using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using SicPM.Devices; using System; using System.Collections.Generic; using System.Diagnostics; namespace SicPM.Routines { public class PMVacIdleRoutine : PMBaseRoutine { private enum RoutineStep { RotationEnable, HeatEnable, VentPumpClose, ArSupply, SetGroupB, SetGroupC, SetGroupE, SetGroupF, SetGroupH, SetGroupD, SetGroupG, SetGroupK, SetM1to16, SetPC, SetGroupI, //V87-96 SetM19to38, MfcAll, SetGasOut, SetTv, SetTv1, SetGasIn1, //V65,V67,V68 OpenFinal1, //V91-96 SetMfcFinal1, //M32-38 SetGasIn2, SetGroupJOpen, OpenFinal2, SetMfcFinal2, PumpDownTimeout, SetTvMode, SetEPV1, SetEPV2, SetTVCloseMode, SetTvPositionToZero, SetMFCMode, SetPCMode, SetTvOpen, SetTvModeToPress, SetTVto1050, CloseFinanl1, CloseFinanl2, SetGroupV38, Mfc1to16, SetV76, SetV75, SetGroupV25, SetV94, Mfc36, TimeDelay1, TimeDelay2, TimeDelay3, TimeDelay4, TimeDelay5, TimeDelay6, TimeDelay7, TimeDelay8, TimeDelay9, TimeDelay10, TimeDelay11, } private PMModule _pmModule; private IoThrottleValve2 _IoThrottle; List _lstPcList = new List { 1, 2, 3, 4, 5, 6, 7 }; private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值 private int _rotationCloseTimeout; //旋转停止超时 private int _IoValueOpenCloseTimeout = 10; //开关超时时间 private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间 private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了) private int _throttleTimeout; //蝶阀调整到指定压力的超时时间 private int _pumpDownKeep = 10; private int _EPV12TimeSapn = 10; private double _pumpBasePressure =0 ; private int _routineTimeOut = 300; private int _EPV2OpenDelayTime = 9; private Stopwatch _swTimer = new Stopwatch(); public PMVacIdleRoutine(ModuleName module, PMModule pm) : base(module, pm) { Module = module.ToString(); _pmModule = pm; Name = "VacIdle"; _IoThrottle = DEVICE.GetDevice($"{Module}.TV"); } public override Result Start(params object[] objs) { Reset(); _rotationCloseTimeout = SC.GetValue($"PM.{Module}.RotationCloseTimeout"); _pmPressureMaxDiff = SC.GetValue($"PM.{Module}.ThrottlePressureMaxDiff"); _throttleTimeout = SC.GetValue($"PM.{Module}.ThrottlePressureTimeout"); _EPV2OpenDelayTime = SC.GetValue($"PM.{Module}.TimeDelayAlterEPV2Open"); _swTimer.Restart(); Notify("Start"); return Result.RUN; } public override Result Monitor() { try { CheckRoutineTimeOut(); SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout); SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut); SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout); SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.ArSupply, IoGroupName.ArSupply, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV38, IoGroupName.V38, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All); SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList); //1.所有PC,MFC1-16设置到默认值 //////SetMfcToDefaultByGroup((int)RoutineStep.MfcAll, MfcGroupName.All, 5); //////TimeDelay((int)RoutineStep.TimeDelay1, 5); SetMfcToDefaultByGroup((int)RoutineStep.Mfc1to16, MfcGroupName.M1to16, 3); TimeDelay((int)RoutineStep.TimeDelay1, 3); SetPcToDefault((int)RoutineStep.SetPC, _lstPcList); SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout); SetMfcByGroup((int)RoutineStep.SetM19to38, MfcGroupName.M291519to38, 0, 5); TimeDelay((int)RoutineStep.TimeDelay2, 5); //2.依次关闭I Value SetIoValueByGroup((int)RoutineStep.CloseFinanl1, IoGroupName.Final1, false, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay3, 1); SetIoValueByGroup((int)RoutineStep.CloseFinanl2, IoGroupName.Final2, false, _IoValueOpenCloseTimeout); //3.打开抽气系统 (打开EPV2,EPV1,打开throttle valve enable压力伺服当前压力值) [由于InterLock原因,需要先开EPV1再开EPV2] SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8); SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8); SetIoValueByGroup((int)RoutineStep.SetEPV1, IoGroupName.EPV1, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay4, _EPV12TimeSapn); //打开EPV2 SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay5, _EPV2OpenDelayTime); //打开蝶阀,压力设定为1050 SetThrottleEnableAndWait((int)RoutineStep.SetTvOpen, _IoThrottle, 10); SetThrottleToPressModeAndWait((int)RoutineStep.SetTvModeToPress, _IoThrottle, 10); SetThrottleToTargetAndNoWait((int)RoutineStep.SetTVto1050, _IoThrottle, 1050); TimeDelay((int)RoutineStep.TimeDelay6, 2); //4.Pump down到0mbar,达到稳定后保持10秒 SetThrottlePressureAndWait((int)RoutineStep.SetTv1, _IoThrottle, _pumpBasePressure, _pmPressureMaxDiff, _throttleTimeout); Delay((int)RoutineStep.TimeDelay7, _pumpDownKeep); ////打开V94,M36设置为Default值 //SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout); //SetMfcToDefaultByGroup((int)RoutineStep.Mfc36, MfcGroupName.M36, 3); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s"); _swTimer.Stop(); return Result.DONE; } public override void Abort() { PMDevice.SetRotationServo(0, 0); base.Abort(); } private void CheckRoutineTimeOut() { if (_routineTimeOut > 10) { if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut) { Notify($"Routine TimeOut! over {_routineTimeOut} s"); throw (new RoutineFaildException()); } } } } }