using Aitex.Core.RT.Device; using Aitex.Core.RT.Device.Unit; using Aitex.Core.RT.Event; using Aitex.Core.RT.Routine; using Aitex.Core.RT.SCCore; using MECF.Framework.Common.Equipment; using SicPM.Devices; using System; using System.Collections.Generic; using System.Diagnostics; namespace SicPM.Routines { public class PMPurgeRoutine : PMBaseRoutine { private enum RoutineStep { RotationEnable, HeatEnable, VentPumpClose, ArSupply, SetGroupA, SetGroupB, SetGroupC, SetGroupE, SetGroupF, SetGroupH, SetGroupD, SetGroupG, SetGroupK, SetMFCMode, SetPCMode, SetM1to16, SetPC, SetGroupJ, SetM291519to38, SetGasOut, SetTv, SetGasIn1, //V65,V67,V68 OpenFinal1, //V91-96 SetMfcFinal1, //M32-38 SetMfc19to26, SetTVCloseMode, SetTvPositionToZero, SetGasIn2, SetGroupJOpen, SetM291519to26, OpenFinal2, SetMfcFinal2, SetEPV1, SetEPV2, SetTvMode, SetTvOpen, SetTvModeToPress, SetTVtoCurrent, RoutinePre, SetPressureUp, SetPressureDown, WaitPressureDown, WaitPressureUp, VentPumpOpen, PressureToMax, PressureToMin, StartLoop, EndLoop, SetMfc28to31, SetReactorPress, CloseFinanl1, CloseFinanl2, CloseEPV2, SetTVCloseMode2, CLoseTvvvv, SetEPVVV2, CLoseEPV1, CheckPM1000, WaitPressUpTo1000, WaitPressUpTo1020, SetPressUpOrDown1, SetPressUpOrDown2, SetMfc28to31Special, WaitPmPressureUp, SetMfc28to40Default, SetV75, SetV76, SetV751, SetV761, SetPC567Close, SetPC567Mode, SetPC567Default, OpenEPV2, WaitPressUpTo20, SetMfc291519to38, WaitPressUpTo0, SetMfc291519to38ToDefault, WaitPressDownTo20, SetPmPressureTo20, CloseMfcFinal1, CloseMfcFinal2, CloseMfc2915, CheckFinal1Open, SetGroupV38, SetGroupV25, SetV94, Mfc36, SetM39, CloseJ, CloseMfc1to16, CloseMfc19to26, CheckTVOpen1, CheckTVOpen2, CheckEPV1Open1, CheckEPV2Open1, CheckEPV2Open2, Set2Mfc19to26, TimeDelay1, TimeDelay2, TimeDelay3, TimeDelay4, TimeDelay5, TimeDelay6, TimeDelay7, TimeDelay8, TimeDelay9, TimeDelay10, TimeDelay11, TimeDelay18, TimeDelay19, Notify1, Notify2 } private ModuleName moduleName; private PMModule _pmModule; private IoThrottleValve2 _IoThrottle; private IoInterLock _pmIoInterLock; List _lstPcList = new List { 1, 2, 3, 4, 5, 6, 7 }; private int _rotationCheckSpeed =0 ; //设置旋转速度为0后检查是否转速低于此数值 private int _rotationCloseTimeout; //旋转停止超时 private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间 private int _EPV2OpenTimeDelay = 10; private double _pressureMax; //Loop压力上限可设置600-800） private double _pressureMin; //Loop压力下限可设置 0-400） private int _pressureLoopCount; //Loop次数 private int _pressureMinDelay; private int _pressureMaxDelay; private int _pressureMinTimeout; private int _pressureMaxTimeout; private int _IoValueOpenCloseTimeout = 10; //开关阀门超时时间 private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了) private int _throttleTimeout; //蝶阀调整到指定压力的超时时间 private int _EPV12TimeSapn = 10; private int _waitChamberTo1000TimeOut = 300; //等待腔体压力上升到1000的超时时间 private double _mfc28SpecialFlow = 15000; private double _mfc29SpecialFlow = 5000; private double _mfc31SpecialFlow = 10000; //private int _routineTimeOut; private int _EPV2OpenDelayTime = 9; private bool _needFinalValveOpen = false; private double _mfc36Flow = 0; private Stopwatch _swTimer = new Stopwatch(); public PMPurgeRoutine(ModuleName module, PMModule pm) : base(module, pm) { moduleName = module; _pmModule = pm; Name = "Purge"; _IoThrottle = DEVICE.GetDevice($"{Module}.TV"); _pmIoInterLock = DEVICE.GetDevice($"{Module}.PMInterLock"); } public override Result Start(params object[] objs) { Reset(); _EPV12TimeSapn = SC.GetConfigItem($"PM.{Module}.EPV2OpenTimeDelayAlterEPV1Open").IntValue; _rotationCloseTimeout = SC.GetValue($"PM.{Module}.RotationCloseTimeout"); _EPV2OpenTimeDelay = SC.GetConfigItem($"PM.{Module}.EPV2OpenTimeDelayAlterEPV1Open").IntValue; _mfc28SpecialFlow = SC.GetValue($"PM.{Module}.Mfc28FlowSpecail"); _mfc29SpecialFlow = SC.GetValue($"PM.{Module}.Mfc29FlowSpecail"); _mfc31SpecialFlow = SC.GetValue($"PM.{Module}.Mfc31FlowSpecail"); _pmPressureMaxDiff = SC.GetValue($"PM.{Module}.ThrottlePressureMaxDiff"); _throttleTimeout = SC.GetValue($"PM.{Module}.ThrottlePressureTimeout"); _pressureLoopCount = SC.GetValue($"PM.{Module}.Purge.CyclePurgeCount"); _pressureMin = SC.GetValue($"PM.{Module}.Purge.PumpBasePressure"); _pressureMinDelay = SC.GetValue($"PM.{Module}.Purge.PumpDelayTime"); _pressureMinTimeout = SC.GetValue($"PM.{Module}.Purge.PumpTimeout"); _pressureMax = SC.GetValue($"PM.{Module}.Purge.VentBasePressure"); _pressureMaxDelay = SC.GetValue($"PM.{Module}.Purge.VentDelayTime"); _pressureMaxTimeout = SC.GetValue($"PM.{Module}.Purge.VentTimeout"); //_routineTimeOut = SC.GetValue($"PM.{Module}.Purge.RoutineTimeOut"); _EPV2OpenDelayTime = SC.GetValue($"PM.{Module}.TimeDelayAlterEPV2Open"); _needFinalValveOpen = SC.GetValue($"PM.{Module}.Purge.NeedFinalValveOpen"); _mfc36Flow = SC.GetValue($"PM.{Module}.Purge.Mfc36Flow"); if (!_pmIoInterLock.SetPMPurgeRoutineRunning(true, out string reason)) { EV.PostAlarmLog(Module, $"can not Purge,{reason}"); return Result.FAIL; } //Clean succeed 清掉 _pmIoInterLock.DoLidCloseRoutineSucceed = false; //purge succeed 清掉 _pmIoInterLock.DoLidOpenRoutineSucceed = false; currentPressureUpOrDown = PressureUpOrDown.None; _finalOpen = false; _swTimer.Restart(); Notify($"Start LoopCount:{_pressureLoopCount}"); return Result.RUN; } //Purge public override Result Monitor() { try { //CheckRoutineTimeOut(); SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut); SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout); SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.ArSupply, IoGroupName.ArSupply, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV38, IoGroupName.V38, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout); SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout); SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All); SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList); SetMfcByGroup((int)RoutineStep.SetM39, MfcGroupName.M39, 0, 1); SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16,0); SetPcToDefault((int)RoutineStep.SetPC, _lstPcList); CheckFinalIoStatue((int)RoutineStep.CheckFinal1Open); if (!_finalOpen) { SetMfcByGroup((int)RoutineStep.SetM291519to38, MfcGroupName.M291519to38, 0, 5); TimeDelay((int)RoutineStep.TimeDelay1, 5); } //1.打开抽气系统 （打开EPV1,关闭EPV2,打开throttle valve enable压力伺服当前压力值） [由于InterLock原因,需要先开EPV1再开EPV2] //判断蝶阀是否开启 CheckTvOpen((int)RoutineStep.CheckTVOpen1); if (_isTvOpen) { SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8); SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8); TimeDelay((int)RoutineStep.TimeDelay19, 1); } //SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); CheckEPV1Open((int)RoutineStep.CheckEPV1Open1); if (!_isEPV1Open) { SetIoValueByGroup((int)RoutineStep.SetEPV1, IoGroupName.EPV1, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay2, _EPV2OpenTimeDelay); } //2.打开进气系统 （V65,V67,V68) SetIoValueByGroup((int)RoutineStep.SetGasIn1, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout); //3.打开Final valves 和对应的MFC值 SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3); TimeDelay((int)RoutineStep.TimeDelay3, 3); SetIoValueByGroup((int)RoutineStep.OpenFinal1, IoGroupName.Final1, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal1, MfcGroupName.Final1, 3); TimeDelay((int)RoutineStep.TimeDelay4, 3); //4.打开J Valves SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout); SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M291519to26, 3); //打开EPV2,等待9秒,打开蝶阀 //判断EPV2是否开启 CheckEPV2Open((int)RoutineStep.CheckEPV2Open1); if (!_isEPV2Open) { SetIoValueByGroup((int)RoutineStep.OpenEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout); TimeDelay((int)RoutineStep.TimeDelay5, _EPV2OpenDelayTime); } //判断蝶阀是否开启 CheckTvOpen((int)RoutineStep.CheckTVOpen2); if (!_isTvOpen) { SetThrottleEnableAndWait((int)RoutineStep.SetTvOpen, _IoThrottle, 10); SetThrottleToPressModeAndWait((int)RoutineStep.SetTvModeToPress, _IoThrottle, 10); } ////Loop ////Loop((int)RoutineStep.StartLoop, _pressureLoopCount); ////SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Dowing); ////SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureDown, _IoThrottle, 20); ////WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.WaitPressureDown, _IoThrottle, 20, _pmPressureMaxDiff, _throttleTimeout); //////等待Pm压力到20，设置Pm压力到0 ////SetMfcByGroup((int)RoutineStep.SetMfc291519to38, MfcGroupName.M291519to38, 0, 2); ////SetThrottlePressureAndWait((int)RoutineStep.SetPmPressureTo20, _IoThrottle, 0, _pmPressureMaxDiff, _throttleTimeout); ////TimeDelay((int)RoutineStep.TimeDelay7, _pressureMinDelay); //////设置Pm压力到300 ////SetMfcToDefaultByGroup((int)RoutineStep.SetMfc291519to38ToDefault, MfcGroupName.M291519to38, 2); ////SetThrottlePressureAndWait((int)RoutineStep.WaitPressUpTo20, _IoThrottle, 20, _pmPressureMaxDiff, _throttleTimeout); ////SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown2, PressureUpOrDown.Uping); ////SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureUp, _IoThrottle, _pressureMax); ////WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.WaitPressureUp, _IoThrottle, _pressureMax, _pmPressureMaxDiff, _throttleTimeout); ////TimeDelay((int)RoutineStep.TimeDelay8, _pressureMaxDelay); ////EndLoop((int)RoutineStep.EndLoop); Loop((int)RoutineStep.StartLoop, _pressureLoopCount); SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Dowing); SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureDown, _IoThrottle, _pressureMin); WaitThrottleToPressureAndSetMfcSpecialForLidOpen((int)RoutineStep.WaitPressureDown, _IoThrottle, _pressureMin, _pmPressureMaxDiff, _pressureMinTimeout); TimeDelay((int)RoutineStep.TimeDelay7, _pressureMinDelay); //设置Pm压力到300 SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown2, PressureUpOrDown.Uping); SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureUp, _IoThrottle, _pressureMax); WaitThrottleToPressureAndSetMfcSpecialForLidOpen((int)RoutineStep.WaitPressureUp, _IoThrottle, _pressureMax, _pmPressureMaxDiff, _pressureMaxTimeout); TimeDelay((int)RoutineStep.TimeDelay8, _pressureMaxDelay); EndLoop((int)RoutineStep.EndLoop); //关闭先关蝶阀,再EPV2 SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode2, _IoThrottle, 8); SetThrottleDisable((int)RoutineStep.CLoseTvvvv, _IoThrottle, 8); TimeDelay((int)RoutineStep.TimeDelay18, 1); SetIoValueByGroup((int)RoutineStep.SetEPVVV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout); //判断反应腔压力是否超过1000mbar GetPressureCondition((int)RoutineStep.CheckPM1000, 1000); if (!_checkPMPressureOver1000) { //设置M28,M29,M31 为特定值 SetMfc28to31Special((int)RoutineStep.SetMfc28to31Special, _mfc28SpecialFlow, _mfc29SpecialFlow, _mfc31SpecialFlow, 1); } //等待反应腔压力到达1000 NotifyInfo((int)RoutineStep.Notify1, "Wait pm pressure to 1000 mbar!"); WaitChamberPressUpTo((int)RoutineStep.WaitPressUpTo1000, 1000, _waitChamberTo1000TimeOut); SetMfcToDefaultByGroup((int)RoutineStep.SetMfc28to40Default, MfcGroupName.M28toM40, 0); TimeDelay((int)RoutineStep.TimeDelay9, 1); SetIoValueByGroup((int)RoutineStep.CLoseEPV1, IoGroupName.EPV1, false, _IoValueOpenCloseTimeout); //等待反应腔压力到达1020 NotifyInfo((int)RoutineStep.Notify2, "Wait pm pressure to 1020 mbar!"); WaitChamberPressUpTo((int)RoutineStep.WaitPressUpTo1020, 1020, _waitChamberTo1000TimeOut); //关闭V87-V96 //打开V94,M36设置为Default值 if (_needFinalValveOpen) { SetMfcByGroup((int)RoutineStep.CloseMfc1to16, MfcGroupName.M1to16, 0, 5); SetMfcByGroup((int)RoutineStep.CloseMfc19to26, MfcGroupName.M19toM26, 0, 5); SetMfcForPurgeConfigByGroup((int)RoutineStep.CloseMfcFinal1, MfcGroupName.Final1, "Purge", 5); SetMfcForPurgeConfigByGroup((int)RoutineStep.CloseMfcFinal2, MfcGroupName.Final2, "Purge", 5); TimeDelay((int)RoutineStep.TimeDelay10, 5); SetIoValueByGroup((int)RoutineStep.CloseJ, IoGroupName.J, false, _IoValueOpenCloseTimeout); } else { SetMfcByGroup((int)RoutineStep.CloseMfcFinal1, MfcGroupName.M32toM38, 0, 5); TimeDelay((int)RoutineStep.TimeDelay10, 5); SetIoValueByGroup((int)RoutineStep.CloseFinanl1, IoGroupName.Final1, false, _IoValueOpenCloseTimeout); SetMfcByGroup((int)RoutineStep.CloseMfcFinal2, MfcGroupName.M19toM31, 0, 5); TimeDelay((int)RoutineStep.TimeDelay11, 5); SetIoValueByGroup((int)RoutineStep.CloseFinanl2, IoGroupName.Final2, false, _IoValueOpenCloseTimeout); SetMfcByGroup((int)RoutineStep.CloseMfc2915, MfcGroupName.M2915, 0, 5); } } catch (RoutineBreakException) { return Result.RUN; } catch (RoutineFaildException) { return Result.FAIL; } Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s"); _swTimer.Stop(); SetRoutineRuningDo(); SetRoutineSuccessedDo(); return Result.DONE; } public override void Abort() { SetRoutineRuningDo(); PMDevice._ioThrottleValve.StopRamp(); PMDevice.SetMfcStopRamp(PMDevice.GetMfcListByGroupName(MfcGroupName.All)); PMDevice.SetRotationServo(0, 0); base.Abort(); } private void SetRoutineRuningDo() { _pmIoInterLock.DoLidOpenRoutineRunning = false; } private void SetRoutineSuccessedDo() { _pmIoInterLock.SetLidOpenRoutineSucceed(true, out string reason); _pmIoInterLock.DoLidCloseRoutineSucceed = false; } //private void CheckRoutineTimeOut() //{ // if (_routineTimeOut > 10) // { // if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut) // { // Notify($"Routine TimeOut! over {_routineTimeOut} s"); // throw (new RoutineFaildException()); // } // } //} } }