using System; using System.Collections.Generic; using System.Diagnostics.Eventing.Reader; using Aitex.Core.RT.DataCenter; using Aitex.Core.RT.IOCore; using Aitex.Core.RT.Log; using Aitex.Core.Util; using Aitex.Core.WCF; using MECF.Framework.Common.PLC; using SicSimulator.Views; namespace SicSimulator.Instances { public class SimulatorSystem : Singleton { private PeriodicJob _thread; Random _rd = new Random(); public SimulatorSystem() { } public void Initialize() { SetDefaultValue("PM1"); SetDefaultValue("PM2"); SetTMDefaultValue("TM"); Singleton.Instance.Initialize(false); WcfServiceManager.Instance.Initialize(new Type[] { typeof(SimulatorAdsPlcService) }); _thread = new PeriodicJob(200, OnMonitor, nameof(SimulatorSystem), true); } private void SetTMDefaultValue(string mod) { IO.DI["DI_DryPumpAlarm"].Value = true; IO.DI["DI_DryPumpWarning"].Value = true; IO.DI["DI_DryPumpRuning"].Value = true; IO.DI["DI_LLDoorClosed"].Value = true; IO.DI["DI_PreHeatStationDoorClosed"].Value = true; IO.DI["DI_ReactorADoorClosed"].Value = true; IO.DI["DI_TMLidClosed"].Value = true; IO.DI["DI_RobotOnBackPos"].Value = true; IO.DI["DI_LLLidClosed"].Value = true; IO.DI["DI_BufferLidClosed"].Value = true; IO.DI["DI_TMSlowRoughOpen_FB"].Value = true; IO.DI["DI_TMFastRoughOpen_FB"].Value = true; IO.DI["DI_TMN2PurgeOpen_FB"].Value = true; IO.DI["DI_TMFastVentOpen_FB"].Value = true; IO.DI["DI_LLSlowRoughOpen_FB"].Value = true; IO.DI["DI_LLFastRoughOpen_FB"].Value = true; IO.DI["DI_LLSlowVentOpen_FB"].Value = true; IO.DI["DI_LLFastVentOpen_FB"].Value = true; IO.DI["DI_DryPumpAlarm"].Value = true; IO.DI["DI_DryPumpWarning"].Value = true; IO.AI["AI_TMPressure"].Value = 300; IO.AI["AI_LLPressure"].Value = 0; IO.DI["DI_TMUnderVac"].Value = true; } private void SetDefaultValue(string mod) { { IO.DI[$"{mod}.DI_DryPumpAlarm"].Value = true; IO.DI[$"{mod}.DI_DryPump1Warning"].Value = true; IO.DI[$"{mod}.DI_DryPump1Running"].Value = true; IO.DI[$"{mod}.DI_ServoReady"].Value = true; IO.AI[$"{mod}.AI_ForelinePress"].FloatValue = 1100f; IO.AI[$"{mod}.AI_ChamPress"].FloatValue = 1100f; IO.DI[$"{mod}.DI_EPV21_FB"].Value = true; } { IO.DI[$"{mod}.DI_ChamPressAboveATMSW"].Value = true; IO.DI[$"{mod}.DI_HeaterTempUp1680CSW"].Value = false; IO.DI[$"{mod}.DI_ChamTopFlowSW"].Value = true; IO.DI[$"{mod}.DI_DryPump1Running"].Value = true; } { IO.DI[$"{mod}.DI_ChamLidPushButtonLocal"].Value = true; IO.DI[$"{mod}.DI_ChamMoveBodyDown"].Value = true; IO.DI[$"{mod}.DI_ChamMoveBodyFront"].Value = true; IO.DI[$"{mod}.DI_ChamMoveBodyUpLatchFW"].Value = false; IO.DI[$"{mod}.DI_ChamMoveBodyEndLatchBW"].Value = true; IO.DI[$"{mod}.DI_SHLidClosed"].Value = true; IO.DI[$"{mod}.DI_MiddleLidClosed"].Value = true; IO.DI[$"{mod}.DI_SHLidTighten1"].Value = true; IO.DI[$"{mod}.DI_MiddleLidTighten1"].Value = true; IO.DI[$"{mod}.DI_SHLidSwingLock"].Value = true; IO.DI[$"{mod}.DI_MiddleLidSwingLock"].Value = true; IO.DI[$"{mod}.DI_ConfinementRingDown"].Value = true; IO.DI[$"{mod}.DI_SHGasConnectorLoosen"].Value = false; IO.DI[$"{mod}.DI_SHGasConnectorTighten"].Value = true; } IO.AO[$"{mod}.AO_ValveModeSetpoint"].FloatValue = (float)2; { IO.DI[$"{mod}.DI_ChamLidClosed"].Value = true; IO.DI[$"{mod}.DI_ChamCabDoorClosed"].Value = true; IO.DI[$"{mod}.DI_ChamPressAboveATMSW"].Value = true; IO.DI[$"{mod}.DI_ChamAtSafeProcessPressSW"].Value = false; IO.DI[$"{mod}.DI_DORPressATMSW"].Value = false; IO.DI[$"{mod}.DI_HeaterTempBelow900CSW"].Value = true; IO.DI[$"{mod}.DI_ConfinementRingUp"].Value = true; IO.DI[$"{mod}.DI_SHFlowSW"].Value = true; IO.DI[$"{mod}.DI_ChamTopFlowSW"].Value = true; IO.DI[$"{mod}.DI_ChamMiddleFlow1SW"].Value = true; IO.DI[$"{mod}.DI_BottomPlateFlowSW"].Value = true; IO.DI[$"{mod}.DI_ChamBottomFlowSW"].Value = true; IO.DI[$"{mod}.DI_PowerRod1FlowSW"].Value = true; IO.DI[$"{mod}.DI_PowerRod2FlowSW"].Value = true; IO.DI[$"{mod}.DI_ForelineFlowSW"].Value = true; IO.DI[$"{mod}.DI_InSituFlowSW"].Value = true; IO.DI[$"{mod}.DI_SideWallPowerRodFlowSW"].Value = true; IO.DI[$"{mod}.DI_TransformerFlowSW"].Value = true; IO.DI[$"{mod}.DI_GBH2DetectorSW"].Value = true; IO.DI[$"{mod}.DI_GBHCLDetectorSW"].Value = true; IO.DI[$"{mod}.DI_GBDoorClosed"].Value = true; IO.DI[$"{mod}.DI_PumpExhaustPressSW"].Value = true; IO.DI[$"{mod}.DI_PMATMSW"].Value = true; IO.DI[$"{mod}.DI_ScrubberIntlkSW"].Value = true; IO.DI[$"{mod}.DI_FacilityIntlkSW"].Value = true; } #region TC //IO.AI[$"{mod}.AI_L1WorkingOP"].FloatValue = 10; //IO.AI[$"{mod}.AI_L2WorkingOP"].FloatValue = 10; //IO.AI[$"{mod}.AI_L3WorkingOP"].FloatValue = 10; //IO.AI[$"{mod}.AI_L1PV"].FloatValue = 20; //IO.AI[$"{mod}.AI_L2PV"].FloatValue = 20; //IO.AI[$"{mod}.AI_L3PV"].FloatValue = 20; //IO.AI[$"{mod}.AI_L1TempHighAlarm"].FloatValue = 30; //IO.AI[$"{mod}.AI_L2TempHighAlarm"].FloatValue = 30; //IO.AI[$"{mod}.AI_L3TempHighAlarm"].FloatValue = 30; //IO.AI[$"{mod}.AI_L1TempLowAlarm"].FloatValue = 25; //IO.AI[$"{mod}.AI_L2TempLowAlarm"].FloatValue = 25; //IO.AI[$"{mod}.AI_L3TempLowAlarm"].FloatValue = 25; //IO.AO[$"{mod}.AO_L1LoopMode"].FloatValue = 1; //IO.AO[$"{mod}.AO_L2LoopMode"].FloatValue = 1; //IO.AO[$"{mod}.AO_L3LoopMode"].FloatValue = 1; //IO.AO[$"{mod}.AO_L1TargetSP"].FloatValue = 20; //IO.AO[$"{mod}.AO_L2TargetSP"].FloatValue = 20; //IO.AO[$"{mod}.AO_L3TargetSP"].FloatValue = 20; //IO.AO[$"{mod}.AO_L1TargetOP"].FloatValue = 30; //IO.AO[$"{mod}.AO_L2TargetOP"].FloatValue = 30; //IO.AO[$"{mod}.AO_L3TargetOP"].FloatValue = 30; //IO.AO[$"{mod}.AO_L1IPCST"].FloatValue = 40; //IO.AO[$"{mod}.AO_L2IPCST"].FloatValue = 40; //IO.AO[$"{mod}.AO_L3IPCST"].FloatValue = 40; //IO.AO[$"{mod}.AO_L1IPCST"].FloatValue = 70; //IO.AO[$"{mod}.AO_L2IPCST"].FloatValue = 70; //IO.AO[$"{mod}.AO_L3IPCST"].FloatValue = 70; //IO.AO[$"{mod}.AO_TCPyroMode"].FloatValue = 1; //IO.AO[$"{mod}.AO_L1TempHighLimit"].FloatValue = 90; //IO.AO[$"{mod}.AO_L2TempHighLimit"].FloatValue = 90; //IO.AO[$"{mod}.AO_L3TempHighLimit"].FloatValue = 90; //IO.AO[$"{mod}.AO_L1TempLowLimit"].FloatValue = 80; //IO.AO[$"{mod}.AO_L2TempLowLimit"].FloatValue = 80; //IO.AO[$"{mod}.AO_L3TempLowLimit"].FloatValue = 80; //IO.AI[$"{mod}.AI_L1WorkingOP2"].FloatValue = 10; //IO.AI[$"{mod}.AI_L2WorkingOP2"].FloatValue = 10; //IO.AI[$"{mod}.AI_L3WorkingOP2"].FloatValue = 10; //IO.AI[$"{mod}.AI_L1PV2"].FloatValue = 20; //IO.AI[$"{mod}.AI_L2PV2"].FloatValue = 20; //IO.AI[$"{mod}.AI_L3PV2"].FloatValue = 20; //IO.AI[$"{mod}.AI_L1TempHighAlarm2"].FloatValue = 30; //IO.AI[$"{mod}.AI_L2TempHighAlarm2"].FloatValue = 30; //IO.AI[$"{mod}.AI_L3TempHighAlarm2"].FloatValue = 30; //IO.AI[$"{mod}.AI_L1TempLowAlarm2"].FloatValue = 25; //IO.AI[$"{mod}.AI_L2TempLowAlarm2"].FloatValue = 25; //IO.AI[$"{mod}.AI_L3TempLowAlarm2"].FloatValue = 25; //IO.AO[$"{mod}.AO_L1LoopMode2"].FloatValue = 1; //IO.AO[$"{mod}.AO_L2LoopMode2"].FloatValue = 1; //IO.AO[$"{mod}.AO_L3LoopMode2"].FloatValue = 1; //IO.AO[$"{mod}.AO_L1TargetSP2"].FloatValue = 20; //IO.AO[$"{mod}.AO_L2TargetSP2"].FloatValue = 20; //IO.AO[$"{mod}.AO_L3TargetSP2"].FloatValue = 20; //IO.AO[$"{mod}.AO_L1TargetOP2"].FloatValue = 30; //IO.AO[$"{mod}.AO_L2TargetOP2"].FloatValue = 30; //IO.AO[$"{mod}.AO_L3TargetOP2"].FloatValue = 30; //IO.AO[$"{mod}.AO_L1RecipeValue2"].FloatValue = 40; //IO.AO[$"{mod}.AO_L2RecipeValue2"].FloatValue = 40; //IO.AO[$"{mod}.AO_L3RecipeValue2"].FloatValue = 40; //IO.AO[$"{mod}.AO_L1IPCST2"].FloatValue = 70; //IO.AO[$"{mod}.AO_L2IPCST2"].FloatValue = 70; //IO.AO[$"{mod}.AO_L3IPCST2"].FloatValue = 70; //IO.AO[$"{mod}.AO_TCPyroMode2"].FloatValue = 1; //IO.AO[$"{mod}.AO_L1TempHighLimit2"].FloatValue = 90; //IO.AO[$"{mod}.AO_L2TempHighLimit2"].FloatValue = 90; //IO.AO[$"{mod}.AO_L3TempHighLimit2"].FloatValue = 90; //IO.AO[$"{mod}.AO_L1TempLowLimit2"].FloatValue = 80; //IO.AO[$"{mod}.AO_L2TempLowLimit2"].FloatValue = 80; //IO.AO[$"{mod}.AO_L3TempLowLimit2"].FloatValue = 80; #endregion IO.DI[$"{mod}.DI_PMH2DetectorSW"].Value = true; IO.DI[$"{mod}.DI_ProcessStopSW"].Value = false; IO.DI[$"{mod}.DI_GBWaterLeakSW"].Value = true; IO.DI[$"{mod}.DI_MainCBStatusSW"].Value = true; IO.DI[$"{mod}.DI_ReactorWaterLeakSW"].Value = true; IO.DI[$"{mod}.DI_ChamMiddleFlow1SW"].Value = true; IO.DI[$"{mod}.DI_ChamMiddleFlow2SW"].Value = true; IO.DI[$"{mod}.DI_PumpExhaustDPSW"].Value = true; IO.DI[$"{mod}.DI_TMFlow1SW"].Value = true; IO.DI[$"{mod}.DI_TMFlow2SW"].Value = true; IO.DI[$"{mod}.DI_H2PressureSW"].Value = false; IO.DI[$"{mod}.DI_TMN2FlowSW"].Value = true; IO.DI[$"{mod}.DI_TCSAlarm"].Value = true; IO.DI[$"{mod}.DI_GBExhaustDPSW"].Value = true; IO.DI[$"{mod}.DI_PMAExhaustDPSW"].Value = true; IO.DI[$"{mod}.DI_ServoDriverFaultSW"].Value = true; IO.DI[$"{mod}.DI_PowerRackExhaustDP"].Value = true; IO.DI[$"{mod}.DI_ServoDriverFaultSW"].Value = true; IO.DI[$"{mod}.DI_GN2InletPressSW"].Value = false; IO.DI[$"{mod}.DI_ArInletPressSW"].Value = false; IO.DI[$"{mod}.DI_FacilityWarningSW"].Value = true; IO.DO[$"{mod}.DO_UPSEnable"].Value = true; IO.DO[$"{mod}.DO_UPSLowBattery"].Value = true; IO.DO[$"{mod}.DO_CleanRoutineSucceed"].Value = true; IO.DO[$"{mod}.DO_TVEnable"].Value = true; IO.DI[$"{mod}.DI_EPV21_FB"].Value = true; } private bool OnMonitor() { try { MonitorPressureTM(); MonitorPressureLL1(); MonitorPm("PM1"); MonitorPm("PM2"); MonitorTM("TM"); MonitorValve("PM1"); MonitorTMValve(); MonitorWaterFlow(); MonitorFlowRamp("PM1"); MonitorFlowRamp("PM2"); MonitorGasConnector("PM1"); MonitorLid("PM1"); MonitorLidSwing("PM1"); MonitorConfinementRing("PM1"); MonitorGasConnector("PM2"); MonitorLid("PM2"); MonitorLidSwing("PM2"); MonitorConfinementRing("PM2"); MonitorChamberMoveBody("PM1"); MonitorChamberMoveBodyUp("PM1"); MonitorHeater("PM1"); MonitorRotation("PM1"); } catch (Exception e) { LOG.Write(e); } return true; } void MonitorFlowRamp(string pm) { var rampList = new List> { new Tuple( "AI_M1", "AO_M1" ), new Tuple( "AI_M2", "AO_M2" ), new Tuple("AI_M3","AO_M3"), new Tuple("AI_M4","AO_M4"), new Tuple("AI_M5","AO_M5"), new Tuple("AI_M6","AO_M6"), new Tuple("AI_M7","AO_M7"), new Tuple("AI_M8","AO_M8"), new Tuple("AI_M9","AO_M9"), new Tuple("AI_M10","AO_M10"), new Tuple("AI_M11","AO_M11"), new Tuple("AI_M12","AO_M12"), new Tuple("AI_M13","AO_M13"), new Tuple("AI_M14","AO_M14"), new Tuple("AI_M15","AO_M15"), new Tuple("AI_M16","AO_M16"), new Tuple("AI_M19","AO_M19"), new Tuple("AI_M20","AO_M20"), new Tuple("AI_M22","AO_M22"), new Tuple("AI_M23","AO_M23"), new Tuple("AI_M25","AO_M25"), new Tuple("AI_M26","AO_M26"), new Tuple("AI_M27","AO_M27"), new Tuple("AI_M28","AO_M28"), new Tuple("AI_M29","AO_M29"), new Tuple("AI_M40","AO_M40"), new Tuple("AI_M31","AO_M31"), new Tuple("AI_M32","AO_M32"), new Tuple("AI_M33","AO_M33"), new Tuple("AI_M35","AO_M35"), new Tuple("AI_M36","AO_M36"), new Tuple("AI_M37","AO_M37"), new Tuple("AI_M38","AO_M38"), new Tuple("AI_M39","AO_M39"), new Tuple("AI_PressCtrl1","AO_PressCtrl1"), new Tuple("AI_PressCtrl2","AO_PressCtrl2"), new Tuple("AI_PressCtrl3","AO_PressCtrl3"), new Tuple("AI_PressCtrl4","AO_PressCtrl4"), new Tuple("AI_PressCtrl5","AO_PressCtrl5"), new Tuple("AI_PressCtrl6","AO_PressCtrl6"), new Tuple("AI_PressCtrl7","AO_PressCtrl7"), //new Tuple( // "AI_Gas2Flow", // "AO_Gas2Flow" //), //new Tuple( // "AI_Gas3Flow", // "AO_Gas3Flow" //), //new Tuple( // "AI_Gas4Flow", // "AO_Gas4Flow" //), }; foreach (var item in rampList) { float setpoint = 0; float result = 0; float current = 0; if (IO.AI[$"{pm}.{item.Item1}"] != null) { current = IO.AI[$"{pm}.{item.Item1}"].FloatValue; setpoint = IO.AO[$"{pm}.{item.Item2}"].FloatValue; } if (current >= setpoint) { result = current - 50; if (result < setpoint) result = setpoint; } if (current < setpoint) { result = current + 50; if (result > setpoint) result = setpoint; } result = result + (float)_rd.NextDouble(); IO.AI[$"{pm}.{item.Item1}"].FloatValue = result; } } public object locker = new object(); private void MonitorPm(string pm) { if (IO.AO[$"{pm}.AO_PSUInnerLoopMode"].FloatValue == 1) { IO.AI[$"{pm}.AI_PSUInnerWorkingOP"].FloatValue = IO.AO[$"{pm}.AO_PSUInnerTargetOP"].FloatValue; } else { IO.AI[$"{pm}.AI_PSUInnerWorkingOP"].FloatValue = IO.AO[$"{pm}.AO_PSUInnerTargetSP"].FloatValue / 1800 * 100; } if (IO.AO[$"{pm}.AO_PSUMiddleLoopMode"].FloatValue == 1) { IO.AI[$"{pm}.AI_PSUMiddleWorkingOP"].FloatValue = IO.AO[$"{pm}.AO_PSUMiddleTargetOP"].FloatValue; } else { IO.AI[$"{pm}.AI_PSUMiddleWorkingOP"].FloatValue = IO.AO[$"{pm}.AO_PSUMiddleTargetSP"].FloatValue / 1800 * 100; } if (IO.AO[$"{pm}.AO_PSUOuterLoopMode"].FloatValue == 1) { IO.AI[$"{pm}.AI_PSUOuterWorkingOP"].FloatValue = IO.AO[$"{pm}.AO_PSUOuterTargetOP"].FloatValue; } else { IO.AI[$"{pm}.AI_PSUOuterWorkingOP"].FloatValue = IO.AO[$"{pm}.AO_PSUOuterTargetSP"].FloatValue / 1800 * 100; } //SCR if (IO.AO[$"{pm}.AO_SCRUpperLoopMode"].FloatValue == 1) { IO.AI[$"{pm}.AI_SCRUpperWorkingOP"].FloatValue = IO.AO[$"{pm}.AO_PSUInnerTargetOP"].FloatValue; } else { IO.AI[$"{pm}.AI_SCRUpperWorkingOP"].FloatValue = IO.AO[$"{pm}.AO_SCRUpperTargetSP"].FloatValue / 1800 * 100; } if (IO.AO[$"{pm}.AO_SCRMiddleLoopMode"].FloatValue == 1) { IO.AI[$"{pm}.AI_SCRMiddleWorkingOP"].FloatValue = IO.AO[$"{pm}.AO_SCRMiddleTargetOP"].FloatValue; } else { IO.AI[$"{pm}.AI_SCRMiddleWorkingOP"].FloatValue = IO.AO[$"{pm}.AO_SCRMiddleTargetSP"].FloatValue / 1800 * 100; } if (IO.AO[$"{pm}.AO_SCRLowerLoopMode"].FloatValue == 1) { IO.AI[$"{pm}.AI_SCRLowerWorkingOP"].FloatValue = IO.AO[$"{pm}.AO_SCRLowerTargetOP"].FloatValue; } else { IO.AI[$"{pm}.AI_SCRLowerWorkingOP"].FloatValue = IO.AO[$"{pm}.AO_SCRLowerTargetSP"].FloatValue / 1800 * 100; } IO.AI[$"{pm}.AI_Valvemode"].FloatValue = IO.AO[$"{pm}.AO_ValveModeSetpoint"].FloatValue; IO.AI[$"{pm}.AI_HeartBeat"].FloatValue = IO.AO[$"{pm}.AO_HeartBeat"].FloatValue; //蝶阀开启,跟着蝶阀的设置值走 if (IO.DO[$"{pm}.DO_TVEnable"].Value) { if (IO.AI[$"{pm}.AI_ActualPressure"].FloatValue > IO.AO[$"{pm}.AO_SetpointPressure"].FloatValue) { if (IO.AI[$"{pm}.AI_ActualPressure"].FloatValue - 10 < IO.AO[$"{pm}.AO_SetpointPressure"].FloatValue) { IO.AI[$"{pm}.AI_ActualPressure"].FloatValue -= 10; } else { IO.AI[$"{pm}.AI_ActualPressure"].FloatValue = IO.AO[$"{pm}.AO_SetpointPressure"].FloatValue; } } else if (IO.AI[$"{pm}.AI_ActualPressure"].FloatValue < IO.AO[$"{pm}.AO_SetpointPressure"].FloatValue) { if (IO.AI[$"{pm}.AI_ActualPressure"].FloatValue + 10 < IO.AO[$"{pm}.AO_SetpointPressure"].FloatValue) { IO.AI[$"{pm}.AI_ActualPressure"].FloatValue += 10; } else { IO.AI[$"{pm}.AI_ActualPressure"].FloatValue = IO.AO[$"{pm}.AO_SetpointPressure"].FloatValue; } } } else { //判断是否有进气(V89到V97是否有开阀) if (IO.DI[$"{pm}.DI_InnerGasFinal_FB"].Value || IO.DI[$"{pm}.DI_MiddleGasFinal_FB"].Value || IO.DI[$"{pm}.DI_GasRingPurgeFinal_FB"].Value || IO.DI[$"{pm}.DI_HeaterUpPurgeFinal_FB"].Value || IO.DI[$"{pm}.DI_ChamberPurgeFinal_FB"].Value || IO.DI[$"{pm}.DI_RotationUpPurgeFinal_FB"].Value || IO.DI[$"{pm}.DI_ConfinementRingFinal_FB"].Value || IO.DI[$"{pm}.DI_HeaterWFPurgeFinal_FB"].Value) { if (IO.AI[$"{pm}.AI_ActualPressure"].FloatValue < 1200) { IO.AI[$"{pm}.AI_ActualPressure"].FloatValue += 10; } } } //蝶阀Ramp有Bug,设置AO值可以化解 if (IO.AI[$"{pm}.AI_ActualPressure"].FloatValue >= 1100) { IO.AO[$"{pm}.AO_SetpointPressure"].FloatValue = IO.AI[$"{pm}.AI_ActualPressure"].FloatValue; } IO.AI[$"{pm}.AI_ChamPress"].FloatValue = IO.AI[$"{pm}.AI_ActualPressure"].FloatValue; //V27自动打开 if (IO.AI[$"{pm}.AI_ChamPress"].FloatValue > 1020 && IO.DO[$"{pm}.DO_PumpBypass"].Value != true) { IO.DO[$"{pm}.DO_PumpBypass"].Value = true; } if (IO.AI[$"{pm}.AI_ChamPress"].FloatValue < 900 && IO.DO[$"{pm}.DO_PumpBypass"].Value) { IO.DO[$"{pm}.DO_PumpBypass"].Value = false; } //设置PT2的压力比PT1的小20 IO.AI[$"{pm}.AI_ForelinePress"].FloatValue = IO.AI[$"{pm}.AI_ChamPress"].FloatValue - 20 > 0 ? IO.AI[$"{pm}.AI_ChamPress"].FloatValue - 20 : 0; } private void MonitorTM(string Tm) { } private void MonitorPressureLL1() { bool isSlowPum = IO.DI["DI_LLSlowRoughOpen_FB"].Value; bool isFastPump = IO.DI["DI_LLFastRoughOpen_FB"].Value; bool isSlowVent = IO.DI["DI_LLSlowVentOpen_FB"].Value; //200毫秒调用一次,10秒内实现从0到1020 double pressure = IO.AI["AI_LLPressure"].Value; if (isFastPump || isSlowPum) { if (pressure > 350) { pressure -= 10; } else if (pressure >= 250 && pressure <= 350) { pressure -= 4; } else { pressure -= 10; } } else if (isSlowVent) { if (pressure > 320) { pressure += 10; } else if (pressure >= 290 && pressure <= 320) { pressure += 1; } else { pressure += 10; } } if (pressure < 0) pressure = 0; if (pressure > 1020) pressure = 1020; if (!isFastPump && pressure < 1) pressure = 0; IO.AI["AI_LLPressure"].Value = Convert.ToInt16(pressure); } private void MonitorPressureTM() { bool isSlowPum = IO.DI["DI_TMSlowRoughOpen_FB"].Value; bool isSlowVent = IO.DI["DI_TMN2PurgeOpen_FB"].Value; bool isDryPumpingValveOpen = IO.DI["DI_TMFastRoughOpen_FB"].Value; bool isVentValveOpen = IO.DI["DI_TMFastVentOpen_FB"].Value; bool isV121 = IO.DI["DI_TMRoughBypass_FB"].Value; if (IO.DI["DI_ReactorADoorOpened"].Value || IO.DI["PM1.DI_TMPressBalance_FB"].Value) { IO.AI["AI_TMPressure"].Value = Convert.ToInt16(IO.AI[$"PM1.AI_ChamPress"].FloatValue); return; } bool isV85Opne = IO.DI["DI_TMTOLLVentOpen_FB"].Value; if (isV85Opne) { short tmPress = IO.AI["AI_TMPressure"].Value; short llPress = IO.AI["AI_LLPressure"].Value; short avergePress = Convert.ToInt16((tmPress + llPress) / 2); IO.AI["AI_TMPressure"].Value = avergePress; IO.AI["AI_LLPressure"].Value = avergePress; } //200毫秒调用一次,10秒内实现从0到1020 double pressure = IO.AI["AI_TMPressure"].Value; double factor = pressure / (3 * 10); double pressureStep = factor < 1 ? 1 : factor; if (isDryPumpingValveOpen) { pressure -= pressureStep; } else if (isSlowPum) { pressure -= 2; } if (isVentValveOpen) { pressure += pressureStep; } else if (isSlowVent) { pressure += 5 * (IO.AI["AI_MFCFlowValue"].Value / 50); pressure += 2; } if (isV121) { pressure -= 0.5; } if (pressure < 0) pressure = 0; if (pressure > 1020) pressure = 1020; if (!isDryPumpingValveOpen && !isVentValveOpen && pressure < 1) pressure = 0; IO.AI["AI_TMPressure"].Value = Convert.ToInt16(pressure); if (IO.AI["AI_LLPressure"].FloatValue > 960) { IO.DI["DI_LoadLockAtATM"].Value = true; } else { IO.DI["DI_LoadLockAtATM"].Value = false; } if (IO.AI["AI_TMPressure"].FloatValue > 960) { IO.DI["DI_TMatATM"].Value = false; //此信号是反过来的 } else { IO.DI["DI_TMatATM"].Value = true; } } private void MonitorWaterFlow() { if (IO.DO["DO_LLDoorClose"].Value != IO.DO["DO_LLDoorOpen"].Value) { IO.DI["DI_LLDoorOpened"].Value = IO.DO["DO_LLDoorOpen"].Value; IO.DI["DI_LLDoorClosed"].Value = IO.DO["DO_LLDoorClose"].Value; } if (IO.DO["DO_RectorADoorClose"].Value != IO.DO["DO_RectorADoorOpen"].Value) { IO.DI["DI_ReactorADoorOpened"].Value = IO.DO["DO_RectorADoorOpen"].Value; IO.DI["DI_ReactorADoorClosed"].Value = IO.DO["DO_RectorADoorClose"].Value; } } private void MonitorTMValve() { IO.DI["DI_LLSlowVentOpen_FB"].Value = IO.DO["DO_LLSlowVentOpen"].Value; IO.DI["DI_LLFastVentOpen_FB"].Value = IO.DO["DO_LLFastVentOpen"].Value; IO.DI["DI_TMFastVentOpen_FB"].Value = IO.DO["DO_TMFastVentOpen"].Value; IO.DI["DI_TMN2PurgeOpen_FB"].Value = IO.DO["DO_TMSlowVentOpen"].Value; IO.DI["DI_TMTOLLVentOpen_FB"].Value = IO.DO["DO_TMTOLLVentOpen"].Value; IO.DI["DI_LLSlowRoughOpen_FB"].Value = IO.DO["DO_LLSlowRoughOpen"].Value; IO.DI["DI_LLFastRoughOpen_FB"].Value = IO.DO["DO_LLFastRoughOpen"].Value; IO.DI["DI_TMFastRoughOpen_FB"].Value = IO.DO["DO_TMFastRoughOpen"].Value; IO.DI["DI_TMSlowRoughOpen_FB"].Value = IO.DO["DO_TMSlowRoughOpen"].Value; IO.DI["DI_TMRoughBypass_FB"].Value = IO.DO["DO_TMRoughBypass"].Value; IO.DI["DI_VacRobotExtenLLEnable_FB"].Value = IO.DO["DO_VacRobotExtenLLEnable"].Value; IO.DI["DI_VacRobotExtendBufferEnable_FB"].Value = IO.DO["DO_VacRobotExtendBufferEnable"].Value; IO.DI["DI_VacRobotExtendPMAEnable_FB"].Value = IO.DO["DO_VacRobotExtendPM1Enable"].Value; } private void MonitorValve(string pm) { IO.DI[$"{pm}.DI_DORPressATMSW"].Value = IO.DI[$"{pm}.DI_DORRefill_FB"].Value; IO.DI[$"{pm}.DI_PSUEnable_FB"].Value = IO.DO[$"{pm}.DO_PSUEnable"].Value; IO.DI[$"{pm}.DI_InnerHeaterEnable_FB"].Value = IO.DO[$"{pm}.DO_PSU1Enable"].Value; IO.DI[$"{pm}.DI_MiddleHeaterEnable_FB"].Value = IO.DO[$"{pm}.DO_PSU2Enable"].Value; IO.DI[$"{pm}.DI_OuterHeaterEnable_FB"].Value = IO.DO[$"{pm}.DO_PSU3Enable"].Value; //IO.DI[$"{pm}.DI_SCR1Status"].Value = IO.DO[$"{pm}.DO_SCR1Enable"].Value; //IO.DI[$"{pm}.DI_SCR2Status"].Value = IO.DO[$"{pm}.DO_SCR2Enable"].Value; //IO.DI[$"{pm}.DI_SCR3Status"].Value = IO.DO[$"{pm}.DO_SCR3Enable"].Value; IO.DI[$"{pm}.DI_ChamMoveBodyUpDownEnable_FB"].Value = IO.DO[$"{pm}.DO_ChamMoveBodyUpDownEnable"].Value; IO.DI[$"{pm}.DI_PumpBypass_FB"].Value = IO.DO[$"{pm}.DO_PumpBypass"].Value; IO.DI[$"{pm}.DI_H2Supply_FB"].Value = IO.DO[$"{pm}.DO_H2Supply"].Value; IO.DI[$"{pm}.DI_ArSupply_FB"].Value = IO.DO[$"{pm}.DO_ArSupply"].Value; IO.DI[$"{pm}.DI_H2ArSwitch_FB"].Value = IO.DO[$"{pm}.DO_SHH2ArSwitch"].Value; IO.DI[$"{pm}.DI_H2ArSwitch_FB"].Value = IO.DO[$"{pm}.DO_SHH2ArSwitch"].Value; IO.DI[$"{pm}.DI_H2ArLine1_FB"].Value = IO.DO[$"{pm}.DO_H2ArLine1"].Value; IO.DI[$"{pm}.DI_H2ArLine2_FB"].Value = IO.DO[$"{pm}.DO_H2ArLine2"].Value; IO.DI[$"{pm}.DI_DoppingDilute_FB"].Value = IO.DO[$"{pm}.DO_HighN2Flow"].Value; IO.DI[$"{pm}.DI_DilutedN2RunVent_FB"].Value = IO.DO[$"{pm}.DO_DilutedN2RunVent"].Value; IO.DI[$"{pm}.DI_HighN2RunVent_FB"].Value = IO.DO[$"{pm}.DO_HighN2RunVent"].Value; IO.DI[$"{pm}.DI_TMARun_FB"].Value = IO.DO[$"{pm}.DO_TMARun"].Value; IO.DI[$"{pm}.DI_TMAVent_FB"].Value = IO.DO[$"{pm}.DO_TMAVent"].Value; IO.DI[$"{pm}.DI_TMARelease_FB"].Value = IO.DO[$"{pm}.DO_TMARelease"].Value; IO.DI[$"{pm}.DI_TMABypass_FB"].Value = IO.DO[$"{pm}.DO_TMABypass"].Value; IO.DI[$"{pm}.DI_TMAVac_FB"].Value = IO.DO[$"{pm}.DO_TMAVac"].Value; IO.DI[$"{pm}.DI_TCSRelease_FB"].Value = IO.DO[$"{pm}.DO_TCSRelease"].Value; IO.DI[$"{pm}.DI_TCSBypass_FB"].Value = IO.DO[$"{pm}.DO_TCSBypass"].Value; IO.DI[$"{pm}.DI_TCSVac_FB"].Value = IO.DO[$"{pm}.DO_TCSVac"].Value; IO.DI[$"{pm}.DI_HCLSwitch_FB"].Value = IO.DO[$"{pm}.DO_HCLSwitch"].Value; IO.DI[$"{pm}.DI_SiH4Switch_FB"].Value = IO.DO[$"{pm}.DO_SiH4Switch"].Value; IO.DI[$"{pm}.DI_TCSRunVent_FB"].Value = IO.DO[$"{pm}.DO_TCSRunVent"].Value; IO.DI[$"{pm}.DI_HCLRunVent_FB"].Value = IO.DO[$"{pm}.DO_HCLRunVent"].Value; IO.DI[$"{pm}.DI_SiH4Run_FB"].Value = IO.DO[$"{pm}.DO_SiH4Run"].Value; IO.DI[$"{pm}.DI_SiH4Vent_FB"].Value = IO.DO[$"{pm}.DO_SiH4Vent"].Value; IO.DI[$"{pm}.DI_C3H8Switch_FB"].Value = IO.DO[$"{pm}.DO_C3H8Switch"].Value; IO.DI[$"{pm}.DI_C3H8Run_FB"].Value = IO.DO[$"{pm}.DO_C3H8Run"].Value; IO.DI[$"{pm}.DI_C3H8Vent_FB"].Value = IO.DO[$"{pm}.DO_C3H8Vent"].Value; IO.DI[$"{pm}.DI_DoppingFinal_FB"].Value = IO.DO[$"{pm}.DO_DoppingFinal"].Value; IO.DI[$"{pm}.DI_SilaneFinal_FB"].Value = IO.DO[$"{pm}.DO_SilaneFinal"].Value; IO.DI[$"{pm}.DI_PropaneFinal_FB"].Value = IO.DO[$"{pm}.DO_PropaneFinal"].Value; IO.DI[$"{pm}.DI_GasRingH2Purge_FB"].Value = IO.DO[$"{pm}.DO_GasRingH2Purge"].Value; IO.DI[$"{pm}.DI_GasRingArPurge_FB"].Value = IO.DO[$"{pm}.DO_GasRingArPurge"].Value; IO.DI[$"{pm}.DI_ChamBodyArPurge_FB"].Value = IO.DO[$"{pm}.DO_ChamBodyArPurge"].Value; IO.DI[$"{pm}.DI_ReactorLeakCheck_FB"].Value = IO.DO[$"{pm}.DO_ReactorLeakCheck"].Value; IO.DI[$"{pm}.DI_TMPressBalance_FB"].Value = IO.DO[$"{pm}.DO_TMPressBalance"].Value; IO.DI[$"{pm}.DI_CarryGasFinal_FB"].Value = IO.DO[$"{pm}.DO_CarryGasFinal"].Value; IO.DI[$"{pm}.DI_GasBoxVentPump_FB"].Value = IO.DO[$"{pm}.DO_GasBoxVentPump"].Value; IO.DI[$"{pm}.DI_MOVac_FB"].Value = IO.DO[$"{pm}.DO_MOVac"].Value; IO.DI[$"{pm}.DI_GasboxLeakCheck_FB"].Value = IO.DO[$"{pm}.DO_GasboxLeakCheck"].Value; IO.DI[$"{pm}.DI_DORVac_FB"].Value = IO.DO[$"{pm}.DO_DORVac"].Value; IO.DI[$"{pm}.DI_DORRefill_FB"].Value = IO.DO[$"{pm}.DO_DORRefill"].Value; IO.DI[$"{pm}.DI_SHOpticPurge_FB"].Value = IO.DO[$"{pm}.DO_SHOpticPurgeFinal"].Value; IO.DI[$"{pm}.DI_OutterGas_FB"].Value = IO.DO[$"{pm}.DO_OuterGasFinal"].Value; IO.DI[$"{pm}.DI_InnerGasFinal_FB"].Value = IO.DO[$"{pm}.DO_InnerGasFinal"].Value; IO.DI[$"{pm}.DI_MiddleGasFinal_FB"].Value = IO.DO[$"{pm}.DO_MiddleGasFinal"].Value; IO.DI[$"{pm}.DI_GasRingPurgeFinal_FB"].Value = IO.DO[$"{pm}.DO_GasRingPurgeFinal"].Value; IO.DI[$"{pm}.DI_HeaterUpPurgeFinal_FB"].Value = IO.DO[$"{pm}.DO_HeaterUpPurgeFinal"].Value; IO.DI[$"{pm}.DI_ChamberPurgeFinal_FB"].Value = IO.DO[$"{pm}.DO_ChamberPurgeFinal"].Value; IO.DI[$"{pm}.DI_RotationUpPurgeFinal_FB"].Value = IO.DO[$"{pm}.DO_RotationUpPurgeFinal"].Value; IO.DI[$"{pm}.DI_ConfinementRingFinal_FB"].Value = IO.DO[$"{pm}.DO_ConfinementRingFinal"].Value; IO.DI[$"{pm}.DI_HeaterWFPurgeFinal_FB"].Value = IO.DO[$"{pm}.DO_HeaterWFFinal"].Value; IO.DI[$"{pm}.DI_N2Switch_FB"].Value = IO.DO[$"{pm}.DO_N2Switch"].Value; IO.DI[$"{pm}.DI_GasBoxVentBypass"].Value = IO.DO[$"{pm}.DO_GasBoxVentBypass"].Value; IO.DI[$"{pm}.DI_C3H8SwitchHTPurge"].Value = IO.DO[$"{pm}.DO_C3H8SwitchHTPurge"].Value; IO.DI[$"{pm}.DI_EPV11_FB"].Value = IO.DO[$"{pm}.DO_EPV1"].Value; IO.DI[$"{pm}.DI_EPV21_FB"].Value = IO.DO[$"{pm}.DO_EPV2"].Value; IO.AI[$"{pm}.AI_PressCtrl1"].Value = IO.AO[$"{pm}.AO_PressCtrl1"].Value; IO.AI[$"{pm}.AI_PressCtrl2"].Value = IO.AO[$"{pm}.AO_PressCtrl2"].Value; IO.AI[$"{pm}.AI_PressCtrl3"].Value = IO.AO[$"{pm}.AO_PressCtrl3"].Value; IO.AI[$"{pm}.AI_PressCtrl4"].Value = IO.AO[$"{pm}.AO_PressCtrl4"].Value; IO.AI[$"{pm}.AI_PressCtrl5"].Value = IO.AO[$"{pm}.AO_PressCtrl5"].Value; IO.AI[$"{pm}.AI_PressCtrl6"].Value = IO.AO[$"{pm}.AO_PressCtrl6"].Value; IO.AI[$"{pm}.AI_PressCtrl7"].Value = IO.AO[$"{pm}.AO_PressCtrl7"].Value; } int timeMoveUp = 0; int timeMove = 0; int timeSection = 0; int timeRingUpDwon = 0; R_TRIG _UpTrig = new R_TRIG(); private void MonitorChamberMoveBodyUp(string pm) { if (IO.DO[$"{pm}.DO_ChamMoveBodyUp"].Value != IO.DO[$"{pm}.DO_ChamMoveBodyDown"].Value) { timeMoveUp++; if (timeMoveUp > 20) { IO.DI[$"{pm}.DI_ChamMoveBodyUp"].Value = IO.DO[$"{pm}.DO_ChamMoveBodyUp"].Value; IO.DI[$"{pm}.DI_ChamMoveBodyDown"].Value = IO.DO[$"{pm}.DO_ChamMoveBodyDown"].Value; } } if (timeMoveUp > 20) { timeMoveUp = 0; } } R_TRIG forwardLatch_R = new R_TRIG(); R_TRIG backLatchLatch_R = new R_TRIG(); private void MonitorChamberMoveBody(string pm) { if (IO.DO[$"{pm}.DO_ChamMoveBodyForward"].Value != IO.DO[$"{pm}.DO_ChamMoveBodyBackward"].Value) { timeMove++; if (timeMove > 20) { IO.DI[$"{pm}.DI_ChamMoveBodyFront"].Value = IO.DO[$"{pm}.DO_ChamMoveBodyForward"].Value; IO.DI[$"{pm}.DI_ChamMoveBodyEnd"].Value = IO.DO[$"{pm}.DO_ChamMoveBodyBackward"].Value; } } forwardLatch_R.CLK = IO.DO[$"{pm}.DO_ChamMoveBodyBrakerForward"].Value; if (forwardLatch_R.Q) { IO.DI[$"{pm}.DI_ChamMoveBodyUpLatchFW"].Value = true; IO.DI[$"{pm}.DI_ChamMoveBodyEndLatchBW"].Value = false; backLatchLatch_R.RST = true; } backLatchLatch_R.CLK = IO.DO[$"{pm}.DO_ChamMoveBodyBrakerBackward"].Value; if (backLatchLatch_R.Q) { IO.DI[$"{pm}.DI_ChamMoveBodyEndLatchBW"].Value = true; IO.DI[$"{pm}.DI_ChamMoveBodyUpLatchFW"].Value = false; forwardLatch_R.RST = true; } if (timeMove > 20) { timeMove = 0; } } private void MonitorHeater(string pm) { IO.DI[$"{pm}.DI_PSU1Status"].Value = IO.DO[$"{pm}.DO_PSU1Enable"].Value; IO.DI[$"{pm}.DI_PSU2Status"].Value = IO.DO[$"{pm}.DO_PSU2Enable"].Value; IO.DI[$"{pm}.DI_PSU3Status"].Value = IO.DO[$"{pm}.DO_PSU3Enable"].Value; IO.DI[$"{pm}.DI_SCR1Status"].Value = IO.DO[$"{pm}.DO_SCR1Enable"].Value; IO.DI[$"{pm}.DI_SCR2Status"].Value = IO.DO[$"{pm}.DO_SCR2Enable"].Value; IO.DI[$"{pm}.DI_SCR3Status"].Value = IO.DO[$"{pm}.DO_SCR3Enable"].Value; //IO.AI[$"{pm}.AI_PresentLoop1Temp"].FloatValue = IO.AO[$"{pm}.AO_SetpointLoop1Temp"].FloatValue; //IO.AI[$"{pm}.AI_Loop1ControlMode"].FloatValue = IO.AO[$"{pm}.AO_Loop1ControlMode"].FloatValue; //IO.AI[$"{pm}.AI_Loop1ActualPower"].FloatValue = IO.AO[$"{pm}.AO_Loop1ManualOP"].FloatValue; //IO.DI[$"{pm}.DI_InnerHeaterEnable"].Value = IO.DO[$"{pm}.DO_InnerHeaterEnable"].Value; //IO.AI[$"{pm}.AI_PresentLoop2Temp"].FloatValue = IO.AO[$"{pm}.AO_SetpointLoop2Temp"].FloatValue; //IO.AI[$"{pm}.AI_Loop2ControlMode"].FloatValue = IO.AO[$"{pm}.AO_Loop2ControlMode"].FloatValue; //IO.AI[$"{pm}.AI_Loop2ActualPower"].FloatValue = IO.AO[$"{pm}.AO_Loop2ManualOP"].FloatValue; //IO.DI[$"{pm}.DI_MiddleHeaterEnable"].Value = IO.DO[$"{pm}.DO_MiddleHeaterEnable"].Value; //IO.AI[$"{pm}.AI_PresentLoop3Temp"].FloatValue = IO.AO[$"{pm}.AO_SetpointLoop3Temp"].FloatValue; //IO.AI[$"{pm}.AI_Loop3ControlMode"].FloatValue = IO.AO[$"{pm}.AO_Loop3ControlMode"].FloatValue; //IO.AI[$"{pm}.AI_Loop3ActualPower"].FloatValue = IO.AO[$"{pm}.AO_Loop3ManualOP"].FloatValue; //IO.DI[$"{pm}.DI_OuterHeaterEnable"].Value = IO.DO[$"{pm}.DO_OuterHeaterEnable"].Value; } private void MonitorGasConnector(string pm) { if (IO.DO[$"{pm}.DO_SHGasConnectorLoosen"].Value != IO.DO[$"{pm}.DO_SHGasConnectorTighten"].Value) { IO.DI[$"{pm}.DI_SHGasConnectorLoosen"].Value = IO.DO[$"{pm}.DO_SHGasConnectorLoosen"].Value; IO.DI[$"{pm}.DI_SHGasConnectorTighten"].Value = IO.DO[$"{pm}.DO_SHGasConnectorTighten"].Value; } } private void MonitorLid(string pm) { if (IO.DO[$"{pm}.DO_SHLidLoosen"].Value != IO.DO[$"{pm}.DO_SHLidTighten"].Value) { timeMove++; if (timeMove > 20) { IO.DI[$"{pm}.DI_SHLidLoosen1"].Value = IO.DO[$"{pm}.DO_SHLidLoosen"].Value; IO.DI[$"{pm}.DI_SHLidTighten1"].Value = IO.DO[$"{pm}.DO_SHLidTighten"].Value; IO.DI[$"{pm}.DI_SHLidClosed"].Value = IO.DO[$"{pm}.DO_SHLidTighten"].Value; } return; } if (IO.DO[$"{pm}.DO_MiddleLidLoosen"].Value != IO.DO[$"{pm}.DO_MiddleLidTighten"].Value) { timeMove++; if (timeMove > 20) { IO.DI[$"{pm}.DI_MiddleLidLoosen1"].Value = IO.DO[$"{pm}.DO_MiddleLidLoosen"].Value; IO.DI[$"{pm}.DI_MiddleLidTighten1"].Value = IO.DO[$"{pm}.DO_MiddleLidTighten"].Value; IO.DI[$"{pm}.DI_MiddleLidClosed"].Value = IO.DO[$"{pm}.DO_MiddleLidTighten"].Value; } return; } if (timeMove > 20) { timeMove = 0; } } private void MonitorLidSwing(string pm) { if (IO.DO[$"{pm}.DO_SHLidSwingLock"].Value != IO.DO[$"{pm}.DO_SHLidSwingUnlock"].Value) { IO.DI[$"{pm}.DI_SHLidSwingLock"].Value = IO.DO[$"{pm}.DO_SHLidSwingLock"].Value; IO.DI[$"{pm}.DI_SHLidSwingUnlock"].Value = IO.DO[$"{pm}.DO_SHLidSwingUnlock"].Value; } if (IO.DO[$"{pm}.DO_MiddleLidSwingLock"].Value != IO.DO[$"{pm}.DO_MiddleLidSwingUnlock"].Value) { IO.DI[$"{pm}.DI_MiddleLidSwingLock"].Value = IO.DO[$"{pm}.DO_MiddleLidSwingLock"].Value; IO.DI[$"{pm}.DI_MiddleLidSwingUnlock"].Value = IO.DO[$"{pm}.DO_MiddleLidSwingUnlock"].Value; } } private void MonitorConfinementRing(string pm) { //if (IO.DI[$"{pm}.DI_ConfinementRingDown"].Value != IO.DO[$"{pm}.DO_ConfinementRingDown"].Value || IO.DI[$"{pm}.DI_ConfinementRingUp"].Value != IO.DO[$"{pm}.DO_ConfinementRingUp"].Value) //{ // IO.DI[$"{pm}.DI_ConfinementRingDown"].Value = IO.DO[$"{pm}.DO_ConfinementRingDown"].Value; // IO.DI[$"{pm}.DI_ConfinementRingUp"].Value = IO.DO[$"{pm}.DO_ConfinementRingUp"].Value; //} } private void MonitorPump(string pm) { } private void MonitorRotation(string pm) { IO.AI[$"{pm}.AI_ActualSpeed"].FloatValue = IO.AO[$"{pm}.AO_SetpointSpeed"].FloatValue; } public void Terminate() { _thread.Stop(); } } }