216 lines
5.9 KiB
C#
216 lines
5.9 KiB
C#
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using Mainframe.TMs;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.TMs;
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using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Text;
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using System.Threading.Tasks;
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namespace Mainframe.LLs
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{
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class LoadLockVentToRoutine : ModuleRoutine, IRoutine
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{
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enum RoutineStep
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{
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PumpDownToBase,
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SlowVent,
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CloseSlowVentValve,
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TimeDelay1,
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}
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private LoadLock _ll;
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private SicTM _tm;
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private LoadLockPumpRoutine _pumpDownRoutine;
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private double _ventTargetPressure;
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private int _slowVentTimeout;
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private int _fastVentTimeout;
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private int _ventDelayTime;
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private bool _needPumpDown;
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private bool _needBalance;
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private bool isAtmMode = false;
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public LoadLockVentToRoutine()
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{
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Module = ModuleName.LoadLock.ToString(); ;
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Name = "VentTo";
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_ll = DEVICE.GetDevice<SicLoadLock>($"{ Module}.{Module}");
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_tm = DEVICE.GetDevice<SicTM>($"{ModuleName.System.ToString()}.{"TM"}");
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_pumpDownRoutine = new LoadLockPumpRoutine(ModuleName.LoadLock);
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}
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public Result Start(params object[] objs)
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{
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Reset();
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_ventTargetPressure = SC.GetValue<double>($"TM.PressureBalance.BalancePressureForLL");
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isAtmMode = SC.GetValue<bool>("System.IsATMMode");
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string reason;
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if (!_ll.SetFastPumpValve(false, out reason)
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|| !_ll.SetSlowPumpValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"Can not turn off valves, {reason}");
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return Result.FAIL;
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}
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if (!_ll.CheckDoorClose())
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{
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EV.PostAlarmLog(Module, $"can not vent, lid is open");
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return Result.FAIL;
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}
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if (!_tm.SetFastPumpValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"can not vent, TM fast pump value can not close");
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return Result.FAIL;
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}
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if (!_tm.SetFastPumpValve(false, out reason))
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{
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EV.PostAlarmLog(Module, $"can not vent, TM fast pump value can not close");
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return Result.FAIL;
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}
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if (!_tm.SetTmToLLVent(false, out _))
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{
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EV.PostAlarmLog(Module, $"can not vent,can not close v85!");
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}
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_slowVentTimeout = SC.GetValue<int>("LoadLock.Vent.SlowVentTimeout");
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_needPumpDown = !_ll.CheckVacuum();
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//_needPumpDown = true;
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Notify("Start");
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return Result.RUN;
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}
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public Result Monitor()
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{
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try
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{
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if (isAtmMode)
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{
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return Result.DONE;
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}
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//抽到真空
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if (_needPumpDown)
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{
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ExecuteRoutine((int)RoutineStep.PumpDownToBase, _pumpDownRoutine);
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}
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TimeDelay((int)RoutineStep.TimeDelay1, 1);
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if (_ventTargetPressure == 0)
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{
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return Result.DONE;
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}
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SlowVent((int)RoutineStep.SlowVent, _ll, _ventTargetPressure, _slowVentTimeout);
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CloseSlowVentValve((int)RoutineStep.CloseSlowVentValve, _ll);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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Notify("Finished");
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return Result.DONE;
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}
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public void Abort()
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{
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_ll.SetSlowVentValve(false, out _);
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_ll.SetFastVentValve(false, out _);
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}
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public void SlowVent(int id, LoadLock ll, double switchPressure, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"Open {ll.Name} slow vent valve to {switchPressure} mbar");
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if (!_ll.SetSlowVentValve(true, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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}, () =>
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{
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return ll.ChamberPressure >= switchPressure;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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_ll.SetSlowVentValve(false, out string _);
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Stop($"{ll.Name} pressure can not vent to {switchPressure} mbar in {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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public void CloseSlowVentValve(int id, LoadLock ll)
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{
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Tuple<bool, Result> ret = Execute(id, () =>
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{
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Notify($"Close {ll.Name} slow vent valve");
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if (!_ll.SetSlowVentValve(false, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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});
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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}
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}
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