufferOffset="81" Addr="81" Description=""/>
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<DI_ITEM Index="96" Name="DI_ChamMoveBodyUp" BufferOffset="96" Addr="96" Description=""/>
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<DI_ITEM Index="97" Name="DI_ChamMoveBodyUpLatchFW" BufferOffset="97" Addr="97" Description=""/>
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<DI_ITEM Index="98" Name="DI_ChamMoveBodyDown" BufferOffset="98" Addr="98" Description=""/>
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<DI_ITEM Index="99" Name="DI_ChamMoveBodyFront" BufferOffset="99" Addr="99" Description=""/>
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<DI_ITEM Index="100" Name="DI_ChamMoveBodyEnd" BufferOffset="100" Addr="100" Description=""/>
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<DI_ITEM Index="101" Name="DI_ChamMoveBodyEndLatchBW" BufferOffset="101" Addr="101" Description=""/>
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<DI_ITEM Index="102" Name="DI_SHGasConnectorLoosen" BufferOffset="102" Addr="102" Description=""/>
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<DI_ITEM Index="103" Name="DI_SHGasConnectorTighten" BufferOffset="103" Addr="103" Description=""/>
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<DI_ITEM Index="104" Name="DI_SHLidLoosen1" BufferOffset="104" Addr="104" Description=""/>
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<DI_ITEM Index="105" Name="DI_SHLidTighten1" BufferOffset="105" Addr="105" Description=""/>
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<DI_ITEM Index="106" Name="DI_SHLidClosed" BufferOffset="106" Addr="106" Description=""/>
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<DI_ITEM Index="107" Name="DI_SHLidSwingLock" BufferOffset="107" Addr="107" Description=""/>
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<DI_ITEM Index="108" Name="DI_SHLidSwingUnlock" BufferOffset="108" Addr="108" Description=""/>
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<DI_ITEM Index="111" Name="DI_TopLidLoosen1" BufferOffset="111" Addr="111" Description=""/>
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<DI_ITEM Index="112" Name="DI_TopLidTighten1" BufferOffset="112" Addr="112" Description=""/>
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<DI_ITEM Index="113" Name="DI_TopLidClosed" BufferOffset="113" Addr="113" Description=""/>
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<DI_ITEM Index="114" Name="DI_TopLidSwingLock" BufferOffset="114" Addr="114" Description=""/>
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<DI_ITEM Index="115" Name="DI_TopLidSwingUnlock" BufferOffset="115" Addr="115" Description=""/>
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<DI_ITEM Index="118" Name="DI_MiddleLidLoosen1" BufferOffset="118" Addr="118" Description=""/>
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<DI_ITEM Index="119" Name="DI_MiddleLidTighten1" BufferOffset="119" Addr="119" Description=""/>
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<DI_ITEM Index="120" Name="DI_MiddleLidClosed" BufferOffset="120" Addr="120" Description=""/>
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<DI_ITEM Index="121" Name="DI_MiddleLidSwingLock" BufferOffset="121" Addr="121" Description=""/>
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<DI_ITEM Index="122" Name="DI_MiddleLidSwingUnlock" BufferOffset="122" Addr="122" Description=""/>
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<DI_ITEM Index="123" Name="DI_LocalChamMoveBodyUpSW" BufferOffset="123" Addr="123" Description=""/>
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<DI_ITEM Index="125" Name="DI_InletCoolingWaterPressHigh" BufferOffset="125" Addr="125" Description=""/>
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<DI_ITEM Index="126" Name="DI_InletCoolingWaterPressLow" BufferOffset="126" Addr="126" Description=""/>
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<DI_ITEM Index="159" Name="DI_PumpExhaustDPSW" BufferOffset="159" Addr="159" Description=""/>
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<DI_ITEM Index="160" Name="DI_TCSSupply_FB" BufferOffset="160" Addr="160" Description=""/>
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<DI_ITEM Index="161" Name="DI_H2Supply_FB" BufferOffset="161" Addr="161" Description="V31"/>
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<DI_ITEM Index="162" Name="DI_ArSupply_FB" BufferOffset="162" Addr="162" Description="V32"/>
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<DI_ITEM Index="163" Name="DI_H2ArSwitch_FB" BufferOffset="163" Addr="163" Description="V33"/>
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<DI_ITEM Index="165" Name="DI_H2ArLine1_FB" BufferOffset="165" Addr="165" Description="V35"/>
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<DI_ITEM Index="166" Name="DI_H2ArLine2_FB" BufferOffset="166" Addr="166" Description="V36"/>
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<DI_ITEM Index="167" Name="DI_N2Switch_FB" BufferOffset="167" Addr="167" Description="V37"/>
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<DI_ITEM Index="168" Name="DI_HighN2Flow_FB" BufferOffset="168" Addr="168" Description="V38"/>
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<DI_ITEM Index="169" Name="DI_DilutedN2RunVent_FB" BufferOffset="169" Addr="169" Description="V39"/>
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<DI_ITEM Index="170" Name="DI_HighN2RunVent_FB" BufferOffset="170" Addr="170" Description="V40"/>
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<DI_ITEM Index="171" Name="DI_TMARun_FB" BufferOffset="171" Addr="171" Description="V41"/>
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<DI_ITEM Index="172" Name="DI_TMAVent_FB" BufferOffset="172" Addr="172" Description="V42"/>
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<DI_ITEM Index="173" Name="DI_TMARelease_FB" BufferOffset="173" Addr="173" Description="V43"/>
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<DI_ITEM Index="175" Name="DI_TMABypass_FB" BufferOffset="175" Addr="175" Description="V45"/>
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<DI_ITEM Index="176" Name="DI_TMAVac_FB" BufferOffset="176" Addr="176" Description="V46"/>
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<DI_ITEM Index="178" Name="DI_TCSRelease_FB" BufferOffset="178" Addr="178" Description="V48"/>
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<DI_ITEM Index="179" Name="DI_TCSBypass_FB" BufferOffset="179" Addr="179" Description="V49"/>
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<DI_ITEM Index="180" Name="DI_TCSVac_FB" BufferOffset="180" Addr="180" Description="V50"/>
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<DI_ITEM Index="181" Name="DI_HCLSwitch_FB" BufferOffset="181" Addr="181" Description="V51"/>
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<DI_ITEM Index="182" Name="DI_SiH4Switch_FB" BufferOffset="182" Addr="182" Description="V52"/>
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<DI_ITEM Index="183" Name="DI_TCSRunVent_FB" BufferOffset="183" Addr="183" Description="V53"/>
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<DI_ITEM Index="184" Name="DI_HCLRunVent_FB" BufferOffset="184" Addr="184" Description="V54"/>
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<DI_ITEM Index="185" Name="DI_SiH4Run_FB" BufferOffset="185" Addr="185" Description="V55"/>
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<DI_ITEM Index="186" Name="DI_SiH4Vent_FB" BufferOffset="186" Addr="186" Description="V56"/>
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<DI_ITEM Index="188" Name="DI_C2H4Switch_FB" BufferOffset="188" Addr="188" Description="V58"/>
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<DI_ITEM Index="189" Name="DI_C2H4Run_FB" BufferOffset="189" Addr="189" Description="V59"/>
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<DI_ITEM Index="190" Name="DI_C2H4Vent_FB" BufferOffset="190" Addr="190" Description="V60"/>
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<DI_ITEM Index="192" Name="DI_DoppingFinal_FB" BufferOffset="192" Addr="192" Description="V61"/>
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<DI_ITEM Index="193" Name="DI_SilaneFinal_FB" BufferOffset="193" Addr="193" Description="V62"/>
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<DI_ITEM Index="194" Name="DI_PropaneFinal_FB" BufferOffset="194" Addr="194" Description="V63"/>
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<DI_ITEM Index="195" Name="DI_CarrierGasH2_FB" BufferOffset="195" Addr="195" Description="V64"/>
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<DI_ITEM Index="196" Name="DI_CarrierGasAr_FB" BufferOffset="196" Addr="196" Description="V65"/>
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<DI_ITEM Index="197" Name="DI_GasRingH2Purge_FB" BufferOffset="197" Addr="197" Description="V66"/>
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<DI_ITEM Index="198" Name="DI_GasRingArPurge_FB" BufferOffset="198" Addr="198" Description="V67"/>
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<DI_ITEM Index="199" Name="DI_ChamBodyArPurge_FB" BufferOffset="199" Addr="199" Description="V68"/>
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<DI_ITEM Index="200" Name="DI_SHPurgeFinal_FB" BufferOffset="200" Addr="200" Description="V87"/>
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<DI_ITEM Index="201" Name="DI_OuterGas_FB" BufferOffset="201" Addr="201" Description="V88"/>
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<DI_ITEM Index="202" Name="DI_ReactorLeakCheck_FB" BufferOffset="202" Addr="202" Description="V69"/>
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<DI_ITEM Index="203" Name="DI_TMPressBalance_FB" BufferOffset="203" Addr="203" Description="V70"/>
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<DI_ITEM Index="205" Name="DI_GasBoxVentPump_FB" BufferOffset="205" Addr="205" Description="V72"/>
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<DI_ITEM Index="206" Name="DI_MOVac_FB" BufferOffset="206" Addr="206" Description="V73"/>
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<DI_ITEM Index="207" Name="DI_GasboxLeakCheck_FB" BufferOffset="207" Addr="207" Description="V74"/>
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<DI_ITEM Index="208" Name="DI_DORVac_FB" BufferOffset="208" Addr="208" Description="V75"/>
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<DI_ITEM Index="209" Name="DI_DORRefill_FB" BufferOffset="209" Addr="209" Description="V76"/>
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<DI_ITEM Index="210" Name="DI_GasBoxVentBypass" BufferOffset="210" Addr="210" Description="V25"/>
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<DI_ITEM Index="212" Name="DI_PumpBypass_FB" BufferOffset="212" Addr="212" Description="V27"/>
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<DI_ITEM Index="213" Name="DI_ATMForLidOpen_FB" BufferOffset="213" Addr="213" Description="V28"/>
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<DI_ITEM Index="214" Name="DI_CarryGasFinal_FB" BufferOffset="214" Addr="214" Description="V97"/>
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<DI_ITEM Index="216" Name="DI_PSUEnable_FB" BufferOffset="216" Addr="216" Description=""/>
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<DI_ITEM Index="217" Name="DI_InnerHeaterEnable_FB" BufferOffset="217" Addr="217" Description=""/>
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<DI_ITEM Index="218" Name="DI_MiddleHeaterEnable_FB" BufferOffset="218" Addr="218" Description=""/>
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<DI_ITEM Index="219" Name="DI_OuterHeaterEnable_FB" BufferOffset="219" Addr="219" Description=""/>
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<DI_ITEM Index="220" Name="DI_LineHeaterEnable_FB" BufferOffset="220" Addr="220" Description=""/>
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<DI_ITEM Index="224" Name="DI_ChamMoveBodyUp_FB" BufferOffset="224" Addr="224" Description=""/>
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<DI_ITEM Index="225" Name="DI_ChamMoveBodyDown_FB" BufferOffset="225" Addr="225" Description=""/>
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<DI_ITEM Index="227" Name="DI_ChamMoveBodyForward_FB" BufferOffset="227" Addr="227" Description=""/>
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<DI_ITEM Index="228" Name="DI_ChamMoveBodyBackward_FB" BufferOffset="228" Addr="228" Description=""/>
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<DI_ITEM Index="229" Name="DI_SHGasConnectorLoosen_FB" BufferOffset="229" Addr="229" Description=""/>
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<DI_ITEM Index="230" Name="DI_SHGasConnectorTighten_FB" BufferOffset="230" Addr="230" Description=""/>
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<DI_ITEM Index="231" Name="DI_SHLidLoosen_FB" BufferOffset="231" Addr="231" Description=""/>
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<DI_ITEM Index="232" Name="DI_SHLidTighten_FB" BufferOffset="232" Addr="232" Description=""/>
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<DI_ITEM Index="233" Name="DI_SHLidSwingLock_FB" BufferOffset="233" Addr="233" Description=""/>
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<DI_ITEM Index="234" Name="DI_SHLidSwingUnlock_FB" BufferOffset="234" Addr="234" Description=""/>
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<DI_ITEM Index="235" Name="DI_ChamMoveBodyBrakerForward_FB" BufferOffset="235" Addr="235" Description=""/>
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<DI_ITEM Index="236" Name="DI_ChamMoveBodyBrakerBackward_FB" BufferOffset="236" Addr="236" Description=""/>
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<DI_ITEM Index="237" Name="DI_TopLidLoosen_FB" BufferOffset="237" Addr="237" Description=""/>
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<DI_ITEM Index="238" Name="DI_TopLidTighten_FB" BufferOffset="238" Addr="238" Description=""/>
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<DI_ITEM Index="239" Name="DI_TopLidSwingLock_FB" BufferOffset="239" Addr="239" Description=""/>
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<DI_ITEM Index="240" Name="DI_TopLidSwingUnlock_FB" BufferOffset="240" Addr="240" Description=""/>
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<DI_ITEM Index="243" Name="DI_MiddleLidLoosen_FB" BufferOffset="243" Addr="243" Description=""/>
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<DI_ITEM Index="244" Name="DI_MiddleLidTighten_FB" BufferOffset="244" Addr="244" Description=""/>
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<DI_ITEM Index="245" Name="DI_MiddleLidSwingLock_FB" BufferOffset="245" Addr="245" Description=""/>
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<DI_ITEM Index="246" Name="DI_MiddleLidSwingUnlock_FB" BufferOffset="246" Addr="246" Description=""/>
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<DI_ITEM Index="256" Name="DI_ConfinementRingUp_FB" BufferOffset="256" Addr="256" Description=""/>
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<DI_ITEM Index="257" Name="DI_ConfinementRingDown_FB" BufferOffset="257" Addr="257" Description=""/>
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<DI_ITEM Index="259" Name="DI_ChamMoveBodyUpBrake_FB" BufferOffset="259" Addr="259" Description=""/>
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<DI_ITEM Index="260" Name="DI_ChamMoveBodyUpDownEnable_FB" BufferOffset="260" Addr="260" Description=""/>
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<DI_ITEM Index="263" Name="DI_TowerGreen_FB" BufferOffset="263" Addr="263" Description=""/>
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<DI_ITEM Index="264" Name="DI_TowerYellow_FB" BufferOffset="264" Addr="264" Description=""/>
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<DI_ITEM Index="265" Name="DI_TowerRed_FB" BufferOffset="265" Addr="265" Description=""/>
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<DI_ITEM Index="266" Name="DI_Buzzer_FB" BufferOffset="266" Addr="266" Description=""/>
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<DI_ITEM Index="271" Name="DI_ConfinementRingDrvRst_FB" BufferOffset="271" Addr="271" Description=""/>
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<DI_ITEM Index="272" Name="DI_InnerGasFinal_FB" BufferOffset="272" Addr="272" Description=""/>
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<DI_ITEM Index="273" Name="DI_MiddleGasFinal_FB" BufferOffset="273" Addr="273" Description=""/>
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<DI_ITEM Index="274" Name="DI_OpticPurgeFinal_FB" BufferOffset="274" Addr="274" Description=""/>
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<DI_ITEM Index="275" Name="DI_GasRingPurgeFinal_FB" BufferOffset="275" Addr="275" Description=""/>
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<DI_ITEM Index="276" Name="DI_ChamberPurgeFinal_FB" BufferOffset="276" Addr="276" Description=""/>
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<DI_ITEM Index="277" Name="DI_RotationUpPurgeFinal_FB" BufferOffset="277" Addr="277" Description=""/>
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<DI_ITEM Index="278" Name="DI_ConfinementRingFinal_FB" BufferOffset="278" Addr="278" Description=""/>
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<DI_ITEM Index="279" Name="DI_HeaterWFPurgeFinal_FB" BufferOffset="279" Addr="279" Description=""/>
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<DI_ITEM Index="280" Name="DI_EPV1_FB" BufferOffset="280" Addr="280" Description=""/>
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<DI_ITEM Index="282" Name="DI_EPV2_FB" BufferOffset="282" Addr="282" Description=""/>
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<DI_ITEM Index="288" Name="DI_ServoReady" BufferOffset="288" Addr="288" Description=""/>
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<DI_ITEM Index="296" Name="DI_PSU1Status" BufferOffset="296" Addr="296" Description=""/>
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<DI_ITEM Index="297" Name="DI_PSU2Status" BufferOffset="297" Addr="297" Description=""/>
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<DI_ITEM Index="298" Name="DI_PSU3Status" BufferOffset="298" Addr="298" Description=""/>
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<DI_ITEM Index="302" Name="DI_SCR1Status" BufferOffset="302" Addr="302" Description=""/>
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<DI_ITEM Index="303" Name="DI_SCR2Status" BufferOffset="303" Addr="303" Description=""/>
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<DI_ITEM Index="304" Name="DI_SCR3Status" BufferOffset="304" Addr="304" Description=""/>
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<DI_ITEM Index="305" Name="DI_PSUInnerTempHAlarm" BufferOffset="305" Addr="305" Description=""/>
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<DI_ITEM Index="306" Name="DI_PSUMiddleTempHAlarm" BufferOffset="306" Addr="306" Description=""/>
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<DI_ITEM Index="307" Name="DI_PSUOuterTempHAlarm" BufferOffset="307" Addr="307" Description=""/>
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<DI_ITEM Index="308" Name="DI_PSUInnerTempLAlarm" BufferOffset="308" Addr="308" Description=""/>
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<DI_ITEM Index="309" Name="DI_PSUMiddleTempLAlarm" BufferOffset="309" Addr="309" Description=""/>
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<DI_ITEM Index="310" Name="DI_PSUOuterTempLAlarm" BufferOffset="310" Addr="310" Description=""/>
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<DI_ITEM Index="311" Name="DI_SCRUpperTempHAlarm" BufferOffset="311" Addr="311" Description=""/>
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<DI_ITEM Index="312" Name="DI_SCRMiddleTempHAlarm" BufferOffset="312" Addr="312" Description=""/>
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<DI_ITEM Index="313" Name="DI_SCRLowerTempHAlarm" BufferOffset="313" Addr="313" Description=""/>
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<DI_ITEM Index="314" Name="DI_SCRUpperTempLAlarm" BufferOffset="314" Addr="314" Description=""/>
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<DI_ITEM Index="315" Name="DI_SCRMiddleTempLAlarm" BufferOffset="315" Addr="315" Description=""/>
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<DI_ITEM Index="316" Name="DI_SCRLowerTempLAlarm" BufferOffset="316" Addr="316" Description=""/>
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<DI_ITEM Index="320" Name="DI_PSU1Alarm" BufferOffset="320" Addr="320" Description=""/>
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<DI_ITEM Index="321" Name="DI_PSU2Alarm" BufferOffset="321" Addr="321" Description=""/>
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<DI_ITEM Index="322" Name="DI_PSU3Alarm" BufferOffset="322" Addr="322" Description=""/>
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<DI_ITEM Index="323" Name="DI_SCR1Alarm" BufferOffset="323" Addr="323" Description=""/>
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<DI_ITEM Index="324" Name="DI_SCR2Alarm" BufferOffset="324" Addr="324" Description=""/>
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<DI_ITEM Index="325" Name="DI_SCR3Alarm" BufferOffset="325" Addr="325" Description=""/>
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<DI_ITEM Index="328" Name="DI_PSUTCDPCommunicationError" BufferOffset="328" Addr="328" Description=""/>
|
|
<DI_ITEM Index="329" Name="DI_SCRTCDPCommunicationError" BufferOffset="329" Addr="329" Description=""/>
|
|
<DI_ITEM Index="330" Name="DI_PSU1dpCommunicationError" BufferOffset="330" Addr="330" Description=""/>
|
|
<DI_ITEM Index="331" Name="DI_PSU2dpCommunicationError" BufferOffset="331" Addr="331" Description=""/>
|
|
<DI_ITEM Index="332" Name="DI_PSU3dpCommunicationError" BufferOffset="332" Addr="332" Description=""/>
|
|
<DI_ITEM Index="333" Name="DI_SCRdpCommunicationError" BufferOffset="333" Addr="333" Description=""/>
|
|
<DI_ITEM Index="344" Name="DI_InletTotalTempHigh" BufferOffset="344" Addr="344" Description=""/>
|
|
<DI_ITEM Index="350" Name="DI_HearbeatTimeout" BufferOffset="350" Addr="350" Description=""/>
|
|
<DI_ITEM Index="351" Name="DI_MFC01Offline" BufferOffset="351" Addr="351" Description=""/>
|
|
<DI_ITEM Index="352" Name="DI_MFC02Offline" BufferOffset="352" Addr="352" Description=""/>
|
|
<DI_ITEM Index="353" Name="DI_MFC03Offline" BufferOffset="353" Addr="353" Description=""/>
|
|
<DI_ITEM Index="354" Name="DI_MFC04Offline" BufferOffset="354" Addr="354" Description=""/>
|
|
<DI_ITEM Index="355" Name="DI_MFC05Offline" BufferOffset="355" Addr="355" Description=""/>
|
|
<DI_ITEM Index="356" Name="DI_MFC06Offline" BufferOffset="356" Addr="356" Description=""/>
|
|
<DI_ITEM Index="357" Name="DI_MFC07Offline" BufferOffset="357" Addr="357" Description=""/>
|
|
<DI_ITEM Index="358" Name="DI_MFC08Offline" BufferOffset="358" Addr="358" Description=""/>
|
|
<DI_ITEM Index="359" Name="DI_MFC09Offline" BufferOffset="359" Addr="359" Description=""/>
|
|
<DI_ITEM Index="360" Name="DI_MFC10Offline" BufferOffset="360" Addr="360" Description=""/>
|
|
<DI_ITEM Index="361" Name="DI_MFC11Offline" BufferOffset="361" Addr="361" Description=""/>
|
|
<DI_ITEM Index="362" Name="DI_MFC12Offline" BufferOffset="362" Addr="362" Description=""/>
|
|
<DI_ITEM Index="363" Name="DI_MFC13Offline" BufferOffset="363" Addr="363" Description=""/>
|
|
<DI_ITEM Index="364" Name="DI_MFC14Offline" BufferOffset="364" Addr="364" Description=""/>
|
|
<DI_ITEM Index="365" Name="DI_MFC15Offline" BufferOffset="365" Addr="365" Description=""/>
|
|
<DI_ITEM Index="366" Name="DI_MFC16Offline" BufferOffset="366" Addr="366" Description=""/>
|
|
<DI_ITEM Index="369" Name="DI_MFC19Offline" BufferOffset="369" Addr="369" Description=""/>
|
|
<DI_ITEM Index="370" Name="DI_MFC20Offline" BufferOffset="370" Addr="370" Description=""/>
|
|
<DI_ITEM Index="372" Name="DI_MFC22Offline" BufferOffset="372" Addr="372" Description=""/>
|
|
<DI_ITEM Index="373" Name="DI_MFC23Offline" BufferOffset="373" Addr="373" Description=""/>
|
|
<DI_ITEM Index="375" Name="DI_MFC25Offline" BufferOffset="375" Addr="375" Description=""/>
|
|
<DI_ITEM Index="376" Name="DI_MFC26Offline" BufferOffset="376" Addr="376" Description=""/>
|
|
<DI_ITEM Index="377" Name="DI_MFC27Offline" BufferOffset="377" Addr="377" Description=""/>
|
|
<DI_ITEM Index="378" Name="DI_MFC28Offline" BufferOffset="378" Addr="378" Description=""/>
|
|
<DI_ITEM Index="379" Name="DI_MFC29Offline" BufferOffset="379" Addr="379" Description=""/>
|
|
<DI_ITEM Index="381" Name="DI_MFC31Offline" BufferOffset="381" Addr="381" Description=""/>
|
|
<DI_ITEM Index="382" Name="DI_MFC32Offline" BufferOffset="382" Addr="382" Description=""/>
|
|
<DI_ITEM Index="383" Name="DI_MFC33Offline" BufferOffset="383" Addr="383" Description=""/>
|
|
<DI_ITEM Index="385" Name="DI_MFC35Offline" BufferOffset="385" Addr="385" Description=""/>
|
|
<DI_ITEM Index="386" Name="DI_MFC36Offline" BufferOffset="386" Addr="386" Description=""/>
|
|
<DI_ITEM Index="387" Name="DI_MFC37Offline" BufferOffset="387" Addr="387" Description=""/>
|
|
<DI_ITEM Index="388" Name="DI_MFC38Offline" BufferOffset="388" Addr="388" Description=""/>
|
|
<DI_ITEM Index="391" Name="DI_PC01Offline" BufferOffset="391" Addr="391" Description=""/>
|
|
<DI_ITEM Index="392" Name="DI_PC02Offline" BufferOffset="392" Addr="392" Description=""/>
|
|
<DI_ITEM Index="393" Name="DI_PC03Offline" BufferOffset="393" Addr="393" Description=""/>
|
|
<DI_ITEM Index="394" Name="DI_PC04Offline" BufferOffset="394" Addr="394" Description=""/>
|
|
<DI_ITEM Index="395" Name="DI_PC05Offline" BufferOffset="395" Addr="395" Description=""/>
|
|
<DI_ITEM Index="396" Name="DI_PC06Offline" BufferOffset="396" Addr="396" Description=""/>
|
|
<DI_ITEM Index="397" Name="DI_PC07Offline" BufferOffset="397" Addr="397" Description=""/>
|
|
<DI_ITEM Index="401" Name="DI_SHFlowTempU1OT" BufferOffset="401" Addr="401" Description=""/>
|
|
<DI_ITEM Index="402" Name="DI_ChamTopFlowTempU2OT" BufferOffset="402" Addr="402" Description=""/>
|
|
<DI_ITEM Index="403" Name="DI_ChamMiddleFlow1TempU3OT" BufferOffset="403" Addr="403" Description=""/>
|
|
<DI_ITEM Index="404" Name="DI_ChamMiddleFlow2TempU4OT" BufferOffset="404" Addr="404" Description=""/>
|
|
<DI_ITEM Index="405" Name="DI_ChamBottomFlowTempU5OT" BufferOffset="405" Addr="405" Description=""/>
|
|
<DI_ITEM Index="406" Name="DI_BottomPlateFlowTempU6OT" BufferOffset="406" Addr="406" Description=""/>
|
|
<DI_ITEM Index="407" Name="DI_PowerRodFlow1TempU7OT" BufferOffset="407" Addr="407" Description=""/>
|
|
<DI_ITEM Index="408" Name="DI_PowerRodFlow2TempU8OT" BufferOffset="408" Addr="408" Description=""/>
|
|
<DI_ITEM Index="409" Name="DI_ForelineColdTrapFlowTempU9OT" BufferOffset="409" Addr="409" Description=""/>
|
|
<DI_ITEM Index="410" Name="DI_InSituFlowTempU10OT" BufferOffset="410" Addr="410" Description=""/>
|
|
<DI_ITEM Index="411" Name="DI_SideWallPowerRodFlowTempU11OT" BufferOffset="411" Addr="411" Description=""/>
|
|
<DI_ITEM Index="412" Name="DI_TransformerFlowTempU14OT" BufferOffset="412" Addr="412" Description=""/>
|
|
<DI_ITEM Index="413" Name="DI_TMFlow1TempU12OT" BufferOffset="413" Addr="413" Description=""/>
|
|
<DI_ITEM Index="414" Name="DI_TMFlow2TempU13OT" BufferOffset="414" Addr="414" Description=""/>
|
|
|
|
</Dig_In>
|
|
<Dig_Out>
|
|
<DO_ITEM Index="1" Name="DO_H2Supply" BufferOffset="1" Addr="1" Description="V31"/>
|
|
<DO_ITEM Index="2" Name="DO_ArSupply" BufferOffset="2" Addr="2" Description="V32"/>
|
|
<DO_ITEM Index="3" Name="DO_SHH2ArSwitch" BufferOffset="3" Addr="3" Description="V33"/>
|
|
<DO_ITEM Index="5" Name="DO_H2ArLine1" BufferOffset="5" Addr="5" Description="V35"/>
|
|
<DO_ITEM Index="6" Name="DO_H2ArLine2" BufferOffset="6" Addr="6" Description="V36"/>
|
|
<DO_ITEM Index="7" Name="DO_N2Switch" BufferOffset="7" Addr="7" Description="V37"/>
|
|
<DO_ITEM Index="8" Name="DO_HighN2Flow" BufferOffset="8" Addr="8" Description="V38"/>
|
|
<DO_ITEM Index="9" Name="DO_DilutedN2RunVent" BufferOffset="9" Addr="9" Description="V39"/>
|
|
<DO_ITEM Index="10" Name="DO_HighN2RunVent" BufferOffset="10" Addr="10" Description="V40"/>
|
|
<DO_ITEM Index="11" Name="DO_TMARun" BufferOffset="11" Addr="11" Description="V41"/>
|
|
<DO_ITEM Index="12" Name="DO_TMAVent" BufferOffset="12" Addr="12" Description="V42"/>
|
|
<DO_ITEM Index="13" Name="DO_TMARelease" BufferOffset="13" Addr="13" Description="V43"/>
|
|
<DO_ITEM Index="15" Name="DO_TMABypass" BufferOffset="15" Addr="15" Description="V45"/>
|
|
<DO_ITEM Index="16" Name="DO_TMAVac" BufferOffset="16" Addr="16" Description="V46"/>
|
|
<DO_ITEM Index="18" Name="DO_TCSRelease" BufferOffset="18" Addr="18" Description="V48"/>
|
|
<DO_ITEM Index="19" Name="DO_TCSBypass" BufferOffset="19" Addr="19" Description="V49"/>
|
|
<DO_ITEM Index="20" Name="DO_TCSVac" BufferOffset="20" Addr="20" Description="V50"/>
|
|
<DO_ITEM Index="21" Name="DO_HCLSwitch" BufferOffset="21" Addr="21" Description="V51"/>
|
|
<DO_ITEM Index="22" Name="DO_SiH4Switch" BufferOffset="22" Addr="22" Description="V52"/>
|
|
<DO_ITEM Index="23" Name="DO_TCSRunVent" BufferOffset="23" Addr="23" Description="V53"/>
|
|
<DO_ITEM Index="24" Name="DO_HCLRunVent" BufferOffset="24" Addr="24" Description="V54"/>
|
|
<DO_ITEM Index="25" Name="DO_SiH4Run" BufferOffset="25" Addr="25" Description="V55"/>
|
|
<DO_ITEM Index="26" Name="DO_SiH4Vent" BufferOffset="26" Addr="26" Description="V56"/>
|
|
<DO_ITEM Index="28" Name="DO_C2H4Switch" BufferOffset="28" Addr="28" Description="V58"/>
|
|
<DO_ITEM Index="29" Name="DO_C2H4Run" BufferOffset="29" Addr="29" Description="V59"/>
|
|
<DO_ITEM Index="30" Name="DO_C2H4Vent" BufferOffset="30" Addr="30" Description="V60"/>
|
|
<DO_ITEM Index="32" Name="DO_DoppingFinal" BufferOffset="32" Addr="32" Description="V61"/>
|
|
<DO_ITEM Index="33" Name="DO_SilaneFinal" BufferOffset="33" Addr="33" Description="V62"/>
|
|
<DO_ITEM Index="34" Name="DO_PropaneFinal" BufferOffset="34" Addr="34" Description="V63"/>
|
|
<DO_ITEM Index="35" Name="DO_CarrierGasH2" BufferOffset="35" Addr="35" Description="V64"/>
|
|
<DO_ITEM Index="36" Name="DO_CarrierGasAr" BufferOffset="36" Addr="36" Description="V65"/>
|
|
<DO_ITEM Index="37" Name="DO_GasRingH2Purge" BufferOffset="37" Addr="37" Description="V66"/>
|
|
<DO_ITEM Index="38" Name="DO_GasRingArPurge" BufferOffset="38" Addr="38" Description="V67"/>
|
|
<DO_ITEM Index="39" Name="DO_ChamBodyArPurge" BufferOffset="39" Addr="39" Description="V68"/>
|
|
<DO_ITEM Index="40" Name="DO_SHPurgeFinal" BufferOffset="40" Addr="40" Description="V87"/>
|
|
<DO_ITEM Index="41" Name="DO_OuterGasFinal" BufferOffset="41" Addr="41" Description="V88"/>
|
|
<DO_ITEM Index="42" Name="DO_ReactorLeakCheck" BufferOffset="42" Addr="42" Description="V69"/>
|
|
<DO_ITEM Index="43" Name="DO_TMPressBalance" BufferOffset="43" Addr="43" Description="V70"/>
|
|
<DO_ITEM Index="45" Name="DO_GasBoxVentPump" BufferOffset="45" Addr="45" Description="V72"/>
|
|
<DO_ITEM Index="46" Name="DO_MOVac" BufferOffset="46" Addr="46" Description="V73"/>
|
|
<DO_ITEM Index="47" Name="DO_GasboxLeakCheck" BufferOffset="47" Addr="47" Description="V74"/>
|
|
<DO_ITEM Index="48" Name="DO_DORVac" BufferOffset="48" Addr="48" Description="V75"/>
|
|
<DO_ITEM Index="49" Name="DO_DORRefill" BufferOffset="49" Addr="49" Description="V76"/>
|
|
<DO_ITEM Index="50" Name="DO_GasBoxVentBypass" BufferOffset="50" Addr="50" Description="V25"/>
|
|
<DO_ITEM Index="52" Name="DO_PumpBypass" BufferOffset="52" Addr="52" Description="V27"/>
|
|
<DO_ITEM Index="53" Name="DO_ATMForLidOpen" BufferOffset="53" Addr="53" Description="V28"/>
|
|
<DO_ITEM Index="54" Name="DO_CarryGasFinal" BufferOffset="54" Addr="54" Description="V97"/>
|
|
<DO_ITEM Index="56" Name="DO_PSUEnable" BufferOffset="56" Addr="56" Description=""/>
|
|
<DO_ITEM Index="57" Name="DO_InnerHeaterEnable" BufferOffset="57" Addr="57" Description=""/>
|
|
<DO_ITEM Index="58" Name="DO_MiddleHeaterEnable" BufferOffset="58" Addr="58" Description=""/>
|
|
<DO_ITEM Index="59" Name="DO_OuterHeaterEnable" BufferOffset="59" Addr="59" Description=""/>
|
|
<DO_ITEM Index="64" Name="DO_ChamMoveBodyUp" BufferOffset="64" Addr="64" Description=""/>
|
|
<DO_ITEM Index="65" Name="DO_ChamMoveBodyDown" BufferOffset="65" Addr="65" Description=""/>
|
|
<DO_ITEM Index="67" Name="DO_ChamMoveBodyForward" BufferOffset="67" Addr="67" Description=""/>
|
|
<DO_ITEM Index="68" Name="DO_ChamMoveBodyBackward" BufferOffset="68" Addr="68" Description=""/>
|
|
<DO_ITEM Index="69" Name="DO_SHGasConnectorLoosen" BufferOffset="69" Addr="69" Description=""/>
|
|
<DO_ITEM Index="70" Name="DO_SHGasConnectorTighten" BufferOffset="70" Addr="70" Description=""/>
|
|
<DO_ITEM Index="71" Name="DO_SHLidLoosen" BufferOffset="71" Addr="71" Description=""/>
|
|
<DO_ITEM Index="72" Name="DO_SHLidTighten" BufferOffset="72" Addr="72" Description=""/>
|
|
<DO_ITEM Index="73" Name="DO_SHLidSwingLock" BufferOffset="73" Addr="73" Description=""/>
|
|
<DO_ITEM Index="74" Name="DO_SHLidSwingUnlock" BufferOffset="74" Addr="74" Description=""/>
|
|
<DO_ITEM Index="75" Name="DO_ChamMoveBodyBrakerForward" BufferOffset="75" Addr="75" Description=""/>
|
|
<DO_ITEM Index="76" Name="DO_ChamMoveBodyBrakerBackward" BufferOffset="76" Addr="76" Description=""/>
|
|
<DO_ITEM Index="77" Name="DO_TopLidLoosen" BufferOffset="77" Addr="77" Description=""/>
|
|
<DO_ITEM Index="78" Name="DO_TopLidTighten" BufferOffset="78" Addr="78" Description=""/>
|
|
<DO_ITEM Index="79" Name="DO_TopLidSwingLock" BufferOffset="79" Addr="79" Description=""/>
|
|
<DO_ITEM Index="80" Name="DO_TopLidSwingUnlock" BufferOffset="80" Addr="80" Description=""/>
|
|
<DO_ITEM Index="83" Name="DO_MiddleLidLoosen" BufferOffset="83" Addr="83" Description=""/>
|
|
<DO_ITEM Index="84" Name="DO_MiddleLidTighten" BufferOffset="84" Addr="84" Description=""/>
|
|
<DO_ITEM Index="85" Name="DO_MiddleLidSwingLock" BufferOffset="85" Addr="85" Description=""/>
|
|
<DO_ITEM Index="86" Name="DO_MiddleLidSwingUnlock" BufferOffset="86" Addr="86" Description=""/>
|
|
<DO_ITEM Index="96" Name="DO_ConfinementRingUp" BufferOffset="96" Addr="96" Description=""/>
|
|
<DO_ITEM Index="97" Name="DO_ConfinementRingDown" BufferOffset="97" Addr="97" Description=""/>
|
|
<DO_ITEM Index="99" Name="DO_ChamMoveBodyUpAirBrake" BufferOffset="99" Addr="99" Description=""/>
|
|
<DO_ITEM Index="100" Name="DO_ChamMoveBodyUpDownEnable" BufferOffset="100" Addr="100" Description=""/>
|
|
<DO_ITEM Index="103" Name="DO_TowerGreen" BufferOffset="103" Addr="103" Description=""/>
|
|
<DO_ITEM Index="104" Name="DO_TowerYellow" BufferOffset="104" Addr="104" Description=""/>
|
|
<DO_ITEM Index="105" Name="DO_TowerRed" BufferOffset="105" Addr="105" Description=""/>
|
|
<DO_ITEM Index="106" Name="DO_Buzzer" BufferOffset="106" Addr="106" Description=""/>
|
|
<DO_ITEM Index="110" Name="DO_TCSFluidInfusion" BufferOffset="110" Addr="110" Description=""/>
|
|
<DO_ITEM Index="111" Name="DO_ConfinementRingDrvRst" BufferOffset="111" Addr="111" Description=""/>
|
|
<DO_ITEM Index="112" Name="DO_InnerGasFinal" BufferOffset="112" Addr="112" Description="V89"/>
|
|
<DO_ITEM Index="113" Name="DO_MiddleGasFinal" BufferOffset="113" Addr="113" Description="V90"/>
|
|
<DO_ITEM Index="114" Name="DO_OpticPurgeFinal" BufferOffset="114" Addr="114" Description="V91"/>
|
|
<DO_ITEM Index="115" Name="DO_GasRingPurgeFinal" BufferOffset="115" Addr="115" Description="V92"/>
|
|
<DO_ITEM Index="116" Name="DO_ChamberPurgeFinal" BufferOffset="116" Addr="116" Description="V93"/>
|
|
<DO_ITEM Index="117" Name="DO_RotationUpPurgeFinal" BufferOffset="117" Addr="117" Description="V94"/>
|
|
<DO_ITEM Index="118" Name="DO_ConfinementRingFinal" BufferOffset="118" Addr="118" Description="V95"/>
|
|
<DO_ITEM Index="119" Name="DO_HeaterWFFinal" BufferOffset="119" Addr="119" Description="V96"/>
|
|
<DO_ITEM Index="120" Name="DO_EPV1" BufferOffset="120" Addr="120" Description="EPV1"/>
|
|
<DO_ITEM Index="122" Name="DO_EPV2" BufferOffset="122" Addr="122" Description="EPV2"/>
|
|
<DO_ITEM Index="128" Name="DO_ServoEnable" BufferOffset="128" Addr="128" Description=""/>
|
|
<DO_ITEM Index="129" Name="DO_ServoInitial" BufferOffset="129" Addr="129" Description=""/>
|
|
<DO_ITEM Index="130" Name="DO_ServoReset" BufferOffset="130" Addr="130" Description=""/>
|
|
<DO_ITEM Index="131" Name="DO_PSU1Enable" BufferOffset="131" Addr="131" Description=""/>
|
|
<DO_ITEM Index="132" Name="DO_PSU2Enable" BufferOffset="132" Addr="132" Description=""/>
|
|
<DO_ITEM Index="133" Name="DO_PSU3Enable" BufferOffset="133" Addr="133" Description=""/>
|
|
<DO_ITEM Index="134" Name="DO_SCR1Enable" BufferOffset="134" Addr="134" Description=""/>
|
|
<DO_ITEM Index="135" Name="DO_SCR2Enable" BufferOffset="135" Addr="135" Description=""/>
|
|
<DO_ITEM Index="136" Name="DO_SCR3Enable" BufferOffset="136" Addr="136" Description=""/>
|
|
<DO_ITEM Index="140" Name="DO_TVEnable" BufferOffset="140" Addr="140" Description=""/>
|
|
<DO_ITEM Index="144" Name="DO_PSU1Reset" BufferOffset="144" Addr="144" Description=""/>
|
|
<DO_ITEM Index="145" Name="DO_PSU2Reset" BufferOffset="145" Addr="145" Description=""/>
|
|
<DO_ITEM Index="146" Name="DO_PSU3Reset" BufferOffset="146" Addr="146" Description=""/>
|
|
<DO_ITEM Index="147" Name="DO_SCR1Reset" BufferOffset="147" Addr="147" Description=""/>
|
|
<DO_ITEM Index="148" Name="DO_SCR2Reset" BufferOffset="148" Addr="148" Description=""/>
|
|
<DO_ITEM Index="149" Name="DO_SCR3Reset" BufferOffset="149" Addr="149" Description=""/>
|
|
<DO_ITEM Index="152" Name="DO_PM1SlitVlvClosed" BufferOffset="152" Addr="152" Description=""/>
|
|
<DO_ITEM Index="170" Name="DO_ReactorATMTransferReady" BufferOffset="170" Addr="170" Description=""/>
|
|
<DO_ITEM Index="171" Name="DO_ReactorVACTransferReady" BufferOffset="171" Addr="171" Description=""/>
|
|
<DO_ITEM Index="172" Name="DO_PurgeRoutineSucceed" BufferOffset="172" Addr="172" Description=""/>
|
|
<DO_ITEM Index="173" Name="DO_CleanRoutineSucceed" BufferOffset="173" Addr="173" Description=""/>
|
|
<DO_ITEM Index="174" Name="DO_ProcessRunning" BufferOffset="174" Addr="174" Description=""/>
|
|
<DO_ITEM Index="175" Name="DO_PreprocessRunning" BufferOffset="175" Addr="175" Description=""/>
|
|
<DO_ITEM Index="176" Name="DO_CyclePurgeRoutineRunning" BufferOffset="176" Addr="176" Description=""/>
|
|
<DO_ITEM Index="177" Name="DO_ExchangeMoRoutineRunning" BufferOffset="177" Addr="177" Description=""/>
|
|
<DO_ITEM Index="178" Name="DO_CleanRoutineRunning" BufferOffset="178" Addr="178" Description=""/>
|
|
<DO_ITEM Index="179" Name="DO_PurgeRoutineRunning" BufferOffset="179" Addr="179" Description=""/>
|
|
<DO_ITEM Index="180" Name="DO_PumpRoutineRunning" BufferOffset="180" Addr="180" Description=""/>
|
|
<DO_ITEM Index="181" Name="DO_VentRoutineRunning" BufferOffset="181" Addr="181" Description=""/>
|
|
<DO_ITEM Index="182" Name="DO_VACTransferAllowed" BufferOffset="182" Addr="182" Description=""/>
|
|
<DO_ITEM Index="183" Name="DO_ATMTransferAllowed" BufferOffset="183" Addr="183" Description=""/>
|
|
<DO_ITEM Index="184" Name="DO_PostProcessRunning" BufferOffset="184" Addr="184" Description=""/>
|
|
<DO_ITEM Index="190" Name="DO_ConfinementRingUpDisable" BufferOffset="190" Addr="190" Description=""/>
|
|
<DO_ITEM Index="192" Name="DO_ReactorPressRisingRateFast" BufferOffset="192" Addr="192" Description=""/>
|
|
<DO_ITEM Index="193" Name="DO_UPSEnable" BufferOffset="193" Addr="193" Description=""/>
|
|
<DO_ITEM Index="194" Name="DO_UPSLowBattery" BufferOffset="194" Addr="194" Description=""/>
|
|
<DO_ITEM Index="195" Name="DO_ChamMiddleFlow2Temp" BufferOffset="195" Addr="195" Description=""/>
|
|
<DO_ITEM Index="196" Name="DO_SHFlowTemp" BufferOffset="196" Addr="196" Description=""/>
|
|
<DO_ITEM Index="197" Name="DO_ChamTopFlowTemp" BufferOffset="197" Addr="197" Description=""/>
|
|
<DO_ITEM Index="198" Name="DO_ChamMiddleFlow1Temp" BufferOffset="198" Addr="198" Description=""/>
|
|
<DO_ITEM Index="199" Name="DO_ChamBottomFlowTemp" BufferOffset="199" Addr="199" Description=""/>
|
|
<DO_ITEM Index="200" Name="DO_BottomPlateFlowTemp" BufferOffset="200" Addr="200" Description=""/>
|
|
<DO_ITEM Index="201" Name="DO_PowerRod1FlowTemp" BufferOffset="201" Addr="201" Description=""/>
|
|
<DO_ITEM Index="202" Name="DO_PowerRod2FlowTemp" BufferOffset="202" Addr="202" Description=""/>
|
|
<DO_ITEM Index="203" Name="DO_InSituFlowTemp" BufferOffset="203" Addr="203" Description=""/>
|
|
<DO_ITEM Index="204" Name="DO_SideWallPowerRodFlowTemp" BufferOffset="204" Addr="204" Description=""/>
|
|
<DO_ITEM Index="205" Name="DO_TransformerFlowTemp" BufferOffset="205" Addr="205" Description=""/>
|
|
<DO_ITEM Index="206" Name="DO_ForelineColdTrapFlowTemp" BufferOffset="206" Addr="206" Description=""/>
|
|
<DO_ITEM Index="207" Name="DO_TMFlow1Temp" BufferOffset="207" Addr="207" Description=""/>
|
|
<DO_ITEM Index="208" Name="DO_TMFlow2Temp" BufferOffset="208" Addr="208" Description=""/>
|
|
<DO_ITEM Index="220" Name="DO_PyroCommunicationError" BufferOffset="220" Addr="220" Description=""/>
|
|
|
|
</Dig_Out>
|
|
<Ana_In>
|
|
<AI_ITEM Index="0" Name="AI_ChamPress" BufferOffset="0" Addr="0" Description="" />
|
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<AO_ITEM Index="74" Name="AO_OuterPanel" BufferOffset="74" Addr="74" Description=""/>
|
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<AO_ITEM Index="75" Name="AO_MiddlePanel" BufferOffset="75" Addr="75" Description=""/>
|
|
<AO_ITEM Index="76" Name="AO_InnerPanel" BufferOffset="76" Addr="76" Description=""/>
|
|
<AO_ITEM Index="77" Name="AO_HeatShowerOuter" BufferOffset="77" Addr="77" Description=""/>
|
|
<AO_ITEM Index="78" Name="AO_HeatShowInner" BufferOffset="78" Addr="78" Description=""/>
|
|
<AO_ITEM Index="79" Name="AO_HeatShowMid" BufferOffset="79" Addr="79" Description=""/>
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|
<AO_ITEM Index="80" Name="AO_HeatDptPanel" BufferOffset="80" Addr="80" Description=""/>
|
|
<AO_ITEM Index="81" Name="AO_HeatLeakSource" BufferOffset="81" Addr="81" Description=""/>
|
|
<AO_ITEM Index="82" Name="AO_HeatLeakBypass" BufferOffset="82" Addr="82" Description=""/>
|
|
<AO_ITEM Index="83" Name="AO_HeatDptGate" BufferOffset="83" Addr="83" Description=""/>
|
|
<AO_ITEM Index="92" Name="AO_SCR1Enable" BufferOffset="92" Addr="92" Description="" />
|
|
<AO_ITEM Index="93" Name="AO_SCR1Reset" BufferOffset="93" Addr="92" Description="" />
|
|
<AO_ITEM Index="96" Name="AO_SCR2Enable" BufferOffset="96" Addr="92" Description="" />
|
|
<AO_ITEM Index="97" Name="AO_SCR2Reset" BufferOffset="97" Addr="92" Description="" />
|
|
<AO_ITEM Index="100" Name="AO_SCR3Enable" BufferOffset="100" Addr="100" Description="" />
|
|
<AO_ITEM Index="101" Name="AO_SCR3Reset" BufferOffset="101" Addr="101" Description="" />
|
|
<AO_ITEM Index="108" Name="AO_PressCtrl1" BufferOffset="108" Addr="108" Description="" />
|
|
<AO_ITEM Index="109" Name="AO_PressCtrl2" BufferOffset="109" Addr="109" Description="" />
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|
<AO_ITEM Index="110" Name="AO_PressCtrl3" BufferOffset="110" Addr="110" Description="" />
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<AO_ITEM Index="111" Name="AO_PressCtrl4" BufferOffset="111" Addr="111" Description="" />
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|
<AO_ITEM Index="112" Name="AO_PressCtrl5" BufferOffset="112" Addr="112" Description="" />
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|
<AO_ITEM Index="113" Name="AO_PressCtrl6" BufferOffset="113" Addr="113" Description="" />
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|
<AO_ITEM Index="114" Name="AO_PressCtrl7" BufferOffset="114" Addr="114" Description="" />
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|
<AO_ITEM Index="118" Name="AO_SetpointSpeed" BufferOffset="118" Addr="118" Description="" />
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|
<AO_ITEM Index="127" Name="AO_ValveModeSetpoint" BufferOffset="127" Addr="127" Description="" />
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|
<AO_ITEM Index="128" Name="AO_SetpointPositon" BufferOffset="128" Addr="128" Description="" />
|
|
<AO_ITEM Index="129" Name="AO_SetpointPressure" BufferOffset="129" Addr="129" Description="" />
|
|
<AO_ITEM Index="130" Name="AO_HeartBeat" BufferOffset="130" Addr="130" Description="" />
|
|
<AO_ITEM Index="131" Name="AO_M1CtrlMode" BufferOffset="131" Addr="131" Description=""/>
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|
<AO_ITEM Index="132" Name="AO_M2CtrlMode" BufferOffset="132" Addr="132" Description=""/>
|
|
<AO_ITEM Index="133" Name="AO_M3CtrlMode" BufferOffset="133" Addr="133" Description=""/>
|
|
<AO_ITEM Index="134" Name="AO_M4CtrlMode" BufferOffset="134" Addr="134" Description=""/>
|
|
<AO_ITEM Index="135" Name="AO_M5CtrlMode" BufferOffset="135" Addr="135" Description=""/>
|
|
<AO_ITEM Index="136" Name="AO_M6CtrlMode" BufferOffset="136" Addr="136" Description=""/>
|
|
<AO_ITEM Index="137" Name="AO_M7CtrlMode" BufferOffset="137" Addr="137" Description=""/>
|
|
<AO_ITEM Index="138" Name="AO_M8CtrlMode" BufferOffset="138" Addr="138" Description=""/>
|
|
<AO_ITEM Index="139" Name="AO_M9CtrlMode" BufferOffset="139" Addr="139" Description=""/>
|
|
<AO_ITEM Index="140" Name="AO_M10CtrlMode" BufferOffset="140" Addr="140" Description=""/>
|
|
<AO_ITEM Index="141" Name="AO_M11CtrlMode" BufferOffset="141" Addr="141" Description=""/>
|
|
<AO_ITEM Index="142" Name="AO_M12CtrlMode" BufferOffset="142" Addr="142" Description=""/>
|
|
<AO_ITEM Index="143" Name="AO_M13CtrlMode" BufferOffset="143" Addr="143" Description=""/>
|
|
<AO_ITEM Index="144" Name="AO_M14CtrlMode" BufferOffset="144" Addr="144" Description=""/>
|
|
<AO_ITEM Index="145" Name="AO_M15CtrlMode" BufferOffset="145" Addr="145" Description=""/>
|
|
<AO_ITEM Index="146" Name="AO_M16CtrlMode" BufferOffset="146" Addr="146" Description=""/>
|
|
<AO_ITEM Index="149" Name="AO_M19CtrlMode" BufferOffset="149" Addr="149" Description=""/>
|
|
<AO_ITEM Index="150" Name="AO_M20CtrlMode" BufferOffset="150" Addr="150" Description=""/>
|
|
<AO_ITEM Index="152" Name="AO_M22CtrlMode" BufferOffset="152" Addr="152" Description=""/>
|
|
<AO_ITEM Index="153" Name="AO_M23CtrlMode" BufferOffset="153" Addr="153" Description=""/>
|
|
<AO_ITEM Index="155" Name="AO_M25CtrlMode" BufferOffset="155" Addr="155" Description=""/>
|
|
<AO_ITEM Index="156" Name="AO_M26CtrlMode" BufferOffset="156" Addr="156" Description=""/>
|
|
<AO_ITEM Index="157" Name="AO_M27CtrlMode" BufferOffset="157" Addr="157" Description=""/>
|
|
<AO_ITEM Index="158" Name="AO_M28CtrlMode" BufferOffset="158" Addr="158" Description=""/>
|
|
<AO_ITEM Index="159" Name="AO_M29CtrlMode" BufferOffset="159" Addr="159" Description=""/>
|
|
<AO_ITEM Index="161" Name="AO_M31CtrlMode" BufferOffset="161" Addr="161" Description=""/>
|
|
<AO_ITEM Index="162" Name="AO_M32CtrlMode" BufferOffset="162" Addr="162" Description=""/>
|
|
<AO_ITEM Index="163" Name="AO_M33CtrlMode" BufferOffset="163" Addr="163" Description=""/>
|
|
<AO_ITEM Index="164" Name="AO_M34CtrlMode" BufferOffset="164" Addr="164" Description=""/>
|
|
<AO_ITEM Index="165" Name="AO_M35CtrlMode" BufferOffset="165" Addr="165" Description=""/>
|
|
<AO_ITEM Index="166" Name="AO_M36CtrlMode" BufferOffset="166" Addr="166" Description=""/>
|
|
<AO_ITEM Index="167" Name="AO_M37CtrlMode" BufferOffset="167" Addr="167" Description=""/>
|
|
<AO_ITEM Index="168" Name="AO_M38CtrlMode" BufferOffset="168" Addr="168" Description=""/>
|
|
<AO_ITEM Index="170" Name="AO_M40CtrlMode" BufferOffset="170" Addr="170" Description=""/>
|
|
<AO_ITEM Index="171" Name="AO_PC1CtrlMode" BufferOffset="171" Addr="171" Description=""/>
|
|
<AO_ITEM Index="172" Name="AO_PC2CtrlMode" BufferOffset="172" Addr="172" Description=""/>
|
|
<AO_ITEM Index="173" Name="AO_PC3CtrlMode" BufferOffset="173" Addr="173" Description=""/>
|
|
<AO_ITEM Index="174" Name="AO_PC4CtrlMode" BufferOffset="174" Addr="174" Description=""/>
|
|
<AO_ITEM Index="175" Name="AO_PC5CtrlMode" BufferOffset="175" Addr="175" Description=""/>
|
|
<AO_ITEM Index="176" Name="AO_PC6CtrlMode" BufferOffset="176" Addr="176" Description=""/>
|
|
<AO_ITEM Index="177" Name="AO_PC7CtrlMode" BufferOffset="177" Addr="177" Description=""/>
|
|
<AO_ITEM Index="181" Name="AO_PSUInnerLoopMode" BufferOffset="181" Addr="181" Description=""/>
|
|
<AO_ITEM Index="182" Name="AO_PSUMiddleLoopMode" BufferOffset="182" Addr="182" Description=""/>
|
|
<AO_ITEM Index="183" Name="AO_PSUOuterLoopMode" BufferOffset="183" Addr="183" Description=""/>
|
|
<AO_ITEM Index="184" Name="AO_PSUInnerTargetSP" BufferOffset="184" Addr="184" Description=""/>
|
|
<AO_ITEM Index="185" Name="AO_PSUMiddleTargetSP" BufferOffset="185" Addr="185" Description=""/>
|
|
<AO_ITEM Index="186" Name="AO_PSUOuterTargetSP" BufferOffset="186" Addr="186" Description=""/>
|
|
<AO_ITEM Index="187" Name="AO_PSUInnerTargetOP" BufferOffset="187" Addr="187" Description=""/>
|
|
<AO_ITEM Index="188" Name="AO_PSUMiddleTargetOP" BufferOffset="188" Addr="188" Description=""/>
|
|
<AO_ITEM Index="189" Name="AO_PSUOuterTargetOP" BufferOffset="189" Addr="189" Description=""/>
|
|
<AO_ITEM Index="190" Name="AO_PSUInnerPyroTemp" BufferOffset="190" Addr="190" Description=""/>
|
|
<AO_ITEM Index="191" Name="AO_PSUMiddlePyroTemp" BufferOffset="191" Addr="191" Description=""/>
|
|
<AO_ITEM Index="192" Name="AO_PSUOuterPyroTemp" BufferOffset="192" Addr="192" Description=""/>
|
|
<AO_ITEM Index="193" Name="AO_PSUTCPyroMode" BufferOffset="193" Addr="193" Description=""/>
|
|
<AO_ITEM Index="194" Name="AO_PSUInnerTempHighLimit" BufferOffset="194" Addr="194" Description=""/>
|
|
<AO_ITEM Index="195" Name="AO_PSUMiddleTempHighLimit" BufferOffset="195" Addr="195" Description=""/>
|
|
<AO_ITEM Index="196" Name="AO_PSUOuterTempHighLimit" BufferOffset="196" Addr="196" Description=""/>
|
|
<AO_ITEM Index="197" Name="AO_PSUInnerTempLowLimit" BufferOffset="197" Addr="197" Description=""/>
|
|
<AO_ITEM Index="198" Name="AO_PSUMiddleTempLowLimit" BufferOffset="198" Addr="198" Description=""/>
|
|
<AO_ITEM Index="199" Name="AO_PSUOuterTempLowLimit" BufferOffset="199" Addr="199" Description=""/>
|
|
<AO_ITEM Index="200" Name="AO_PSUInnerRecipeValue" BufferOffset="200" Addr="200" Description=""/>
|
|
<AO_ITEM Index="201" Name="AO_PSUMiddleRecipeValue" BufferOffset="201" Addr="201" Description=""/>
|
|
<AO_ITEM Index="202" Name="AO_PSUOuterRecipeValue" BufferOffset="202" Addr="202" Description=""/>
|
|
<AO_ITEM Index="203" Name="AO_PSUHeaterMode" BufferOffset="203" Addr="203" Description=""/>
|
|
<AO_ITEM Index="204" Name="AO_PSUPowerRef" BufferOffset="204" Addr="204" Description=""/>
|
|
<AO_ITEM Index="205" Name="AO_PSUInnerRatio" BufferOffset="205" Addr="205" Description=""/>
|
|
<AO_ITEM Index="206" Name="AO_PSUMiddleRatio" BufferOffset="206" Addr="206" Description=""/>
|
|
<AO_ITEM Index="207" Name="AO_PSUOuterRatio" BufferOffset="207" Addr="207" Description=""/>
|
|
<AO_ITEM Index="208" Name="AO_PSUInnerRetedValue" BufferOffset="208" Addr="208" Description=""/>
|
|
<AO_ITEM Index="209" Name="AO_PSUMiddleRetedValue" BufferOffset="209" Addr="209" Description=""/>
|
|
<AO_ITEM Index="210" Name="AO_PSUOuterRetedValue" BufferOffset="210" Addr="210" Description=""/>
|
|
<AO_ITEM Index="211" Name="AO_PSUInnerVoltageLimited" BufferOffset="211" Addr="211" Description=""/>
|
|
<AO_ITEM Index="212" Name="AO_PSUMiddleVoltageLimited" BufferOffset="212" Addr="212" Description=""/>
|
|
<AO_ITEM Index="213" Name="AO_PSUOuterVoltageLimited" BufferOffset="213" Addr="213" Description=""/>
|
|
<AO_ITEM Index="216" Name="AO_PSU1Enable" BufferOffset="216" Addr="216" Description=""/>
|
|
<AO_ITEM Index="217" Name="AO_PSU1Reset" BufferOffset="217" Addr="217" Description=""/>
|
|
<AO_ITEM Index="218" Name="AO_PSU1ArmLimited" BufferOffset="218" Addr="218" Description=""/>
|
|
<AO_ITEM Index="225" Name="AO_PSU1Constant" BufferOffset="225" Addr="225" Description=""/>
|
|
<AO_ITEM Index="226" Name="AO_SCRUpperLoopMode" BufferOffset="226" Addr="226" Description=""/>
|
|
<AO_ITEM Index="227" Name="AO_SCRMiddleLoopMode" BufferOffset="227" Addr="227" Description=""/>
|
|
<AO_ITEM Index="228" Name="AO_SCRLowerLoopMode" BufferOffset="228" Addr="228" Description=""/>
|
|
<AO_ITEM Index="229" Name="AO_SCRUpperTargetSP" BufferOffset="229" Addr="229" Description=""/>
|
|
<AO_ITEM Index="230" Name="AO_SCRMiddleTargetSP" BufferOffset="230" Addr="230" Description=""/>
|
|
<AO_ITEM Index="231" Name="AO_SCRLowerTargetSP" BufferOffset="231" Addr="231" Description=""/>
|
|
<AO_ITEM Index="232" Name="AO_SCRUpperTargetOP" BufferOffset="232" Addr="232" Description=""/>
|
|
<AO_ITEM Index="233" Name="AO_SCRMiddleTargetOP" BufferOffset="233" Addr="233" Description=""/>
|
|
<AO_ITEM Index="234" Name="AO_SCRLowerTargetOP" BufferOffset="234" Addr="234" Description=""/>
|
|
<AO_ITEM Index="235" Name="AO_SCRUpperPyroTemp" BufferOffset="235" Addr="235" Description=""/>
|
|
<AO_ITEM Index="236" Name="AO_SCRMiddlePyroTemp" BufferOffset="236" Addr="236" Description=""/>
|
|
<AO_ITEM Index="237" Name="AO_SCRLowerPyroTemp" BufferOffset="237" Addr="237" Description=""/>
|
|
<AO_ITEM Index="238" Name="AO_SCRTCPyroMode" BufferOffset="238" Addr="238" Description=""/>
|
|
<AO_ITEM Index="239" Name="AO_SCRUpperTempHighLimit" BufferOffset="239" Addr="239" Description=""/>
|
|
<AO_ITEM Index="240" Name="AO_SCRMiddleTempHighLimit" BufferOffset="240" Addr="240" Description=""/>
|
|
<AO_ITEM Index="241" Name="AO_SCRLowerTempHighLimit" BufferOffset="241" Addr="241" Description=""/>
|
|
<AO_ITEM Index="242" Name="AO_SCRUpperTempLowLimit" BufferOffset="242" Addr="242" Description=""/>
|
|
<AO_ITEM Index="243" Name="AO_SCRMiddleTempLowLimit" BufferOffset="243" Addr="243" Description=""/>
|
|
<AO_ITEM Index="244" Name="AO_SCRLowerTempLowLimit" BufferOffset="244" Addr="244" Description=""/>
|
|
<AO_ITEM Index="245" Name="AO_SCRUpperRecipeValue" BufferOffset="245" Addr="245" Description=""/>
|
|
<AO_ITEM Index="246" Name="AO_SCRMiddleRecipeValue" BufferOffset="246" Addr="246" Description=""/>
|
|
<AO_ITEM Index="247" Name="AO_SCRLowerRecipeValue" BufferOffset="247" Addr="247" Description=""/>
|
|
<AO_ITEM Index="248" Name="AO_SCRHeaterMode" BufferOffset="248" Addr="248" Description=""/>
|
|
<AO_ITEM Index="249" Name="AO_SCRPowerRef" BufferOffset="249" Addr="249" Description=""/>
|
|
<AO_ITEM Index="250" Name="AO_SCRUpperRatio" BufferOffset="250" Addr="250" Description=""/>
|
|
<AO_ITEM Index="251" Name="AO_SCRMiddleRatio" BufferOffset="251" Addr="251" Description=""/>
|
|
<AO_ITEM Index="252" Name="AO_SCRLowerRatio" BufferOffset="252" Addr="252" Description=""/>
|
|
<AO_ITEM Index="253" Name="AO_SCRUpperRetedValue" BufferOffset="253" Addr="253" Description=""/>
|
|
<AO_ITEM Index="254" Name="AO_SCRMiddleRetedValue" BufferOffset="254" Addr="254" Description=""/>
|
|
<AO_ITEM Index="255" Name="AO_SCRLowerRetedValue" BufferOffset="255" Addr="255" Description=""/>
|
|
<AO_ITEM Index="256" Name="AO_SCRUpperVoltageLimited" BufferOffset="256" Addr="256" Description=""/>
|
|
<AO_ITEM Index="257" Name="AO_SCRMiddleVoltageLimited" BufferOffset="257" Addr="257" Description=""/>
|
|
<AO_ITEM Index="258" Name="AO_SCRLowerVoltageLimited" BufferOffset="258" Addr="258" Description=""/>
|
|
<AO_ITEM Index="261" Name="AO_PSU2Enable" BufferOffset="261" Addr="261" Description=""/>
|
|
<AO_ITEM Index="262" Name="AO_PSU2Reset" BufferOffset="262" Addr="262" Description=""/>
|
|
<AO_ITEM Index="263" Name="AO_PSU2ArmLimited" BufferOffset="263" Addr="263" Description=""/>
|
|
<AO_ITEM Index="270" Name="AO_PSU2Constant" BufferOffset="270" Addr="270" Description=""/>
|
|
<AO_ITEM Index="271" Name="AO_PSU3Enable" BufferOffset="271" Addr="271" Description=""/>
|
|
<AO_ITEM Index="272" Name="AO_PSU3Reset" BufferOffset="272" Addr="272" Description=""/>
|
|
<AO_ITEM Index="273" Name="AO_PSU3ArmLimited" BufferOffset="273" Addr="273" Description=""/>
|
|
<AO_ITEM Index="280" Name="AO_PSU3Constant" BufferOffset="280" Addr="280" Description=""/>
|
|
</Ana_Out>
|
|
</IO_DEFINE>
|