455 lines
19 KiB
C#
455 lines
19 KiB
C#
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using SicPM.Devices;
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using System;
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using System.Collections.Generic;
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using System.Diagnostics;
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namespace SicPM.Routines
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{
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class PMToProcessIdleRoutine : PMBaseRoutine
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{
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private enum RoutineStep
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{
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RotationEnable,
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HeatEnable,
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VentPumpClose,
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ArSupply,
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OpenH2Valve,
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SetGroupA,
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SetGroupB,
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SetGroupC,
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SetGroupE,
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SetGroupF,
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SetGroupH,
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SetGroupD,
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SetGroupG,
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SetGroupK,
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SetMFCMode,
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SetPCMode,
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SetM1to16,
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SetPC,
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SetGroupJ,
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SetM19to38,
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SetPC567Close,
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SetPC567Default,
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SetPC567Mode,
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SetGasOut,
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SetTv,
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SetM291519to38,
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SetGasIn1, //V65,V67,V68
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OpenFinal1, //V91-96
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SetMfcFinal1, //M32-38
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SetM291519to26,
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SetTVCloseMode,
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SetTvPositionToZero,
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CheckPM1000,
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SetGasIn2,
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SetGroupJOpen,
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CloseFinal2,
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OpenFinal2,
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SetMfcFinal2,
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WaitPmPressureUp,
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WaitPmPressureUp1020,
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SetTvOpen,
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SetTvMode,
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SetTVto1050,
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SetTVto300,
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WaitTvTo300,
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CheckPmVac,
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CheckPmAtm,
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CheckV72Open,
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SetV72,
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SetV25,
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SetV76,
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SetV75,
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SetEPV1,
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SetEPV2,
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SetEPV11,
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SetEPV22,
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SetTvModeToPress,
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SetMfc28to31Special,
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SetMfc28to40Default,
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SetPressUpOrDown1,
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SetPressureDown,
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EnableRotation,
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EnableHeater,
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SetRotation1,
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SetTC1Mode,
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SetTC1Ratio,
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SetTC1Ref,
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SetTC2Mode,
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SetTC2Ratio,
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SetTC2Ref,
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EnableTC1,
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EnableTC2,
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SetFinal1ToDefault,
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SetFinal1To0,
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SetFinal2ToDefault,
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SetFinal2To0,
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CheckFinal1Open,
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CheckFinal2Open,
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CheckTvOpen,
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SetRotation2,
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SetGroupV38,
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SetGroupV25,
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SetScrReset,
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CheckEpv2Open,
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CheckEpv1Open,
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DelayV25,
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TimeDelay0,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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TimeDelay4,
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TimeDelay5,
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TimeDelay6,
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TimeDelay7,
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TimeDelay8,
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TimeDelay9,
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TimeDelay10,
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TimeDelay11,
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TimeDelay12,
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TimeDelay13,
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TimeDelay14,
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TimeDelay15,
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Notify1,
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Notify2
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}
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//private PMModule _pmModule;
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private IoThrottleValve2 _IoThrottle;
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List<int> _lstPcList = new List<int> { 1, 2, 3, 4, 5, 6, 7 };
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private int _rotationCheckSpeed=0; //设置旋转速度为0后检查是否转速低于此数值
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private int _rotationCloseTimeout; //旋转停止超时
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private int _IoValueOpenCloseTimeout = 10; //开关超时时间
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private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
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private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
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private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
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private double _throttleFinalPressure = 300;//蝶阀最终调整对的压力
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private int _EPV2OpenTimeDelay = 10;
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private int _waitPMPressureUpTimeout = 300; //等待反应腔压力到达1000的超时时间
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private double _pmNoVacPressure = 10; //腔体高于此压力(判断V72打开复合条件)
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//private int _pressure1 = 1000;
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//private int _pressure2 = 1020;
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private bool _psuHeatEnable = false; //是否启用PSU 加热
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private float _psuHeatMode = 0;
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//private float _psuPowerRef = 0;
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private float _psuL1Ratio = 0;
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private float _psuL2Ratio = 0;
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private float _psuL3Ratio = 0;
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private bool _scrHeatEnable = false; //是否启用SCR 加热
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private float _scrHeatMode = 0;
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//private float _scrPowerRef = 0;
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private float _scrL1Ratio = 0;
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private float _scrL2Ratio = 0;
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private float _scrL3Ratio = 0;
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private double _mfc28SpecialFlow = 15000;
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private double _mfc29SpecialFlow = 5000;
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private double _mfc31SpecialFlow = 10000;
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private int _rotationSpeed = 60;
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private int _routineTimeOut;
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private int _EPV2OpenDelayTime = 9;
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private Stopwatch _swTimer = new Stopwatch();
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private IoInterLock _pmInterLock;
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public PMToProcessIdleRoutine(ModuleName module, PMModule pm) : base(module, pm)
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{
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Module = module.ToString();
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Name = "ProcessIdle";
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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_pmInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
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if (!_pmInterLock.SetPMProcessIdleRunning(true, out string reason))
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{
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EV.PostAlarmLog(Module, $"can not run ProcessIdle, {reason}");
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return Result.FAIL;
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}
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if (!PMDevice.CheckHeadHeaterEnable(true))
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{
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EV.PostAlarmLog(Module, $"Should set HeatEnable on first!");
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return Result.FAIL;
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}
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_v72IsOpen = false;
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_checkPMPressureOver1000 = false;
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_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
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_EPV2OpenTimeDelay = SC.GetConfigItem($"PM.{Module}.EPV2OpenTimeDelayAlterEPV1Open").IntValue;
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_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
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_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
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_mfc28SpecialFlow = SC.GetValue<double>($"PM.{Module}.Mfc28FlowSpecail");
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_mfc29SpecialFlow = SC.GetValue<double>($"PM.{Module}.Mfc29FlowSpecail");
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_mfc31SpecialFlow = SC.GetValue<double>($"PM.{Module}.Mfc31FlowSpecail");
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_rotationSpeed = SC.GetValue<int>($"PM.{Module}.ProcessIdle.RotationSpeed");
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_throttleFinalPressure = SC.GetValue<double>($"PM.{Module}.ProcessIdle.FinalPressure");
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_psuHeatEnable= SC.GetValue<bool>($"PM.{Module}.ProcessIdle.PSUHeaterEnable");
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_psuHeatMode = (float)SC.GetValue<int>($"PM.{Module}.ProcessIdle.PSUHeaterMode");
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_psuL1Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUInnerRatio");
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_psuL2Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUMiddleRatio");
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_psuL3Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUOuterRatio");
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_scrHeatEnable = SC.GetValue<bool>($"PM.{Module}.ProcessIdle.SCRHeaterEnable");
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_scrHeatMode = (float)SC.GetValue<int>($"PM.{Module}.ProcessIdle.SCRHeaterMode");
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_scrL1Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRUpperRatio");
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_scrL2Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRMiddleRatio");
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_scrL3Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRLowerRatio");
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_routineTimeOut= SC.GetValue<int>($"PM.{Module}.ProcessIdle.RoutineTimeOut");
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_EPV2OpenDelayTime = SC.GetValue<int>($"PM.{Module}.TimeDelayAlterEPV2Open");
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_finalOpen = false;
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_isTvOpen = false;
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currentPressureUpOrDown = PressureUpOrDown.None;
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_swTimer.Restart();
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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//if (SC.GetValue<bool>("System.IsSimulatorMode"))
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//{
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// CheckChamberV72Open((int)RoutineStep.CheckV72Open, 10);
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// OpenH2Valve((int)RoutineStep.OpenH2Valve, PMDevice, 2);
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// SetIoValueByGroup((int)RoutineStep.ArSupply, IoGroupName.ArSupply, true, _IoValueOpenCloseTimeout);
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// SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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// SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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// SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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// SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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// SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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// SetIoValueByGroup((int)RoutineStep.SetGroupV38, IoGroupName.V38, true, _IoValueOpenCloseTimeout);
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// SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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// SetIoValueByGroup((int)RoutineStep.SetV72, IoGroupName.VentPump, true, _IoValueOpenCloseTimeout);
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// SetIoValueByGroup((int)RoutineStep.SetV25, IoGroupName.V25, false, _IoValueOpenCloseTimeout);
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// SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
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// SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
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// SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
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// SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
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// SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
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// SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
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// SetIoValueByGroup((int)RoutineStep.SetGasIn1, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
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// SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
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// SetIoValueByGroup((int)RoutineStep.OpenFinal1, IoGroupName.Final1, true, _IoValueOpenCloseTimeout);
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// SetIoValueByGroup((int)RoutineStep.SetEPV1, IoGroupName.EPV1, true, _IoValueOpenCloseTimeout);
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// SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
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// SetThrottleEnableAndWait((int)RoutineStep.SetTvOpen, _IoThrottle, 10);
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// SetThrottleToPressModeAndWait((int)RoutineStep.SetTvModeToPress, _IoThrottle, 10);
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// return Result.DONE;
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//}
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CheckRoutineTimeOut();
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//检查Final1和Final2是否打开
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CheckFinalIoStatue((int)RoutineStep.CheckFinal1Open);
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CheckChamberV72Open((int)RoutineStep.CheckV72Open, 10);
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OpenH2Valve((int)RoutineStep.OpenH2Valve, PMDevice, 2);
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SetIoValueByGroup((int)RoutineStep.ArSupply, IoGroupName.ArSupply, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupV38, IoGroupName.V38, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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if (!_v72IsOpen)
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{
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SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
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}
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SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
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SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
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SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0);
|
|||
|
|
SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
|
|||
|
|
|
|||
|
|
if (!_finalOpen)
|
|||
|
|
{
|
|||
|
|
SetMfcByGroup((int)RoutineStep.SetM291519to38, MfcGroupName.M291519to38, 0, 5);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
TimeDelay((int)RoutineStep.TimeDelay0, 1);
|
|||
|
|
//打开进气系统 （V65,V67,V68)
|
|||
|
|
SetIoValueByGroup((int)RoutineStep.SetGasIn1, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
|
|||
|
|
SetMfcToDefaultByGroup((int)RoutineStep.SetM19to38, MfcGroupName.M19to38, 5);
|
|||
|
|
TimeDelay((int)RoutineStep.TimeDelay1, 5);
|
|||
|
|
|
|||
|
|
//3.打开Final valves 和对应的MFC值
|
|||
|
|
SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
|
|||
|
|
SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3);
|
|||
|
|
TimeDelay((int)RoutineStep.TimeDelay2, 3);
|
|||
|
|
|
|||
|
|
SetIoValueByGroup((int)RoutineStep.OpenFinal1, IoGroupName.Final1, true, _IoValueOpenCloseTimeout);
|
|||
|
|
SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal1, MfcGroupName.Final1, 3);
|
|||
|
|
TimeDelay((int)RoutineStep.TimeDelay3, 3);
|
|||
|
|
|
|||
|
|
//5.打开J Valves
|
|||
|
|
SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout);
|
|||
|
|
SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M291519to26, 3);
|
|||
|
|
|
|||
|
|
CheckTvOpen((int)RoutineStep.CheckTvOpen);
|
|||
|
|
if (!_isTvOpen)
|
|||
|
|
{
|
|||
|
|
CheckEPV2Open((int)RoutineStep.CheckEpv2Open);
|
|||
|
|
if (!_isEPV2Open)
|
|||
|
|
{
|
|||
|
|
CheckEPV1Open((int)RoutineStep.CheckEpv1Open);
|
|||
|
|
if (!_isEPV1Open)
|
|||
|
|
{
|
|||
|
|
//检查EPV1是否打开
|
|||
|
|
SetIoValueByGroup((int)RoutineStep.SetEPV1, IoGroupName.EPV1, true, _IoValueOpenCloseTimeout);
|
|||
|
|
TimeDelay((int)RoutineStep.TimeDelay4, _EPV2OpenTimeDelay);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
//检查EPV2是否打开
|
|||
|
|
SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
|
|||
|
|
TimeDelay((int)RoutineStep.TimeDelay5, _EPV2OpenTimeDelay);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
//打开蝶阀,压力设定为1050
|
|||
|
|
SetThrottleEnableAndWait((int)RoutineStep.SetTvOpen, _IoThrottle, 10);
|
|||
|
|
SetThrottleToPressModeAndWait((int)RoutineStep.SetTvModeToPress, _IoThrottle, 10);
|
|||
|
|
SetThrottleToTargetAndNoWait((int)RoutineStep.SetTVto1050, _IoThrottle, 1050);
|
|||
|
|
TimeDelay((int)RoutineStep.TimeDelay6, 2);
|
|||
|
|
}
|
|||
|
|
//打开V72
|
|||
|
|
SetIoValueByGroup((int)RoutineStep.SetV72, IoGroupName.VentPump, true, _IoValueOpenCloseTimeout);
|
|||
|
|
TimeDelay((int)RoutineStep.DelayV25, 1);
|
|||
|
|
SetIoValueByGroup((int)RoutineStep.SetV25, IoGroupName.V25, false, _IoValueOpenCloseTimeout);
|
|||
|
|
|
|||
|
|
|
|||
|
|
//蝶阀调整到300
|
|||
|
|
SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Dowing);
|
|||
|
|
SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureDown, _IoThrottle, _throttleFinalPressure);
|
|||
|
|
WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.SetTVto300, _IoThrottle, _throttleFinalPressure, _pmPressureMaxDiff, _throttleTimeout);
|
|||
|
|
TimeDelay((int)RoutineStep.TimeDelay7, 10);
|
|||
|
|
|
|||
|
|
|
|||
|
|
//转速Enable,Set 60rpm(可配置) ,加热Enable, 电流功率可配置
|
|||
|
|
EnableRotation((int)RoutineStep.EnableRotation, 5);
|
|||
|
|
SetRotationValveAndNoWait((int)RoutineStep.SetRotation1, _rotationSpeed);
|
|||
|
|
|
|||
|
|
//SetHeatEnable((int)RoutineStep.EnableHeater, true, 5);
|
|||
|
|
TimeDelay((int)RoutineStep.TimeDelay8, 1);
|
|||
|
|
if (_psuHeatEnable)
|
|||
|
|
{
|
|||
|
|
SetPSUEnable((int)RoutineStep.EnableTC1, true, 5);
|
|||
|
|
|
|||
|
|
SetPSUHeatMode((int)RoutineStep.SetTC1Mode, _psuHeatMode);
|
|||
|
|
TimeDelay((int)RoutineStep.TimeDelay9, 1);
|
|||
|
|
SetPSUHeatRatio((int)RoutineStep.SetTC1Ratio, _psuL1Ratio,_psuL2Ratio,_psuL3Ratio);
|
|||
|
|
}
|
|||
|
|
if (_scrHeatEnable)
|
|||
|
|
{
|
|||
|
|
SetSCRReset((int)RoutineStep.SetScrReset);
|
|||
|
|
TimeDelay((int)RoutineStep.TimeDelay10, 1);
|
|||
|
|
|
|||
|
|
SetSCREnable((int)RoutineStep.EnableTC2, true, 5);
|
|||
|
|
SetSCRHeatMode((int)RoutineStep.SetTC2Mode, _scrHeatMode);
|
|||
|
|
TimeDelay((int)RoutineStep.TimeDelay11, 1);
|
|||
|
|
SetSCRHeatRatio((int)RoutineStep.SetTC2Ratio, _scrL1Ratio, _scrL2Ratio, _scrL3Ratio);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
SetRotationValve((int)RoutineStep.SetRotation2, _rotationSpeed,true, _rotationSpeed/2);
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
catch (RoutineBreakException)
|
|||
|
|
{
|
|||
|
|
return Result.RUN;
|
|||
|
|
}
|
|||
|
|
catch (RoutineFaildException)
|
|||
|
|
{
|
|||
|
|
return Result.FAIL;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
_pmInterLock.SetPMProcessIdleRunning(false, out string reason);
|
|||
|
|
Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
|
|||
|
|
_swTimer.Stop();
|
|||
|
|
|
|||
|
|
return Result.DONE;
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
|
|||
|
|
private void CheckRoutineTimeOut()
|
|||
|
|
{
|
|||
|
|
if (_routineTimeOut > 10)
|
|||
|
|
{
|
|||
|
|
if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
|
|||
|
|
{
|
|||
|
|
Notify($"Routine TimeOut! over {_routineTimeOut} s");
|
|||
|
|
throw (new RoutineFaildException());
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
|
|||
|
|
public override void Abort()
|
|||
|
|
{
|
|||
|
|
_pmInterLock.SetPMProcessIdleRunning(false, out string reason);
|
|||
|
|
PMDevice._ioThrottleValve.StopRamp();
|
|||
|
|
PMDevice.SetMfcStopRamp(PMDevice.GetMfcListByGroupName(MfcGroupName.All));
|
|||
|
|
PMDevice.SetHeaterStopRamp();
|
|||
|
|
PMDevice.SetRotationStopRamp();
|
|||
|
|
PMDevice.SetRotationServo(0, 0);
|
|||
|
|
|
|||
|
|
base.Abort();
|
|||
|
|
}
|
|||
|
|
}
|
|||
|
|
}
|