using System; using System.Collections.Generic; using Aitex.Core.Common.DeviceData; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Routine; using MECF.Framework.Common.Equipment; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.PMs; namespace SicPM.Routines { public class PMBaseRoutine : ModuleRoutine, IRoutine { protected PressureUpOrDown currentPressureUpOrDown = PressureUpOrDown.None; protected PressureLevel _lastPressureLevel = PressureLevel.Leavel0; protected bool _checkPMPressureOver1000; protected bool _checkPMPt2Over1000; protected bool _checkChamberLowThan20 = false; protected bool _checkChamberHighThan20 = false; protected bool _v72IsOpen = false; protected bool _finalOpen = false; protected bool _isTvOpen = false; protected bool _isEPV1Open = false; protected bool _isEPV2Open = false; protected bool _setMfc291519to38Flag = false; //在LidOpen和LidClose过程中是否已经设置过了MFC的值 protected enum PressureLevel { Leavel0 = 50, Leavel1 = 150, Leavel2 = 250, Leavel3 = 350, Leavel4 = 450, Leavel5 = 550, Leavel6 = 650, Leavel7 = 750, Leavel8 = 850, Leavel9 = 950, Leavel10= 1150, } protected PressureLevel GetPressure(double pressure) { if (pressure <= 100) { return PressureLevel.Leavel0; } else if (pressure <= 200) { return PressureLevel.Leavel1; } else if (pressure <= 300) { return PressureLevel.Leavel2; } else if (pressure <= 400) { return PressureLevel.Leavel3; } else if (pressure <= 500) { return PressureLevel.Leavel4; } else if (pressure <= 600) { return PressureLevel.Leavel5; } else if (pressure <= 700) { return PressureLevel.Leavel6; } else if (pressure <= 800) { return PressureLevel.Leavel7; } else if (pressure <= 900) { return PressureLevel.Leavel8; } else { return PressureLevel.Leavel9; } } protected enum PressureUpOrDown { Uping, Dowing, None, } protected PMModule PMDevice { get { return _pm; } } private PMModule _pm; public PMBaseRoutine(ModuleName module, PMModule pm) { Module = module.ToString(); _pm = pm; } public virtual Result Start(params object[] objs) { return Result.DONE; } public virtual Result Monitor() { return Result.DONE; } public virtual void Abort() { _pm.SetMfcToDefaultByGroup(MfcGroupName.M28toM40); } protected void PreparePump(int id, PMModuleBase pm, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"{pm.Name} prepare pump"); if (!pm.PreparePump(out string reason)) { Stop(reason); return false; } return true; }, () => { return pm.CheckPreparePump(); }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } if (ret.Item2 == Result.TIMEOUT) { Stop($"{pm.Name} prepare pump timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else { throw (new RoutineBreakException()); } } } protected void TurnPumpOn(int id, PMModuleBase pm, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Turn on {pm.Name} pump"); if (!pm.TurnOnPump(out string reason)) { Stop(reason); return false; } return true; }, () => { return pm.CheckPumpIsOn(); }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } if (ret.Item2 == Result.TIMEOUT) { Stop($"{pm.Name} turn on pump timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else { throw (new RoutineBreakException()); } } } protected void PumpToBase(int id, PMModuleBase pm, double basePressure, int tvPosition, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Run {pm.Name} pump to base pressure {basePressure:F2} mbar"); if (!pm.FastPump(tvPosition, out string reason)) { Stop(reason); return false; } return true; }, () => { if (pm.IsError) { Stop($"{pm.Name} error"); return null; } return pm.ChamberPressure < basePressure; }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) //timeout { Stop($"{pm.Name} pump to base pressure {basePressure:F2} timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void PumpToHighVacuum(int id, string stepName, PM pm, double pumpHighVacuumPressure, int tvPosition, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Run {pm.Name} fast pump to {pumpHighVacuumPressure:F2} mbar"); //if (!pm.FastPump(tvPosition, out string reason)) //{ // Stop(reason); // return false; //} _stepSpan = new TimeSpan(0, 0, 0, (int)timeout); _stepStartTime = DateTime.Now; _stepName = stepName; return true; }, () => { if (pm.IsError) { Stop($"{pm.Name} error"); return null; } return pm.ChamberPressure < pumpHighVacuumPressure; }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) //timeout { Stop($"{pm.Name} pump to gas line pump pressure timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SlowPump(int id, PMModuleBase pm, double slowPumpBasePressure, int tvPosition, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Run {pm.Name} slow pump to {slowPumpBasePressure:F2} mbar"); if (!pm.SlowPump(tvPosition, out string reason)) { Stop(reason); return false; } return true; }, () => { if (pm.IsError) { Stop($"{pm.Name} error"); return null; } return pm.ChamberPressure < slowPumpBasePressure; }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) //timeout { Stop($"{pm.Name} slow pump timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void CheckForelinePressure(int id, string stepName, PM pm, double forelineBasePressure, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Run {pm.Name} check foreline pressure lower than {forelineBasePressure:F2} mbar"); _stepSpan = new TimeSpan(0, 0, 0, (int)timeout); _stepStartTime = DateTime.Now; _stepName = stepName; return true; }, () => { if (pm.IsError) { Stop($"{pm.Name} error"); return null; } return pm.ForelinePressure <= forelineBasePressure; }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) //timeout { Stop($"{pm.Name} wait foreline lower than {forelineBasePressure:F2} mbar timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void CheckPumpOn(int id, PMModuleBase pm) { Tuple ret = Execute(id, () => { Notify($"Run {pm.Name} check pump is on"); if (!pm.CheckPumpIsOn()) { Stop("Pump not on"); return false; } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else { throw (new RoutineBreakException()); } } } protected void CheckChamberOk(int id, PMModuleBase pm) { Tuple ret = Execute(id, () => { Notify($"Run {pm.Name} check chamber running no error"); if (pm.IsError) { Stop($"{pm.Name} error"); return false; } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else { throw (new RoutineBreakException()); } } } protected void EnableRotation(int id, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Set {Module} rotation enable"); if (!_pm.SetRotationEnable(true, out string reason)) { Stop($"Set {Module} rotation enable failed, {reason}"); return false; } return true; }, () => { return _pm.CheckRotationEnable(); }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) { Stop($"Set {Module} rotation enable timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } //protected void EnableHeater(int id,int timeout) //{ // Tuple ret = ExecuteAndWait(id, () => // { // Notify($"Set {_pm.Name} Heater Enable"); // if (!_pm.EnableHeater(true, out string reason)) // { // Stop($"Set {_pm.Name} Heater Enable failed, {reason}"); // return false; // } // return true; // }, () => // { // return _pm.CheckHeaterEnable(); // }, timeout * 1000); // if (ret.Item1) // { // if (ret.Item2 == Result.FAIL) // { // throw (new RoutineFaildException()); // } // if (ret.Item2 == Result.TIMEOUT) // { // Stop($"Set {_pm.Name} Heater Enable timeout, over {timeout} seconds"); // throw (new RoutineFaildException()); // } // else // { // throw (new RoutineBreakException()); // } // } //} /// /// 设置电机转速 /// /// 检查是否低于此速度 protected void SetRotationValve(int id, float checkSpeed,bool bigThan, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Set {Module} rotation to {checkSpeed}"); if (!_pm.SetRotationServo(checkSpeed, 0)) { Stop($"Set {Module} rotation error"); return false; } return true; }, () => { return _pm.CheckRotationServoOn(checkSpeed, bigThan); }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) { Stop($"{Module} Stop rotation timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetRotationValveAndNoWait(int id, float checkSpeed) { Tuple ret = Execute(id, () => { //Notify($"Set {Module} rotation"); if (!_pm.SetRotationServo(checkSpeed, 0)) { //Stop($"Set {Module} rotation error"); return false; } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } //设置Head Heater Enable protected void SetHeadHeatEnable(int id, bool enable, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Set {Module} head heater"); if (!_pm.SetHeadHeaterEnable(enable)) { Stop($"Set {Module} head heater error"); return false; } return true; }, () => { return _pm.CheckHeadHeaterEnable(enable); }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) { Stop($"{Module} Set heat timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetHeatEnable(int id, bool enable, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Set {Module} heat"); if (!_pm.SetHeatEnable(enable)) { Stop($"Set {Module} heat error"); return false; } return true; }, () => { return _pm.CheckHeatEnable(enable); }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) { Stop($"{Module} Set heat timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetPSUEnable(int id, bool enable, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Set {Module} heat TC1"); if (!_pm.SetHeatEnableTC(enable,true)) { Stop($"Set {Module} heat TC1 error"); return false; } return true; }, () => { return _pm.CheckHeatEnableTC(enable,true); }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) { Stop($"{Module} Set heat TC1 timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetSCRReset(int id) { Tuple ret = Execute(id, () => { Notify($"Set {Module} SCR Reset"); if (!_pm.SetSCRReset()) { return false; } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetSCREnable(int id, bool enable, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Set {Module} heat TC2"); if (!_pm.SetHeatEnableTC(enable,false)) { Stop($"Set {Module} heat TC2 error"); return false; } return true; }, () => { return _pm.CheckHeatEnableTC(enable,false); }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) { Stop($"{Module} Set heat TC2 timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetPSUHeatMode(int id, float mode) { Tuple ret = Execute(id, () => { Notify($"Set PSU HeatMode"); if (!_pm.TC1.SetHeaterMode(mode,0)) { Stop($"Set PSU HeatMode error"); return false; } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetPSUHeatRatio(int id,float lp1,float lp2,float lp3) { Tuple ret = Execute(id, () => { Notify($"Set PSU Ratio"); if (!_pm.TC1.SetRatio1(lp1, lp2, lp3)) { Stop($"Set PSU Ratio error"); return false; } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } //protected void SetTC1PowerRef(int id, float powerRef) //{ // Tuple ret = Execute(id, () => // { // Notify($"Set PSU PowerRef1"); // if (!_pm.TC1.SetPowerRef1(powerRef)) // { // Stop($"Set PSU SetPowerRef1 error"); // return false; // } // return true; // }); // if (ret.Item1) // { // if (ret.Item2 == Result.FAIL) // { // throw (new RoutineFaildException()); // } // else // throw (new RoutineBreakException()); // } //} protected void SetSCRHeatMode(int id, float mode) { Tuple ret = Execute(id, () => { Notify($"Set SCR HeatMode"); if (!_pm.TC2.SetHeaterMode2(mode,0)) { Stop($"Set SCR HeatMode error"); return false; } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetSCRHeatRatio(int id, float lp1, float lp2, float lp3) { Tuple ret = Execute(id, () => { Notify($"Set SCR Ratio"); if (!_pm.TC2.SetRatio(lp1, lp2, lp3)) { Stop($"Set SCR Ratio error"); return false; } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } //protected void SetTC2PowerRef(int id, float powerRef) //{ // Tuple ret = Execute(id, () => // { // Notify($"Set SCR PowerRef1"); // if (!_pm.TC2.SetPowerRef(powerRef)) // { // Stop($"Set SCR SetPowerRef1 error"); // return false; // } // return true; // }); // if (ret.Item1) // { // if (ret.Item2 == Result.FAIL) // { // throw (new RoutineFaildException()); // } // else // throw (new RoutineBreakException()); // } //} protected void CheckFinalIoStatue(int id) { Tuple ret = Execute(id, () => { Notify($"Check Final valve is open or closed!"); _finalOpen = _pm.CheckIOValueByGroup(IoGroupName.Final1, true) && _pm.CheckIOValueByGroup(IoGroupName.Final2, true); return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else { throw (new RoutineBreakException()); } } } protected void CheckTvOpen(int id) { Tuple ret = Execute(id, () => { _isTvOpen = _pm._ioThrottleValve.TVValveEnable && _pm._ioThrottleValve.PressureMode == PressureCtrlMode.TVPressureCtrl; return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else { throw (new RoutineBreakException()); } } } protected void CheckEPV1Open(int id) { Tuple ret = Execute(id, () => { _isEPV1Open = _pm.EPV1.Status; return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else { throw (new RoutineBreakException()); } } } protected void CheckEPV2Open(int id) { Tuple ret = Execute(id, () => { _isEPV2Open = _pm.EPV2.Status; return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else { throw (new RoutineBreakException()); } } } protected void CheckChamberV72Open(int id,double pressure) { Tuple ret = Execute(id, () => { _v72IsOpen = _pm.CheckIOValueByGroup(IoGroupName.VentPump, true) && _pm.CheckIOValueByGroup(IoGroupName.V888990, true) && _pm.PT1.FeedBack >= pressure; return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else { throw (new RoutineBreakException()); } } } protected void WaitV27Open(int id, int timeout) { Tuple ret = Wait(id, () => { return _pm.CheckIOValueByGroup(IoGroupName.V27,true); }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.TIMEOUT) { Stop($"Wait V27 Open Timeout;"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void WaitChamberPressUpTo(int id, double press, int timeout) { Tuple ret = Wait(id, () => { return _pm.GetChamberPressure() >= press; }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.TIMEOUT) { Stop($"Wait Chamber Pressure to {press} Timeout,over {timeout} seconds;"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void WaitChamberPressDownTo(int id, double press, int timeout) { Tuple ret = Wait(id, () => { Notify($"Wait pm pressure to {press} mbar"); return _pm.GetChamberPressure() <= press; }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.TIMEOUT) { Stop($"Wait Chamber Pressure Down to {press} Timeout,over {timeout} seconds;"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetIoValueByGroup(int id, IoGroupName groupName, bool close, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify((close ? "Open" : "Close") + $" {groupName.ToString()} value"); return _pm.SetIOValueByGroup(groupName, close); }, () => { return _pm.CheckIOValueByGroup(groupName, close); }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) { Stop((close ? "Open" : "Close") + $" {groupName.ToString()} value timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void OpenH2Valve(int id, PMModule pm, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Open {pm.Name} V31 valve"); if (!pm.V31.TurnValve(true, out string reason)) { Stop($"Open {pm.Name} V31 valve failed, {reason}"); return false; } return true; }, () => { return pm.V31.Status; }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } if (ret.Item2 == Result.TIMEOUT) { Stop($"Open {pm.Name} V31 valve timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else { throw (new RoutineBreakException()); } } } protected void SetMfcModeToNormalByGroup(int id, MfcGroupName groupName) { Tuple ret = Execute(id, () => { Notify($"Set {groupName.ToString()} MFC Mode to normal"); _pm.SetMfcModelToNormal(groupName); return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetMfcToDefaultByGroup(int id, MfcGroupName groupName,int time) { Tuple ret = Execute(id, () => { Notify($"Set {GetMfcTipsByGroup(groupName)} MFC value to default"); if (!_pm.SetMfcToDefaultByGroupRamp(groupName, time)) { Stop($"Set {GetMfcTipsByGroup(groupName)} MFC value to default failed"); return false; } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetMfc28to31Special(int id, double mfc28Flow,double mfc29Flow,double mfc31Flow,int time) { Tuple ret = Execute(id, () => { Notify($"Set MFC28,29,31 to {mfc28Flow},{mfc29Flow},{mfc31Flow}"); if (!_pm.SetMFC28to31Special(mfc28Flow, mfc29Flow, mfc31Flow, time)) { Stop($"Set MFC28,29,31 to {mfc28Flow},{mfc29Flow},{mfc31Flow} failed"); return false; } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetMfcForPurgeConfigByGroup(int id, MfcGroupName groupName, string dValue, int time) { Tuple ret = Execute(id, () => { Notify($"Set {GetMfcTipsByGroup(groupName)} MFC value to {dValue}"); if (!_pm.SetMfcForPurgeConfigByGroup(groupName, dValue, time)) { Stop($"Set {GetMfcTipsByGroup(groupName)} MFC value by config {dValue} failed"); return false; } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetMfcByGroup(int id, MfcGroupName groupName, double dValue,int time) { Tuple ret = Execute(id, () => { Notify($"Set {GetMfcTipsByGroup(groupName)} MFC value to {dValue}"); if (!_pm.SetMfcByGroup(groupName, dValue, time)) { Stop($"Set {GetMfcTipsByGroup(groupName)} MFC value to {dValue} failed"); return false; } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetMfcRampByGroupAndPressureAlways(PressureUpOrDown presOpera) { try { if (presOpera == PressureUpOrDown.None) { return; } else { PressureLevel level = GetPressure(_pm.GetChamberPressure()); if ((int)level != (int)_lastPressureLevel) { int cIntLv = (int)level; if (cIntLv < 100) { Notify($"Set MFC28-40 to pressureLevel [20-100] mbar"); } else if (cIntLv >= 950) { Notify($"Set MFC28-40 to pressureLevel [950] mbar"); } else { Notify($"Set MFC28-40 to pressureLevel [{cIntLv-50}-{cIntLv+50}] mbar"); } _lastPressureLevel = level; _pm.SetMfcRampByGroupAndPressure(MfcGroupName.M28toM40, Convert.ToDouble((int)level)); } } } catch { } } protected void SetPcModeToNormal(int id, List _lstPcList) { Tuple ret = Execute(id, () => { string str = null; foreach (var item in _lstPcList) { str += item.ToString() + ","; } str=str.Remove(str.Length-1); Notify($"Set PC{str} mode to normal"); if (!_pm.SetPcModelToNormal(_lstPcList)) { Stop($"Set PC{str} mode to normal failed"); return false; } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetPcModel(int id, List _lstPcList,PcCtrlMode mode) { Tuple ret = Execute(id, () => { string str = null; foreach (var item in _lstPcList) { str += item.ToString() + ","; } str = str.Remove(str.Length - 1); Notify($"Set PC{str} mode to {mode.ToString()}"); if (!_pm.SetPcModel(_lstPcList,mode)) { Stop($"Set PC{str} mode to {mode.ToString()} failed"); return false; } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetPcToDefault(int id, List _lstPcList) { Tuple ret = Execute(id, () => { string str = null; foreach (var item in _lstPcList) { str += item.ToString() + ","; } str = str.Remove(str.Length - 1); Notify($"Set PC{str} value to default"); if (!_pm.SetPCValueToDefault(_lstPcList)) { Stop($"Set PC{str} value to default failed"); return false; } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } //protected void SetThrottlePositionToZero(int id, IoThrottleValve2 _IoThrottle) //{ // Tuple ret = Execute(id, () => // { // Notify($"Set Throttle pozition to 0"); // _IoThrottle.SetPositionToZero("", null); // return true; // }); // if (ret.Item1) // { // if (ret.Item2 == Result.FAIL) // { // throw (new RoutineFaildException()); // } // else // throw (new RoutineBreakException()); // } //} //protected void SetThrottlePressureToCurrent(int id, IoThrottleValve2 _IoThrottle) //{ // Tuple ret = Execute(id, () => // { // double currentPressure = _pm.PT1.FeedBack; // Notify($"Set Throttle value to {currentPressure}"); // string reason = String.Empty; // if (!_IoThrottle.SetPressure(out reason, 0, new object[] { currentPressure })) // { // Stop($"Set Throttle value to {currentPressure} failed"); // return false; // } // return true; // }); // if (ret.Item1) // { // if (ret.Item2 == Result.FAIL) // { // throw (new RoutineFaildException()); // } // else // throw (new RoutineBreakException()); // } //} //protected void SetThrottlePressureAndSetMfcRamp(int id, IoThrottleValve2 _IoThrottle, MfcGroupName groupName, double pressure, double _pmPressureMaxDiff, int timeout) //{ // Tuple ret = ExecuteAndWait(id, () => // { // Notify($"Set Throttle value to {pressure}"); // string reason = String.Empty; // _pm.SetMfcRampByGroupAndPressure(groupName, pressure); // _IoThrottle.SetPressure(out reason, 0, new object[] { pressure }); // return true; // }, // () => // { // return Math.Abs(_IoThrottle.PressureFeedback - pressure) <= _pmPressureMaxDiff; // }, // timeout * 1000); // if (ret.Item1) // { // if (ret.Item2 == Result.FAIL) // { // throw (new RoutineFaildException()); // } // else if (ret.Item2 == Result.TIMEOUT) // { // Stop($"Set Throttle Pressure to {pressure} timeout, over {timeout} seconds"); // throw (new RoutineFaildException()); // } // else // throw (new RoutineBreakException()); // } //} /// /// 设置压力是上升还是下降趋势，以便调节特殊MFC的流量 /// /// /// protected void SetPressureUpOrDown(int id,PressureUpOrDown pressureUpOrD) { Tuple ret = Execute(id, () => { _setMfc291519to38Flag = false; currentPressureUpOrDown = pressureUpOrD; if (currentPressureUpOrDown == PressureUpOrDown.Uping) { _lastPressureLevel = PressureLevel.Leavel10; } else if (currentPressureUpOrDown == PressureUpOrDown.Dowing) { _lastPressureLevel = PressureLevel.Leavel10; } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetPressureUpOrDown(int id,double targetPressure) { Tuple ret = Execute(id, () => { if (_pm.PT1.FeedBack > targetPressure) { currentPressureUpOrDown = PressureUpOrDown.Dowing; } else { currentPressureUpOrDown = PressureUpOrDown.Uping; } if (currentPressureUpOrDown == PressureUpOrDown.Uping) { _lastPressureLevel = PressureLevel.Leavel0; } else if (currentPressureUpOrDown == PressureUpOrDown.Dowing) { _lastPressureLevel = PressureLevel.Leavel9; } Notify($"Set PressureUpOrDown {currentPressureUpOrDown.ToString()}"); return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } /// /// 检查PM压力是否超过定值,以便省略步骤 /// /// /// protected void GetPressureCondition(int id,double pmPressure) { Tuple ret = Execute(id, () => { Notify($"Check PM Pressure over {pmPressure}"); _checkPMPressureOver1000 = _pm.GetChamberPressure() > pmPressure; return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } /// /// 检查PM压力是否超过定值,以便省略步骤 /// /// /// protected void GetPressureConditionPT2(int id, double pmPressure) { Tuple ret = Execute(id, () => { _checkPMPt2Over1000 = _pm.PT2.FeedBack > pmPressure; return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } /// /// 等待PM压力达到特定值 /// /// /// /// protected void WaitPmPressureUPto(int id, double pressure, int timeout) { Tuple ret = Wait(id, () => { return _pm.GetChamberPressure() > pressure; }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) { Stop($"Wait Pm Pressure to {pressure} timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetThrottlePressureAndWait(int id, IoThrottleValve2 _IoThrottle, double pressure, double _pmPressureMaxDiff, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Set Throttle pressure to {pressure} and wait"); string reason = String.Empty; if (!_IoThrottle.SetPressure(out reason, 0, new object[] { pressure })) { Stop($"Set Throttle pressure to { pressure} failed, { reason}"); return false; } return true; }, () => { return Math.Abs(_IoThrottle.PressureFeedback - pressure) <= _pmPressureMaxDiff; }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) { Stop($"Set Throttle Pressure to {pressure} timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetThrottleToTargetAndNoWait(int id, IoThrottleValve2 _IoThrottle, double pressure) { Tuple ret = Execute(id, () => { Notify($"Set Throttle pressure to {pressure}"); string reason = String.Empty; if (!_IoThrottle.SetPressure(out reason, 0, new object[] { pressure })) { Stop($"Set Throttle pressure to {pressure} failed, {reason}"); return false; } return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void WaitThrottleToPressureAndSetMfcSpecial(int id, IoThrottleValve2 _IoThrottle, double pressure, double _pmPressureMaxDiff, int timeout) { Tuple ret = Wait(id, () => { SetMfcRampByGroupAndPressureAlways(currentPressureUpOrDown); return Math.Abs(_IoThrottle.PressureFeedback - pressure) <= _pmPressureMaxDiff; }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) { Stop($"Set Throttle Pressure to {pressure} timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } /// /// 等待压力上升下降过程中(顺便调节MFC2,9,15,19到38 以及特殊MFC流量) /// /// /// /// /// /// protected void WaitThrottleToPressureAndSetMfcSpecialForLidOpen(int id, IoThrottleValve2 _IoThrottle, double pressure, double _pmPressureMaxDiff, int timeout) { Tuple ret = Wait(id, () => { if (_IoThrottle.PressureFeedback > 20) { SetMfcRampByGroupAndPressureAlways(currentPressureUpOrDown); } if (!_setMfc291519to38Flag && currentPressureUpOrDown == PressureUpOrDown.Dowing && _IoThrottle.PressureFeedback < 20) { Notify($"Set M291519to38 value to 0 "); _pm.SetMfcByGroup(MfcGroupName.M291519to38, 0, 2); _setMfc291519to38Flag = true; } else if (!_setMfc291519to38Flag && currentPressureUpOrDown == PressureUpOrDown.Uping && _IoThrottle.PressureFeedback < 20) { Notify($"Set M291519to38 value to default"); _pm.SetMfcToDefaultByGroupRamp(MfcGroupName.M291519to38, 2); _setMfc291519to38Flag = true; } return Math.Abs(_IoThrottle.PressureFeedback - pressure) <= _pmPressureMaxDiff; }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) { Stop($"Set Throttle Pressure to {pressure} timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } /// /// 在Wait步骤之前打印日志 /// /// /// protected void NotifyInfo(int id,string message) { Tuple ret = Execute(id, () => { Notify(message); return true; }); } protected void SetThrottleToPressModeAndWait(int id, IoThrottleValve2 _IoThrottle, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Set Throttle To PressMode"); if (!_IoThrottle.SetMode(Aitex.Core.Common.DeviceData.PressureCtrlMode.TVPressureCtrl, out string reason)) { Stop($"Set Throttle To PressMode failed, {reason}"); return false; } return true; }, () => { return _IoThrottle.ControlModeFeedback == Aitex.Core.Common.DeviceData.PressureCtrlMode.TVPressureCtrl; }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) { Stop($"Set Throttle To PressMode timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetThrottleToCloseMode(int id, IoThrottleValve2 _IoThrottle, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Set Throttle To CloseMode"); if (!_IoThrottle.SetMode(Aitex.Core.Common.DeviceData.PressureCtrlMode.TVClose, out string reason)) { Stop($"Set Throttle To CloseMode failed, {reason}"); return false; } return true; }, () => { return _IoThrottle.ControlModeFeedback == PressureCtrlMode.TVClose; }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) { Stop($"Set Throttle To CloseMode timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected void SetThrottleEnableAndWait(int id, IoThrottleValve2 _IoThrottle, int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Set Throttle Enable"); if (!_IoThrottle.SetTVEnableState(true, out string reason)) { Stop(reason); return false; } return true; }, () => { return _IoThrottle.TVValveEnable == true ; }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) { Stop($"Set Throttle Enable timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) { Stop($"Set Throttle Enable Error!"); throw (new RoutineFaildException("Timeout")); } else throw (new RoutineBreakException()); } } protected void SetThrottleDisable(int id, IoThrottleValve2 _IoThrottle,int timeout) { Tuple ret = ExecuteAndWait(id, () => { Notify($"Set Throttle to Disable"); string reason = String.Empty; if (!_IoThrottle.SetTVEnableState(false, out reason)) { Stop(reason); return false; } return true; }, () => { return _IoThrottle.TVValveEnable == false ; }, timeout * 1000); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else if (ret.Item2 == Result.TIMEOUT) { Stop($"Set Throttle to Disable timeout, over {timeout} seconds"); throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } } protected bool IsCmdSkip(string cmd) { if (cmd == "SiSourTotalFlow" || cmd == "CSourTotalFlow" || cmd == "DopeTotalFlow" || cmd == "TotalVentFlow") return true; return false; } protected string GetMfcTipsByGroup(MfcGroupName groupName) { if (groupName == MfcGroupName.M291519to38) { return "2,9,15,19to38"; } else if (groupName == MfcGroupName.M291519to26) { return "2,9,15,19to26"; } else { return groupName.ToString(); } } } }