Sic02-new/Modules/SicPM/Routines/PMPurgeRoutine.cs

486 lines
20 KiB
C#
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2023-07-25 14:28:00 +08:00
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using MECF.Framework.Common.Equipment;
using SicPM.Devices;
using System;
using System.Collections.Generic;
using System.Diagnostics;
namespace SicPM.Routines
{
public class PMPurgeRoutine : PMBaseRoutine
{
private enum RoutineStep
{
RotationEnable,
HeatEnable,
VentPumpClose,
ArSupply,
SetGroupA,
SetGroupB,
SetGroupC,
SetGroupE,
SetGroupF,
SetGroupH,
SetGroupD,
SetGroupG,
SetGroupK,
SetMFCMode,
SetPCMode,
SetM1to16,
SetPC,
SetGroupJ,
SetM291519to38,
SetGasOut,
SetTv,
SetGasIn1, //V65,V67,V68
OpenFinal1, //V91-96
SetMfcFinal1, //M32-38
SetMfc19to26,
SetTVCloseMode,
SetTvPositionToZero,
SetGasIn2,
SetGroupJOpen,
SetM291519to26,
OpenFinal2,
SetMfcFinal2,
SetEPV1,
SetEPV2,
SetTvMode,
SetTvOpen,
SetTvModeToPress,
SetTVtoCurrent,
RoutinePre,
SetPressureUp,
SetPressureDown,
WaitPressureDown,
WaitPressureUp,
VentPumpOpen,
PressureToMax,
PressureToMin,
StartLoop,
EndLoop,
SetMfc28to31,
SetReactorPress,
CloseFinanl1,
CloseFinanl2,
CloseEPV2,
SetTVCloseMode2,
CLoseTvvvv,
SetEPVVV2,
CLoseEPV1,
CheckPM1000,
WaitPressUpTo1000,
WaitPressUpTo1020,
SetPressUpOrDown1,
SetPressUpOrDown2,
SetMfc28to31Special,
WaitPmPressureUp,
SetMfc28to40Default,
SetV75,
SetV76,
SetV751,
SetV761,
SetPC567Close,
SetPC567Mode,
SetPC567Default,
OpenEPV2,
WaitPressUpTo20,
SetMfc291519to38,
WaitPressUpTo0,
SetMfc291519to38ToDefault,
WaitPressDownTo20,
SetPmPressureTo20,
CloseMfcFinal1,
CloseMfcFinal2,
CloseMfc2915,
CheckFinal1Open,
SetGroupV38,
SetGroupV25,
SetV94,
Mfc36,
SetM39,
CloseJ,
CloseMfc1to16, CloseMfc19to26,
CheckTVOpen1,
CheckTVOpen2,
CheckEPV1Open1,
CheckEPV2Open1,
CheckEPV2Open2,
Set2Mfc19to26,
TimeDelay1,
TimeDelay2,
TimeDelay3,
TimeDelay4,
TimeDelay5,
TimeDelay6,
TimeDelay7,
TimeDelay8,
TimeDelay9,
TimeDelay10,
TimeDelay11,
TimeDelay18,
TimeDelay19,
Notify1,
Notify2
}
private ModuleName moduleName;
private PMModule _pmModule;
private IoThrottleValve2 _IoThrottle;
private IoInterLock _pmIoInterLock;
List<int> _lstPcList = new List<int> { 1, 2, 3, 4, 5, 6, 7 };
private int _rotationCheckSpeed =0 ; //设置旋转速度为0后检查是否转速低于此数值
private int _rotationCloseTimeout; //旋转停止超时
private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
private int _EPV2OpenTimeDelay = 10;
private double _pressureMax; //Loop压力上限可设置600-800
private double _pressureMin; //Loop压力下限可设置 0-400
private int _pressureLoopCount; //Loop次数
private int _pressureMinDelay;
private int _pressureMaxDelay;
private int _pressureMinTimeout;
private int _pressureMaxTimeout;
private int _IoValueOpenCloseTimeout = 10; //开关阀门超时时间
private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
private int _EPV12TimeSapn = 10;
private int _waitChamberTo1000TimeOut = 300; //等待腔体压力上升到1000的超时时间
private double _mfc28SpecialFlow = 15000;
private double _mfc29SpecialFlow = 5000;
private double _mfc31SpecialFlow = 10000;
//private int _routineTimeOut;
private int _EPV2OpenDelayTime = 9;
private bool _needFinalValveOpen = false;
private double _mfc36Flow = 0;
private Stopwatch _swTimer = new Stopwatch();
public PMPurgeRoutine(ModuleName module, PMModule pm) : base(module, pm)
{
moduleName = module;
_pmModule = pm;
Name = "Purge";
_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
_pmIoInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
}
public override Result Start(params object[] objs)
{
Reset();
_EPV12TimeSapn = SC.GetConfigItem($"PM.{Module}.EPV2OpenTimeDelayAlterEPV1Open").IntValue;
_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
_EPV2OpenTimeDelay = SC.GetConfigItem($"PM.{Module}.EPV2OpenTimeDelayAlterEPV1Open").IntValue;
_mfc28SpecialFlow = SC.GetValue<double>($"PM.{Module}.Mfc28FlowSpecail");
_mfc29SpecialFlow = SC.GetValue<double>($"PM.{Module}.Mfc29FlowSpecail");
_mfc31SpecialFlow = SC.GetValue<double>($"PM.{Module}.Mfc31FlowSpecail");
_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
_pressureLoopCount = SC.GetValue<int>($"PM.{Module}.Purge.CyclePurgeCount");
_pressureMin = SC.GetValue<double>($"PM.{Module}.Purge.PumpBasePressure");
_pressureMinDelay = SC.GetValue<int>($"PM.{Module}.Purge.PumpDelayTime");
_pressureMinTimeout = SC.GetValue<int>($"PM.{Module}.Purge.PumpTimeout");
_pressureMax = SC.GetValue<double>($"PM.{Module}.Purge.VentBasePressure");
_pressureMaxDelay = SC.GetValue<int>($"PM.{Module}.Purge.VentDelayTime");
_pressureMaxTimeout = SC.GetValue<int>($"PM.{Module}.Purge.VentTimeout");
//_routineTimeOut = SC.GetValue<int>($"PM.{Module}.Purge.RoutineTimeOut");
_EPV2OpenDelayTime = SC.GetValue<int>($"PM.{Module}.TimeDelayAlterEPV2Open");
_needFinalValveOpen = SC.GetValue<bool>($"PM.{Module}.Purge.NeedFinalValveOpen");
_mfc36Flow = SC.GetValue<double>($"PM.{Module}.Purge.Mfc36Flow");
if (!_pmIoInterLock.SetPMPurgeRoutineRunning(true, out string reason))
{
EV.PostAlarmLog(Module, $"can not Purge,{reason}");
return Result.FAIL;
}
//Clean succeed 清掉
_pmIoInterLock.DoLidCloseRoutineSucceed = false;
//purge succeed 清掉
_pmIoInterLock.DoLidOpenRoutineSucceed = false;
currentPressureUpOrDown = PressureUpOrDown.None;
_finalOpen = false;
_swTimer.Restart();
Notify($"Start LoopCount:{_pressureLoopCount}");
return Result.RUN;
}
//Purge
public override Result Monitor()
{
try
{
//CheckRoutineTimeOut();
SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);
SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.ArSupply, IoGroupName.ArSupply, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupV38, IoGroupName.V38, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
SetMfcByGroup((int)RoutineStep.SetM39, MfcGroupName.M39, 0, 1);
SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16,0);
SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
CheckFinalIoStatue((int)RoutineStep.CheckFinal1Open);
if (!_finalOpen)
{
SetMfcByGroup((int)RoutineStep.SetM291519to38, MfcGroupName.M291519to38, 0, 5);
TimeDelay((int)RoutineStep.TimeDelay1, 5);
}
//1.打开抽气系统 打开EPV1,关闭EPV2,打开throttle valve enable压力伺服当前压力值 [由于InterLock原因,需要先开EPV1再开EPV2]
//判断蝶阀是否开启
CheckTvOpen((int)RoutineStep.CheckTVOpen1);
if (_isTvOpen)
{
SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8);
SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8);
TimeDelay((int)RoutineStep.TimeDelay19, 1);
}
//SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
CheckEPV1Open((int)RoutineStep.CheckEPV1Open1);
if (!_isEPV1Open)
{
SetIoValueByGroup((int)RoutineStep.SetEPV1, IoGroupName.EPV1, true, _IoValueOpenCloseTimeout);
TimeDelay((int)RoutineStep.TimeDelay2, _EPV2OpenTimeDelay);
}
//2.打开进气系统 V65,V67,V68)
SetIoValueByGroup((int)RoutineStep.SetGasIn1, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
//3.打开Final valves 和对应的MFC值
SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3);
TimeDelay((int)RoutineStep.TimeDelay3, 3);
SetIoValueByGroup((int)RoutineStep.OpenFinal1, IoGroupName.Final1, true, _IoValueOpenCloseTimeout);
SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal1, MfcGroupName.Final1, 3);
TimeDelay((int)RoutineStep.TimeDelay4, 3);
//4.打开J Valves
SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout);
SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M291519to26, 3);
//打开EPV2,等待9秒,打开蝶阀
//判断EPV2是否开启
CheckEPV2Open((int)RoutineStep.CheckEPV2Open1);
if (!_isEPV2Open)
{
SetIoValueByGroup((int)RoutineStep.OpenEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
TimeDelay((int)RoutineStep.TimeDelay5, _EPV2OpenDelayTime);
}
//判断蝶阀是否开启
CheckTvOpen((int)RoutineStep.CheckTVOpen2);
if (!_isTvOpen)
{
SetThrottleEnableAndWait((int)RoutineStep.SetTvOpen, _IoThrottle, 10);
SetThrottleToPressModeAndWait((int)RoutineStep.SetTvModeToPress, _IoThrottle, 10);
}
////Loop
////Loop((int)RoutineStep.StartLoop, _pressureLoopCount);
////SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Dowing);
////SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureDown, _IoThrottle, 20);
////WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.WaitPressureDown, _IoThrottle, 20, _pmPressureMaxDiff, _throttleTimeout);
//////等待Pm压力到20设置Pm压力到0
////SetMfcByGroup((int)RoutineStep.SetMfc291519to38, MfcGroupName.M291519to38, 0, 2);
////SetThrottlePressureAndWait((int)RoutineStep.SetPmPressureTo20, _IoThrottle, 0, _pmPressureMaxDiff, _throttleTimeout);
////TimeDelay((int)RoutineStep.TimeDelay7, _pressureMinDelay);
//////设置Pm压力到300
////SetMfcToDefaultByGroup((int)RoutineStep.SetMfc291519to38ToDefault, MfcGroupName.M291519to38, 2);
////SetThrottlePressureAndWait((int)RoutineStep.WaitPressUpTo20, _IoThrottle, 20, _pmPressureMaxDiff, _throttleTimeout);
////SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown2, PressureUpOrDown.Uping);
////SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureUp, _IoThrottle, _pressureMax);
////WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.WaitPressureUp, _IoThrottle, _pressureMax, _pmPressureMaxDiff, _throttleTimeout);
////TimeDelay((int)RoutineStep.TimeDelay8, _pressureMaxDelay);
////EndLoop((int)RoutineStep.EndLoop);
Loop((int)RoutineStep.StartLoop, _pressureLoopCount);
SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Dowing);
SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureDown, _IoThrottle, _pressureMin);
WaitThrottleToPressureAndSetMfcSpecialForLidOpen((int)RoutineStep.WaitPressureDown, _IoThrottle, _pressureMin, _pmPressureMaxDiff, _pressureMinTimeout);
TimeDelay((int)RoutineStep.TimeDelay7, _pressureMinDelay);
//设置Pm压力到300
SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown2, PressureUpOrDown.Uping);
SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureUp, _IoThrottle, _pressureMax);
WaitThrottleToPressureAndSetMfcSpecialForLidOpen((int)RoutineStep.WaitPressureUp, _IoThrottle, _pressureMax, _pmPressureMaxDiff, _pressureMaxTimeout);
TimeDelay((int)RoutineStep.TimeDelay8, _pressureMaxDelay);
EndLoop((int)RoutineStep.EndLoop);
//关闭先关蝶阀,再EPV2
SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode2, _IoThrottle, 8);
SetThrottleDisable((int)RoutineStep.CLoseTvvvv, _IoThrottle, 8);
TimeDelay((int)RoutineStep.TimeDelay18, 1);
SetIoValueByGroup((int)RoutineStep.SetEPVVV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
//判断反应腔压力是否超过1000mbar
GetPressureCondition((int)RoutineStep.CheckPM1000, 1000);
if (!_checkPMPressureOver1000)
{
//设置M28,M29,M31 为特定值
SetMfc28to31Special((int)RoutineStep.SetMfc28to31Special, _mfc28SpecialFlow, _mfc29SpecialFlow, _mfc31SpecialFlow, 1);
}
//等待反应腔压力到达1000
NotifyInfo((int)RoutineStep.Notify1, "Wait pm pressure to 1000 mbar!");
WaitChamberPressUpTo((int)RoutineStep.WaitPressUpTo1000, 1000, _waitChamberTo1000TimeOut);
SetMfcToDefaultByGroup((int)RoutineStep.SetMfc28to40Default, MfcGroupName.M28toM40, 0);
TimeDelay((int)RoutineStep.TimeDelay9, 1);
SetIoValueByGroup((int)RoutineStep.CLoseEPV1, IoGroupName.EPV1, false, _IoValueOpenCloseTimeout);
//等待反应腔压力到达1020
NotifyInfo((int)RoutineStep.Notify2, "Wait pm pressure to 1020 mbar!");
WaitChamberPressUpTo((int)RoutineStep.WaitPressUpTo1020, 1020, _waitChamberTo1000TimeOut);
//关闭V87-V96
//打开V94,M36设置为Default值
if (_needFinalValveOpen)
{
SetMfcByGroup((int)RoutineStep.CloseMfc1to16, MfcGroupName.M1to16, 0, 5);
SetMfcByGroup((int)RoutineStep.CloseMfc19to26, MfcGroupName.M19toM26, 0, 5);
SetMfcForPurgeConfigByGroup((int)RoutineStep.CloseMfcFinal1, MfcGroupName.Final1, "Purge", 5);
SetMfcForPurgeConfigByGroup((int)RoutineStep.CloseMfcFinal2, MfcGroupName.Final2, "Purge", 5);
TimeDelay((int)RoutineStep.TimeDelay10, 5);
SetIoValueByGroup((int)RoutineStep.CloseJ, IoGroupName.J, false, _IoValueOpenCloseTimeout);
}
else
{
SetMfcByGroup((int)RoutineStep.CloseMfcFinal1, MfcGroupName.M32toM38, 0, 5);
TimeDelay((int)RoutineStep.TimeDelay10, 5);
SetIoValueByGroup((int)RoutineStep.CloseFinanl1, IoGroupName.Final1, false, _IoValueOpenCloseTimeout);
SetMfcByGroup((int)RoutineStep.CloseMfcFinal2, MfcGroupName.M19toM31, 0, 5);
TimeDelay((int)RoutineStep.TimeDelay11, 5);
SetIoValueByGroup((int)RoutineStep.CloseFinanl2, IoGroupName.Final2, false, _IoValueOpenCloseTimeout);
SetMfcByGroup((int)RoutineStep.CloseMfc2915, MfcGroupName.M2915, 0, 5);
}
}
catch (RoutineBreakException)
{
return Result.RUN;
}
catch (RoutineFaildException)
{
return Result.FAIL;
}
Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
_swTimer.Stop();
SetRoutineRuningDo();
SetRoutineSuccessedDo();
return Result.DONE;
}
public override void Abort()
{
SetRoutineRuningDo();
PMDevice._ioThrottleValve.StopRamp();
PMDevice.SetMfcStopRamp(PMDevice.GetMfcListByGroupName(MfcGroupName.All));
PMDevice.SetRotationServo(0, 0);
base.Abort();
}
private void SetRoutineRuningDo()
{
_pmIoInterLock.DoLidOpenRoutineRunning = false;
}
private void SetRoutineSuccessedDo()
{
_pmIoInterLock.SetLidOpenRoutineSucceed(true, out string reason);
_pmIoInterLock.DoLidCloseRoutineSucceed = false;
}
//private void CheckRoutineTimeOut()
//{
// if (_routineTimeOut > 10)
// {
// if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
// {
// Notify($"Routine TimeOut! over {_routineTimeOut} s");
// throw (new RoutineFaildException());
// }
// }
//}
}
}