486 lines
20 KiB
C#
486 lines
20 KiB
C#
|
using Aitex.Core.RT.Device;
|
|||
|
using Aitex.Core.RT.Device.Unit;
|
|||
|
using Aitex.Core.RT.Event;
|
|||
|
using Aitex.Core.RT.Routine;
|
|||
|
using Aitex.Core.RT.SCCore;
|
|||
|
using MECF.Framework.Common.Equipment;
|
|||
|
using SicPM.Devices;
|
|||
|
using System;
|
|||
|
using System.Collections.Generic;
|
|||
|
using System.Diagnostics;
|
|||
|
|
|||
|
namespace SicPM.Routines
|
|||
|
{
|
|||
|
public class PMPurgeRoutine : PMBaseRoutine
|
|||
|
{
|
|||
|
private enum RoutineStep
|
|||
|
{
|
|||
|
RotationEnable,
|
|||
|
HeatEnable,
|
|||
|
VentPumpClose,
|
|||
|
ArSupply,
|
|||
|
|
|||
|
SetGroupA,
|
|||
|
SetGroupB,
|
|||
|
SetGroupC,
|
|||
|
SetGroupE,
|
|||
|
SetGroupF,
|
|||
|
SetGroupH,
|
|||
|
SetGroupD,
|
|||
|
SetGroupG,
|
|||
|
SetGroupK,
|
|||
|
|
|||
|
SetMFCMode,
|
|||
|
SetPCMode,
|
|||
|
|
|||
|
SetM1to16,
|
|||
|
SetPC,
|
|||
|
SetGroupJ,
|
|||
|
SetM291519to38,
|
|||
|
|
|||
|
SetGasOut,
|
|||
|
SetTv,
|
|||
|
|
|||
|
SetGasIn1, //V65,V67,V68
|
|||
|
OpenFinal1, //V91-96
|
|||
|
SetMfcFinal1, //M32-38
|
|||
|
SetMfc19to26,
|
|||
|
|
|||
|
SetTVCloseMode,
|
|||
|
SetTvPositionToZero,
|
|||
|
|
|||
|
SetGasIn2,
|
|||
|
SetGroupJOpen,
|
|||
|
SetM291519to26,
|
|||
|
|
|||
|
OpenFinal2,
|
|||
|
SetMfcFinal2,
|
|||
|
|
|||
|
SetEPV1,
|
|||
|
SetEPV2,
|
|||
|
SetTvMode,
|
|||
|
|
|||
|
SetTvOpen,
|
|||
|
SetTvModeToPress,
|
|||
|
SetTVtoCurrent,
|
|||
|
RoutinePre,
|
|||
|
|
|||
|
SetPressureUp,
|
|||
|
SetPressureDown,
|
|||
|
WaitPressureDown,
|
|||
|
WaitPressureUp,
|
|||
|
VentPumpOpen,
|
|||
|
|
|||
|
PressureToMax,
|
|||
|
PressureToMin,
|
|||
|
|
|||
|
StartLoop,
|
|||
|
EndLoop,
|
|||
|
|
|||
|
SetMfc28to31,
|
|||
|
SetReactorPress,
|
|||
|
CloseFinanl1,
|
|||
|
CloseFinanl2,
|
|||
|
CloseEPV2,
|
|||
|
SetTVCloseMode2,
|
|||
|
CLoseTvvvv,
|
|||
|
SetEPVVV2,
|
|||
|
CLoseEPV1,
|
|||
|
CheckPM1000,
|
|||
|
WaitPressUpTo1000,
|
|||
|
WaitPressUpTo1020,
|
|||
|
|
|||
|
SetPressUpOrDown1,
|
|||
|
SetPressUpOrDown2,
|
|||
|
SetMfc28to31Special,
|
|||
|
WaitPmPressureUp,
|
|||
|
SetMfc28to40Default,
|
|||
|
|
|||
|
SetV75,
|
|||
|
SetV76,
|
|||
|
SetV751,
|
|||
|
SetV761,
|
|||
|
|
|||
|
SetPC567Close,
|
|||
|
SetPC567Mode,
|
|||
|
SetPC567Default,
|
|||
|
OpenEPV2,
|
|||
|
WaitPressUpTo20,
|
|||
|
SetMfc291519to38,
|
|||
|
WaitPressUpTo0,
|
|||
|
SetMfc291519to38ToDefault,
|
|||
|
WaitPressDownTo20,
|
|||
|
SetPmPressureTo20,
|
|||
|
CloseMfcFinal1,
|
|||
|
CloseMfcFinal2,
|
|||
|
CloseMfc2915,
|
|||
|
CheckFinal1Open,
|
|||
|
SetGroupV38,
|
|||
|
SetGroupV25,
|
|||
|
SetV94,
|
|||
|
Mfc36,
|
|||
|
SetM39,
|
|||
|
CloseJ,
|
|||
|
CloseMfc1to16, CloseMfc19to26,
|
|||
|
|
|||
|
CheckTVOpen1,
|
|||
|
CheckTVOpen2,
|
|||
|
CheckEPV1Open1,
|
|||
|
CheckEPV2Open1,
|
|||
|
CheckEPV2Open2,
|
|||
|
Set2Mfc19to26,
|
|||
|
|
|||
|
TimeDelay1,
|
|||
|
TimeDelay2,
|
|||
|
TimeDelay3,
|
|||
|
TimeDelay4,
|
|||
|
TimeDelay5,
|
|||
|
TimeDelay6,
|
|||
|
TimeDelay7,
|
|||
|
TimeDelay8,
|
|||
|
TimeDelay9,
|
|||
|
TimeDelay10,
|
|||
|
TimeDelay11,
|
|||
|
TimeDelay18,
|
|||
|
TimeDelay19,
|
|||
|
|
|||
|
Notify1,
|
|||
|
Notify2
|
|||
|
}
|
|||
|
|
|||
|
private ModuleName moduleName;
|
|||
|
private PMModule _pmModule;
|
|||
|
private IoThrottleValve2 _IoThrottle;
|
|||
|
private IoInterLock _pmIoInterLock;
|
|||
|
|
|||
|
|
|||
|
List<int> _lstPcList = new List<int> { 1, 2, 3, 4, 5, 6, 7 };
|
|||
|
|
|||
|
private int _rotationCheckSpeed =0 ; //设置旋转速度为0后检查是否转速低于此数值
|
|||
|
private int _rotationCloseTimeout; //旋转停止超时
|
|||
|
private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
|
|||
|
|
|||
|
private int _EPV2OpenTimeDelay = 10;
|
|||
|
|
|||
|
private double _pressureMax; //Loop压力上限可设置600-800)
|
|||
|
private double _pressureMin; //Loop压力下限可设置 0-400)
|
|||
|
private int _pressureLoopCount; //Loop次数
|
|||
|
private int _pressureMinDelay;
|
|||
|
private int _pressureMaxDelay;
|
|||
|
private int _pressureMinTimeout;
|
|||
|
private int _pressureMaxTimeout;
|
|||
|
|
|||
|
private int _IoValueOpenCloseTimeout = 10; //开关阀门超时时间
|
|||
|
private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
|
|||
|
private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
|
|||
|
private int _EPV12TimeSapn = 10;
|
|||
|
private int _waitChamberTo1000TimeOut = 300; //等待腔体压力上升到1000的超时时间
|
|||
|
|
|||
|
private double _mfc28SpecialFlow = 15000;
|
|||
|
private double _mfc29SpecialFlow = 5000;
|
|||
|
private double _mfc31SpecialFlow = 10000;
|
|||
|
//private int _routineTimeOut;
|
|||
|
private int _EPV2OpenDelayTime = 9;
|
|||
|
private bool _needFinalValveOpen = false;
|
|||
|
private double _mfc36Flow = 0;
|
|||
|
|
|||
|
private Stopwatch _swTimer = new Stopwatch();
|
|||
|
public PMPurgeRoutine(ModuleName module, PMModule pm) : base(module, pm)
|
|||
|
{
|
|||
|
moduleName = module;
|
|||
|
_pmModule = pm;
|
|||
|
Name = "Purge";
|
|||
|
|
|||
|
_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
|
|||
|
_pmIoInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
|
|||
|
}
|
|||
|
|
|||
|
public override Result Start(params object[] objs)
|
|||
|
{
|
|||
|
Reset();
|
|||
|
|
|||
|
_EPV12TimeSapn = SC.GetConfigItem($"PM.{Module}.EPV2OpenTimeDelayAlterEPV1Open").IntValue;
|
|||
|
_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
|
|||
|
_EPV2OpenTimeDelay = SC.GetConfigItem($"PM.{Module}.EPV2OpenTimeDelayAlterEPV1Open").IntValue;
|
|||
|
_mfc28SpecialFlow = SC.GetValue<double>($"PM.{Module}.Mfc28FlowSpecail");
|
|||
|
_mfc29SpecialFlow = SC.GetValue<double>($"PM.{Module}.Mfc29FlowSpecail");
|
|||
|
_mfc31SpecialFlow = SC.GetValue<double>($"PM.{Module}.Mfc31FlowSpecail");
|
|||
|
_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
|
|||
|
_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
|
|||
|
|
|||
|
|
|||
|
_pressureLoopCount = SC.GetValue<int>($"PM.{Module}.Purge.CyclePurgeCount");
|
|||
|
_pressureMin = SC.GetValue<double>($"PM.{Module}.Purge.PumpBasePressure");
|
|||
|
_pressureMinDelay = SC.GetValue<int>($"PM.{Module}.Purge.PumpDelayTime");
|
|||
|
_pressureMinTimeout = SC.GetValue<int>($"PM.{Module}.Purge.PumpTimeout");
|
|||
|
_pressureMax = SC.GetValue<double>($"PM.{Module}.Purge.VentBasePressure");
|
|||
|
_pressureMaxDelay = SC.GetValue<int>($"PM.{Module}.Purge.VentDelayTime");
|
|||
|
_pressureMaxTimeout = SC.GetValue<int>($"PM.{Module}.Purge.VentTimeout");
|
|||
|
//_routineTimeOut = SC.GetValue<int>($"PM.{Module}.Purge.RoutineTimeOut");
|
|||
|
|
|||
|
_EPV2OpenDelayTime = SC.GetValue<int>($"PM.{Module}.TimeDelayAlterEPV2Open");
|
|||
|
|
|||
|
_needFinalValveOpen = SC.GetValue<bool>($"PM.{Module}.Purge.NeedFinalValveOpen");
|
|||
|
_mfc36Flow = SC.GetValue<double>($"PM.{Module}.Purge.Mfc36Flow");
|
|||
|
|
|||
|
if (!_pmIoInterLock.SetPMPurgeRoutineRunning(true, out string reason))
|
|||
|
{
|
|||
|
EV.PostAlarmLog(Module, $"can not Purge,{reason}");
|
|||
|
return Result.FAIL;
|
|||
|
}
|
|||
|
//Clean succeed 清掉
|
|||
|
_pmIoInterLock.DoLidCloseRoutineSucceed = false;
|
|||
|
//purge succeed 清掉
|
|||
|
_pmIoInterLock.DoLidOpenRoutineSucceed = false;
|
|||
|
|
|||
|
currentPressureUpOrDown = PressureUpOrDown.None;
|
|||
|
|
|||
|
_finalOpen = false;
|
|||
|
_swTimer.Restart();
|
|||
|
Notify($"Start LoopCount:{_pressureLoopCount}");
|
|||
|
return Result.RUN;
|
|||
|
|
|||
|
|
|||
|
}
|
|||
|
|
|||
|
//Purge
|
|||
|
public override Result Monitor()
|
|||
|
{
|
|||
|
try
|
|||
|
{
|
|||
|
//CheckRoutineTimeOut();
|
|||
|
|
|||
|
|
|||
|
SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
|
|||
|
|
|||
|
SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);
|
|||
|
|
|||
|
SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.ArSupply, IoGroupName.ArSupply, true, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupV38, IoGroupName.V38, true, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
|
|||
|
SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
|
|||
|
SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
|
|||
|
|
|||
|
SetMfcByGroup((int)RoutineStep.SetM39, MfcGroupName.M39, 0, 1);
|
|||
|
|
|||
|
SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16,0);
|
|||
|
SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
|
|||
|
|
|||
|
CheckFinalIoStatue((int)RoutineStep.CheckFinal1Open);
|
|||
|
if (!_finalOpen)
|
|||
|
{
|
|||
|
SetMfcByGroup((int)RoutineStep.SetM291519to38, MfcGroupName.M291519to38, 0, 5);
|
|||
|
TimeDelay((int)RoutineStep.TimeDelay1, 5);
|
|||
|
}
|
|||
|
|
|||
|
|
|||
|
//1.打开抽气系统 (打开EPV1,关闭EPV2,打开throttle valve enable压力伺服当前压力值) [由于InterLock原因,需要先开EPV1再开EPV2]
|
|||
|
//判断蝶阀是否开启
|
|||
|
CheckTvOpen((int)RoutineStep.CheckTVOpen1);
|
|||
|
if (_isTvOpen)
|
|||
|
{
|
|||
|
SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8);
|
|||
|
SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8);
|
|||
|
TimeDelay((int)RoutineStep.TimeDelay19, 1);
|
|||
|
}
|
|||
|
//SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
|
|||
|
CheckEPV1Open((int)RoutineStep.CheckEPV1Open1);
|
|||
|
if (!_isEPV1Open)
|
|||
|
{
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetEPV1, IoGroupName.EPV1, true, _IoValueOpenCloseTimeout);
|
|||
|
TimeDelay((int)RoutineStep.TimeDelay2, _EPV2OpenTimeDelay);
|
|||
|
}
|
|||
|
|
|||
|
//2.打开进气系统 (V65,V67,V68)
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGasIn1, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
//3.打开Final valves 和对应的MFC值
|
|||
|
SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
|
|||
|
SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3);
|
|||
|
TimeDelay((int)RoutineStep.TimeDelay3, 3);
|
|||
|
SetIoValueByGroup((int)RoutineStep.OpenFinal1, IoGroupName.Final1, true, _IoValueOpenCloseTimeout);
|
|||
|
SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal1, MfcGroupName.Final1, 3);
|
|||
|
TimeDelay((int)RoutineStep.TimeDelay4, 3);
|
|||
|
|
|||
|
//4.打开J Valves
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout);
|
|||
|
SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M291519to26, 3);
|
|||
|
|
|||
|
|
|||
|
//打开EPV2,等待9秒,打开蝶阀
|
|||
|
//判断EPV2是否开启
|
|||
|
CheckEPV2Open((int)RoutineStep.CheckEPV2Open1);
|
|||
|
if (!_isEPV2Open)
|
|||
|
{
|
|||
|
SetIoValueByGroup((int)RoutineStep.OpenEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
|
|||
|
TimeDelay((int)RoutineStep.TimeDelay5, _EPV2OpenDelayTime);
|
|||
|
}
|
|||
|
//判断蝶阀是否开启
|
|||
|
CheckTvOpen((int)RoutineStep.CheckTVOpen2);
|
|||
|
if (!_isTvOpen)
|
|||
|
{
|
|||
|
SetThrottleEnableAndWait((int)RoutineStep.SetTvOpen, _IoThrottle, 10);
|
|||
|
SetThrottleToPressModeAndWait((int)RoutineStep.SetTvModeToPress, _IoThrottle, 10);
|
|||
|
}
|
|||
|
|
|||
|
////Loop
|
|||
|
////Loop((int)RoutineStep.StartLoop, _pressureLoopCount);
|
|||
|
////SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Dowing);
|
|||
|
////SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureDown, _IoThrottle, 20);
|
|||
|
////WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.WaitPressureDown, _IoThrottle, 20, _pmPressureMaxDiff, _throttleTimeout);
|
|||
|
|
|||
|
//////等待Pm压力到20,设置Pm压力到0
|
|||
|
////SetMfcByGroup((int)RoutineStep.SetMfc291519to38, MfcGroupName.M291519to38, 0, 2);
|
|||
|
////SetThrottlePressureAndWait((int)RoutineStep.SetPmPressureTo20, _IoThrottle, 0, _pmPressureMaxDiff, _throttleTimeout);
|
|||
|
////TimeDelay((int)RoutineStep.TimeDelay7, _pressureMinDelay);
|
|||
|
|
|||
|
//////设置Pm压力到300
|
|||
|
////SetMfcToDefaultByGroup((int)RoutineStep.SetMfc291519to38ToDefault, MfcGroupName.M291519to38, 2);
|
|||
|
////SetThrottlePressureAndWait((int)RoutineStep.WaitPressUpTo20, _IoThrottle, 20, _pmPressureMaxDiff, _throttleTimeout);
|
|||
|
////SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown2, PressureUpOrDown.Uping);
|
|||
|
////SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureUp, _IoThrottle, _pressureMax);
|
|||
|
////WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.WaitPressureUp, _IoThrottle, _pressureMax, _pmPressureMaxDiff, _throttleTimeout);
|
|||
|
////TimeDelay((int)RoutineStep.TimeDelay8, _pressureMaxDelay);
|
|||
|
////EndLoop((int)RoutineStep.EndLoop);
|
|||
|
|
|||
|
Loop((int)RoutineStep.StartLoop, _pressureLoopCount);
|
|||
|
SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Dowing);
|
|||
|
SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureDown, _IoThrottle, _pressureMin);
|
|||
|
WaitThrottleToPressureAndSetMfcSpecialForLidOpen((int)RoutineStep.WaitPressureDown, _IoThrottle, _pressureMin, _pmPressureMaxDiff, _pressureMinTimeout);
|
|||
|
TimeDelay((int)RoutineStep.TimeDelay7, _pressureMinDelay);
|
|||
|
|
|||
|
//设置Pm压力到300
|
|||
|
SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown2, PressureUpOrDown.Uping);
|
|||
|
SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureUp, _IoThrottle, _pressureMax);
|
|||
|
WaitThrottleToPressureAndSetMfcSpecialForLidOpen((int)RoutineStep.WaitPressureUp, _IoThrottle, _pressureMax, _pmPressureMaxDiff, _pressureMaxTimeout);
|
|||
|
TimeDelay((int)RoutineStep.TimeDelay8, _pressureMaxDelay);
|
|||
|
EndLoop((int)RoutineStep.EndLoop);
|
|||
|
|
|||
|
|
|||
|
|
|||
|
|
|||
|
//关闭先关蝶阀,再EPV2
|
|||
|
SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode2, _IoThrottle, 8);
|
|||
|
SetThrottleDisable((int)RoutineStep.CLoseTvvvv, _IoThrottle, 8);
|
|||
|
TimeDelay((int)RoutineStep.TimeDelay18, 1);
|
|||
|
SetIoValueByGroup((int)RoutineStep.SetEPVVV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
//判断反应腔压力是否超过1000mbar
|
|||
|
GetPressureCondition((int)RoutineStep.CheckPM1000, 1000);
|
|||
|
if (!_checkPMPressureOver1000)
|
|||
|
{
|
|||
|
//设置M28,M29,M31 为特定值
|
|||
|
SetMfc28to31Special((int)RoutineStep.SetMfc28to31Special, _mfc28SpecialFlow, _mfc29SpecialFlow, _mfc31SpecialFlow, 1);
|
|||
|
}
|
|||
|
|
|||
|
//等待反应腔压力到达1000
|
|||
|
NotifyInfo((int)RoutineStep.Notify1, "Wait pm pressure to 1000 mbar!");
|
|||
|
WaitChamberPressUpTo((int)RoutineStep.WaitPressUpTo1000, 1000, _waitChamberTo1000TimeOut);
|
|||
|
SetMfcToDefaultByGroup((int)RoutineStep.SetMfc28to40Default, MfcGroupName.M28toM40, 0);
|
|||
|
TimeDelay((int)RoutineStep.TimeDelay9, 1);
|
|||
|
SetIoValueByGroup((int)RoutineStep.CLoseEPV1, IoGroupName.EPV1, false, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
//等待反应腔压力到达1020
|
|||
|
NotifyInfo((int)RoutineStep.Notify2, "Wait pm pressure to 1020 mbar!");
|
|||
|
WaitChamberPressUpTo((int)RoutineStep.WaitPressUpTo1020, 1020, _waitChamberTo1000TimeOut);
|
|||
|
|
|||
|
//关闭V87-V96
|
|||
|
|
|||
|
|
|||
|
//打开V94,M36设置为Default值
|
|||
|
if (_needFinalValveOpen)
|
|||
|
{
|
|||
|
SetMfcByGroup((int)RoutineStep.CloseMfc1to16, MfcGroupName.M1to16, 0, 5);
|
|||
|
SetMfcByGroup((int)RoutineStep.CloseMfc19to26, MfcGroupName.M19toM26, 0, 5);
|
|||
|
|
|||
|
SetMfcForPurgeConfigByGroup((int)RoutineStep.CloseMfcFinal1, MfcGroupName.Final1, "Purge", 5);
|
|||
|
SetMfcForPurgeConfigByGroup((int)RoutineStep.CloseMfcFinal2, MfcGroupName.Final2, "Purge", 5);
|
|||
|
TimeDelay((int)RoutineStep.TimeDelay10, 5);
|
|||
|
SetIoValueByGroup((int)RoutineStep.CloseJ, IoGroupName.J, false, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
|
|||
|
}
|
|||
|
else
|
|||
|
{
|
|||
|
SetMfcByGroup((int)RoutineStep.CloseMfcFinal1, MfcGroupName.M32toM38, 0, 5);
|
|||
|
TimeDelay((int)RoutineStep.TimeDelay10, 5);
|
|||
|
SetIoValueByGroup((int)RoutineStep.CloseFinanl1, IoGroupName.Final1, false, _IoValueOpenCloseTimeout);
|
|||
|
|
|||
|
SetMfcByGroup((int)RoutineStep.CloseMfcFinal2, MfcGroupName.M19toM31, 0, 5);
|
|||
|
TimeDelay((int)RoutineStep.TimeDelay11, 5);
|
|||
|
SetIoValueByGroup((int)RoutineStep.CloseFinanl2, IoGroupName.Final2, false, _IoValueOpenCloseTimeout);
|
|||
|
SetMfcByGroup((int)RoutineStep.CloseMfc2915, MfcGroupName.M2915, 0, 5);
|
|||
|
}
|
|||
|
|
|||
|
|
|||
|
}
|
|||
|
catch (RoutineBreakException)
|
|||
|
{
|
|||
|
return Result.RUN;
|
|||
|
}
|
|||
|
catch (RoutineFaildException)
|
|||
|
{
|
|||
|
return Result.FAIL;
|
|||
|
}
|
|||
|
|
|||
|
Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
|
|||
|
_swTimer.Stop();
|
|||
|
SetRoutineRuningDo();
|
|||
|
SetRoutineSuccessedDo();
|
|||
|
return Result.DONE;
|
|||
|
}
|
|||
|
|
|||
|
|
|||
|
|
|||
|
public override void Abort()
|
|||
|
{
|
|||
|
SetRoutineRuningDo();
|
|||
|
PMDevice._ioThrottleValve.StopRamp();
|
|||
|
PMDevice.SetMfcStopRamp(PMDevice.GetMfcListByGroupName(MfcGroupName.All));
|
|||
|
PMDevice.SetRotationServo(0, 0);
|
|||
|
|
|||
|
base.Abort();
|
|||
|
}
|
|||
|
|
|||
|
private void SetRoutineRuningDo()
|
|||
|
{
|
|||
|
_pmIoInterLock.DoLidOpenRoutineRunning = false;
|
|||
|
}
|
|||
|
|
|||
|
private void SetRoutineSuccessedDo()
|
|||
|
{
|
|||
|
_pmIoInterLock.SetLidOpenRoutineSucceed(true, out string reason);
|
|||
|
_pmIoInterLock.DoLidCloseRoutineSucceed = false;
|
|||
|
}
|
|||
|
|
|||
|
|
|||
|
//private void CheckRoutineTimeOut()
|
|||
|
//{
|
|||
|
// if (_routineTimeOut > 10)
|
|||
|
// {
|
|||
|
// if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
|
|||
|
// {
|
|||
|
// Notify($"Routine TimeOut! over {_routineTimeOut} s");
|
|||
|
// throw (new RoutineFaildException());
|
|||
|
// }
|
|||
|
// }
|
|||
|
//}
|
|||
|
}
|
|||
|
}
|