using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.DBCore; using MECF.Framework.Common.Equipment; using SicPM.Devices; using System; using System.Collections.Generic; using System.Diagnostics; namespace SicPM.Routines { public class PMLeakCheckRoutine : PMBaseRoutine { private enum RoutineStep { RotationEnable, HeatEnable, VentPumpClose, ArSupply, SetGroupA, SetGroupB, SetGroupC, SetGroupE, SetGroupF, SetGroupH, SetGroupD, SetGroupG, SetGroupK, SetMFCMode, SetPCMode, SetM1to16, SetPC, SetGroupJ, SetM291519to38, SetGasOut, SetTv, SetGasIn1, //V65,V67,V68 OpenFinal1, //V91-96 SetMfcFinal1, //M32-38 SetMfc19to26, SetTVCloseMode, SetTvPositionToZero, SetGasIn2, SetGroupJOpen, SetM291519to26, OpenFinal2, SetMfcFinal2, SetEPV1, SetEPV2, SetTvMode, SetTvOpen, SetTvModeToPress, SetTVtoCurrent, RoutinePre, SetPressureUp, SetPressureDown, WaitPressureDown, WaitPressureUp, VentPumpOpen, PressureToMax, PressureToMin, StartLoop, EndLoop, SetMfc28to31, SetReactorPress, CloseFinanl1, CloseFinanl2, CloseEPV2, SetTVCloseMode2, CLoseTvvvv, SetEPVVV2, CLoseEPV1, CheckPM1000, WaitPressUpTo1000, WaitPressUpTo1020, SetPressUpOrDown1, SetPressUpOrDown2, SetMfc28to31Special, WaitPmPressureUp, SetMfc28to40Default, SetV75, SetV76, SetV751, SetV761, SetPC567Close, SetPC567Mode, SetPC567Default, OpenEPV2, WaitPressUpTo20, SetMfc291519to38, WaitPressUpTo0, SetMfc291519to38ToDefault, WaitPressDownTo20, SetPmPressureTo20, CloseMfcFinal1, CloseMfcFinal2, CloseMfc2915, CheckFinal1Open, DoLeakCheck, CalcLeakCheck, SetTVClose, CloseTV, CloseV27, CloseV28, CloseV69, CloseV70, SetGroupV25, TimeDelay1, TimeDelay2, TimeDelay3, TimeDelay4, TimeDelay5, TimeDelay6, TimeDelay7, TimeDelay8, TimeDelay9, TimeDelay10, TimeDelay11, TimeDelay12, TimeDelay13, } enum LeakCheckType { ChamberOnly, ChamberAndGasline, ChamberAndGaslineToFacility, } private ModuleName moduleName; private PMModule _pmModule; private IoThrottleValve2 _IoThrottle; private IoInterLock _pmIoInterLock; List _lstPcList = new List { 1, 2, 3, 4, 5, 6, 7 }; private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值 private int _rotationCloseTimeout; //旋转停止超时 private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间 private int _EPV2OpenTimeDelay = 10; private double _pressureMax; //Loop压力上限可设置600-800) private double _pressureMin; //Loop压力下限可设置 0-400) private int _pressureLoopCount; //Loop次数 private int _pressureMinDelay; private int _pressureMaxDelay; private int _pressureMinTimeout; private int _pressureMaxTimeout; private int _IoValueOpenCloseTimeout = 10; //开关阀门超时时间 private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了) private int _throttleTimeout; //蝶阀调整到指定压力的超时时间 private int _paramContinuePumpTime; private int _paramLeakCheckTime ; private double _beginPressure; private double _beginTime; private int _calTimes; //第几次计算LeakCheck的值(每60秒计算一次) private double _leakSpec; private int _routineTimeOut; private int _EPV2OpenDelayTime = 9; private bool _useSettingValue = false; private Stopwatch _swTimer = new Stopwatch(); public int ElapsedTime { get { return _swTimer.IsRunning ? (int)(_swTimer.ElapsedMilliseconds / 1000) : 0; } } public PMLeakCheckRoutine(ModuleName module, PMModule pm) : base(module, pm) { Module = module.ToString(); Name = "Leak Check"; _IoThrottle = DEVICE.GetDevice($"{Module}.TV"); } internal void Init(int pumpTime, int leakCheckTime) { _paramContinuePumpTime = pumpTime; _paramLeakCheckTime = leakCheckTime; _useSettingValue = true; } internal void Init() { _useSettingValue = false; } public override Result Start(params object[] objs) { Reset(); _swTimer.Restart(); _rotationCloseTimeout = SC.GetValue($"PM.{Module}.RotationCloseTimeout"); _pmPressureMaxDiff = SC.GetValue($"PM.{Module}.ThrottlePressureMaxDiff"); _throttleTimeout = SC.GetValue($"PM.{Module}.ThrottlePressureTimeout"); _pmIoInterLock = DEVICE.GetDevice($"{Module}.PMInterLock"); _pmPressureMaxDiff = SC.GetValue($"PM.{Module}.ThrottlePressureMaxDiff"); _rotationCloseTimeout = SC.GetValue($"PM.{Module}.RotationCloseTimeout"); _EPV2OpenTimeDelay = SC.GetConfigItem($"PM.{Module}.EPV2OpenTimeDelayAlterEPV1Open").IntValue; _pressureLoopCount = SC.GetValue($"PM.{Module}.LeakCheck.CyclePurgeCount"); _pressureMin = SC.GetValue($"PM.{Module}.LeakCheck.PumpBasePressure"); _pressureMinDelay = SC.GetValue($"PM.{Module}.LeakCheck.PumpDelayTime"); _pressureMinTimeout = SC.GetValue($"PM.{Module}.LeakCheck.PumpTimeout"); _pressureMax = SC.GetValue($"PM.{Module}.LeakCheck.VentBasePressure"); _pressureMaxDelay = SC.GetValue($"PM.{Module}.LeakCheck.VentDelayTime"); _pressureMaxTimeout = SC.GetValue($"PM.{Module}.LeakCheck.VentTimeout"); _routineTimeOut = SC.GetValue($"PM.{Module}.LeakCheck.RoutineTimeOut"); _EPV2OpenDelayTime = SC.GetValue($"PM.{Module}.TimeDelayAlterEPV2Open"); if (!_useSettingValue) { _paramContinuePumpTime = SC.GetValue($"PM.{Module}.LeakCheck.ContinuePumpTime"); _paramLeakCheckTime = SC.GetValue($"PM.{Module}.LeakCheck.LeakCheckDelayTime"); } _leakSpec = SC.GetValue($"PM.{Module}.LeakCheck.LeakSpec"); if (!PMDevice.SetIOValueByGroup(IoGroupName.V70, false)) { EV.PostAlarmLog(Module,"Can not close V70-1"); return Result.FAIL; } Notify($"Start LoopCount:{_pressureLoopCount}"); return Result.RUN; } public override Result Monitor() { try { CheckRoutineTimeOut(); SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout); SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut); SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.ArSupply, IoGroupName.ArSupply, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout); SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All); SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList); SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0); SetPcToDefault((int)RoutineStep.SetPC, _lstPcList); CheckFinalIoStatue((int)RoutineStep.CheckFinal1Open); if (!_finalOpen) { SetMfcByGroup((int)RoutineStep.SetM291519to38, MfcGroupName.M291519to38, 0, 5); TimeDelay((int)RoutineStep.TimeDelay1, 5); } //1.打开抽气系统 (打开EPV1,关闭EPV2,打开throttle valve enable压力伺服当前压力值) [由于InterLock原因,需要先开EPV1再开EPV2] //SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8); //SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8); //SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetEPV1, IoGroupName.EPV1, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay2, _EPV2OpenTimeDelay); //2.打开进气系统 (V65,V67,V68) SetIoValueByGroup((int)RoutineStep.SetGasIn1, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout); //3.打开Final valves 和对应的MFC值 SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3); TimeDelay((int)RoutineStep.TimeDelay3, 3); SetIoValueByGroup((int)RoutineStep.OpenFinal1, IoGroupName.Final1, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal1, MfcGroupName.Final1, 3); TimeDelay((int)RoutineStep.TimeDelay4, 3); //4.打开J Valves SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M291519to26, 3); //打开EPV2,等待9秒,打开蝶阀 SetIoValueByGroup((int)RoutineStep.OpenEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay5, _EPV2OpenDelayTime); SetThrottleEnableAndWait((int)RoutineStep.SetTvOpen, _IoThrottle, 10); SetThrottleToPressModeAndWait((int)RoutineStep.SetTvModeToPress, _IoThrottle, 10); SetMfcToDefaultByGroup((int)RoutineStep.SetMfc291519to38ToDefault, MfcGroupName.M291519to38, 2); //Loop Loop((int)RoutineStep.StartLoop, _pressureLoopCount); SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown2, PressureUpOrDown.Uping); SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureUp, _IoThrottle, _pressureMax); WaitThrottleToPressureAndSetMfcSpecialForLidOpen((int)RoutineStep.WaitPressureUp, _IoThrottle, _pressureMax, _pmPressureMaxDiff, _pressureMaxTimeout); TimeDelay((int)RoutineStep.TimeDelay8, _pressureMaxDelay); SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Dowing); SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureDown, _IoThrottle, _pressureMin); WaitThrottleToPressureAndSetMfcSpecialForLidOpen((int)RoutineStep.WaitPressureDown, _IoThrottle, _pressureMin, _pmPressureMaxDiff, _pressureMinTimeout); TimeDelay((int)RoutineStep.TimeDelay7, _pressureMinDelay); EndLoop((int)RoutineStep.EndLoop); //2.依次关闭I Value SetMfcByGroup((int)RoutineStep.CloseMfcFinal1, MfcGroupName.M32toM38, 0, 5); TimeDelay((int)RoutineStep.TimeDelay10, 5); SetIoValueByGroup((int)RoutineStep.CloseFinanl1, IoGroupName.Final1, false, _IoValueOpenCloseTimeout); SetMfcByGroup((int)RoutineStep.CloseMfcFinal2, MfcGroupName.M19toM31, 0, 5); TimeDelay((int)RoutineStep.TimeDelay11, 5); SetIoValueByGroup((int)RoutineStep.CloseFinanl2, IoGroupName.Final2, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.CloseV27, IoGroupName.V27, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.CloseV69, IoGroupName.V69, false, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay9, _paramContinuePumpTime); //关闭蝶阀,关闭EPV2 SetThrottleToCloseMode((int)RoutineStep.SetTVClose, _IoThrottle, 8); TimeDelay((int)RoutineStep.TimeDelay12, 2); SetThrottleDisable((int)RoutineStep.CloseTV, _IoThrottle, 8); TimeDelay((int)RoutineStep.TimeDelay13, 2); SetIoValueByGroup((int)RoutineStep.CloseEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); DoLeakCheck((int)RoutineStep.DoLeakCheck, _paramLeakCheckTime); CalcLeackCheckPerMinute(_paramLeakCheckTime); //CalcLeakCheck((int)RoutineStep.CalcLeakCheck, _paramLeakCheckTime); } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } _swTimer.Stop(); return Result.DONE; } public override void Abort() { Stop($"{Module} leak check aborted"); _swTimer.Stop(); PMDevice._ioThrottleValve.StopRamp(); PMDevice.SetMfcStopRamp(PMDevice.GetMfcListByGroupName(MfcGroupName.All)); PMDevice.SetRotationServo(0, 0); base.Abort(); } private void CheckRoutineTimeOut() { if (_routineTimeOut > 10) { if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut) { Notify($"Routine TimeOut! over {_routineTimeOut} s"); throw (new RoutineFaildException()); } } } public void DoLeakCheck(int id, double time) { Tuple ret = Execute(id, () => { Notify($"Keep pressure for {time} seconds"); _beginTime = _swTimer.ElapsedMilliseconds; _beginPressure = PMDevice.ChamberPressure; _calTimes = 1; return true; }); if (ret.Item1) { if (ret.Item2 == Result.FAIL) { throw (new RoutineFaildException()); } else throw (new RoutineBreakException()); } //Tuple ret = Delay(id, () => //{ // Notify($"Keep pressure for {time} seconds"); // _beginPressure = PMDevice.ChamberPressure; // mbar // return true; //}, time * 1000); //if (ret.Item1) //{ // if (ret.Item2 == Result.RUN) // { // throw (new RoutineBreakException()); // } //} } public void CalcLeackCheckPerMinute(int time) { //大于LeakCheck时间, if ((int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000) >= time) { int leakSecond = (int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000); double endPressure = PMDevice.ChamberPressure; double leakSpan = endPressure - _beginPressure; double leakRate = (endPressure - _beginPressure) / (leakSecond / 60.0); if (leakRate > _leakSpec) { LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.FAIL.ToString(), "", Module); EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}"); } else { LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.Succeed.ToString(), "", Module); EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}"); } } else { if ((int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000) >= 60 * _calTimes) { _calTimes++; int leakSecond = (int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000); double endPressure = PMDevice.ChamberPressure; double leakSpan = endPressure - _beginPressure; double leakRate = (endPressure - _beginPressure) / (leakSecond / 60.0); if (leakRate > _leakSpec) { EV.PostInfoLog(Module, $"Leak check Failed Count {_calTimes - 1}: using {leakSecond} seconds, leak rate: {leakRate:F2} ,Rate over {_leakSpec}"); throw (new RoutineFaildException()); } EV.PostInfoLog(Module, $"Leak check Count {_calTimes - 1}: using {leakSecond} seconds, leak rate: {leakRate:F2}"); } throw (new RoutineBreakException()); } } public void CalcLeakCheck(int id, int time) { Tuple ret = Execute(id, () => { double endPressure = PMDevice.ChamberPressure; double leakSpan = endPressure - _beginPressure; double leakRate = (endPressure - _beginPressure) / (time / 60.0); if (leakRate > _leakSpec) { LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.FAIL.ToString(), "", Module); EV.PostInfoLog(Module,$"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}"); return false; } else { LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.Succeed.ToString(), "", Module); EV.PostInfoLog(Module,$"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}"); return true; } }); } } }